Number | Date | Country | Kind |
---|---|---|---|
3102647 | Jan 1981 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
3904462 | Dimigen et al. | Sep 1975 | |
3975252 | Fraser | Aug 1976 | |
4132586 | Schaible et al. | Jan 1979 |
Number | Date | Country |
---|---|---|
52-9647 | Jan 1977 | JPX |
56-3680 | Jan 1981 | JPX |
Entry |
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Michel Contagrel, "Considerations on High Resolution Patterns Engraved by Ion Etching", IEEE Transactions on Electron Devices, vol. ED-22, Jul. 1975, pp. 483-486. |