Method of manufacturing a micro-electromechanical fluid ejecting device

Abstract

A method of manufacturing a micro-electromechanical fluid ejecting device includes the step of forming a plurality of nozzle chambers on a wafer substrate. Sacrificial layers are deposited on the wafer substrate. A plurality of fluid ejecting mechanisms is formed on the sacrificial layers to be operatively positioned with respect to the nozzle chambers. The sacrificial layers are etched to free the fluid ejecting mechanisms. The fluid ejecting mechanisms are formed so that they are capable of ejecting fluid through both of a pair of fluid ejection ports defined in a roof of each nozzle chamber on one cycle of operation of the fluid ejecting mechanism.

Description

CROSS REFERENCES TO RELATED APPLICATIONS

The following Australian provisional patent applications are hereby incorporated by cross-reference. For the purposes of location and identification, U.S. patent applications identified by their U.S. patent application serial numbers (USSN) are listed alongside the Australian applications from which the U.S. patent applications claim the right of priority.

	US PATENT/PATENT
	APPLICATION (CLAIMING
CROSS-REFERENCED	RIGHT OF PRIORITY
AUSTRALIAN	FROM AUSTRALIAN
PROVISIONAL PATENT	PROVISIONAL	DOCKET
APPLICATION NO.	APPLICATION)	NO.
PO7991	09/113,060	ART01
PO8505	09/113,070	ART02
PO7988	09/113,073	ART03
PO9395	6,322,181	ART04
PO8017	09/112,747	ART06
PO8014	09/112,776	ART07
PO8025	09/112,750	ART08
PO8032	09/112,746	ART09
PO7999	09/112,743	ART10
PO7998	09/112,742	ART11
PO8031	09/112,741	ART12
PO8030	6,196,541	ART13
PO7997	6,195,150	ART15
PO7979	09/113,053	ART16
PO8015	09/112,738	ART17
PO7978	09/113,067	ART18
PO7982	09/113,063	ART19
PO7989	09/113,069	ART20
PO8019	09/112,744	ART21
PO7980	6,356,715	ART22
PO8018	09/112,777	ART24
PO7938	09/113,224	ART25
PO8016	6,366,693	ART26
PO8024	09/112,805	ART27
PO7940	09/113,072	ART28
PO7939	09/112,785	ART29
PO8501	6,137,500	ART30
PO8500	09/112,796	ART31
PO7987	09/113,071	ART32
PO8022	09/112,824	ART33
PO8497	09/113,090	ART34
PO8020	09/112,823	ART38
PO8023	09/113,222	ART39
PO8504	09/112,786	ART42
PO8000	09/113,051	ART43
PO7977	09/112,782	ART44
PO7934	09/113,056	ART45
PO7990	09/113,059	ART46
PO8499	09/113,091	ART47
PO8502	6,381,361	ART48
PO7981	6,317,192	ART50
PO7986	09/113,057	ART51
PO7983	09/113,054	ART52
PO8026	09/112,752	ART53
PO8027	09/112,759	ART54
PO8028	09/112,757	ART56
PO9394	6,357,135	ART57
PO9396	09/113,107	ART58
PO9397	6,271,931	ART59
PO9398	6,353,772	ART60
PO9399	6,106,147	ART61
PO9400	09/112,790	ART62
PO9401	6,304,291	ART63
PO9402	09/112,788	ART64
PO9403	6,305,770	ART65
PO9405	6,289,262	ART66
PP0959	6,315,200	ART68
PP1397	6,217,165	ART69
PP2370	09/112,781	DOT01
PP2371	09/113,052	DOT02
PO8003	6,350,023	Fluid01
PO8005	6,318,849	Fluid02
PO9404	09/113,101	Fluid03
PO8066	6,227,652	IJ01
PO8072	6,213,588	IJ02
PO8040	6,213,589	IJ03
PO8071	6,231,163	IJ04
PO8047	6,247,795	IJ05
PO8035	6,394,581	IJ06
PO8044	6,244,691	IJ07
PO8063	6,257,704	IJ08
PO8057	6,416,168	IJ09
PO8056	6,220,694	IJ10
PO8069	6,257,705	IJ11
PO8049	6,247,794	IJ12
PO8036	6,234,610	IJ13
PO8048	6,247,793	IJ14
PO8070	6,264,306	IJ15
PO8067	6,241,342	IJ16
PO8001	6,247,792	IJ17
PO8038	6,264,307	IJ18
PO8033	6,254,220	IJ19
PO8002	6,234,611	IJ20
PO8068	6,302,528	IJ21
PO8062	6,283,582	IJ22
PO8034	6,239,821	IJ23
PO8039	6,338,547	IJ24
PO8041	6,247,796	IJ25
PO8004	09/113,122	IJ26
PO8037	6,390,603	IJ27
PO8043	6,362,843	IJ28
PO8042	6,293,653	IJ29
PO8064	6,312,107	IJ30
PO9389	6,227,653	IJ31
PO9391	6,234,609	IJ32
PP0888	6,238,040	IJ33
PP0891	6,188,415	IJ34
PP0890	6,227,654	IJ35
PP0873	6,209,989	IJ36
PP0993	6,247,791	IJ37
PP0890	6,336,710	IJ38
PP1398	6,217,153	IJ39
PP2592	6,416,167	IJ40
PP2593	6,243,113	IJ41
PP3991	6,283,581	IJ42
PP3987	6,247,790	IJ43
PP3985	6,260,953	IJ44
PP3983	6,267,469	IJ45
PO7935	6,224,780	IJM01
PO7936	6,235,212	IJM02
PO7937	6,280,643	IJM03
PO8061	6,284,147	IJM04
PO8054	6,214,244	IJM05
PO8065	6,071,750	IJM06
PO8055	6,267,905	IJM07
PO8053	6,251,298	IJM08
PO8078	6,258,285	IJM09
PO7933	6,225,138	IJM10
PO7950	6,241,904	IJM11
PO7949	09/113,129	IJM12
PO8060	09/113,124	IJM13
PO8059	6,231,773	IJM14
PO8073	6,190,931	IJM15
PO8076	6,248,249	IJM16
PO8075	09/113,120	IJM17
PO8079	6,241,906	IJM18
PO8050	09/113,116	IJM19
PO8052	6,241,905	IJM20
PO7948	09/113,117	IJM21
PO7951	6,231,772	IJM22
PO8074	6,274,056	IJM23
PO7941	09/113,110	IJM24
PO8077	6,248,248	IJM25
PO8058	09/113,087	IJM26
PO8051	09/113,074	IJM27
PO8045	6,110,754	IJM28
PO7952	09/113,088	IJM29
PO8046	09/112,771	IJM30
PO9390	6,264,849	IJM31
PO9392	6,254,793	IJM32
PP0889	6,235,211	IJM35
PP0887	09/112,801	IJM36
PP0882	6,264,850	IJM37
PP0874	6,258,284	IJM38
PP1396	09/113,098	IJM39
PP3989	6,228,668	IJM40
PP2591	6,180,427	IJM41
PP3990	6,171,875	IJM42
PP3986	6,267,904	IJM43
PP3984	6,245,247	IJM44
PP3982	09/112,835	IJM45
PP0895	6,231,148	IR01
PP0870	09/113,106	IR02
PP0869	09/113,105	IR04
PP0887	09/113,104	IR05
PP0885	6,238,033	IR06
PP0884	09/112,766	IR10
PP0886	6,238,111	IR12
PP0871	09/113,086	IR13
PP0876	09/113,094	IR14
PP0877	09/112,760	IR16
PP0878	6,196,739	IR17
PP0879	09/112,774	IR18
PP0883	6,270,182	IR19
PP0880	6,152,619	IR20
PP0881	09/113,092	IR21
PO8006	6,087,638	MEMS02
PO8007	09/113,093	MEMS03
PO8008	09/113,062	MEMS04
PO8010	6,041,600	MEMS05
PO8011	09/113,082	MEMS06
PO7947	6,067,797	MEMS07
PO7944	09/113,080	MEMS09
PO7946	6,044,646	MEMS10
PO9393	09/113,065	MEMS11
PP0875	09/113,078	MEMS12
PP0894	09/113,075	MEMS13

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

Not applicable.

FIELD OF THE INVENTION

The present invention relates to the field of inkjet printing and, in particular, discloses a method of manufacturing a micro-electromechanical fluid ejecting device.

BACKGROUND OF THE INVENTION

Many ink jet printing mechanisms are known. Unfortunately, in mass production techniques, the production of ink jet heads is quite difficult. For example, often, the orifice or nozzle plate is constructed separately from the ink supply and ink ejection mechanism and bonded to the mechanism at a later stage (Hewlett-Packard Journal, Vol. 36 no 5, pp 33-37 (1985)). The separate material processing steps required in handling such precision devices often add a substantial expense in manufacturing.

Additionally, side shooting ink jet technologies (U.S. Pat. No. 4,899,181) are often used but again, this limits the amount of mass production throughput given any particular capital investment.

Additionally, more esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp 33-37 (1985)), electro-discharge machining, laser ablation (U.S. Pat. No. 5,208,604), micro-punching, etc.

The utilization of the above techniques is likely to add substantial expense to the mass production of ink jet print heads and therefore add substantially to their final cost.

It would therefore be desirable if an efficient system for the mass production of ink jet print heads could be developed.

SUMMARY OF THE INVENTION

In accordance with a first aspect of the present invention, there is provided a method of manufacturing a Dual Chamber Single Vertical Actuator Ink Jet Printer print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Preferably, multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer.

The print heads can be formed utilizing standard vlsi/ulsi processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:

FIG. 1 shows a schematic side view of an ink jet nozzle of the invention in a quiescent state;

FIG. 2 shows a schematic side view of the nozzle in an initial part of an ink ejection stage;

FIG. 3 shows a schematic side view of the nozzle in a further part of an ink ejection stage;

FIG. 4 shows a schematic side view of the nozzle in a final part of an ink ejection stage;

FIG. 5 shows a schematic side view of the nozzle again in its quiescent state;

FIG. 6 illustrates a side perspective view, of a single nozzle arrangement of the preferred embodiment.

