Various features relate to packages and substrates.
Packages can include a substrate and an integrated device. The substrate may include a plurality of interconnects. A package is subject to many stresses that can cause warpage in the package, the substrate and/or the integrated device, which can cause one or more components of the package to break. There is an ongoing need to provide packages that are more resistant to warpage, while also minimizing the form factor of the package.
Various features relate to packages and substrates.
One example provides a package comprising an integrated device; and a substrate coupled to the integrated device through at least a plurality of solder interconnects. The substrate comprises at least one dielectric layer; an embedded frame at least partially located in the at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer.
Another example provides a package that includes an integrated device; a substrate coupled to the integrated device through at least a first plurality of solder interconnects; a second plurality of solder interconnects coupled to a second surface of the substrate; and a frame coupled to the second surface of the substrate. The integrated device is coupled to a first surface of the substrate. The substrate comprises at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer.
Another example provides a substrate. The substrate comprises at least one dielectric layer; an embedded frame at least partially located in the at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer.
Another example provides a substrate. The substrate comprises at least one dielectric layer; a plurality of interconnects located at least partially in the at least one dielectric layer; a plurality of solder interconnects coupled to a surface of the substrate; and a frame coupled to the surface of the substrate.
Another example provides a method for fabricating a package. The method provides a substrate comprising at least one dielectric layer; an embedded frame at least partially located in the at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer. The method couples an integrated device to the substrate through at least a plurality of solder interconnects.
Various features, nature and advantages may become apparent from the detailed description set forth below when taken in conjunction with the drawings in which like reference characters identify correspondingly throughout.
In the following description, specific details are given to provide a thorough understanding of the various aspects of the disclosure. However, it will be understood by one of ordinary skill in the art that the aspects may be practiced without these specific details. For example, circuits may be shown in block diagrams in order to avoid obscuring the aspects in unnecessary detail. In other instances, well-known circuits, structures and techniques may not be shown in detail in order not to obscure the aspects of the disclosure.
The present disclosure describes a package comprising an integrated device and a substrate coupled to the integrated device. The substrate comprises at least one dielectric layer, an embedded frame at least partially located in the at least one dielectric layer and a plurality of interconnects located at least partially in the at least one dielectric layer. In some implementations, the package may include a first frame coupled to a first surface of the substrate, and a second frame coupled to a second surface of the substrate. The embedded frame, the first frame and/or the second frame are configured as stiffeners for the substrate. The use of the embedded frame, the first frame and/or the second frame helps provide a more robust substrate that is less likely to warp and/or warp to a lesser degree due to various stresses on the package. The use of an embedded frame may help reduce the overall form package, which would allow the package to be implemented in smaller devices.
Exemplary Package with a Substrate Comprising an Embedded Frame
The substrate 101 may be a package substrate. The substrate 101 includes at least one dielectric layer 110, a plurality of interconnects 112 (e.g., substrate interconnects) and an embedded frame 107. The embedded frame 107 is located in the substrate 101. The embedded frame 107 may be a frame that is partially located (e.g., partially embedded) in the substrate 101 or fully located (e.g., fully embedded) in the substrate 101. The embedded frame 107 is located in the at least one dielectric layer 110. The embedded frame 107 is at least partially surrounded by the at least one dielectric layer 110. The embedded frame 107 may be a frame (e.g., a first frame) that is at least partially located (e.g., partially embedded) in the at least one dielectric layer 110. The embedded frame 107 may include a metal frame. The material and/or composition of the embedded frame 107 may be different from the plurality of interconnects 112. Different implementations may use different materials and/or composition for the embedded frame 107. The embedded frame 107 may include an alloy. The embedded frame 107 may be one contiguous and/or continuous frame. For example, the embedded frame 107 may be a unibody embedded frame. In some implementations, the embedded frame 107 may be defined by several frames and/or several separate frame portions. The substrate 101 may include several embedded frames. Thus, the embedded frame 107 may be part of several frames that are embedded in the substrate 101. In some implementations, the embedded frame 107 may be configured to be free of any electrical connection with an active component (e.g., transistor). In some implementations, the embedded frame 107 may be configured to not be electrically coupled to interconnects of the substrate 101, that are configured to be electrically coupled to active components and/or passive components of the substrate and/or the package.
