The present application claims priority under 35 U.S.C. §119 to Korean Patent Application No. 2005-8028 filed on Jan. 28, 2005. The content of the application is incorporated herein by reference in its entirety.
1. Field of the Invention
The present invention relates, generally, to a method of fabricating a printed circuit board (PCB), and more particularly, to a method of fabricating a PCB having a fine circuit pattern and a via hole in which no residue exists, by forming the circuit pattern using an imprinting process and forming the via hole using a laser.
2. Description of the Related Art
Recently, to correspond to semiconductor chips requiring high densities and high signal transfer speeds, techniques for directly mounting a semiconductor chip on a PCB have been increasingly used, instead of CSP (Chip-Sized Package) mounting or wire bonding mounting. Consequently, with the aim of directly mounting the semiconductor chip on the PCB, highly reliable PCBs having high densities, capable of being used with highly dense semiconductors, must be developed.
Requirements for the PCB having high density and reliability, which are closely associated with specifications of semiconductor chips, include fine circuits, high electrical properties, high speed signal transfer structures, high functionality, etc. Hence, techniques for fabricating a PCB having a fine circuit pattern and a micro-via hole that fulfills the above requirements are needed.
In general, the method of fabricating the PCB uses photo-lithography exhibiting high producibility and low fabrication costs.
The method of fabricating the PCB using photo-lithography is exemplified by subtractive, full additive, and semi-additive methods. Of the above methods, the semi-additive method is receiving attention, because it is able to form the finest circuit pattern.
a to 1i are sectional views sequentially showing a process of fabricating a PCB using a conventional semi-additive technique.
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As such, the predetermined pattern of the art work film 160 includes patterns corresponding to the circuit pattern, the inside of the via hole, and the upper land for the via hole, which are to be formed in the following processes.
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Subsequently, laminating an insulating layer, forming a circuit pattern using a semi-additive technique, forming a solder resist, nickel/gold plating, and processing an outer appearance are carried out to conventionally fabricate a PCB 100.
However, the conventional fabrication method of the PCB using a semi-additive process is disadvantageous in that because the flash etching process is performed for a relatively long time to remove the unnecessary electroless copper plated layer 130, the circuit pattern regions 131 and 141 (in particular, edge portions of the circuit pattern regions 131 and 141) may be over-etched.
Thus, the circuit pattern regions 131 and 141 may be delaminated or have non-uniform morphology.
In particular, the over-etching problems of the circuit pattern become more severe in proportion to the fineness of the circuit pattern of the PCB.
To solve the problems, Japanese Patent Laid-open Publication Nos. 2001-320150 and 2002-57438 disclose a method of fabricating a PCB using an imprinting process.
a to 2e are sectional views sequentially showing a process of fabricating a PCB using a conventional imprinting technique, which is disclosed in Japanese Patent Laid-open Publication No. 2001-320150.
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The fabrication method of the PCB disclosed in Japanese Patent Laid-open Publication No. 2001-320150 is advantageous because the fine circuit pattern can be formed using the stamper 201 having the negative pattern corresponding to the fine circuit pattern.
However, in the case in which the via hole for connection between the circuit layers is formed by the fabrication method of the PCB disclosed in Japanese Patent Laid-open Publication No. 2001-320150, the resin residue may remain on the lower land.
Further, since the resin residue remaining on the lower land for the via hole is not completely removed by a desmearing process spraying water at a high pressure of 70 kg/cm2 or more, it acts as a resistance when the circuit layers are electrically connected, thus decreasing the electrical properties of the PCB.
Accordingly, the present invention has been made keeping in mind the above problems occurring in the related art, and an object of the present invention is to provide a method of fabricating a PCB having a fine circuit pattern and a via hole in which no residue exists.
In order to accomplish the above object, the present invention provides a method of fabricating a printed circuit board, which includes the steps of (A) laminating a semi-cured insulating layer on a base substrate having a first circuit pattern and a lower land for a via hole, and matching a tool foil having a predetermined pattern corresponding to a second circuit pattern to the base substrate on which the insulating layer is laminated; (B) imprinting the tool foil on the insulating layer and completely curing the insulating layer, to form a recess for the second circuit pattern in the insulating layer; (C) forming a via hole through the insulating layer on the lower land of the base substrate using a laser; (D) forming an electroless plated layer on the insulating layer, the recess for the second circuit pattern, and the inner wall of the via hole; (E) forming an electroplated layer on the electroless plated layer; and (F) polishing the electroless plated layer and the electroplated layer until the insulating layer is exposed.
In an embodiment, the step (B) of the above method includes the steps of (B-1) imprinting the tool foil on the insulating layer; (B-2) removing the tool foil from the insulating layer, thereby forming the recess for the second circuit pattern in the insulating layer; and (B-3) curing the insulating layer completely.
In another embodiment, the step (B) of the above method includes the steps of (B-1) imprinting the tool foil on the insulating layer, while heating at least one of the insulating layer and the tool foil to completely cure the insulating layer; and (B-2) removing the tool foil from the insulating layer, thereby forming the recess for the second circuit pattern in the insulating layer.