FIG. 7 illustrates a perspective view, partly in section of a single nozzle arrangement of the preferred embodiment;

FIG. 8 shows a schematic side view of an initial stage in the manufacture of an ink jet nozzle of the invention with the deposition of a CMOS layer;

FIG. 9 shows a step of an initial etch to form a nozzle chamber;

FIG. 10 shows a step of depositing a first sacrificial layer;

FIG. 11 shows a step of etching the first sacrificial layer;

FIG. 12 shows a step of depositing a glass layer;

FIG. 13 shows a step of etching the glass layer;

FIG. 14 shows a step of depositing an actuator material layer;

FIG. 15 shows a step of planarizing the actuating material layers;

FIG. 16 shows a step of depositing a heater material layer;

FIG. 17 shows a step of depositing a further glass layer;

FIG. 18 shows a step of depositing a further heater material layer;

FIG. 19 shows a step of planarizing the further heater material layer;

FIG. 20 shows a step of depositing yet another glass layer;

FIG. 21 shows a step of etching said another glass layer;

FIG. 22 shows a step of etching the other glass layers;

FIG. 23 shows a step of depositing a further sacrificial layer;

FIG. 24 shows a step of forming a nozzle chamber;

FIG. 25 shows a step of forming nozzle openings;

FIG. 26 shows a step of back etching the substrate; and

FIG. 27 shows a final step of etching the sacrificial layers;

FIG. 28 illustrates a part of an array view of a portion of a printhead as constructed in accordance with the principles of the present invention;

FIG. 29 provides a legend of the materials indicated in FIGS. 30 to 42 ; and

FIG. 30 shows a sectional side view of an initial manufacturing step of an ink jet printhead nozzle showing a silicon wafer with a buried epitaxial layer and an electrical circuitry layer;

FIG. 31 shows a step of etching the oxide layer;

FIG. 32 shows a step of etching an exposed part of the silicon layer;

FIG. 33 shows a step of depositing a second sacrificial layer;

FIG. 34 shows a step of etching the first sacrificial layer;

FIG. 35 shows a step of etching the second sacrificial layer;

FIG. 36 shows the step of depositing a heater material layer;

FIG. 37 shows a step of depositing a further heater material layer;

FIG. 38 shows a step of etching a glass layer;

FIG. 39 shows a step of depositing a further glass layer;

FIG. 40 shows a step of etching the further glass layer;

FIG. 41 shows a step of further etching the further glass layer;

FIG. 42 shows a step of back etching through the silicon layer;

FIG. 43 shows a step of etching the sacrificial layers; and

FIG. 44 shows a step of filling the completed ink jet nozzle with ink.

DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS

In the preferred embodiment, there is provided an inkjet printhead having an array of nozzles wherein the nozzles are grouped in pairs and each pair is provided with a single actuator which is actuated so as to move a paddle type mechanism to force the ejection of ink out of one or other of the nozzle pairs. The paired nozzles eject ink from a single nozzle chamber which is re-supplied by means of an ink supply channel. Further, the actuator of the preferred embodiment has unique characteristics so as to simplify the actuation process.

Turning initially to FIGS. 1 to 5 , there will now be explained the principles of operation of the preferred embodiment. In the preferred embodiment, a single nozzle chamber 1 is utilized to supply ink to two ink ejection nozzles 2 , 3 . Ink is re-supplied to the nozzle chamber 1 via means of an ink supply channel 5 . In its quiescent position, two ink menisci 6 , 7 are formed around the ink ejection holes 2 , 3 . The arrangement of FIG. 1 being substantially axially symmetric around a central paddle 9 which is attached to an actuator mechanism.

When it is desired to eject ink out of one of the nozzles, say nozzle 3 , the paddle 9 is actuated so that it begins to move as indicated in FIG. 2 . The movement of paddle 9 in the direction 10 results in a general compression of the ink on the right hand side of the paddle 9 . The compression of the ink results in the meniscus 7 growing as the ink is forced out of the nozzles 3 . Further, the meniscus 6 undergoes an inversion as the ink is sucked back on the left hand side of the actuator 10 with additional ink 12 being sucked in from ink supply channel 5 . The paddle actuator 9 eventually comes to rest and begins to return as illustrated in FIG. 3 . The ink 13 within meniscus 7 has substantial forward momentum and continues away from the nozzle chamber whilst the paddle 9 causes ink to be sucked back into the nozzle chamber. Further, the surface tension on the meniscus 6 results in further in flow of the ink via the ink supply channel 5 . The resolution of the forces at work in the resultant flows results in a general necking and subsequent breaking of the meniscus 7 as illustrated in FIG. 4 wherein a drop 14 is formed which continues onto the media or the like. The paddle 9 continues to return to its quiescent position.

Next, as illustrated in FIG. 5 , the paddle 9 returns to its quiescent position and the nozzle chamber refills by means of surface tension effects acting on meniscuses 6 , 7 with the arrangement of returning to that showing in FIG. 1 . When required, the actuator 9 can be activated to eject ink out of the nozzle 2 in a symmetrical manner to that described with reference to FIGS. 1-5 . Hence, a single actuator 9 is activated to provide for ejection out of multiple nozzles. The dual nozzle arrangement has a number of advantages including in that movement of actuator 9 does not result in a significant vacuum forming on the back surface of the actuator 9 as a result of its rapid movement. Rather, meniscus 6 acts to ease the vacuum and further acts as a “pump” for the pumping of ink into the nozzle chamber. Further, the nozzle chamber is provided with a lip 15 ( FIG. 2 ) which assists in equalizing the increase in pressure around the ink ejection holes 3 which allows for the meniscus 7 to grow in an actually symmetric manner thereby allowing for straight break off of the drop 14 .

Turning now to FIGS. 6 and 7 , there is illustrated a suitable nozzle arrangement with FIG. 6 showing a single side perspective view and FIG. 7 showing a view, partly in section illustrating the nozzle chamber. The actuator 20 includes a pivot arm attached at the post 21 . The pivot arm includes an internal core portion 22 which can be constructed from glass. On each side 23 , 24 of the internal portion 22 is two separately control heater arms which can be constructed from an alloy of copper and nickel (45% copper and 55% nickel). The utilization of the glass core is advantageous in that it has a low coefficient thermal expansion and coefficient of thermal conductivity. Hence, any energy utilized in the heaters 23 , 24 is substantially maintained in the heater structure and utilized to expand the heater structure and opposed to an expansion of the glass core 22 . Structure or material chosen to form part of the heater structure preferably has a high “bend efficiency”. One form of definition of bend efficiency can be the Young's modulus times the coefficient of thermal expansion divided by the density and by the specific heat capacity.

The copper nickel alloy in addition to being conductive has a high coefficient of thermal expansion, a low specific heat and density in addition to a high Young's modulus. It is therefore a highly suitable material for construction of the heater element although other materials would also be suitable.

Each of the heater elements can comprise a conductive out and return trace with the traces being insulated from one and other along the length of the trace and conductively joined together at the far end of the trace. The current supply for the heater can come from a lower electrical layer via the pivot anchor 21 . At one end of the actuator 20 , there is provided a bifurcated portion 30 which has attached at one end thereof to leaf portions 31 , 32 .

To operate the actuator, one of the arms 23 , 24 e.g. 23 is heated in air by passing current through it. The heating of the arm results in a general expansion of the arm. The expansion of the arm results in a general bending of the arm 20 . The bending of the arm 20 further results in leaf portion 32 pulling on the paddle portion 9 . The paddle 9 is pivoted around a fulcrum point by means of attachment to leaf portions 38 , 39 which are generally thin to allow for minor flexing. The pivoting of the arm 9 causes ejection of ink from the nozzle hole 40 . The heater is deactivated resulting in a return of the actuator 20 to its quiescent position and its corresponding return of the paddle 9 also to is quiescent position. Subsequently, to eject ink out of the other nozzle hole 41 , the heater 24 can be activated with the paddle operating in a substantially symmetric manner.

It can therefore be seen that the actuator can be utilized to move the paddle 9 on demand so as to eject drops out of the ink ejection hole e.g. 40 with the ink refilling via an ink supply channel 44 located under the paddle 9 .

The nozzle arrangement of the preferred embodiment can be formed on a silicon wafer utilizing standard semi-conductor fabrication processing steps and micro-electromechanical systems (MEMS) construction techniques.

For a general introduction to a micro-electro mechanical system (MEMS) reference is made to standard proceedings in this field including the proceeding of the SPIE (International Society for Optical Engineering) including volumes 2642 and 2882 which contain the proceedings of recent advances and conferences in this field.

Preferably, a large wafer of printheads is constructed at any one time with each printhead providing a predetermined pagewidth capabilities and a single printhead can in turn comprise multiple colors so as to provide for full color output as would be readily apparent to those skilled in the art.

Turning now to FIG. 8 - FIG. 27 there will now be explained one form of fabrication of the preferred embodiment. The preferred embodiment can start as illustrated in FIG. 8 with a CMOS processed silicon wafer 50 which can include a standard CMOS layer 51 including of the relevant electrical circuitry etc. The processing steps can then be as follows:

1. As illustrated in FIG. 9 , a deep etch of the nozzle chamber 98 is performed to a depth of 25 micron;

2. As illustrated in FIG. 10 , a 27 micron layer of sacrificial material 52 such as aluminum is deposited;

3. As illustrated in FIG. 11 , the sacrificial material is etched to a depth of 26 micron using a glass stop so as to form cavities using a paddle and nozzle mask.

4. As illustrated in FIG. 12 , a 2 micron layer of low stress glass 53 is deposited.

5. As illustrated in FIG. 13 , the glass is etched to the aluminum layer utilizing a first heater via mask.

6. As illustrated in FIG. 14 , a 2-micron layer of 60% copper and 40% nickel is deposited 55 and planarized ( FIG. 15 ) using chemical mechanical planarization (CMP).

7. As illustrated in FIG. 16 , a 0.1 micron layer of silicon nitride is deposited 56 and etched using a heater insulation mask.

8. As illustrated in FIG. 17 , a 2-micron layer of low stress glass 57 is deposited and etched using a second heater mask.

9. As illustrated in FIG. 18 , a 2-micron layer of 60% copper and 40% nickel 58 is deposited and planarized ( FIG. 19 ) using chemical mechanical planarization.

10. As illustrated in FIG. 20 , a 1-micron layer of low stress glass 60 is deposited and etched ( FIG. 21 ) using a nozzle wall mask.

11. As illustrated in FIG. 22 , the glass is etched down to the sacrificial layer using an actuator paddle wall mask.

12. As illustrated in FIG. 23 , a 5-micron layer of sacrificial material 62 is deposited and planarized using CMP.

13. As illustrated in FIG. 24 , a 3-micron layer of low stress glass 63 is deposited and etched using a nozzle rim mask.

14. As illustrated in FIG. 25 , the glass is etched down to the sacrificial layer using nozzle mask.

15. As illustrated in FIG. 26 , the wafer can be etched from the back using a deep silicon trench etcher such as the Silicon Technology Systems deep trench etcher.

16. Finally, as illustrated in FIG. 27 , the sacrificial layers are etched away releasing the ink jet structure.

Subsequently, the print head can be washed, mounted on an ink chamber, relevant electrical interconnections TAB bonded and the print head tested.

