Claims
- 1. A shield usable in a sputter reactor, comprising
an outer wall extending generally parallel to an axis and including a plurality of perforations therethrough to allow gas to reach from an outer side of said outer wall to an inner side of said outer wall; an inner wall extending generally parallel to said axis and closer to said axis than said outer wall; and a bottom wall connecting said inner and outer walls.
- 2. The shield of claim 1, wherein said perforations are round.
- 3. The shield of claim 1, wherein said outer wall extends farther along said axis than does said inner wall.
- 4. The shield of claim 1 which is generally symmetric about said axis.
- 5. The shield of claim 1 which is formed from stainless steel.
- 6. A shield assembly including the shield of claim 1 as a first shield and further comprising a second shield fittable within the inner wall of said first shield to cover said perforations.
- 7. The shield assembly of claim 6, wherein said second shield has two generally straight portions connected through a curved portion.
- 8. In a sputter reactor having sidewalls arranged about a central axis, a target of a material to be sputtered, and a substrate to be sputter deposited separated from said target along said central axis,
- 9. The shield of claim 8, wherein said perforations are round.
- 10. The shield of claim 8, wherein said outer wall extends farther along said central axis than does said inner wall.
- 11. The shield of claim 8 which is generally symmetric about said central axis.
- 12 The shield of claim 8 which is formed from stainless steel.
- 13. A shield assembly including the shield of claim 8 as a first shield and further comprising a second shield fittable within the inner wall of said first shield to cover said perforations.
- 14. The shield assembly of claim 13, wherein said second shield has two generally straight portions connected through a curved portion.
Parent Case Info
[0001] This application is a division of Ser. No. 09/916,412, filed Jul. 26, 2001, now allowed, which claims benefit of U.S. Provisional Application No. 60/221,597, filed on Jul. 28, 2000, both of which are herein incorporated by reference.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60221597 |
Jul 2000 |
US |
Divisions (1)
|
Number |
Date |
Country |
Parent |
09916412 |
Jul 2001 |
US |
Child |
10643281 |
Aug 2003 |
US |