Claims
- 1. A multi-foil optic comprising:
a plurality of flat plates each having a reflecting surface, and positioned normal to an arc to provide total external reflection to high energy radiation incident on the plates from a high energy radiation source, to focus the incident high energy radiation on a designated surface, wherein each plate has a thickness in the range of 50-70 μm.
- 2. The multi-foil optic of claim 1, wherein the high energy radiation comprises X-ray radiation.
- 3. The multi-foil optic of claim 1, wherein the high energy radiation comprises extreme ultraviolet (EUV) radiation.
- 4. The multi-foil optic of claim 1, wherein the plates are made of glass.
- 5. The multi-foil optic of claim 1, wherein the plates are made of mica.
- 6. A method for performing high energy radiation lithography, comprising the steps of:
receiving high energy radiation from a high energy radiation source; focusing the high energy radiation from the high energy radiation source using a multi-foil optic; receiving the focused high energy radiation from the multi-foil optic onto a lithographic specimen via a lithographic mask.
- 7. The method of claim 6, wherein the high energy radiation comprises X-ray radiation.
- 8. The method of claim 6, wherein the high energy radiation comprises extreme ultraviolet (EUV) radiation.
- 9. A high energy lithographic system, comprising:
a high energy source; a multi-foil optic for focusing high energy radiation from the high energy source; and a mask, which receives focused high energy radiation from the multi-foil optic and selectively blocks some of the radiation to form a pattern on a specimen that is exposed to high energy radiation passing through said mask.
- 10. The high energy lithographic system of claim 9, wherein the high energy radiation comprises X-ray radiation.
- 11. The high energy lithographic system of claim 9, wherein the high energy radiation comprises extreme ultraviolet (EUV) radiation.
Parent Case Info
[0001] This disclosure claims priority under 35 U.S.C. 119(e) from U.S. Provisional Application No. 60/398,599, filed Jul. 26, 2002, the content of which is incorporated herein by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60398599 |
Jul 2002 |
US |