Turning now to FIG. 28 , there is illustrated a portion 80 of a full color printhead which is divided into three series of nozzles 71 , 72 and 73 . Each series can supply a separate color via means of a corresponding ink supply channel. Each series is further subdivided into two sub rows e.g. 76 , 77 with the relevant nozzles of each sub row being fired simultaneously with one sub row being fired a predetermined time after a second sub row such that a line of ink drops is formed on a page.

As illustrated in FIG. 28 the actuators are formed in a curved relationship with respect to the main nozzle access so as to provide for a more compact packing of the nozzles. Further, the block portion ( 21 of FIG. 6 ) is formed in the wall of an adjacent series with the block portion of the row 73 being formed in a separate guide rail 80 provided as an abutment surface for the TAB strip when it is abutted against the guide rail 80 so as to provide for an accurate registration of the tab strip with respect to the bond pads 81 , 82 which are provided along the length of the printhead so as to provide for low impedance driving of the actuators.

The principles of the preferred embodiment can obviously be readily extended to other structures. For example, a fulcrum arrangement could be constructed which includes two arms which are pivoted around a thinned wall by means of their attachment to a cross bar. Each arm could be attached to the central cross bar by means of similarly leafed portions to that shown in FIG. 6 and FIG. 7 . The distance between a first arm and the thinned wall can be L units whereas the distance between the second arm and wall can be NL units. Hence, when a translational movement is applied to the second arm for a distance of N×X units the first arm undergoes a corresponding movement of X units. The leafed portions allow for flexible movement of the arms whilst providing for full pulling strength when required.

It would be evident to those skilled in the art that the present invention can further be utilized in either mechanical arrangement requiring the application forces to induce movement in a structure.

One form of detailed manufacturing process which can be used to fabricate monolithic ink jet print heads operating in accordance with the principles taught by the present embodiment can proceed utilizing the following steps:

1. Using a double sided polished wafer 50 , complete drive transistors, data distribution, and timing circuits using a 0.5 micron, one poly, 2 metal CMOS process 51 . Relevant features of the wafer at this step are shown in FIG. 30 . For clarity, these diagrams may not be to scale, and may not represent a cross section though any single plane of the nozzle. FIG. 29 is a key to representations of various materials in these manufacturing diagrams, and those of other cross-referenced ink jet configurations.

2. Etch oxide down to silicon or aluminum using Mask 1 . This mask defines the ink inlet, the heater contact vias, and the edges of the print head chips. This step is shown in FIG. 31 .

3. Etch exposed silicon 51 to a depth of 20 microns. This step is shown in FIG. 32 .

4. Deposit a 1-micron conformal layer of a first sacrificial material 91 .

5. Deposit 20 microns of a second sacrificial material 92 , and planarize down to the first sacrificial layer using CMP. This step is shown in FIG. 33 .

6. Etch the first sacrificial layer using Mask 2 , defining the nozzle chamber wall 93 , the paddle 9 , and the actuator anchor point 21 . This step is shown in FIG. 34 .

7. Etch the second sacrificial layer down to the first sacrificial layer using Mask 3 . This mask defines the paddle 9 . This step is shown in FIG. 35 .

8. Deposit a 1-micron conformal layer of PECVD glass 53 .

9. Etch the glass using Mask 4 , which defines the lower layer of the actuator loop.

10. Deposit 1 micron of heater material 55 , for example titanium nitride (TiN) or titanium diboride (TiB2). Planarize using CMP. This step is shown in FIG. 36 .

11. Deposit 0.1 micron of silicon nitride 56 .

12. Deposit 1 micron of PECVD glass 57 .

13. Etch the glass using Mask 5 , which defines the upper layer of the actuator loop.

14. Etch the silicon nitride using Mask 6 , which defines the vias connecting the upper layer of the actuator loop to the lower layer of the actuator loop.

15. Deposit 1 micron of the same heater material 58 previously deposited. Planarize using CMP. This step is shown in FIG. 37 .

16. Deposit 1 micron of PECVD glass 60 .

17. Etch the glass down to the sacrificial layer using Mask 6 . This mask defines the actuator and the nozzle chamber wall, with the exception of the nozzle chamber actuator slot. This step is shown in FIG. 38 .

18. Wafer probe. All electrical connections are complete at this point, bond pads are accessible, and the chips are not yet separated.

19. Deposit 4 microns of sacrificial material 62 and planarize down to glass using CMP.

20. Deposit 3 microns of PECVD glass 63 . This step is shown in FIG. 39 .

21. Etch to a depth of (approx.) 1 micron using Mask 7 . This mask defines the nozzle rim 95 . This step is shown in FIG. 40 .

22. Etch down to the sacrificial layer using Mask 8 . This mask defines the roof of the nozzle chamber, and the nozzle 40 , 41 itself. This step is shown in FIG. 41 .

23. Back-etch completely through the silicon wafer (with, for example, an ASE Advanced Silicon Etcher from Surface Technology Systems) using Mask 9 . This mask defines the ink inlets 65 which are etched through the wafer. The wafer is also diced by this etch. This step is shown in FIG. 42 .

24. Etch both types of sacrificial material. The nozzle chambers are cleared, the actuators freed, and the chips are separated by this etch. This step is shown in FIG. 43 .

25. Mount the print heads in their packaging, which may be a molded plastic former incorporating ink channels which supply the appropriate color ink 96 to the ink inlets at the back of the wafer.

26. Connect the print heads to their interconnect systems. For a low profile connection with minimum disruption of airflow, TAB may be used. Wire bonding may also be used if the printer is to be operated with sufficient clearance to the paper.

27. Hydrophobize the front surface of the print heads.

28. Fill the completed print heads with ink and test them. A filled nozzle is shown in FIG. 44 .

The presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: color and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with in-built pagewidth printers, portable color and monochrome printers, color and monochrome copiers, color and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic “minilabs”, video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.

It would be appreciated by a person skilled in the art that numerous variations and/or modifications may be made to the present invention as shown in the specific embodiments without departing from the spirit or scope of the invention as broadly described. The present embodiments are, therefore, to be considered in all respects to be illustrative and not restrictive.

Ink Jet Technologies

The embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.

The most significant problem with thermal ink jet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal ink jet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.

The most significant problem with piezoelectric ink jet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewidth print heads with 19,200 nozzles.

Ideally, the ink jet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications. To meet the requirements of digital photography, new ink jet technologies have been created. The target features include:

low power (less than 10 Watts)

High-resolution capability (1,600 dpi or more)

photographic quality output

low manufacturing cost

small size (pagewidth times minimum cross section)

high speed (<2 seconds per page).

All of these features can be met or exceeded by the ink jet systems described below with differing levels of difficulty. Forty-five different ink jet technologies have been developed by the Assignee to give a wide range of choices for high volume manufacture. These technologies form part of separate applications assigned to the present Assignee as set out in the table above under the heading Cross References to Related Applications.

The ink jet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems

For ease of manufacture using standard process equipment, the print head is designed to be a monolithic 0.5-micron CMOS chip with MEMS post processing. For color photographic applications, the print head is 100 mm long, with a width which depends upon the ink jet type. The smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm. The print heads each contain 19,200 nozzles plus data and control circuitry.

Ink is supplied to the back of the print head by injection molded plastic ink channels. The molding requires 50-micron features, which can be created using a lithographically micro machined insert in a standard injection-molding tool. Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer. The print head is connected to the camera circuitry by tape automated bonding.

Tables of Drop-on-Demand Ink Jets

Eleven important characteristics of the fundamental operation of individual ink jet nozzles have been identified. These characteristics are largely orthogonal, and so can be elucidated as an eleven dimensional matrix. Most of the eleven axes of this matrix include entries developed by the present assignee.

The following tables form the axes of an eleven dimensional table of ink jet types.

Actuator mechanism (18 types)

Basic operation mode (7 types)

Auxiliary mechanism (8 types)

Actuator amplification or modification method (17 types)

Actuator motion (19 types)

Nozzle refill method (4 types)

Method of restricting back-flow through inlet (10 types)

Nozzle clearing method (9 types)

Nozzle plate construction (9 types)

Drop ejection direction (5 types)

Ink type (7 types)

The complete eleven dimensional table represented by these axes contains 36.9 billion possible configurations of ink jet nozzle. While not all of the possible combinations result in a viable ink jet technology, many million configurations are viable. It is clearly impractical to elucidate all of the possible configurations. Instead, certain ink jet types have been investigated in detail. These are designated IJ01 to IJ45 which matches the docket numbers in the table under the heading CROSS REFERENCES TO RELATED APPLICATIONS.

Other ink jet configurations can readily be derived from these forty-five examples by substituting alternative configurations along one or more of the 11 axes. Most of the IJ01 to IJ45 examples can be made into ink jet print heads with characteristics superior to any currently available ink jet technology.

Where there are prior art examples known to the inventor, one or more of these examples are listed in the examples column of the tables below. The IJ01 to IJ45 series are also listed in the examples column. In some cases, a printer may be listed more than once in a table, where it shares characteristics with more than one entry.

Suitable applications for the ink jet technologies include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.

The information associated with the aforementioned 11 dimensional matrix is set out in the following tables.