In a further embodiment, the step (B) of the above method includes the steps of (B-1) imprinting the tool foil on the insulating layer, while heating at least one of the insulating layer and the tool foil to temporarily cure the insulating layer; (B-2) removing the tool foil from the insulating layer, thereby forming the recess for the second circuit pattern in the insulating layer; and (B-3) curing the insulating layer completely.
In yet another embodiment, the tool foil further includes a pattern corresponding to an upper land for the via hole.
The above and other objects, features and advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
a to 1i are sectional views sequentially showing a process of fabricating a PCB using a conventional semi-additive technique;
a to 2e are sectional views sequentially showing a process of fabricating a PCB using a conventional imprinting technique;
a to 4g are sectional views sequentially showing the process of fabricating the PCB, according to an embodiment of the present invention;
a to 5g are sectional views sequentially showing a process of fabricating a PCB, according to another embodiment of the present invention;
a to 6h are sectional views sequentially showing a process of fabricating a PCB, according to a comparative embodiment compared to the fabrication process of the present invention; and
Hereinafter, a detailed description will be given of a method of fabricating a PCB according to the present invention, with reference to the appended drawings.
As shown in
More specifically, in
Used as the base substrate 1110, the CCL is exemplified by glass/epoxy CCL, heat resistant resin CCL, paper/phenol CCL, high frequency CCL, flexible CCL, composite CCL, etc., depending on the end purpose. Of these CCLs, the glass/epoxy CCL including an insulating resin layer and copper foil layers formed on both surfaces thereof is preferably used to prepare a PCB 1000.
Although the circuit layer is formed on either surface of the base substrate 1110, a base substrate having a multi-layer structure in which a predetermined inner circuit pattern and a via hole are formed may be used, depending on the end purpose.
The tool foil 1200 is formed of a transparent material, such as SiO2, quartz, glass or a polymer, or an opaque material, such as a semiconductor material, ceramic, metal or a polymer.
Further, the tool foil 1200 is manufactured by processing one surface of a plate to form a negative pattern. As such, the one surface of the plate is processed by electron beam lithography, photo-lithography, dicing, laser, RIE (Reactive Ion Etching) or the like.
Alternatively, the tool foil 1200 may be manufactured by separately preparing circuit patterns, and attaching them to the plate to form the negative pattern.
In an embodiment, to easily remove the tool foil 1200 from the insulating layer 1120, a release film may be attached to the surface of the negative pattern of the tool foil 1200.
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In an embodiment, while the tool foil 1200 is imprinted on the insulating layer 1120 (S120), the insulating layer 1120 or the tool foil 1200 is sufficiently heated, whereby the semi-cured insulating layer 1120 is cured.
In another embodiment, while the tool foil 1200 is imprinted on the insulating layer 1120 (S120), the insulating layer 1120 or the tool foil 1200 is sufficiently heated to temporarily cure the semi-cured insulating layer 1120, after which the insulating layer 1120 is cured using ultraviolet rays or heat (S130).
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At this time, a laser is exemplified by a YAG (Yttrium Aluminum Garnet) laser and a CO2 laser.
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The electroless copper plated layer 1130 is formed by catalyst deposition, which includes the steps of cleaning, soft etching, pre-catalysis, catalysis, activation, electroless copper plating, and oxidation prevention.
Alternatively, the electroless copper plated layer 1130 may be formed by sputtering, in which ion particles (e.g., Ar+) of gas generated by plasma collide with a copper target, so that the electroless copper plated layer 1130 is formed on the insulting layer 1120, the recesses 1121 for the second circuit pattern, and the inner wall of the via hole 1123.
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As such, the copper electroplated layer 1140 is formed in such a way that the substrate is dipped into a copper electroplating bath to perform copper electroplating using a direct current (DC) rectifier, in which the plating area is calculated and a predetermined current required to plate the calculated plating area is applied using the DC rectifier to deposit copper.
The copper electroplated layer has physical properties superior to the electroless copper plated layer, and is easily formed to be thick.
As a copper plating wire to form the copper electroplated layer 1140, a separately formed copper plating wire may be used. However, in an embodiment of the present invention, the copper plating wire to form the copper electroplated layer 1140 may consist of the electroless copper plated layer 1130.
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The surface polishing process is exemplified by chemical-mechanical polishing to polish the surface of the plated layer using a chemical reaction and mechanical polishing. In the chemical-mechanical polishing, the substrate in contact with a polishing pad is supplied with a polishing slurry, whereby the surface of the substrate is chemically reacted and, simultaneously, is physically flattened by the motion of a polishing table, equipped with a polishing pad, relative to a polishing head to hold the substrate.
Thereafter, laminating the insulating layer, imprinting the tool foil on the insulating layer, forming the via hole, forming the electroless copper plated layer, forming the copper electroplated layer and polishing the surface of the plated layer are repeatedly performed until the desired number of layers is obtained. Subsequently, forming a solder resist, nickel/gold plating and forming an outer appearance are further performed, thus fabricating a PCB 1000, according to an embodiment of the present invention.
a to 5g are sectional views sequentially showing a process of fabricating a PCB, according to another embodiment of the present invention. In the drawings, it is noted that although one surface of the PCB is processed, both surfaces of the PCB are actually processed.
