Number | Date | Country | Kind |
---|---|---|---|
10-331559 | Nov 1998 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5217849 | Chonan et al. | Jun 1993 | A |
5595858 | Akama et al. | Jan 1997 | A |
6013419 | Tani et al. | Jan 2000 | A |
6117616 | Omote et al. | Sep 2000 | A |
Number | Date | Country |
---|---|---|
0 533 198 | Mar 1993 | EP |
A-60-157286 | Aug 1985 | JP |
A-60-243120 | Dec 1985 | JP |
A-63-239998 | Oct 1988 | JP |
A-1-245586 | Sep 1989 | JP |
A-3-123093 | May 1991 | JP |
A-5-139027 | Jun 1993 | JP |
Entry |
---|
IBM Technical disclosure Bulletin, Planarizing Metal Insulator Structures, Jan. 1983, vol. 25, ISS. No. 8, p. 4141. |