	Description	Advantages	Disadvantages	Examples
ACTUATOR MECHANISM
(APPLIED ONLY TO SELECTED INK DROPS)
Thermal	An electrothermal heater	Large force generated	High power	Canon Bubblejet 1979 Endo
bubble	heats the ink to above	Simple construction	Ink carrier limited to water	et al GB patent 2,007,162
	boiling point, transferring	No moving parts	Low efficiency	Xerox heater-in-pit 1990
	significant heat to the aqueous	Fast operation	High temperatures required	Hawkins et al
	ink. A bubble nucleates and	Small chip area required for	High mechanical stress	U.S. Pat. No. 4,899,181
	quickly forms, expelling the ink.	actuator	Unusual materials required	Hewlett-Packard TIJ 1982
	The efficiency of the process is		Large drive transistors	Vaught et al
	low, with typically less than		Cavitation causes actuator	U.S. Pat. No. 4,490,728
	0.05% of the electrical energy		failure
	being transformed into kinetic		Kogation reduces bubble
	energy of the drop.		formation
			Large print heads are difficult
			to fabricate
Piezoelectric	A piezoelectric crystal such as	Low power consumption	Very large area required for	Kyser et al
	lead lanthanum zirconate (PZT)	Many ink types can be used	actuator	U.S. Pat. No. 3,946,398
	is electrically activated, and	Fast operation	Difficult to integrate	Zoltan U.S. Pat. No. 3,683,212
	either expands, shears, or	High efficiency	with electronics	1973 Stemme
	bends to apply pressure to the		High voltage drive transistors	U.S. Pat. No. 3,747,120
	ink, ejecting drops.		required	Epson Stylus
			Full pagewidth print heads	Tektronix
			impractical due to actuator size	IJ04
			Requires electrical poling in
			high field strengths during
			manufacture
Electrostrictive	An electric field is used to	Low power consumption	Low maximum strain (approx.	Seiko Epson, Usui et all
	activate electrostriction in	Many ink types can be used	0.01%)	JP 253401/96
	relaxor materials such as lead	Low thermal expansion	Large area required for actuator	IJ04
	lanthanum zirconate titanate	Electric field strength required	due to low strain
	(PLZT) or lead magnesium	(approx. 3.5 V/μm) can be	Response speed is marginal
	niobate (PMN).	generated without difficulty	(˜10 μs)
		Does not require electrical	High voltage drive transistors
		poling	required
			Full pagewidth print heads
			impractical due to actuator size
Ferroelectric	An electric field is used to	Low power consumption	Difficult to integrate with	IJ04
	induce a phase transition	Many ink types can be used	electronics
	between the antiferroelectric	Fast operation (<1 μs)	Unusual materials such as
	(AFE) and ferroelectric (FE)	Relatively high longitudinal	PLZSnT are required
	phase. Perovskite materials such	strain	Actuators require a large area
	as tin modified lead lanthanum	High efficiency
	zirconate titanate (PLZSnT)	Electric field strength of around
	exhibit large strains of up to 1%	3 V/μm can be readily provided
	associated with the AFE to FE
	phase transition.
Electrastatic	Conductive plates are separated	Low power consumption	Difficult to operate electrostatic	IJ02, IJ04
plates	by a compressible or fluid	Many ink types can be used	devices in an aqueous environ-
	dielectric (usually air). Upon	Fast operation	ment
	application of a voltage, the		The electrostatic actuator
	plates attract each other and		will normally need to be
	displace ink, causing drop		separated from the ink
	ejection. The conductive plates		Very large area required to
	may be in a comb or honeycomb		achieve high forces
	structure, or stacked to increase		High voltage drive transistors
	the surface area and therefore		may be required
	the force.		Full pagewidth print heads are
			not competitive due to actuator
			size
Electrostatic	A strong electric field is applied	Low current consumption	High voltage required	1989 Saito et al,
pull on ink	to the ink, whereupon electro-	Low temperature	May be damaged by sparks due	U.S. Pat. No. 4,799,068
	static attraction accelerates the		to air breakdown	1989 Miura et al,
	ink towards the print medium.		Required field strength increase	U.S. Pat. No. 4,810,954
			as the drop size decreases	Tone-jet
			High voltage drive transistors
			required
			Electrostatic field attracts dust
Permanent	An electromagnet directly	Low power consumption	Complex fabrication	IJ07, IJ10
magnet	attracts a permanent magnet,	Many ink types can be used	Permanent magnetic material
electromagnetic	displacing ink and causing drop	Fast operation	such as Neodymium Iron Boron
	ejection. Rare earth magnets	High efficiency	(NdFeB) required.
	with a field strength around 1	Fast extension from single	High local currents required
	Tesla can be used. Examples	nozzles to pagewidth print heads	Copper metalization should be
	are: Samarium Cobalt (SaCo)		used for long electromigration
	and magnetic materials in the		lifetime and low resistivity
	neodymium iron boron family		Pigmented inks are usually
	(NdFeB, NdDyFeBNb,		infeasible
	NdDyFeB, etc)		Operating temperature limited
			to the Curie temperature
			(around 540 K)
Soft magnetic	A solenoid induced a magnetic	Low power consumption	Complex fabrication	IJ01, IJ05, IJ08, IJ10, IJ12,
core	field in a soft magnetic core	Many ink types can be used	Materials not usually present	IJ14, IJ15, IJ17
electromagnetic	or yoke fabricated from a ferrous	Fast operation	in a CMOS fab such as NiFe,
	material such as electroplated	High efficiency	CoNiFe, or CoFe are required
	iron alloys such as CoNiFe [1],	Easy extension from single	High local currents required
	CoFe, or NiFe alloys. Typically,	nozzles to pagewidth print heads	Copper metallisation should be
	the soft magnetic material is in		used for long electromigration
	two parts, which are normally		lifetime and low resistivity
	held apart by a spring. When the		Electroplating is required
	solenoid is actuated, the two		High saturation flux density is
	parts attract, displacing the ink.		required (2.0-2.1 T is achievable
			with CoNiFe [1])
Lorenz force	The Lorenz force acting on a	Low power consumption	Force acts as a twisting motion	IJ06, IJ11, IJ13, IJ16
	current carrying wire in a	Many ink types can be used	Typically, only a quarter of the
	magnetic field is utilized. This	Fast operation	solenoid length provides force
	allows the magnetic field to be	High efficiency	in a useful direction
	supplied externally to the print	Easy extension from single	High local currents required
	head, for example with rare	nozzles to pagewidth print heads	Copper metallisation should be
	earth permanent magnets. Only		used for long electro migration
	the current carrying wire need		lifetime and low resistivity
	be fabricated on the print head,		Pigmented inks are usually
	simplifying materials		infeasible
	requirements.
Magneto-	The actuator uses the giant	Many ink types can be used	Force acts as a twisting motion	Fischenbeck,
striction	magnetostrictive effect of	Fast operation	Unusual material such as	U.S. Pat. No. 4,032,929
	materials such as Terfenol-D	Easy extension from single	Terfenol-D are required	IJ25
	(an alloy of terbium, dysprosium	nozzles to pagewidth print heads	High local currents required
	and iron developed at the Naval	High force is available	Copper metallisation should be
	Ordnance Laboratory, hence		used for long electro migration
	Ter-Fe-NOL). For best		lifetime and low resistivity
	efficiency, the actuator should		Pre-stressing may be required
	be pre-stressed to approx.
	8 MPa.
Surface tension	Ink under positive pressure is	Low power consumption	Requires supplementary force	Silverbrook, EP 0771 658 A2
reduction	held in a nozzle by surface	Simple construction	to effect drop separation	and related patent applications
	tension. The surface tension of	No unusual materials required	Requires special ink surfactants
	the ink is reduced below the	in fabrication	Speed may be limited by
	bubble threshold, causing the	High efficiency	surfactant properties
	ink to egress from the nozzle.	Easy extension from single
		nozzles to pagewidth print heads
Viscosity	The ink viscosity is locally	Simple construction	Requires supplementary force	Silverbrook, EP 0771 658 A2
reduction	reduced to select which drops	No unusual materials required in	to effect drop separation	and related patent applications
	are to be ejected. A viscosity	fabrication	Requires special ink viscosity
	reduction can be achieved	Easy extension from single	properties
	electrothermally with most inks,	nozzles to pagewidth print heads	High speed is difficult to achieve
	but special inks can be		Requires oscillating ink pressure
	engineered for a 100:1 viscosity		A high temperature difference
	reduction.		(typically 80 degrees) is required
Acoustic	An acoustic wave is generated	Can operate without a nozzle	Complex drive circuitry	1993 Hadimioglu et al,
	and focussed upon the drop	plate	Complex fabrication	EUP 550,192
	ejection region.		Low efficiency	1993 Elrod et al, EUP 572,220
			Poor control of drop position
			Poor control of drop volume
Thermoelastic	An actuator which relies upon	Low power consumption	Efficient aqueous operation	IJ03, IJ09, IJ17, IJ18, IJ19,
bend actuator	differential thermal expansion	Many ink types can be used	requires a thermal insulator on	IJ20, IJ21, IJ22, IJ23, IJ24,
	upon Joule heating is used.	Simple planar fabrication	the hot side	IJ27, IJ28, IJ29, IJ30, IJ31,
		Small chip area required for	Corrosion prevention can be	IJ32, IJ33, IJ34, IJ35, IJ36,
		each actuator	difficult	IJ37, IJ38, IJ39, IJ40, IJ41
		Fast operation	Pigmented inks may be
		High efficiency	infeasible, as pigment particles
		CMOS compatible voltages and	may jam the bend actuator
		currents
		Standard MEMS processes can
		be used
		Easy extension from single
		nozzles to pagewidth print heads
High CTE	A material with a very high	High force can be generated	Requires special material (e.g.	IJ09, IJ17, IJ18, IJ20, IJ21,
Thermoelastic	coefficient of thermal expansion	Three methods of PTFE	PTFE)	IJ22, IJ23, IJ24, IJ27, IJ28,
actuator	(CTE) such as polytetrafluoro-	deposition are under develop-	Requires a PTFE deposition	IJ29, IJ30, IJ31, IJ42, IJ43,
	ethylene (PTFE) is used. As	ment: chemical vapor	process, which is not yet	IJ44
	high CTE materials are usually	deposition (CVD), spin coating,	standard in ULSI fabs
	non-conductive, a heater	and evaporation	PTFE deposition cannot be
	fabricated from a conductive	PTFE is a candidate for low	followed with high temperature
	material is incorporated. A	dielectric constant insulation	(above 350° C.) processing
	50 μm long PTFE bend actuator	in ULSI	Pigmented inks may be
	with polysilicon heater and	Very low power consumption	infeasible, as pigment particles
	15 mW power input can provide	Many ink types can be used	may jam the bend actuator
	180 μN force and 10 μm	Simple planar fabrication
	deflection. Actuator motions	Small chip are required for each
	include:	actuator