The embedded frame 107 is configured as a stiffener for the substrate 101 and/or the package 100. The embedded frame 107 may be an embedded lead frame. The embedded frame 107 is made of a material that is stronger than the at least one dielectric layer 110, which helps strengthen the substrate 101 and/or the package 100. This in turns, makes the substrate 101 and/or the package 100 more resistant to stresses and thus, the substrate 101 and/or the package 100 is less likely to warp, or to warp less. In addition, by embedding the frame in the substrate 101, the overall form factor of the substrate 101 and/or the package 100 may be minimized and/or reduced. The embedded frame 107 may occupy space in the substrate 101 that would normally be occupied by a dielectric layer, which may mean that the embedded frame 107 may be implemented in the substrate 101 without increasing the overall size and/or thickness of the substrate 101.
As shown in
The substrate 401 may be a package substrate. The substrate 401 includes a core layer 410, at least one dielectric layer 420, at least one dielectric layer 430, a plurality of interconnects 412 (e.g., substrate interconnects) and an embedded frame 107. The embedded frame 107 is located in the substrate 401. The embedded frame 107 may be located in the core layer 410, the at least one dielectric layer 420 and/or the at least one dielectric layer 430. The embedded frame 107 may be at least partially surrounded by the core layer 410. However, the embedded frame 107 may be touched by the at least one dielectric layer 420 and/or the at least one dielectric layer 430. The at least one dielectric layer 420 may be coupled to a first surface of the core layer 410. The at least one dielectric layer 430 may be coupled to a second surface of the core layer 410. The embedded frame 107 may include a metal frame. The material and/or composition of the embedded frame 107 may be different from the plurality of interconnects 412. Different implementations may use different materials and/or composition for the embedded frame 107. The embedded frame 107 may be one contiguous and/or continuous frame. For example, the embedded frame 107 may be a unibody embedded frame. In some implementations, the embedded frame 107 may be defined by several frames. The substrate 401 may include several embedded frames. Thus, the embedded frame 107 may be part of several frames that are embedded in the substrate 401. In some implementations, the embedded frame 107 may be configured to be free of any electrical connection with an active component (e.g., transistor). In some implementations, the embedded frame 107 may be configured to not be electrically coupled to interconnects (e.g., interconnects that are configured to provide an electrical path for power and/or signals) of the substrate 401. The same benefits of the embedded frame 107 for the substrate 101, as described above may be applicable to the substrate 401. In some implementations, the embedded frame 107 may be touching an interconnect that is not configured to provide an electrical path for power and/or signals.
As shown in
In some implementations, additional frames and/or stiffeners may be implemented, and/or implemented as a standalone frame.
As shown in
As shown in
In some implementations, the frame 605 and/or the frame 607 may be configured to be free of any electrical connection with an active component (e.g., transistor). In some implementations, the frame 605 and/or the frame 607 may be configured to not be electrically coupled to interconnects (e.g., interconnects that are configured to provide an electrical path for power and/or signals) of the substrate 101. In some implementations, the frame 605 and/or the frame 607 may be touching an interconnect that is not configured to provide an electrical path for power and/or signals.
The frame 605 and/or the frame 607 may be made of a similar material and/or composition as the embedded frame 107. However, different implementations may use different materials and/or composition for the frame 605 and/or the frame 607.
As mentioned above, the embedded frame 107 helps stiffen the substrate and/or the package, which helps reduce and/or minimize warpage that may occur in the substrate and/or the package.
