Claims
- 1. An electrically insulating sealing apparatus useful in vacuum semiconductor processing, comprising: a three dimensional structure fabricated from a plastic having a volume resistivity of at least 1012 Ω-cm; a deflection temperature @264 PSI (1.82 MPa) of at least 300° F. (148.9° C.); and a surface finish of 16 μin. (0.40 μm) or better in the direction perpendicular to seal.
- 2. The electrically insulating sealing apparatus of claim 1, wherein water absorption of said plastic is less than about 2.5%.
- 3. The electrically insulating sealing apparatus of claim 1, wherein the linear hi coefficient of expansion of said plastic is less than 50×10−6 in./in./° F. (90×10−6 mm/mm/° C.) at temperatures below about 300° F. (148.9° C.).
- 4. The electrically insulating sealing apparatus of claim 1, wherein the notched izod impact strength of said engineering plastic is at least 1.0 ft-lbs./in (52 J/m).
- 5. The electrically insulating sealing apparatus of claim 1, wherein the ultimate compressive strength of said engineering plastic is at least 15,000 PSI (103.4 MPa).
- 6. The electrically insulating sealing apparatus of claim 1, wherein said plastic is selected from the group consisting of phenolic, epoxy, polyetherimide, polyimide, and polyetheretherketone.
- 7. The electrically insulating sealing apparatus of claim 6, wherein said plastic is a G-3 fiberglass-reinforced epoxy, a G-10 fiberglass-reinforced phenolic, or a G-11 fiberglass-reinforced phenolic.
- 8. The electrically insulating sealing apparatus of claim 6, wherein said polyetherimide is Ultem® 1000.
- 9. The electrically insulating sealing apparatus of claim 6, wherein said polyimide is Vespe® SP-1.
- 10. The electrically insulating sealing apparatus of claim 6, wherein said polyetheretherketone is Arlon® 1000.
- 11. The electrically insulating sealing apparatus of claim 1, wherein said three dimensional structure is of single piece construction.
- 12. The electrically insulating sealing apparatus of claim 1, wherein said three dimensional structure is of multiple piece construction, and wherein said multiple pieces are bonded to each other.
- 13. The electrically insulating sealing apparatus of claim 12, wherein an adhesive is used to accomplish said bonding.
- 14. The electrically insulating sealing apparatus of claim 13, wherein said adhesive is a glass-filled, epoxy-based adhesive.
- 15. The electrically insulating sealing apparatus of claim 1, wherein said three dimensional structure is of single piece construction.
- 16. The electrically insulating sealing apparatus of claim 1, wherein at least one surface of said three dimensional structure comprises a groove.
- 17. The electrically insulating sealing apparatus of claim 1, wherein at least one surface of said three dimensional structure comprises a continuous contacting bead or molding.
- 18. The insulating sealing apparatus of claim 1, wherein at least one surface of said three dimensional structure comprises an elastomeric coating, whereby a continuous seal is enabled between said at least one surface and another surface brought in contact with said elastomeric coating.
- 19. A method of providing an electrically insulating sealing surface between a first chamber wall housing a cathode and a second chamber wall housing an anode of a sputtering apparatus, comprising:
a) selecting a three dimensional structure fabricated from a plastic having a volume resistivity of at least 1012 Ω-cm; a deflection temperature @264 PSI (1.8 MPa) of at least 300° F. (148.9° C.); and b) placing said three dimensional structure between said first chamber wall housing a cathode and said second chamber wall housing an anode in a manner such that a first continuous seal is created between a first surface of said electrically insulating sealing structure and said first chamber wall, and a second continuous seal is created between a second surface of said electrically insulating sealing structure and said second chamber wall.
- 20. The method of claim 19, wherein said plastic has a surface finish of 16 μin (0.40 μm) or better in the direction perpendicular to seal.
- 21. The method of claim 20, wherein said plastic has a surface finish of 8 μin. (0.20 μm) or better in the direction perpendicular to seal.