	Bend	Fast operation
	Push	High efficiency
	Buckle	CMOS compatible voltages and
	Rotate	currents
		East extension from single
		nozzles to pagewidth print heads
Conductive	A polymer with a high	High force can be generated	Requires special materials	IJ24
polymer	coefficient of thermal expansion	Very low power consumption	development (High CTE
thermoelastic	(such as PTFE) is doped with	Many ink types can be used	conductive polymer)
actuator	conducting substances to	Simple planar fabrication	Requires a PTFE deposition
	increase its conductivity to	Small chip area required for	process, which is not yet
	about 3 orders of magnitude	each actuator	standard in ULSI fabs
	below that of copper. The	Fast operation	PTFE deposition cannot be
	conducting polymer expands	High efficiency	followed with high temperature
	when resistively heated.	CMOS compatible voltages and	(above 350° C.) processing
	Examples of conducting dopants	currents	Evaporation and CVD
	include:	Easy extension from single	deposition techniques cannot
	Carbon nanotubes	nozzles to pagewidth print heads	be used
	Metal fibers		Pigmented inks may be
	Conductive polymers such as		infeasible, as pigment particles
	doped polythiophene		may jam the bend actuator
	Carbon granules
Shape memory	A shape memory alloy such as	High force is available (stresses	Fatigue limits maximum number	IJ26
alloy	TiNi (also known as Nitinol-	of hundreds of MPa)	of cycles
	Nickel Titanium alloy developed	Large strain is available (more	Low strain (1%) is required to
	at the Naval Ordnance	than 3%)	extend fatigue resistance
	Laboratory) is thermally	High corrosion resistance	Cycle rate limited by heat
	switched between its weak	Simple construction	removal
	martensitic state and its	Easy extension from single	Requires unusual materials
	high stiffness austenic state.	nozzles to pagewidth print heads	(TiNi)
	The shape of the actuator in	Low voltage operation	The latent heat of transformation
	its martensitic state is		must be provided
	deformed relative to the		High current operation
	austenitic shape. The shape		Requires pre-stressing to distort
	change causes ejection of a		the martensitic state
	drop.
Linear	Linear magnetic actuators	Linear Magentic actuators can	Requires unusual semiconductor	IJ12
Magnetic	include the Linear Induction	be constructed with high thrust,	materials such as soft magentic
Actuator	Actuator (LIA), Linear	long travel, and high efficiency	alloys (e.g. CoNiFe)
	Permanent Magnet Synchronous	using planar semiconductor	Some varieties also require
	Actuator (LPMSA), Linear	fabrication techniques	permanent magnetic materials
	Reluctance Synchronous	Long actuator travel is available	such as Neodymium iron boron
	Actuator (LRSA), Linear	Medium force is available	(NdFeB)
	Switched Reluctance Actuator	Low voltage operation	Requires complex multi-phase
	(LSRA), and the Linear Stepper		drive circuity
	Actuator (LSA).		High current operation
BASIC OPERATION MODE
Actuator	This is the simplest mode of	Simple operation	Drop repetition rate is usually	Thermal ink jet
directly pushes	operation: the actuator directly	No external fields required	limited to around 10 kHz.	Piezoelectric ink jet
ink	supplies sufficient kinetic	Satellite drops can be avoided	However, this is not funda-	IJ01, IJ02, IJ03, IJ04, IJ05,
	energy to expel the drop. The	if drop velocity is less than	mental to the method, but is	IJ06, IJ07, IJ09, IJ11, IJ12,
	drop must have a sufficient	4 m/s	related to the refill method	IJ14, IJ16, IJ20, IJ22, IJ23,
	velocity to overcome the surface	Can be efficient, depending	normally used	IJ24, IJ25, IJ26, IJ27, IJ28,
	tension.	upon the actuator used	All of the drop kinetic energy	IJ29, IJ30, IJ31, IJ32, IJ33,
			must be provided by the	IJ34, IJ35, IJ36, IJ37, IJ38,
			actuator	IJ39, IJ40, IJ41, IJ42, IJ43,
			Satellite drops usually form if	IJ44
			drop velocity is greater than
			4.5 m/s
Proximity	The drops to be printed are	Very simple print head	Requires close proximity	Silverbrook, EP 0771 658 A2
	selected by some manner (e.g.	fabrication can be used	between the print head and	and related patent applications
	thermally induced surface	The drop selection means does	the print media or transfer roller
	tension reduction of pressurized	not need to provide the energy	May require two print heads
	ink). Selected drops are	required to separate the drop	printing alternate rows of the
	separated from the ink in the	from the nozzle	image
	nozzle by contact with the		Monolithic color print heads are
	print medium or a transfer		difficult
	roller.
Electrostatic	The drops to be printed are	Very simple print head	Requires very high electrostatic	Silverbrook, EP 0771 658 A2
pull on ink	selected by some manner (e.g.	fabrication can be used	field	and related patent applications
	thermally induced surface	The drop selection means does	Electrostatic field for small	Tone-Jet
	tension reduction of pressurized	not need to provide the energy	nozzle sizes is above air
	ink). Selected drops are	required to separate the drop	breakdown
	separated from the ink in the	from the nozzle	Electrostatic field may attract
	nozzle by a strong electric field.		dust
Magnetic	The drops to be printed are	Very simple print head	Requires magnetic ink	Silverbrook, EP 0771 658 A2
pull on ink	selected by some manner (e.g.	fabrication can be used	Ink colors other than black are	and related patent applications
	thermally induced surface	The drop slection means does	difficult
	tension reduction of pressurized	not need to provide the energy	Requires very high magnetic
	ink). Selected drops are	required to separate the drop	fields
	separated from the ink in the	from the nozzle
	nozzle by a strong magnetic
	field acting on the magnetic
	ink.
Shutter	The actuator moves a shutter	High speed (>50 kHz) operation	Moving parts are required	IJ13, IJ17, IJ21
	to block ink flow to the nozzle.	can be achieved due to reduced	Requires ink pressure modulator
	The ink pressure is pulsed at a	refill time	Friction and wear must be
	multiple of the drop ejection	Drop timing can be very	considered
	frequency.	accurate	Stiction is possible
		The actuator energy can be very
		low
Shuttered grill	The actuator moves a shutter	Actuators with small travel can	Moving parts are required	IJ08, IJ15, IJ18, IJ19
	to block ink flow through a	be used	Requires ink pressure modulator
	grill to the nozzle. The shutter	Actuators with small force can	Friction and wear must be
	movement need only be equal to	be used	considered
	the width of the grill holes.	High speed (>50 kHz) operation	Stiction is possible
		can be achieved
Pulsed	A pulsed magnetic field attracts	Extremely low energy operation	Requires an external pulsed	IJ10
magnetic pull	an ‘ink pusher’ at the drop	is possible	magentic field
on ink pusher	ejection frequency. An actuator	No heat dissipation problems	Requires special materials for
	controls a catch, which prevents		both the actuator and the ink
	the ink pusher from moving		pusher
	when a drop is not to be ejected.		Complex construction
AUXILIARY MECHANISM (APPLIED TO ALL NOZZLES)
None	The actuator directly fires the	Simplicity of construction	Drop ejection energy must be	Most ink jets, including
	ink drop, and there is no	Simplicity of operation	supplied by individual nozzle	piezoelectric and thermal
	external field or other	Small physical size	actuator	bubble.
	mechanism required.			IJ01, IJ02, IJ03, IJ04, IJ05,
				IJ07, IJ09, IJ11, IJ12, IJ14,
				IJ20, IJ22, IJ23, IJ24, IJ25,
				IJ26, IJ27, IJ28, IJ29, IJ30,
				IJ31, IJ32, IJ33, IJ34, IJ35,
				IJ36, IJ37, IJ38, IJ39, IJ40,
				IJ41, IJ42, IJ43, IJ44
Oscillating ink	The ink pressure oscillates,	Oscillating ink pressure can	Requires external ink pressure	Silverbrook, EP 0771 658 A2
pressure	providing much of the drop	provide a refill pulse, allowing	oscillator	and related patent applications
(including	ejection energy. The actuator	higher operating speed	Ink pressure phase and	IJ08, IJ13, IJ15, IJ17, IJ18,
acoustic	selects which drops are to be	The actuators may operate with	amplitude must be carefully	IJ19, IJ21
stimulation)	fired by selectivity blocking	much lower energy	controlled
	or enabling nozzles. The ink	Acoustic lenses can be used to	Acoustic reflections in the ink
	pressure oscillation may be	focus the sound on the nozzles	chamber must be designed for
	achieved by vibrating the print
	head, or preferably by an
	actuator in the ink supply.
Media	The print head is placed in	Low power	Precision assembly required	Silverbrook, EP 0771 658 A2
proximity	close proximity to the print	High accuracy	Paper fibers may cause problems	and related patent applications
	medium. Selected drops protrude	Simple print head construction	Cannot print on rough substrates
	from the print head further than
	unselected drops, and contact the
	print medium. The drop soaks
	into the medium fast enough to
	cause drop separation.
Transfer roller	Drops are printed to a transfer	High accuracy	Bulky	Silverbrook, EP 0771 658 A2
	roller instead of straight to the	Wide range of print substrates	Expensive	and related patent applications
	print medium. A transfer roller	can be used	Complex construction	Tektronix hot melt piezoelectric
	can also be used for proximity	Ink can be dried on the transfer		ink jet
	drop separation.	roller		Any of the IJ series
Electrostatic	An electric field is used to	Low power	Field strength required for	Silverbrook, EP 0771 658 A2
	accelerate selected drops	Simple print head construction	separation of small drops is	and related patent applications
	towards the print medium.		near or above air breakdown	Tone-Jet
Direct	A magnetic field is used to	Low power	Requires magnetic ink	Silverbrook, EP 0771 658 A2
magnetic field	accelerate selected drops of	Simple print head construction	Requires strong magnetic field	and related patent applications
	magnetic ink towards the print
	medium.
Cross	The print head is placed in a	Does not require magnetic	Requires external magnet	IJ06, IJ16
magnetic field	constant magnetic field. The	materials to be integrated in	Current densities may be high,
	Lorenz force in a current	the print head manufacturing	resulting in electromigration
	carrying wire is used to move	process	problems
	the actuator.
Pulsed	A pulsed magnetic field is used	Very low power operation is	Complex print head construction	IJ10
magnetic field	to cyclically attract a paddle,	possible	Magnetic materials required in
	which pushes on the ink. A	Small print head size	print head
	small actuator moves a catch,
	which selectively prevents
	the paddle from moving.
ACTUATOR AMPLIFICATION OR MODIFICATION METHOD
None	No actuator mechanical	Operational simplicity	Many actuator mechanisms have	Thermal Bubble Ink jet
	amplification is used. The		insufficient travel, or	IJ01, IJ02, IJ06, IJ07, IJ16,
