This is a divisional of copending application(s) Ser. No. 08/367,565 filed on Jan. 3, 1995.
Number | Name | Date | Kind |
---|---|---|---|
3675062 | Flasche | Jul 1972 | |
3790870 | Mitchell | Feb 1974 | |
4990410 | Saitoh et al. | Feb 1991 | |
5262354 | Cote et al. | Nov 1993 | |
5403779 | Joshi et al. | Apr 1995 | |
5523259 | Merchant et al. | Jun 1996 | |
5527739 | Parrillo et al. | Jun 1996 | |
5672545 | Trautt et al. | Sep 1997 |
Number | Date | Country |
---|---|---|
472733 | Jun 1992 | JPX |
629405 | Apr 1994 | JPX |
Entry |
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Journal of Vacuum Science and Technology, Part A, vol. 5, No. 4, Jul., 1987-Aug., 1987, New York US, pp. 2088-2091, XP002005739 T. Kobayashi et al. |
Number | Date | Country | |
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Parent | 367565 | Jan 1995 |