This invention was made with United States Government support under ONR/DARPA Contract No. N00014-84-K-0624. The Government has certain rights in this invention.
Number | Name | Date | Kind |
---|---|---|---|
3977925 | Schwabe | Aug 1976 | |
4312117 | Robillard | Jan 1982 | |
4668865 | Gimzewski | May 1987 | |
4806755 | Duerig | Feb 1989 | |
4943719 | Akamine | Jul 1990 |
Entry |
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Angell, Terry, and Barth, "Silicon Micromechanical Devices", Scientific American, Apr. 1983, vol. 248, No. 4, pp. 44-55. |