Claims
- 1. A method of fabricating a semiconductor integrated circuit, comprising the steps of:
- forming a n-type semiconductor layer on a p-type semiconductor substrate, said n-type semiconductor layer being divided into first, second and third regions of n-type;
- simultaneously forming fourth and fifth regions of low p-type concentration in said first and second regions as upper surfaces of said first and second regions;
- forming a sixth region of an n-type in said fourth region from a upper surface of said fourth region;
- simultaneously forming seventh, eight and ninth regions of p-type in said sixth, fifth and third regions respectively from upper surfaces of said sixth, fifth and third regions; and
- simultaneously forming tenth and eleventh regions of n-type in said sixth and ninth regions from upper surfaces of said sixth and ninth regions, respectively,
- whereby said fourth, sixth and seventh regions form a pnp type vertical bipolar transistor, and said fifth and eight regions from a resistance device, and said third, ninth and eleventh regions forming an npn type vertical bipolar transistor.
- 2. A method as in claim 1, comprising the further steps of:
- forming a twelfth region of n-type at a border area of said first region and said semiconductor substrate; and
- forming a thirteenth region of n-type in said first region from said upper surface of said first region in such a manner that said thirteenth region reaches said twelfth region.
- 3. A method as in claim 2, comprising the further step of electrically connecting said sixth region to said thirteenth region.
Priority Claims (7)
Number |
Date |
Country |
Kind |
57-65925 |
Apr 1982 |
JPX |
|
57-95332 |
Jun 1982 |
JPX |
|
57-95333 |
Jun 1982 |
JPX |
|
57-95334 |
Jun 1982 |
JPX |
|
57-95345 |
Jun 1982 |
JPX |
|
57-157623 |
Sep 1982 |
JPX |
|
58-14896 |
Jan 1983 |
JPX |
|
Parent Case Info
This application is a division of application Ser. No. 06/841,688 filed Mar. 19, 1986, abandoned, which in turn was a continuation of Ser. No. 06/485,887 filed Apr. 18, 1983 abandoned.
US Referenced Citations (22)
Foreign Referenced Citations (1)
Number |
Date |
Country |
0021854 |
Feb 1982 |
JPX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
841688 |
Mar 1986 |
|
Continuations (1)
|
Number |
Date |
Country |
Parent |
485887 |
Apr 1983 |
|