	actuator directly drives the		insufficient force, to efficiently	IJ25, IJ26
	drop ejection process.		drive the drop ejection process
Differential	An actuator material expands	Provides greater travel in a	High stresses are involved	Piezoelectric
expansion bend	more on one side than on the	reduced print head area	Care must be taken that the	IJ03, IJ09, IJ17, IJ18, IJ19,
actuator	other. The expansion may be		materials do not delaminate	IJ20, IJ21, IJ22, IJ23, IJ24,
	thermal, piezoelectric,		Residual bend resulting from	IJ27, IJ29, IJ30, IJ31, IJ32,
	magnetostrictive, or other		high temperature or high stress	IJ33, IJ34, IJ35, IJ36, IJ37,
	mechanism. The bend actuator		during formation	IJ38, IJ39, IJ42, IJ43, IJ44
	converts a high force low travel
	actuator mechanism to high
	travel, lower force mechanism.
Transient bend	A trilayer bend actuator where	Very good temperature stability	High stresses are involved	IJ40, IJ41
actuator	the two outside layers are	High speed, as a new drop can	Care must be taken that the
	identical. This cancels bend	be fired before heat dissipates	materials do no delaminate
	due to ambient temperature and	Cancels residual stress of
	residual stress. The actuator	formation
	only responds to transient
	heating of one side or the other.
Reverse spring	The actuator loads a spring.	Better coupling to the ink	Fabrication complexity	IJ05, IJ11
	When the actuator is turned off,		High stress in the spring
	the spring releases. This can
	reverse the force/distance curve
	of the actuator to make it
	compatible with the force/time
	requirements of the drop
	ejection.
Actuator stack	A series of thin actuators are	Increased travel	Increased fabrication complexity	Some piezoelectric ink jets
	stacked. This can be appropriate	Reduced drive voltage	Increased possibility of short	IJ04
	where actuators require high		circuits due to pinholes
	electric field strength, such as
	electrostatic and piezoelectric
	actuators.
Multiple	Multiple smaller actuators are	Increases the force available	Actuator forces may not add	IJ12, IJ13, IJ18, IJ20, IJ22,
actuators	used simultaneously to move the	from an actuator	linearly, reducing efficiency	IJ28, IJ42, IJ43
	ink. Each actuator need provide	Multiple actuators can be
	only a portion of the force	positioned to control ink flow
	required.	accurately
Linear Spring	A linear spring is used to	Matches low travel actuator with	Requires print head area for the	IJ15
	transform a motion with small	higher travel requirements	spring
	travel and high force into a	Non-contact method of motion
	longer travel, lower force	transformation
	motion.
Coiled actuator	A bend actuator is coiled to	Increases travel	Generally restricted to planar	IJ17, IJ21, IJ34, IJ35
	provide greater travel in a	Reduces chip area	implementations due to extreme
	reduced chip area.	Planar implementations are	fabrication difficulty in other
		relatively easy to fabricate.	orientations.
Flexure bend	A bend actuator has a small	Simple means of increasing	Care must be taken not to	IJ10, IJ19, IJ33
actuator	region near the fixture point,	travel of a bend actuator	exceed the elastic limit in the
	which flexes much more readily		flexure area
	than the remainder of the		Stress distribution is very
	actuator. The actuator flexing		uneven Difficult to accurately
	is effectively converted from		model with finite element
	an even coiling to an angular		analysis
	bend, resulting in greater travel
	of the actuator tip.
Catch	The actuator controls a small	Very low actuator energy	Complex construction	IJ10
	catch. The catch either enables	Very small actuator size	Requires external force
	or disables movement of an ink		Unsuitable for pigmented inks
	pusher that is controlled in a
	bulk manner.
Gears	Gears can be used to increase	Low force, low travel actuators	Moving parts are required	IJ13
	travel at the expense of duration.	can be used	Several actuator cycles are
	Circular gears, rack and pinion,	Can be fabricated using standard	required
	ratchets, and other gearing	surface MEMS processes	More complex drive electronics
	methods can be used.		Complex construction
			Friction, friction, and wear are
			possible
Buckle plate	A buckle plate can be used to	Very fast movement achievable	Must stay within elastic limits	S. Hirata et al. “An Ink-jet
	change a slow actuator into a		of the materials for long device	Head Using Diaphragm
	fast motion. It can also convert		life	Microactuator”, Proc. IEEE
	a high force, low travel		High stresses involved	MEMS, Feb. 1996, pp 418-423.
	actuator into a high travel,		Generally high power	IJ18, IJ27
	medium force motion.		requirement
Tapered	A tapered magnetic pole can	Linearizes the magnetic force/	Complex construction	IJ14
magnetic pole	increase travel at the expense	distance curve
	of force.
Lever	A lever and fulcrum is used to	Matches low travel actuator with	High stress around the fulcrum	IJ32, IJ36, IJ37
	transform a motion with small	higher travel requirements
	travel and high force into a	Fulcrum area has no linear
	motion with longer travel and	movement, and can be used for
	lower force. The lever can also	a fluid seal
	reverse the direction of travel.
Rotary impeller	The actuator is connected to a	High mechanical advantage	Complex construction	IJ28
	rotary impeller. A small angular	The ratio of force to travel of	Unsuitable for pigmented inks
	deflection of the actuator results	the actuator can be matched to
	in a rotation of the impeller	the nozzle requirements by
	vanes, which push the ink	varying the number of impeller
	against stationary vanes and out	vanes
	of the nozzle.
Acoustic lens	A refractive or diffractive (e.g.	No moving parts	Large area required	1993 Hadimioglu et al, EUP
	zone plate) acoustic lens is used		Only relevant for acoustic	550,192
	to concentrate sound waves.		ink jets	1993 Elrod et al, EUP 572,220
Sharp	A sharp point is used to	Simple construction	Difficult to fabricate using	Tone-jet
conductive	concentrate an electrostatic field.		standard VLSI processes for a
point			surface ejecting ink-jet
			Only relevant for electrostatic
			ink jets
ACTUATOR MOTION
Volume	The volume of the actuator	Simple construction in the	High energy is typically	Hewlett-Packard Thermal
expansion	changes, pushing the ink in	case of thermal ink jet	required to achieve volume	Ink jet
	all directions.		expansion. This leads to	Canon Bubblejet
			thermal stress, cavitation,
			and kogation in thermal ink jet
			implementations
Linear, normal	The actuator moves in a	Efficient coupling to ink drops	High fabrication complexity	IJ01, IJ02, IJ04, IJ07, IJ11,
to chip surface	direction normal to the print	ejected normal to the surface	may be required to achieve	IJ14
	head surface. The nozzle is		perpendicular motion
	typically in the line of
	movement.
Parallel to	The actuator moves parallel	Suitable for planar fabrication	Fabrication complexity	IJ12, IJ13, IJ15, IJ33, IJ34,
chip surface	to the print head surface.		Friction	IJ35, IJ36
	Drop ejection may still be		Stiction
	normal to the surface.
Membrane	An actuator with a high force	The effective area of the	Fabrication complexity	1982 Howkins
push	but small area is used to push	actuator becomes the membrane	Actuator size	U.S. Pat. No. 4,459,601
	a stiff membrane that is in	area	Difficulty of integration in a
	contact with the ink.		VLSI process
Rotary	The actuator causes the rotation	Rotary levers may be used to	Device complexity	IJ05, IJ08, IJ13, IJ28
	of some element, such a grill	increase travel	May have friction at a pivot
	or impeller	Small chip area requirements	point
Bend	The actuator bends when	A very small change in	Requires the actuator to be	1970 Kyser et al
	energized. This may be due to	dimensions can be converted	made from at least two distinct	U.S. Pat. No. 3,946,398
	differential thermal expansion,	to a large motion.	layers, or to have a thermal	1973 Stemme
	piezoelectric expansion,		difference across the actuator	U.S. Pat. No. 3,747,120
	magnetostriction, or other form			IJ03, IJ09, IJ10, IJ19, IJ23,
	of relative dimensional change.			IJ24, IJ25, IJ29, IJ30, IJ31,
				IJ33, IJ34, IJ35
Swivel	The actuator swivels around a	Allows operation where the net	Inefficient coupling to the ink	IJ06
	central pivot. This motion is	linear force on the paddle is zero	motion
	suitable where there are	Small chip area requirements
	opposite forces applied to
	opposite sides of the paddle,
	e.g. Lorenz force.
Straighten	The actuator is normally bent,	Can be used with shape memory	Requires careful balance of	IJ26, IJ32
	and straightens when energized.	alloys where the austenic phase	stresses to ensure that the
		is planar	quiescent bend is accurate
Double bend	The actuator bends in one	One actuator can be used to	Difficult to make the drops	IJ36, IJ37, IJ38
	direction when one element is	power two nozzles.	ejected by both bend directions
	energized, and bends the other	Reduced chip size.	identical.
	way when another element is	Not sensitive to ambient	A small efficiency loss
	energized.	temperature	compared to equivalent single
			bend actuators.
Shear	Energizing the actuator causes	Can increase the effective travel	Not readily applicable to other	1985 Fishbeck
	a shear motion in the actuator	of piezoelectric actuators	actuator mechanisms	U.S. Pat. No. 4,584,590
	material.
Radial	The actuator squeezes an ink	Relatively easy to fabricate	High force required	1970 Zoltan
constriction	reservoir, forcing ink from a	single nozzles from glass tubing	Inefficient	U.S. Pat. No. 3,683,212
	constricted nozzle.	as macroscopic structures	Difficult to integrate with VLSI
			processes
Coil/uncoil	A coiled actuator uncoils or	Easy to fabricate as a planar	Difficult to fabricate for non-	IJ17, IJ21, IJ34, IJ35
	coils more tightly. The motion	VLSI process	planar devices
	of the free end of the	Small area required, therefore	Poor out-of-plane stiffness
	actuator ejects the ink.	low cost
Bow	The actuator bows (or buckles)	Can increase the speed of travel	Maximum travel is constrained	IJ16, IJ18, IJ27
	in the middle when energized.	Mechanically rigid	High force required
Push-Pull	Two actuators control a shutter.	The structure is pinned at both	Not readily suitable for ink jets	IJ18
	One actuator pulls the shutter,	ends, so has a high out-of-plane	which directly push the ink
	and the other pushes it.	rigidity
Curl inwards	A set of actuators curl inwards	Good fluid flow to the region	Design complexity	IJ20, IJ42
	to reduce the volume of ink	behind the actuator increases
	that they enclose.	efficiency
Curl outwards	A set of actuators curl outwards,	Relatively simple construction	Relatively large chip area	IJ43
	pressurizing ink in a chamber
	surrounding the actuators, and
	expelling ink from a nozzle
	in the chamber.
Iris	Multiple vanes enclose a volume	High efficiency	High fabrication complexity	IJ22