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In the drawing, although the base substrate 2110 having the circuit layer on one surface thereof is shown, the base substrate 2110 having a multi-layer structure in which a predetermined inner circuit pattern and a via hole are formed may be used, depending on the end purpose.
In an embodiment, a release film may be attached to the surface of the negative circuit pattern of the tool foil 2200 to easily remove the tool foil 2200 from the insulating layer 2120.
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In an embodiment, while the tool foil 2200 is imprinted on the insulating layer 2120 (S120), the insulating layer 2120 or the tool foil 2200 is sufficiently heated, so that the semi-cured insulating layer 2120 is cured.
In another embodiment, while the tool foil 2200 is imprinted on the insulating layer 2120 (S120), the insulating layer 2120 or the tool foil 2200 is sufficiently heated to temporarily cure the semi-cured insulating layer 2120, after which the insulating layer 2120 is cured using ultraviolet rays or heat (S130).
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Used in the present invention, the laser includes, for example, a YAG laser or a CO2 laser.
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In such a case, the electroless copper plated layer 2130 is formed using catalyst deposition or sputtering.
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As such, the copper electroplated layer 2140 is formed in such a way that the substrate is dipped into a copper electroplating bath to perform copper electroplating using a DC rectifier, in which the plating area is calculated and a predetermined current required to plate the calculated plating area is applied using the DC rectifier to deposit copper.
In an embodiment, the copper plating wire to form the copper electroplated layer 2140 may consist of the electroless copper plated layer 2130.
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Thereafter, laminating the insulating layer, imprinting the tool foil on the insulating layer, forming the via hole, forming the electroless copper plated layer, forming the copper electroplated layer and polishing the surface of the plated layer are repeatedly performed until the desired number of layers is obtained. Subsequently, forming a solder resist, nickel/gold plating and forming an outer appearance are further performed, thus fabricating a PCB 2000, according to the current embodiment of the present invention.
Compared to the process of fabricating the PCB shown in
Accordingly, the process of fabricating the PCB shown in
a to 6h are sectional views sequentially showing a process of fabricating a PCB, according to a comparative embodiment for comparison with the fabrication methods of the present invention, which is combined processes of forming a via hole using a laser in a conventional semi-additive technique and of fabricating a PCB disclosed in Japanese Patent Laid-open Publication No. 2001-320150. In addition,
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Then, laminating the insulating layer, forming the via hole, imprinting the tool foil on the insulating layer, forming the electroless copper plated layer, forming the copper electroplated layer and polishing the surface of the plated layer are repeatedly performed until the desired number of layers is obtained. Subsequently, forming a solder resist, nickel/gold plating and forming an outer appearance are further performed, thus fabricating a PCB 3000, according the comparative embodiment of the present invention.
In the fabrication method of the PCB shown in
If the insulating layer 3120 is completely cured to form the via hole 3122 using a laser as in
Meanwhile, if the insulating layer 3120 is maintained in the state of being semi-cured to imprint the tool foil 3200 on the insulating layer 3120 as apparent from
To overcome the problems, the method of fabricating the PCB, according to the present invention, adopts an imprinting process, in which the via hole is formed using a laser in the course of forming the circuit pattern.
Therefore, in the method of fabricating the PCB according to the present invention, when the tool foil 1200 or 2200 is imprinted on the insulating layer 1120 or 2120 shown in
In the method of fabricating the PCB according to the present invention, when the via hole 1123 or 2123 is formed using a laser as shown in
In the method of fabricating the PCB according to the present invention, since the process of forming the circuit pattern using imprinting and the process of forming the via hole using a laser may exhibit synergistic effects, a fine circuit pattern and a via hole having no residue can be formed.
Additionally, in the method of fabricating the PCB according to the present invention, the copper plated layer includes a plated layer consisting mainly of copper, as well as a plated layer consisting completely of pure copper. This can be confirmed by analyzing a chemical composition of the copper plated layer using an analyzing device, such as EDAX (Energy Dispersive Analysis of X-ray).
Further, in the method of fabricating the PCB according to the present invention, the plated layer may be formed of a conductive material, such as gold (Au), nickel (Ni), tin (Sn), etc., depending on the end purpose, in addition to copper (Cu).
As described above, the present invention provides a method of fabricating a PCB, in which the circuit pattern is formed by imprinting and thus is fine and has regular width therebetween. In addition, the PCB has a flat structure.
In the method of fabricating the PCB according to the present invention, the via hole is formed using a laser and then a desmearing process is performed. Hence, the via hole has no residue.
In the method of fabricating the PCB according to the present invention, since the circuit pattern is embedded in the insulating layer, it is not delaminated or damaged.
In the method of fabricating the PCB according to the present invention, the tool foil is fabricated at low cost and is easily managed, owing to having the negative pattern corresponding to the plane circuit pattern.
Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.
Number | Date | Country | Kind |
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10-2005-0008028 | Jan 2005 | KR | national |