An integrated device may include a die (e.g., semiconductor bare die). The integrated device may include a power management integrated circuit (PMIC). The integrated device may include an application processor. The integrated device may include a modem. The integrated device may include a radio frequency (RF) device, a passive device, a filter, a capacitor, an inductor, an antenna, a transmitter, a receiver, a gallium arsenide (GaAs) based integrated device, a surface acoustic wave (SAW) filter, a bulk acoustic wave (BAW) filter, a light emitting diode (LED) integrated device, a silicon (Si) based integrated device, a silicon carbide (SiC) based integrated device, a memory, power management processor, and/or combinations thereof. An integrated device may include at least one electronic circuit (e.g., first electronic circuit, second electronic circuit, etc.,). An integrated device may include transistors. An integrated device may be an example of an electrical component and/or electrical device. In some implementations, an integrated device may include a chiplet. A chiplet may be fabricated using a process that provides better yields compared to other processes that are used to fabricate other types of integrated devices, which can lower the overall cost of fabricating a chiplet. Different chiplets may have different sizes and/or shapes. Different chiplets may be configured to provide different functions. Different chiplets may have different interconnect densities (e.g., interconnects with different width and/or spacing). In some implementations, several chiplets may be used to perform the functionalities of one or more chips (e.g., one more integrated devices). Using several chiplets that perform several functions may reduce the overall cost of a package relative to using a single chip to perform all of the functions of a package.
Different implementations may use different materials, different compositions and/or different designs for an embedded frame.
Stage 1 of
Stage 2 illustrates a state after a design of the embedded frame 107 is formed from the sheet 1207. A stamping process may be used to form the embedded frame 107 from the sheet 1207. In some implementations, a laser may be used to cut the design of the embedded frame 107.
Exemplary Sequence for Fabricating a Substrate with an Embedded Frame
It should be noted that the sequence of
Stage 1, as shown in
Stage 2 illustrates a state after the sheet 1207 is cut and/or defined to form the design of the embedded frame 107. In some implementations, a stamping process may be used to define the embedded frame 107.
Stage 3 illustrates a state after a dielectric layer 201 is formed around the embedded frame 107. The dielectric layer 201 touches the embedded frame 107. The dielectric layer 201 at least partially surrounds the embedded frame 107. A deposition process and/or a lamination process may be used to form the dielectric layer 201. The dielectric layer 201 may represent one or more dielectric layers.
Stage 4 illustrates a state after a plurality of cavities 1310 are formed in the dielectric layer 201. The plurality of cavities 1310 may extend through the dielectric layer 201. A laser process (e.g., laser ablation) may be used to form the plurality of cavities 1310. However, different implementations may use different processes to form the plurality of cavities 1310.
Stage 5, as shown in
Stage 6 illustrates a state after a dielectric layer 203 and the dielectric layer 204 are formed. The dielectric layer 203 may include a plurality of cavities 1331. The dielectric layer 204 may include a plurality of cavities 1341. The dielectric layer 203 may be formed and coupled to a first surface (e.g., top surface) of the dielectric layer 201. The dielectric layer 204 may be formed and coupled to a second surface (e.g., bottom surface) of the dielectric layer 201. In some implementations, the dielectric layer 203 and/or the dielectric layer 204 may include a polymer. In some implementations, the dielectric layer 203 and/or the dielectric layer 204 may include Ajinomoto Build-up Film (ABF). In some implementations, the dielectric layer 203 and/or the dielectric layer 204 may include prepreg. The dielectric layer 203 and/or the dielectric layer 204 may be the same or different from the dielectric layer 201.
The plurality of cavities 1331 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 203. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1331 in the dielectric layer 203. However, different implementations may use different processes to form the plurality of cavities 1331. The plurality of cavities 1341 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 204. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1341 in the dielectric layer 204. However, different implementations may use different processes to form the plurality of cavities 1341.
