Micro-filters

Industry

CPC
B81B2201/10

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/10Micro-filters

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-electro-mechanical system fluid control
- Patent number 12,304,804
- Issue date May 20, 2025
- WATER STUFF & SUN GMBH
- Johan Bejhed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS type semiconductor gas detection element
- Patent number 11,977,043
- Issue date May 7, 2024
- NEW COSMOS ELECTRIC CO., LTD.
- Hirokazu Mitsuhashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor package structure and method for manufacturing the same
- Patent number 11,535,509
- Issue date Dec 27, 2022
- Advanced Semiconductor Engineering, Inc.
- Wei-Wei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plurality of filters
- Patent number 11,440,009
- Issue date Sep 13, 2022
- Hewlett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS package
- Patent number 10,745,269
- Issue date Aug 18, 2020
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Nick Renaud-Bezot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming micro-pipes on a substrate and a structure formed...
- Patent number 10,493,378
- Issue date Dec 3, 2019
- Imec VZW
- Zheng Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device package and method for manufacturing the same
- Patent number 10,472,228
- Issue date Nov 12, 2019
- Advanced Semiconductor Engineering, Inc.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) on application specific integr...
- Patent number 10,301,176
- Issue date May 28, 2019
- Intel IP Corporation
- Gerald Ofner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) on application specific integr...
- Patent number 10,150,668
- Issue date Dec 11, 2018
- Intel IP Corporation
- Gerald Ofner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) on application specific integr...
- Patent number 9,663,353
- Issue date May 30, 2017
- Intel IP Corporation
- Gerald Ofner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for simultaneous structuring and chip singulation
- Patent number 9,610,543
- Issue date Apr 4, 2017
- Infineon Technologies AG
- Thomas Grille
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a micromechanical structure having a buri...
- Patent number 8,633,553
- Issue date Jan 21, 2014
- STMicroelectronics S.r.l.
- Marco Ferrera
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a component, in particular a micromechanical a...
- Patent number 8,529,781
- Issue date Sep 10, 2013
- Robert Bosch GmbH
- Tino Fuchs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a product with a micro or nano sized structure and...
- Patent number 7,531,120
- Issue date May 12, 2009
- Aquamarijn Holding B.V.
- Cornelis Johannes Maria Van Rijn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component comprising submicron hollow spaces
- Patent number 7,507,467
- Issue date Mar 24, 2009
- Oerlikon Trading AG, Trubbach
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for filtering particles from a fluid
- Patent number 7,371,329
- Issue date May 13, 2008
- OC Oerlikon Balzers AG
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabrication of a molecular filter and apparatus formed b...
- Patent number 7,252,764
- Issue date Aug 7, 2007
- California Institute of Technology
- Axel Scherer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component comprising submicron hollow spaces
- Patent number 7,026,046
- Issue date Apr 11, 2006
- Unaxis Balzers Ltd.
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component comprising submicron hollow spaces
- Patent number 6,884,500
- Issue date Apr 26, 2005
- Unaxis Balzers Ltd.
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a porous silicon film
- Patent number 6,780,786
- Issue date Aug 24, 2004
- The Regents of the University of California
- George M. Dougherty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacture of semipermeable silicon nitride membranes
- Patent number 6,660,648
- Issue date Dec 9, 2003
- Sandia Corporation
- Paul Charles Galambos
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS elements with integrated porous membranes and method of making...
- Patent number 6,613,241
- Issue date Sep 2, 2003
- California Insitute of Technology
- Axel Scherer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated filter with specially constructed channel walls, an...
- Patent number 6,044,981
- Issue date Apr 4, 2000
- The Regents of the University of California
- Wen-Hwa Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined porous membranes with bulk support
- Patent number 5,985,328
- Issue date Nov 16, 1999
- Regents of the University of California
- Wen-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a filter
- Patent number 5,985,164
- Issue date Nov 16, 1999
- Regents of the University of California
- Wen-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated filter with specially constructed channel walls, an...
- Patent number 5,798,042
- Issue date Aug 25, 1998
- Regents of the University of California
- Wen-Hwa Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined capsules having porous membranes and bulk supports
- Patent number 5,770,076
- Issue date Jun 23, 1998
- The Regents of the University of California
- Wen-Hwa Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM FLUID CONTROL
- Publication number 20240279048
- Publication date Aug 22, 2024
- Water Stuff & Sun GmbH
- Johan BEJHED
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIPLY ENCAPSULATED MICRO ELECTRICAL MECHANICAL SYSTEMS DEVICE
- Publication number 20220219971
- Publication date Jul 14, 2022
- CAMBRIDGE ENTERPRISE LIMITED
- Ashwin SESHIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREFOR
- Publication number 20220063988
- Publication date Mar 3, 2022
- Ningbo Semiconductor International Corporation (Shanghai Branch)
- Xiaoshan QIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20210147219
- Publication date May 20, 2021
- Advanced Semiconductor Engineering, Inc.
- Wei-Wei LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TYPE SEMICONDUCTOR GAS DETECTION ELEMENT
- Publication number 20210116405
- Publication date Apr 22, 2021
- NEW COSMOS ELECTRIC CO., LTD.
- Hirokazu Mitsuhashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLURALITY OF FILTERS
- Publication number 20190143325
- Publication date May 16, 2019
- Hewlett-Packard Development Company, L.P.
- Chien-Hua CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20190055118
- Publication date Feb 21, 2019
- Advanced Semiconductor Engineering, Inc.
- Chien-Hua CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Package
- Publication number 20180297834
- Publication date Oct 18, 2018
- AT&S Austria Technologies & Systemtechnik Aktiengesellschaft
- Nick Renaud-Bezot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFIC INTEGR...
- Publication number 20180186627
- Publication date Jul 5, 2018
- Intel IP Corporation
- Gerald Ofner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFIC INTEGR...
- Publication number 20170217766
- Publication date Aug 3, 2017
- Intel IP Corporation
- Gerald Ofner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFIC INTEGR...
- Publication number 20160200566
- Publication date Jul 14, 2016
- Intel IP Corporation
- Gerald Ofner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURI...
- Publication number 20120018819
- Publication date Jan 26, 2012
- STMicroelectronics S.r.l.
- Marco Ferrera
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a component, in particular a micromechanical a...
- Publication number 20100294710
- Publication date Nov 25, 2010
- ROBERT BOSCH GmbH
- Tino Fuchs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPONENT COMPRISING SUBMICRON HOLLOW SPACES
- Publication number 20080152892
- Publication date Jun 26, 2008
- OC OERLIKON BALZERS AG
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method For Manufacturing A Membrane In A (111) Surface Of A (100) S...
- Publication number 20080020579
- Publication date Jan 24, 2008
- Technische Universiteit Delft
- Warner Jurrien Venstra
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Component comprising submicron hollow spaces
- Publication number 20060147679
- Publication date Jul 6, 2006
- Unaxis Balzers Ltd.
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Component comprising submicron hollow spaces
- Publication number 20050208211
- Publication date Sep 22, 2005
- Unaxis Balzers Ltd.
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin film membrane structure
- Publication number 20040212028
- Publication date Oct 28, 2004
- George M. Dougherty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of making a product with a micro or nano sized structure and...
- Publication number 20040028875
- Publication date Feb 12, 2004
- Cornelis Johannes Maria Van Rijn
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Submicron hollow spaces
- Publication number 20030180024
- Publication date Sep 25, 2003
- Johannes Edlinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin film membrane structure
- Publication number 20030100136
- Publication date May 29, 2003
- George M. Dougherty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for fabrication of a molecular filter and apparatus formed b...
- Publication number 20020173015
- Publication date Nov 21, 2002
- Axel Scherer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Micro-filters

