Claims
- 1. A microfabricated containment capsule, comprising:
- at least one bulk substrate, said at least one bulk substrate delimiting a cavity having a boundary, a first portion of said boundary constituting an inner wall of a solid portion of said at least one bulk substrate; and
- at a second portion of said boundary, a membrane having at least one porous area with controlled pores and rib members to provide additional structural support to said at least one porous area, providing a selective molecular barrier between an interior and an exterior of said containment capsule.
CROSS REFERENCE TO RELATED APPLICATIONS
This application is a continuation-in-part of U.S. Pat. application Ser. No. 08/254,330 filed Jun. 6, 1994 which is a continuation-in-part of U.S. patent application Ser. No. 08/207,457 filed Mar. 7, 1994 , now U.S. Pat. No. 5,651,900, and a continuation-in-part of U.S. pat. application Ser. No. 08/207,459 filed Mar. 7, 1994, now Pat. No. 5,660,680. The entire disclosures of these applications are incorporated herein by reference.
US Referenced Citations (53)
Foreign Referenced Citations (5)
Number |
Date |
Country |
292325 |
Nov 1988 |
EPX |
1-138110 |
May 1989 |
JPX |
1680270 |
Sep 1991 |
SUX |
WO 9311862 |
Jun 1993 |
WOX |
9323154 |
Nov 1993 |
WOX |
Non-Patent Literature Citations (3)
Entry |
G. Kittilsland et al., "A Sub-Micron Particle Filte in Silicon," Sensors and Actuators, A21-A23, (1990), pp. 904-907. |
W. Lang et al., "Application of Porous Silicon as a Sacrificial Layer," 7th International Conference on Solid-State Sensors and Actuators Digest of Technical Papers, Jun. 7-10, 1993, pp. 202-205. |
Websters Third New International Dictionary, Copyright 1986 by Merriam-Webster, Inc., p. 811. |
Related Publications (1)
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Number |
Date |
Country |
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207459 |
Mar 1994 |
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Continuation in Parts (2)
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Number |
Date |
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Parent |
254330 |
Jun 1994 |
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Parent |
207457 |
Mar 1994 |
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