	of ink. These simultaneously	Small chip area	Not suitable for pigmented inks
	rotate, reducing the volume
	between the vanes.
Acoustic	The actuator vibrates at a high	The actuator can be physically	Large area required for efficient	1993 Hadimioglu et al,
vibration	frequency.	distant from the ink	operation at useful frequencies	EUP 550,192
			Acoustic coupling and crosstalk	1993 Elrod et al, EUP 572,220
			Complex drive circuitry
			Poor control of drop volume and
			position
None	In various ink jet designs the	No moving parts	Various other tradeoffs are	Silverbrook, EP 0771 658 A2
	actuator does not move.		required to eliminate moving	and related patent applications
			parts	Tone-jet
NOZZLE REFILL METHOD
Surface tension	This is the normal way that ink	Fabrication simplicity	Low speed	Thermal ink jet
	jets are refilled. After the	Operational simplicity	Surface tension force relatively	Piezoelectric ink jet
	actuator is energized, it typically		small compared to actuator force	IJ01-IJ07, IJ10-IJ14, IJ16,
	returns rapidly to its normal		Long refill time usually	IJ20, IJ22-IJ45
	position. This rapid return sucks		dominates the total repetition
	the air through the nozzle		rate
	opening. The ink surface tension
	at the nozzle then exerts a small
	force restoring the meniscus to
	a minimum area. This force
	refills the nozzle.
Shuttered	Ink to the nozzle chamber is	High speed	Requires common ink pressure	IJ08, IJ13, IJ15, IJ17, IJ18,
oscillating ink	provided at a pressure that	Low actuator energy, as the	oscillator	IJ19, IJ21
pressure	oscillates at twice the drop	actuator need only open or close	May not be suitable for
	ejection frequency. When a drop	the shutter, instead of ejecting	pigmented inks
	is to be ejected, the shutter	the ink drop
	is opened for 3 half cycles:
	drop ejection, actuator return,
	and refill. The shutter is then
	closed to prevent the nozzle
	chamber emptying during the
	next negative pressure cycle.
Refill actuator	After the main actuator has	High speed, as the nozzle is	Requires two independent	IJ09
	ejected a drop a second (refill)	actively refilled	actuators per nozzle
	actuator is energized. The refill
	actuator pushes ink into the
	nozzle chamber, The refill
	actuator returns slowly, to
	prevent its return from emptying
	the chamber again.
Positive	The ink is held a slight positive	High refill rate, therefore a	Surface spill must be prevented	Silverbrook, EP 0771 658 A2
ink pressure	pressure. After the ink drop is	high drop repetition rate is	Highly hydrophobic print head	and related patent applications
	ejected, the nozzle chamber fills	possible	surfaces are required	Alternative for:, IJ01-IJ07,
	quickly as surface tension and			IJ10-IJ14, IJ16, IJ20, IJ22-IJ45
	ink pressure both operate to
	refill the nozzle.
METHOD OF RESTRICTING BACK-FLOW THROUGH INLET
Long inlet	The ink inlet channel to the	Designs simplicity	Restricts refill rate	Thermal ink jet
channel	nozzle chamber is made long	Operational simplicity	May result in a relatively large	Piezoelectric ink jet
	and relatively narrow, relying on	Reduces crosstalk	chip area	IJ42, IJ43
	viscous drag to reduce inlet		Only partially effective
	back-flow.
Positve	The ink is under a positive	Drop selection and separation	Requires a method (such as a	Silverbrook, EP 0771 658 A2
ink pressure	pressure, so that in the quiescent	forces can be reduced	nozzle rim or effective	and related patent applications
	state some of the ink drop	Fast refill time	hydrophobizing, or both) to	Possible operation of the
	already protrudes from the		prevent flooding of the ejection	following: IJ01-IJ07, IJ09-IJ12,
	nozzle. This reduces the		surface of the print head.	IJ14, IJ16, IJ20, IJ22, IJ23-IJ34
	pressure in the nozzle chamber			IJ36-IJ41, IJ44
	which is required to eject a
	certain volume of ink. The
	reduction in chamber pressure
	results in a reduction in ink
	pushed out through the inlet.
Baffle	One or more baffles are placed	The refill rate is not as	Design complexity	HP Thermal Ink Jet
	in the inlet ink flow. When the	restricted as the long inlet	May increase fabrication	Tektronix piezoelectric ink jet
	actuator is energized, the rapid	method.	complexity (e.g. Tektronix hot
	ink movement creates eddies	Reduces crosstalk	melt piezoelectric print heads).
	which restrict the flow through
	the inlet. The slower refill
	process is unrestricted, and
	does not result in eddies.
Flexible flap	In this method recently disclosed	Significantly reduces back-flow	Not applicable to most ink jet	Canon
restricts inlet	by Canon, the expanding	for edge-shooter thermal ink	configurations
	actuator (bubble) pushes on q	jet devices	Increased fabrication complexity
	flexible flap that restricts the		Inelastic deformation of polymer
	inlet.		flap results in creep over
			extended use
Inlet filter	A filter is located between the	Additional advantage of ink	Restricts refill rate	IJ04, IJ12, IJ24, IJ27, IJ29,
	ink inlet and the nozzle	filtration	May result in complex	IJ30
	chamber. The filter has a	Ink filter may be fabricated with	construction
	multitude of small holes or slots,	no additional process steps
	restricting ink flow. The filter
	also removes particles which
	may block the nozzle.
Small inlet	The ink inlet channel to the	Design simplicity	Restricts refill rate	IJ02, IJ37, IJ44
compared to	nozzle chamber has a sub-		May result in a relatively large
nozzle	stantially smaller cross section		chip area
	than that of the nozzle,		Only partially effective
	resulting in easier ink egress
	out of the nozzle than out of
	the inlet.
Inlet shutter	A secondary actuator controls	Increases speed of the ink-jet	Requires separate refill actuator	IJ09
	the position of a shutter,	print head operation	and drive circuit
	closing off the ink inlet when
	the main actuator is energized.
The inlet is	The method avoids the problem	Back-flow problem is eliminated	Requires careful design to	IJ01, IJ03, IJ05, IJ06, IJ07,
located behind	of inlet back-flow by arranging		minimize the negative pressure	IJ10, IJ11, IJ14, IJ16, IJ22,
the ink-pushing	the ink-pushing surface of		behind the paddle	IJ23, IJ25, IJ28, IJ31, IJ32,
surface	the actuator between the inlet			IJ33, IJ34, IJ35, IJ36, IJ39,
	and the nozzle.			IJ40, IJ41
Part of the	The actuator and a wall of the	Significant reductions in	Small increases in fabrication	IJ07, IJ20, IJ26, IJ38
actuator	ink chamber are arranged so that	back-flow can be achieved	complexity
moves to shut	the motion of the actuator closes	Compact designs possible
off the inlet	off the inlet.
Nozzle	In some configurations of ink	Ink back-flow problem is	None related to ink back-flow	Silverbrook, EP 0771 658 A2
actuator	jet, there is no expansion or	eliminated	on actuation	and related patent applications
does not	movement of an actuator which			Valve-jet
result in ink	may cause ink back-flow			Tone-jet
back-flow	through the inlet.
NOZZLE CLEARING METHOD
Normal nozzle	All of the nozzles are fired	No added complexity on the	May not be sufficient to	Most ink jet systems
firing	periodically, before the ink has	print head	displace dried ink	IJ01, IJ02, IJ03, IJ04, IJ05,
	a chance to dry. When not in use			IJ06, IJ07, IJ09, IJ10, IJ11,
	the nozzles are sealed (capped)			IJ12, IJ14, IJ16, IJ20, IJ22,
	against air. The nozzle firing			IJ23, IJ24, IJ25, IJ26, IJ27,
	is usually performed during a			IJ28, IJ29, IJ30, IJ31, IJ32,
	special clearing cycle, after first			IJ33, IJ34, IJ36, IJ37, IJ38,
	moving the print head to a			IJ39, IJ40, IJ41, IJ42, IJ43,
	cleaning station.			IJ44, IJ45
Extra power	In systems which heat the ink,	Can be highly effective if the	Requires higher drive voltage	Silverbrook, EP 0771 658 A2
to ink heater	but do not boil it under normal	heater is adjacent to the nozzle	for clearing	and related patent applications
	situations, nozzle clearing can		May require larger drive
	be achieved by over-powering		transistors
	the heater and boiling ink at
	the nozzle.
Rapid	The actuator is fired in rapid	Does not require extra drive	Effectiveness depends sub-	May be used with: IJ01, IJ02,
succession of	succession. In some config-	circuits on the print head	stantially upon the configuration	IJ03, IJ04, IJ05, IJ06, IJ07,
actuator pulses	urations, this may cause heat	Can be readily controlled and	of the ink jet nozzle	IJ09, IJ10, IJ11, IJ14, IJ16,
	build-up at the nozzle which	initiated by digital logic		IJ20, IJ22, IJ23, IJ24, IJ25,
	boils the ink, clearing the			IJ27, IJ28, IJ29, IJ30, IJ31,
	nozzle. In other situations,			IJ32, IJ33, IJ34, IJ36, IJ37,
	it may cause sufficient vibrations			IJ38, IJ39, IJ40, IJ41, IJ42,
	to dislodge clogged nozzles.			IJ43, IJ44, IJ45
Extra power to	Where an actuator is not	A simple solution where	Not suitable where there is a	May be used with: IJ03, IJ09,
ink pushing	normally driven to the limit of	applicable	hard limit to actuator movement	IJ16, IJ20, IJ23, IJ24, IJ25
actuator	its motion, nozzle clearing may			IJ27, IJ29, IJ30, IJ31, IJ32
	be assisted by providing an			IJ39, IJ40, IJ41, IJ42, IJ43
	enhanced drive signal to the			IJ44, IJ45
	actuator.
Acoustic	An ultrasonic wave is applied to	A high nozzle clearing capability	High implementation cost if	IJ08, IJ13, IJ15, IJ17, IJ18,
resonance	the ink chamber. This wave is of	can be achieved	system does not already include	IJ19, IJ21
	an appropriate amplitude and	May be implemented at very low	an acoustic actuator
	frequency to cause sufficient	cost in systems which already
	force at the nozzle to clear	include acoustic actuators
	blockages. This is easiest to
	acheive if the ultrasonic wave
	is at a resonant frequency of
	the ink cavity.
Nozzle clearing	A microfabricated plate is	Can clear severely clogged	Accurate mechanical alignment	Silverbrook, EP 0771 658 A2
plate	pushed against the nozzles. The	nozzles	is required	and related patent applications
	plate has a post for every		Moving parts are required
	nozzle. A post moves through		There is risk of damage to the
	each nozzle, displacing dried		nozzles
	ink.		Accurate fabrication is required
Ink pressure	The pressure of the ink is	May be effective where other	Requires pressure pump or other	May be used with all IJ series
pulse	temporarily increased so that	methods cannot be used	pressure actuator	ink jets
	ink streams from all of the		Expensive
	nozzles. This may be used in		Wasteful of ink
	conjunction with acuator
	energizing.
Print head	A flexible ‘blade’ is wiped	Effective for planar print	Difficult to use if print head	Many ink jet systems
wiper	across the print head surface.	head surfaces	surface is non-planar or very
	The blade is usually fabricated	Low cost	fragile
	from a flexible polymer, e.g.		Requires mechanical parts
	rubber or synthetic elastomer.		Blade can wear out in high
			volume print systems
Separate ink	A separate heater is provided at	Can be effective where other	Fabrication complexity	Can be used with many IJ series