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electro-mechanical system fluid control

MEMS type semiconductor gas detection element

Semiconductor package structure and method for manufacturing the same

Plurality of filters

MEMS package

Method of forming micro-pipes on a substrate and a structure formed...

MEMS device package and method for manufacturing the same

Microelectromechanical system (MEMS) on application specific integr...

Microelectromechanical system (MEMS) on application specific integr...

Microelectromechanical system (MEMS) on application specific integr...

Method for simultaneous structuring and chip singulation

Process for manufacturing a micromechanical structure having a buri...

Method for producing a component, in particular a micromechanical a...

Method of making a product with a micro or nano sized structure and...

Component comprising submicron hollow spaces

Method for filtering particles from a fluid

Method for fabrication of a molecular filter and apparatus formed b...

Component comprising submicron hollow spaces

Component comprising submicron hollow spaces

Method for producing a porous silicon film

Process for manufacture of semipermeable silicon nitride membranes

MEMS elements with integrated porous membranes and method of making...

Microfabricated filter with specially constructed channel walls, an...

Micromachined porous membranes with bulk support

Method for forming a filter

Microfabricated filter with specially constructed channel walls, an...

Micromachined capsules having porous membranes and bulk supports

Patents Applicationslast 30 patents

MICRO-ELECTRO-MECHANICAL SYSTEM FLUID CONTROL

MULTIPLY ENCAPSULATED MICRO ELECTRICAL MECHANICAL SYSTEMS DEVICE

MEMS PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREFOR

SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

MEMS TYPE SEMICONDUCTOR GAS DETECTION ELEMENT

PLURALITY OF FILTERS

MEMS DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME

MEMS Package

MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFIC INTEGR...

MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFIC INTEGR...

MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFIC INTEGR...

PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURI...

Method for producing a component, in particular a micromechanical a...

COMPONENT COMPRISING SUBMICRON HOLLOW SPACES

Method For Manufacturing A Membrane In A (111) Surface Of A (100) S...

Component comprising submicron hollow spaces

Component comprising submicron hollow spaces

Thin film membrane structure

Method of making a product with a micro or nano sized structure and...

Submicron hollow spaces

Thin film membrane structure

Method for fabrication of a molecular filter and apparatus formed b...