- 22. The method of claim 19, wherein at least one of said first continuous seal and said second continuous seal is created by contact between a surface of said electrically insulating sealing apparatus and an O-ring.
- 23. The method of claim 22, wherein said O-ring is seated within a groove located upon said electrically insulating sealing apparatus.
- 24. The method of claim 19, wherein at least one of said first continuous seal and said second continuous seal is created by contact between a continuous contacting bead or molding located upon at least one said electrically insulating sealing surface.
- 25. The method of claim 19, wherein at least one of said first continuous seal and said second continuous seal is created by contact between an elastomeric coating present upon at least one said electrically insulating sealing surface.
- 26. A method of fabricating the electrically insulating sealing apparatus of claim 13, comprising:
a) drying said engineering plastic in pellet or powdered form, whereby potential outgassing components are removed; b) forming said three dimensional structure using melt compression, or injection molding.
- 27. A method of fabricating the electrically insulating sealing apparatus of claim 11, comprising:
a) selecting said multiple pieces to be bonded to each other; and b) bonding said multiple pieces into a single, three-dimensional structure.
- 28. The method of claim 27, wherein said bonding is accomplished using an a epoxy-based adhesive.
- 29. An insulating sealing structure comprising:
a) a rigid central portion or member for inhibiting seal deformation; b) at least one electrical insulator applied to said rigid central portion to provide a dielectric strength of at least 1.96 MV/m in air, the electrical insulator having a surface; c) a surface finish on said electrical insulator surface, said finish having a roughness height of less than about 0.40 μm, to enable a seal against a vacuum of at least 10−6 Torr.
- 30. The insulating sealing structure of claim 29, wherein said seal is a continuous seal capable of sealing an enclosed area of at least 225 in2.
- 31. The insulating sealing structure of claim 30, wherein said enclosed area is at least 2304 in2.
- 32. The insulating sealing structure of claim 29, wherein said rigid central portion or member comprises a material selected from the group consisting of a metal, a fiber reinforced polymeric material, and a polymeric material, wherein said material does not outgas in a manner which prevents said insulating sealing structure from functioning properly under operational conditions.
- 33. The insulating sealing structure of claim 32, wherein said material is a metal.
- 34. The insulating sealing structure of claim 33, wherein said metal is aluminum.
- 35. The insulating sealing structure of claim 34, wherein said aluminum has been treated to produce an aluminum oxide surface layer.
- 36. The insulating sealing structure of claim 29, wherein said material is a fiber reinforced polymeric material and said fiber comprises a graphite, silicon nitride, silica, or glass.
- 37. The insulating sealing structure of claim 29, wherein said material is a polymeric material selected from the group consisting of phenolic, polyetherimide, polyimide, and polyetheretherketone.
- 38. The insulating sealing structure of claim 32, wherein said rigid central portion or member comprises aluminum which has been treated to create a surface layer of aluminum oxide, and wherein said electrical insulator comprises a polyimide.
- 39. The insulating sealing structure of claim 32, wherein said rigid central portion or member comprises aluminum which has been treated to create a surface layer of aluminum oxide, and wherein said electrical insulator is selected from the group consisting of silicon oxide, aluminum nitride, and silicon nitride, or a combination thereof.
- 40. The insulating sealing structure of claim 39, wherein said electrical insulator was applied using a physical vapor deposition technique.
- 41. The insulating sealing structure of claim 32, wherein said electrical insulator is selected from the group consisting of phenolic, polyetherimide, polyimide, polyketone, polyetherketone, polyetheretherketone, epoxy, aluminum oxide, silicon oxide, aluminum nitride, silicon nitride, and combinations thereof.
- 42. A physical vapor deposition apparatus including an insulating sealing structure capable of sealing an enclosed area of at least 225 in2 against a vacuum of at least 10−6 Torr, comprising:
a target assembly which functions as a cathode; a process chamber which functions as a anode; and, an insulating sealing structure disposed between said target and said process chamber, said insulating sealing structure comprising
a) a rigid central portion or member for inhibiting deformation; and, b) an electrical insulator applied to said central portion, wherein said electrical insulator has a dielectric strength of at least 1.96 MV/m in air and a surface finish roughness height of less than about 0.40 μm.