boiling heater	the nozzle although the normal	nozzle clearing methods cannot		ink jets
	drop ejection mechanism does	be used
	not require it. The heaters do	Can be implemented at no
	not require indiviual drive	additional cost in some ink jet
	circuits, as many nozzles can	configurations
	be cleared simultaneously, and
	no imaging is required.
NOZZLE PLATE CONSTRUCTION
Electroformed	A nozzle plate is separately	Fabrication simplicity	High temperatures and pressures	Hewlett Packard Thermal
nickel	fabricated from electroformed		are required to bond nozzle plate	Ink jet
	nickel, and bonded to the print		Minimum thickness constraints
	head chip.		Differential thermal expansion
Laser ablated	Individual nozzle holes are	No masks required	Each hole must be individually	Canon Bubblejet
or drilled	ablated by an intense UV laser	Can be quite fast	formed	1998 Sercel et al., SPIE,
polymer	in a nozzle plate, which is	Some control over nozzle profile	Special equipment required	Vol. 998 Excimer Beam
	typically a polymer such as	is possible	Slow where there are many	Applications, pp. 76-83
	polyimide or polysulphone	Equipment required is relatively	thousands of nozzles per print	1993 Watanabe et al.,
		low cost	head	U.S. Pat. No. 5,208,604
			May produce thin burrs at exit
			holes
Silicon	A separate nozzle plate is	High accuracy is attainable	Two part construction	K. Bean, IEEE Transactions on
micromachined	micromachined from single		High cost	Electron Devices, Vol. ED-25,
	crystal silicon, and bonded to		Requires precision alignment	No. 10, 1978, pp 1185-1195
	the print head wafer.		Nozzles may be clogged by	Xerox 1990 Hawkins et al.,
			adhesive	U.S. Pat. No. 4,899,181
Glass	Fine glass capillaries are	No expensive equipment	Very small nozzle sizes are	1970 Zoltan
capillaries	drawn from glass tubing. This	required	difficult to form	U.S. Pat. No. 3,683,212
	method has been used for	Simple to make single nozzles	Not suited for mass production
	making individual nozzles, but
	is difficult to use for bulk
	manufacturing of print heads
	with thousands of nozzles.
Monolithic,	The nozzle plate is deposited	High accuracy (<1 μm)	Requires sacrificial layer under	Silverbrook, EP 0771 658 A2
surface	as a layer using standard VLSI	Monolithic	the nozzle plate to form the	and related patent applications
micromachined	deposition techniques. Nozzles	Low cost	nozzle chamber	IJ01, IJ02, IJ04, IJ11, IJ12,
using VLSI	are etched in the nozzle plate	Existing processes can be used	Surface may be fragile to the	IJ17, IJ18, IJ20, IJ22, IJ24,
lithographic	using VLSI lithography and		touch	IJ27, IJ28, IJ29, IJ30, IJ31,
processes	etching.			IJ32, IJ33, IJ34, IJ36, IJ37,
				IJ38, IJ39, IJ40, IJ41, IJ42,
				IJ43, IJ44
Monolithic,	The nozzle plate is a buried	High accuracy (<1 μm)	Requires long etch times	IJ03, IJ05, IJ06, IJ07, IJ08,
etched through	etch stop in the wafer. Nozzle	Monolithic	Requires a support wafer	IJ09, IJ10, IJ13, IJ14, IJ15,
substrate	chambers are etched in the front	Low cost		IJ16, IJ19, IJ21, IJ23, IJ25,
	of the wafer, and the wafer is	No differential expansion		IJ26
	thinned from the back side.
	Nozzles are then etched in the
	etch stop layer.
No nozzle plate	Various methods have been tried	No nozzles to become clogged	Difficult to control drop position	Ricoh 1995 Sekiya et al
	to eliminate the nozzles entirely,		accurately	U.S. Pat. No. 5,412,413
	to prevent nozzle clogging.		Crosstalk problems	1993 Hadimioglu et al
	These include thermal bubble			EUP 550,192
	mechanisms and acoustic lens			1993 Elrod et al
	mechanisms			EUP 572,220
Trough	Each drop ejector has a trough	Reduced manufacturing	Drop firing direction is sensitive	IJ35
	through which a paddle moves.	complexity	to wicking.
	There is no nozzle plate.	Monolithic
Nozzle slit	The elimination of nozzle holes	No nozzles to become clogged	Difficult to control drop position	1989 Saito et al
instead of	and replacement by a slit		accurately	U.S. Pat. No. 4,799,068
individual	encompassing many actuator		Crosstalk problems
nozzles	positions reduces nozzle
	clogging, but increases crosstalk
	due to ink surface waves
DROP EJECTION DIRECTION
Edge (‘edge	Ink flow is along the surface	Simple construction	Nozzles limited to edge	Canon Bubblejet 1979 Endo
shooter’)	of the chip, and ink drops are	No silicon etching required	High resolution is difficult	et al GB patent 2,007,162
	ejected from the chip edge.	Good heat sinking via substrate	Fast color printing requires	Xerox heater-in-pit 1990
		Mechanically strong	one print head per color	Hawkins et al U.S. Pat. No.
		Ease of chip handing		4,899,181
				Tone-jet
Surface (‘roof	Ink flow is along the surface	No bulk silicon etching required	Maximum ink flow is severely	Hewlett-Packard TIJ 1982
shooter’)	of the chip, and ink drops are	Silicon can make an effective	restricted	Vaught et al
	ejected from the chip surface,	heat sink		U.S. Pat. No. 4,490,728
	normal to the plane of the chip.	Mechanical strength		IJ02, IJ11, IJ12, IJ20, IJ22
Through chip,	Ink flow is through the chip,	High ink flow	Requires bulk silicon etching	Silverbrook, EP 0771 658 A2
forward	and ink drops are ejected from	Suitable for pagewidth print		and related patent applications
(‘up shooter’)	the front surface of the chip.	heads		IJ04, IJ17, IJ18, IJ24,
		High nozzle packing density		IJ27-IJ45
		therefore low manufacturing cost
Through chip,	Ink flow is through the chip,	High ink flow	Requires wafer thinning	IJ01, IJ03, IJ05, IJ06, IJ07
reverse (‘down	and ink drops are ejected from	Suitable for pagewidth print	Requires special handling during	IJ08, IJ09, IJ10, IJ13, IJ14
shooter’)	the rear surface of the chip.	heads	manufacturing	IJ15, IJ16, IJ19, IJ21, IJ23
		High nozzle packing density		IJ25, IJ26
		therefore low manufacturing cost
Through	Ink flow is through the actuator,	Suitable for piezolelectric print	Pagewidth print heads require	Epson Stylus
actuator	which is not fabricated as part	heads	several thousand connections to	Tektronix hot melt piezoelectric
	of the same substrate as the		drive cicuits	ink jets
	drive transistors.		Cannot be manufactured in
			standard CMOS fabs
			Complex assembly required
INK TYPE
Aqueous, dye	Water based ink which typically	Environmentally friendly	Slow drying	Most existing ink jets
	contains: water, dye, surfactant,	No odor	Corrosive	All IJ series in jets
	humectant, and biocide.		Bleeds on paper	Silverbrook, EP 0771 658 A2
	Modern ink dyes have high		May strikethough	and related patent applications
	water-fastness, light fastness		Cockles paper
Aqueous,	Water based ink which typically	Environmentally friendly	Slow drying	IJ02, IJ04, IJ21, IJ26, IJ27,
pigment	contains: water, pigment,	No odor	Corrosive	IJ30
	surfactant, humectant, and	Reduced bleed	Pigment may clog nozzles	Silverbrook, EP 0771 658 A2
	biocide. Pigments have an	Reduced wicking	Pigment may clog actuator	and related patent applications
	advantage in reduced bleed,	Reduced strikethough	mechanisms	Piezoelectric ink-jets
	wicking and strikethough.		Cockles paper	Thermal ink jets
				(with significant restrictions)
Methy Ethyl	MEK is a highly volatile solvent	Very fast drying	Odorous	All IJ series ink jets
Ketone (MEK)	used for industrial printing on	Prints on various substrates	Flammable
	difficult surfaces such as	such as metals and plastics
	aluminum cans.
Alcohol	Alcohol based inks can be used	Fast drying	Slight odor	All IJ Series ink jets
(ethanol,	where the printer must operate	Operates at subfreezing	Flammable
2-butanol, and	at temperatures below the	temperatures
others)	freezing point of water. An	Reduced paper cockle
	example of this is in-camera	Low cost
	consumer photographic printing.
Phase change	The ink is solid at room	No drying time-ink instantly	High viscosity	Tektronix hot melt
(hot melt)	temperature, and is melted in the	freezes on the print medium	Printed ink typically has a	piezoelectric ink jets
	print head before jetting. Hot	Almost any print medium can be	‘waxy’ feel	1989 Nowak
	melt inks are usually wax based,	used	Printed pages may ‘block’	U.S. Pat. No. 4,820,346
	with a melting point around	No paper cockle occurs	Ink temperature may be above	All IJ series ink jets
	80° C. After jetting the ink	No wicking occurs	the curie point of permenant
	freezes almost instantly upon	No bleed occurs	magnets
	contacting the print medium	No strikethrough occurs	Ink heaters consume power
	or a transfer roller.		Long warm-up time
Oil	Oil based inks are extensively	High solubility medium for	High viscosity: this is a	All IJ series ink jets
	used in offset printing. They	some dyes	significant limitation for use
	have advantages in improved	Does not cockle paper	in ink jets, which usually require
	characteristics on paper	Does not wick through paper	a low viscosity. Some short
	(especially no wicking or		chain and multi-branched oils
	cockle). Oil soluble dies and		have a sufficiently low viscosity.
	pigments are required.		Slow drying
Microemulsion	A microemulsion is a stable,	Stops ink bleed	Viscosity higher than water	All IJ series ink jets
	self forming emulsion of oil,	High dye solubility	Cost is slightly higher than
	water, and surfactant. The	Water, oil, and amphiphilic	water based ink
	characteristic drop size is less	soluble dies can be used	High surfactant concentration
	than 100 nm, and is determined	Can stabilize pigment	required (around 5%)
	by the preferred curvature of	suspensions
	the surfactant.

Claims

1. A method of manufacturing a micro-electromechanical fluid ejecting device that includes a plurality of nozzle arrangements, each nozzle arrangement defining a nozzle chamber and a pair of fluid ejection ports in fluid communication with the nozzle chamber and a fluid ejecting mechanism operatively positioned with respect to the nozzle chamber to selectively eject fluid from either of the fluid ejection ports, the method comprising the steps of:partially forming the plurality of nozzle chambers within a wafer substrate; depositing at least one sacrificial layer on the wafer substrate; forming at least part of each fluid ejecting mechanism on the, or one of the, sacrificial layers; and etching the, or each, sacrificial layer to free the fluid ejecting mechanisms.

2. A method as claimed in claim 1, in which the step of forming the nozzle chambers includes the step of etching the wafer substrate to define walls of the nozzle chambers.

3. A method as claimed in claim 2, which includes the step of forming each pair of fluid ejection ports by depositing a roof wall layer on the, or each, sacrificial layer and etching through the roof wall layer.

4. A method as claimed in claim 1, which includes the step of depositing at least two sacrificial layers so that the sacrificial layers each define deposition zones for components of the fluid ejecting mechanism.