Stage 7, as shown in
Stage 8 illustrates a state after a dielectric layer 205 and the dielectric layer 206 are formed. The dielectric layer 205 may include a plurality of cavities 1351. The dielectric layer 206 may include a plurality of cavities 1361. The dielectric layer 205 may be formed and coupled to a first surface (e.g., top surface) of the dielectric layer 203. The dielectric layer 206 may be formed and coupled to a second surface (e.g., bottom surface) of the dielectric layer 204. In some implementations, the dielectric layer 205 and/or the dielectric layer 206 may include a polymer. In some implementations, the dielectric layer 205 and/or the dielectric layer 206 may include Ajinomoto Build-up Film (ABF). In some implementations, the dielectric layer 205 and/or the dielectric layer 206 may include prepreg. The dielectric layer 205 and/or the dielectric layer 206 may be the same or different from the dielectric layer 203 and/or the dielectric layer 204.
The plurality of cavities 1351 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 205. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1351 in the dielectric layer 205. However, different implementations may use different processes to form the plurality of cavities 1351. The plurality of cavities 1361 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 206. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1361 in the dielectric layer 206. However, different implementations may use different processes to form the plurality of cavities 1361.
Stage 9, as shown in
Stage 10, as shown in
Stage 10 also illustrates and describes a state after a solder resist layer 209 is formed and patterned. The solder resist layer 209 may be coupled to the dielectric layer 1301. A deposition, a lamination, an exposure, a development and/or an etching process may be used to form and pattern the solder resist layer 209.
Exemplary Flow Diagram of a Method for Fabricating a Substrate with an Embedded Frame
In some implementations, fabricating a substrate includes several processes.
It should be noted that the method 1400 of
The method provides (at 1405) a frame. The frame may be formed from a sheet that has been cut and/or defined. Stage 1 of
The method forms (at 1410) a first dielectric layer around the frame, including above a first surface of the first dielectric layer, below a second surface of the first dielectric layer and/or around the lateral surface(s) of the frame. Stage 3 of
The method forms (at 1415) a plurality of cavities in the first dielectric layer. Stage 4 of
The method forms (at 1420) a plurality of via interconnects in the plurality of cavities of the first dielectric layer and a plurality of interconnects on surfaces of the first dielectric layer. Stage 5 of
The method forms (at 1425) several build up layers that include at least on dielectric layer and a plurality of interconnects. Stage 6 of
The plurality of cavities 1331 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 203. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1331 in the dielectric layer 203. However, different implementations may use different processes to form the plurality of cavities 1331. The plurality of cavities 1341 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 204. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1341 in the dielectric layer 204. However, different implementations may use different processes to form the plurality of cavities 1341.
Stage 7 of
Stage 8 of 13C, illustrates and describes an example of a state after a dielectric layer 205 and the dielectric layer 206 are formed. The dielectric layer 205 may include a plurality of cavities 1351. The dielectric layer 206 may include a plurality of cavities 1361. The dielectric layer 205 may be formed and coupled to a first surface (e.g., top surface) of the dielectric layer 203. The dielectric layer 206 may be formed and coupled to a second surface (e.g., bottom surface) of the dielectric layer 204. In some implementations, the dielectric layer 205 and/or the dielectric layer 206 may include a polymer. In some implementations, the dielectric layer 205 and/or the dielectric layer 206 may include Ajinomoto Build-up Film (ABF). In some implementations, the dielectric layer 205 and/or the dielectric layer 206 may include prepreg. The dielectric layer 205 and/or the dielectric layer 206 may be the same or different from the dielectric layer 203 and/or the dielectric layer 204.
The plurality of cavities 1351 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 205. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1351 in the dielectric layer 205. However, different implementations may use different processes to form the plurality of cavities 1351. The plurality of cavities 1361 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 206. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1361 in the dielectric layer 206. However, different implementations may use different processes to form the plurality of cavities 1361.
Stage 9 of
The method forms (at 1430) at least one solder resist layer. Stage 10 of
Stage 10 also illustrates and describes an example of a state after a solder resist layer 209 is formed and patterned. The solder resist layer 209 may be coupled to the dielectric layer 1301. A deposition, a lamination, an exposure, a development and/or an etching process may be used to form and pattern the solder resist layer 209.
