Number | Name | Date | Kind |
---|---|---|---|
4839311 | Riley et al. | Jun 1989 | |
5006485 | Villalon | Apr 1991 | |
5068207 | Manocha et al. | Nov 1991 | |
5077238 | Fujii et al. | Dec 1991 | |
5336640 | Sato | Aug 1994 | |
5366850 | Chen et al. | Nov 1994 | |
5382545 | Hong | Jan 1995 | |
5444019 | Chen et al. | Aug 1995 | |
5482900 | Yang | Jan 1996 | |
5496771 | Cronin et al. | Mar 1996 |
Entry |
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S. Wolf et al, "Silicon Processing for the VLSI Era--vol. 2", Lattice Press, Sunset Beach, CA, pp. 65, 236. |