Number | Name | Date | Kind |
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3383567 | King et al. | May 1968 | |
3571673 | Ovshinsky | Mar 1971 | |
3700978 | North et al. | Oct 1972 | |
3877060 | Shono et al. | Apr 1975 | |
4438351 | Schuermeyer | Mar 1984 |
Number | Date | Country |
---|---|---|
0125875 | Oct 1981 | JPX |
0082570 | May 1983 | JPX |
Entry |
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Journal of Applied Physics, vol. 54, #8, Aug. 83, "Reactively . . . Sputtered AIN Films as Gate Dielectric" by Fathimulla et al. |