Referring to
The interlayer insulating layer 12 and the etch-stop layer 11 are etched by a photo and etch processes, thus forming a trench 13. A nitride layer is deposited on the surface including the trench 13 to secure the capacitance between bit lines by preventing the width of the interlayer insulating layer 12 from decreasing during a subsequent cleaning process (see next paragraph). The cleaning process employs an oxide layer etch solution in the present implementation. The nitride layer is etched to form a spacer 14 on the sidewalls of the trench 13.
Thereafter, a native oxide layer formed in the trench 13 is removed by a cleaning process employing an oxide layer etch solution, such as Buffer Oxide Etchant (BOE). A Ti layer 15 and a TiN layer 16 are formed as barrier metals. It is preferable that the Ti layer 15 be formed by an Ion Metal Plasma (IMP) deposition method, and the TiN layer 16 be formed by a Metal Organic Chemical Vapor Deposition (MOCVD) method.
A thermal treatment process is performed to form an ohmic contact layer 17 at the interface of the Ti layer 15 and the semiconductor substrate 10. The ohmic contact layer 17 is formed through the reaction of the Ti component of the Ti layer 15 and the Si component of the semiconductor substrate 10 by the thermal treatment process. The ohmic contact layer 17 functions to lower the contact resistance. In some embodiments, a Rapid Thermal Annealing (RTA) process may be used as the thermal treatment process.
Referring to
The titanium carbon nitride layer 18 can be easily deposited in a TiN deposition chamber using one of TDMAT (tetrakis dimethylamino titanium, Ti[N(CH3)2]4) and TDEAT (tetrakis diethylamino titanium, Ti[N(C2H5)2]4) as a precursor without using plasma treatment.
Referring to
In order to form the tungsten layer 19, a tungsten seed layer is first formed on the amorphous titanium carbon nitride layer 18. At this time, the number of tungsten seeds is controlled by the amorphous titanium carbon nitride layer 18.
The tungsten seed layer may be formed by either an Atomic Layer Deposition (ALD) method or a Pulsed Nucleation Layer (PNL) method of depositing the tungsten seed layer while repeating the step of supplying and purging a gas. A boron gas is added to an atmosphere gas including WF6 and SiH4 so that tungsten having a big grain size can be formed. In some embodiments, the tungsten seed layer is formed to a thickness of about 10 Å to about 300 Å and the tungsten seed layer is formed at a temperature of about 350° C. to about 550° C. In some embodiments, a B2H6 gas is used as the source of the boron gas. Bulk tungsten is then deposited by flowing H2 and WF6, thus forming the tungsten layer 19. The bulk tungsten deposition process and the tungsten seed layer formation process may be formed in-situ.
The method of forming the tungsten layer 19 may employ a Chemical Vapor Deposition (CVD) or Physical Vapor Deposition (PVD) method. However, in order to secure gap-fill margin according to the gap-fill of the trench 13, a CVD method having a good step coverage characteristic is preferably used.
As described above, the seed number of the tungsten seed layer is controlled by the amorphous titanium carbon nitride layer 18, and the tungsten seed layer is formed under the atmosphere including the boron gas. Accordingly, an initial bulk tungsten layer is deposited in an amorphous state and tungsten of a crystalline state is deposited on the initial bulk tungsten layer. Accordingly, the resistivity of the tungsten layer 19 can be decreased since the crystalline tungsten layer formed on the amorphous tungsten layer has a big grain size.
Referring to
In the above embodiment, an example in which the bit line is formed within the trench of a single damascene structure has been described. It should be appreciated that the present invention can be applied to a dual damascene structure. Furthermore, the present invention may be applied to a RIE structure in which a bit line is first formed and an insulating layer is then formed in order to separate bit lines from each other, unlike the damascene process of forming a bit line within a previously formed trench.
From
As described above, according to the present invention, before a tungsten layer (i.e., a conductive layer for a primary bit line material) is formed, an amorphous titanium carbon nitride layer is formed in order to control the seed number of a tungsten seed layer. The tungsten seed layer is formed under an atmosphere including a boron gas in order to form an initial tungsten layer of an amorphous state. The tungsten layer formed on the amorphous tungsten layer has a big grain size. It is therefore possible to secure an electrical characteristic of devices since the resistivity of a bit line can be lowered.
Although the foregoing description has been made with reference to the various embodiments, it is to be understood that changes and modifications of the present invention may be made by the ordinary skilled in the art without departing from the spirit and scope of the detailed description and appended claims.
Number | Date | Country | Kind |
---|---|---|---|
2006-60373 | Jun 2006 | KR | national |