Mikrisysteme GmbH Chemnitz, “Electrostatic Micromechanic Actuators: Scanner” (undated). |
Karen W. Markus, “Commercialization of Microsystems '96: The Challenges of Infrastructure—Supporting the Growth of MEMs into Production” The Engineering Foundation, p.p. 28-32 (Steven Walsh ed. 1996) (No Month). |
Kurt Petersen et al. “Surface Micromachined Structures Fabricated with Silicon Fusion Bonding” International Conference on Solid-State Sensors and Actuators: Digest of technical Papers, 1991, p.p. 397-399 (1991) (No Month). |
B. Diem et al., “SOI (Simox and Substrate for Surface Micromachining of Single Crystalline Silicon Sensors and Actuators” The 7th International Conference on Solid-State Sensors and Actuators, p.p. 233-236 (1994). (No Month). |
B. Wagner, et al., “Electromagnetic Microactuators with Multiple Degrees of Freedom” Fraunhofer-Institut fur Mikrostrukturtechnik, 1991IEEE, 91CH2817-5/91 10000-0614 p.p. 614-617 (1991) (No Month). |
V.P. Jaecklin et al., “Mechanical and Optical Properties of Surface Micromachined Torsional Mirrors in Silicon, Polysilicon and Aluminum” The 7th International Conference on Solid-State Actuators p.p. 958-961 (1994) (No Month). |
Kurt E. Petersen, “Silicon as a Mechanical Material,” Proceedings of the IEEE, vol, 70, No. 5, May 1982, p.p. 420-457. |
R.A. Buser et al., “Very High Q-factor Resonators in Monocrystalline Silicon,” Sensors and Actuators, A21-A23 (1990) p.p. 323-327 (No Month). |
R.N. Kleiman, et al. “Single-crystal Silicon High-Q Torsional Oscillators,” Rev. Sci. Instrum. 56(11), p.p. 2088-2091 (American Institute of Phisics Nov. 1985). |
W.G. Pfann et al., “Semiconducting Stress Transducers Utiliziang the Transverse and Shear Piezoresistance Effects,” The Journal of Applied Physics, vol. 32, No. 10, Oct. 1961, p.p. 2008-2019. |
Karen W. Markus, “Fabrication Technology and the Challenges of Large-Scale Production,” Frontiers of Engineering: Reports on Leading Edge Engineering From the 1996 NAE Symposium on Frontiers of Engineering, p. 57, National Academy of Engineering, 1996 (No Month). |
Karen W. Markus, “Developing Infrastructure to Mass-Produce MEMS” Computational Science & Engineering, Jan.-Mar. 1997 p.p. 49-54. |
Karen W. Markus et al., “MEMS Infrastructure: Multi-User Access and Smart MEMS,” Government Microcircuit Applications Conference 1994, 1994 Digest of Papers p.p. 207-210 (No Month). |
Bernhard E. Boser et al., “Design of Integrated MEMs,” Emerging Technologies, Designing Low Power Digital Systems, Tutorial for 1996 International Symposium on Circuits and Systems. Ch. 3.1, p.p. 207-232 (No Month). |
K.W. Markus et al., “Smart MEMS: Flip Chip Integration of MEMS and Electronics,” Smart Structures and Materials 1995—Smart Electronics, proceedings of SPIE The International Society for Optical Engineering, vol. 2448, p.p. 82-92 (Varadan ed. Mar. 2-3, 1995). |
J.A. Walker et al., A Silicon Optical Modulator With 5MHz Operation for Fiber-In-The-Loop applications, The 8th International Conference on Solid-State Sensors and Actuators, Eurosensors IX, p.p. 285-288 (1995) (No Month). |
John H. Comotois et al., “Surface Micromachined Polysilicon Thermal Actuator Arrays and Applications,” Solid-State Sensors and Actuators Workshop p.p. 174-177 (Transducers Research Foundation, Inc., eds. Jun. 3-6, 1996). |
Kurt Petersen, et al., “Surface Micromachined Structures Fabricated with Silicon Fusion Bonding,” Transducers '91—1991 International Conference on Solid-State Sensors and Actuators, Digest of technical Papers, p.p. 397-399. (No Month). |
U. Breng et al., Electrostatic Micromechanic Actuators, J. Micromech. And Microeng., vol. 2, 1992, pp. 256-261 (No Month). |
K. Deng et al., The Development of Polysilicon Micromotors for Optical Scanning Applications, Proceeding, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 1994. |
Hiroshi Goto et al., Scanning Optical Sensor for Micro Robot, Central R&D Laboratory, OMRON Corporation, pp. 1-6 (No Date). |
V.P. Jaecklin et al., Optical Microshutters and Torsional Micromirrors For Light Modulator Arrays, IEEE, 1993, pp. 124-127 (No Month). |
Yoshinori Ohtuka et al., 2-Dimensional Optical Scanner Applying A Torsional Resonator With 2 Degrees Of Freedom, Proceedings, IEEE Micro Electro Mechanical Systems, 1995, pp. 306-309 (No Month). |
Kurt E. Peterson, Silicon Torsional Scanning Mirror, IBM J. Res. Develop., vol. 24, No. 5, Sep. 1980 pp. 631-637. |