The method couples (at 1435) a plurality of solder interconnects to interconnects of the substrate. In some implementations, a plurality of solder interconnects may be coupled to interconnects of the substrate 101 through openings in the solder resist layer 207 and/or openings in the solder resist layer 209.
Once the substrate (e.g., 101) is provided and/or fabricated, an integrated device (e.g., 103) may be coupled to the substrate through at least a plurality of bump interconnects (e.g., 130). The substrate and the integrated device may then be coupled to a board (e.g., 105) through a plurality of solder interconnects (e.g., 140).
Exemplary Sequence for Fabricating a Substrate with an Embedded Frame
It should be noted that the sequence of
Stage 1, as shown in
Stage 2 illustrates a state after a plurality of cavities 1510 are formed in the core layer 501. The plurality of cavities 1510 may be formed through the seed layer 1501 and the seed layer 1503. A laser process (e.g., laser ablation) may be used to form the plurality of cavities 1510. However, different implementations may use different processes to form the plurality of cavities 1510. The plurality of cavities 1500 may extend through the thickness of the core layer 501, the seed layer 1501 and/or the seed layer 1503.
Stage 3 illustrates a state after a plurality of via interconnects 510, a plurality of interconnects 1512 and a plurality of interconnects 1514. The plurality of via interconnects 510 may be formed in the plurality of cavities 1510. The plurality of interconnects 1512 may be formed and coupled to a first surface of the core layer 501. In some implementations, part of the seed layer 1501 may be part of the plurality of interconnects 1512. The plurality of interconnects 1512 may be coupled to the plurality of via interconnects 510. The plurality of interconnects 1514 may be formed and coupled to a second surface of the core layer 501. In some implementations, part of the seed layer 1503 may be part of the plurality of interconnects 1514. The plurality of interconnects 814 may be coupled to the plurality of via interconnects 510. A plating process and a patterning process may be used to form the plurality of via interconnects 510, the plurality of interconnects 1512 and/or the plurality of interconnects 1514.
Stage 4 illustrates a state after a cavity 1520 is formed in the core layer 501. The cavity 1520 may be formed through the core layer 501. A laser process (e.g., laser ablation) may be used to form the cavity 1520. However, different implementations may use different processes to form the cavity 1520. The cavity 1520 may extend through the thickness of the core layer 501.
Stage 5, as shown in
Stage 6 illustrates a state after an embedded frame 107, is coupled to the tape 1530. The embedded frame 107 is coupled to the tape 1530 through the cavity 1520 in the core layer 501. The embedded frame 107 is located at least partially in the cavity 1520 of the core layer 501.
Stage 7 illustrates a state after a dielectric layer 1540 is formed. The dielectric layer 1540 fills at least part of the cavity 1520 of the core layer 501. The dielectric layer 1540 is coupled to and touching the embedded frame 107 and the core layer 501. The dielectric layer 1540 may be coupled to a second surface (e.g., bottom surface) of the core layer 501. A deposition process and/or a lamination process may be used to form the dielectric layer 1540. In some implementations, the dielectric layer 1540 may include a polymer. In some implementations, the dielectric layer 1540 may include prepreg.
Stage 8, as shown in
Stage 9 illustrates a state after the dielectric layer 1550 is formed and coupled to the core layer 501 and the embedded frame 107. The dielectric layer 1550 may fill part of the cavity 1520 in the core layer 501 that is not occupied by the embedded frame 107 and/or the dielectric layer 1540. The dielectric layer 1550 may be coupled to the embedded frame 107 and a first surface (e.g., top surface) of the core layer 501. A deposition process and/or a lamination process may be used to form the dielectric layer 1550. In some implementations, the dielectric layer 1550 may include a polymer. In some implementations, the dielectric layer 1550 may include prepreg. The dielectric layer 1550 may be the same material as the dielectric layer 1540. The dielectric layer 1540 and the dielectric layer 1550 may be represented as the dielectric layer 502.
Stage 10 illustrates a state after a plurality of cavities 1551 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 502. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1551 in the dielectric layer 502. However, different implementations may use different processes to form the plurality of cavities 1551.