- 43. The physical vapor deposition apparatus of claim 42, wherein said rigid central portion or member comprises a material selected from the group consisting of a metal, a fiber reinforced polymeric material, and a polymeric material, wherein said material outgassing under said insulating sealing structure operational conditions does not result in a reduction in the vacuum applied across a sealing surface of said insulating sealing structure.
- 44. The physical vapor deposition apparatus of claim 43, wherein said rigid central portion or member comprises a metal.
- 45. The physical vapor deposition apparatus of claim 44, wherein said metal is aluminum.
- 46. The physical vapor deposition apparatus of claim 45, wherein said aluminum has been treated to produce an aluminum oxide surface layer.
- 47. The physical vapor deposition apparatus of claim 43, wherein said rigid central portion or member is a fiber reinforced polymeric material and said fiber comprises a graphite, silicon nitride, silica, or a glass.
- 48. The physical vapor deposition apparatus of claim 43, wherein said rigid central portion or member is a polymeric material selected from the group consisting of phenolic, polyetherimide, polyimide, and polyetheretherketone.
- 49. The physical vapor deposition apparatus of claim 43, wherein said electrical insulator is selected from the group consisting of polyetherimide, polyimide, polyketone, polyetherketone, polyetheretherketone epoxy, aluminum oxide, silicon oxide, aluminum nitride, silicon nitride, and combinations thereof.
- 50. The physical vapor deposition apparatus of claim 43, wherein said rigid central portion material comprises aluminum which has been treated to create a surface layer of aluminum oxide, and wherein said electrical insulator comprises a polyimide.
- 51. The physical vapor deposition apparatus of claim 43, wherein said rigid as central portion material comprises aluminum which has been treated to create a surface layer of aluminum oxide, and wherein said electrical insulator is selected from the group consisting of silicon oxide, aluminum nitride, and silicon nitride, or a combination thereof.
- 52. A method of forming an insulating sealing structure for use between the cathode and anode of a physical vapor deposition apparatus, said method comprising the steps of:
a) providing a rigid central member of said insulating sealing structure; and, b) applying an electrically insulating coating over at least a portion of said rigid central member.
- 53. The method of claim 52, including the additional step:
c) polishing a surface of said electrically insulating coating to a finish having a roughness height of less than about 0.40 μm to enable said surface to seal with a mating surface against a vacuum of at least 10−6 Torr.
- 54. The method of claim 52, wherein said rigid central member comprises aluminum.
- 55. The method of claim 54, wherein said aluminum is treated to create an aluminum oxide layer thereon prior to application of said electrically insulating coating.
- 56. The method of claim 55, wherein said electrically insulating coating is selected from the group consisting of polyetherimide, polyimide, polyketone, polyetherketone, polyetheretherketone, epoxy, aluminum oxide, silicon oxide, aluminum nitride, silicon nitride, and combinations thereof.
Priority Claims (1)
Number |
Date |
Country |
Kind |
07-165885 |
Jun 1995 |
JP |
|
CROSS-REFERENCE TO RELATED PATENT APPLICATION
[0001] This patent application is a continuation-in-part of U.S. patent application Ser. No. 08/268,480, filed Jun. 30, 1994, and entitled “An Electrically Insulating Sealing Structure And Its Method Of Use In A High Vacuum Physical Vapor Deposition Apparatus”.
Divisions (2)
|
Number |
Date |
Country |
Parent |
09478940 |
Jan 2000 |
US |
Child |
10180436 |
Jun 2002 |
US |
Parent |
08899685 |
Jul 1997 |
US |
Child |
09478940 |
Jan 2000 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
08268480 |
Jun 1994 |
US |
Child |
08899685 |
Jul 1997 |
US |