Number | Date | Country | Kind |
---|---|---|---|
08317/76 | Mar 1976 | UK |
This invention was made in the course of a contract with the Department of the Air Force.
Number | Name | Date | Kind |
---|---|---|---|
3433686 | Marinace | Mar 1969 | |
3546036 | Manaseuit | Dec 1970 | |
3574014 | Hugle | Apr 1971 | |
3629016 | Glendinning et al. | Dec 1971 | |
3652324 | Chu et al. | Mar 1972 | |
3679502 | Hads | Jul 1972 | |
3717514 | Burgess | Feb 1973 | |
3743552 | Fa | Jul 1973 | |
4008111 | Rutz | Feb 1977 |
Entry |
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Stinson et al., "Sulfur Hexafluoride Etching Effects on Silicon", J. Electrochemical Society, vol. 123, No. 4, Apr. 1976, pp. 551-555. |
Anderson et al., "Etching of SiO Using Plasma", IBM Technical Disclosure Bulletin, vol. 16, No. 6, Nov. 1973, p. 1892. |