Stage 10 also illustrates a state after a plurality of cavities 1553 are formed through another surface (e.g., second surface, bottom surface) of the dielectric layer 502. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1553 in the dielectric layer 502. However, different implementations may use different processes to form the plurality of cavities 1553.
Stage 11, as shown in
Stage 12 illustrates a state after a dielectric layer 503 and the dielectric layer 504 are formed. The dielectric layer 503 may include a plurality of cavities 1561. The dielectric layer 504 may include a plurality of cavities 1563. The dielectric layer 503 may be formed and coupled to a first surface (e.g., top surface) of the dielectric layer 502. The dielectric layer 504 may be formed and coupled to a second surface (e.g., bottom surface) of the dielectric layer 502. In some implementations, the dielectric layer 503 and/or the dielectric layer 504 may include a polymer. In some implementations, the dielectric layer 503 and/or the dielectric layer 504 may include Ajinomoto Build-up Film (ABF). In some implementations, the dielectric layer 503 and/or the dielectric layer 504 may include prepreg. The dielectric layer 503 and/or the dielectric layer 504 may be the same or different from the dielectric layer 502.
The plurality of cavities 1561 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 503. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1561 in the dielectric layer 503. However, different implementations may use different processes to form the plurality of cavities 1561. The plurality of cavities 1563 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 504. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1563 in the dielectric layer 504. However, different implementations may use different processes to form the plurality of cavities 1563.
Stage 13, as shown in
Stage 14 illustrates a state after a dielectric layer 505 and the dielectric layer 506 are formed. The dielectric layer 505 may include a plurality of cavities 1571. The dielectric layer 506 may include a plurality of cavities 1573. The dielectric layer 505 may be formed and coupled to a first surface (e.g., top surface) of the dielectric layer 503. The dielectric layer 506 may be formed and coupled to a second surface (e.g., bottom surface) of the dielectric layer 504. In some implementations, the dielectric layer 505 and/or the dielectric layer 506 may include a polymer. In some implementations, the dielectric layer 505 and/or the dielectric layer 506 may include Ajinomoto Build-up Film (ABF). In some implementations, the dielectric layer 505 and/or the dielectric layer 506 may include prepreg. The dielectric layer 505 and/or the dielectric layer 506 may be the same or different from the dielectric layer 502, the dielectric layer 503 and/or the dielectric layer 504.
The plurality of cavities 1571 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 505. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1571 in the dielectric layer 505. However, different implementations may use different processes to form the plurality of cavities 1571. The plurality of cavities 1573 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 506. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1573 in the dielectric layer 506. However, different implementations may use different processes to form the plurality of cavities 1573.
Stage 15, as shown in
Stage 16, as shown in
Stage 16 also illustrates and describes a state after a solder resist layer 209 is formed and patterned. The solder resist layer 209 may be coupled to the dielectric layer 1590. A deposition, a lamination, an exposure, a development and/or an etching process may be used to form and pattern the solder resist layer 209.
Exemplary Flow Diagram of a Method for Fabricating a Substrate with an Embedded Frame
In some implementations, fabricating a substrate includes several processes.
It should be noted that the method 1600 of
The method provides (at 1605) a core layer with seed layers and forms cavities in the core layer. Stage 1 of
The method forms (at 1610) interconnects in the cavities of the core layer and on surfaces of the core layer. Stage 3 of
The method forms (at 1615) a cavity in the core layer. Stage 4 of
The method couples (at 1620) the core layer to a tape and couples an embedded frame to the tape through the cavity in the core layer. Stage 5 of
Stage 6 of
The method forms (at 1625) a dielectric layer and detapes. Stage 7 of
Stage 8 of
The method forms (at 1630) at least one build up layer, which includes at least one dielectric layer and a plurality of interconnects. Stage 9 of
Stage 9 of
Stage 10 of
Stage 10 also illustrates and describes an example of a state after a plurality of cavities 1553 are formed through another surface (e.g., second surface, bottom surface) of the dielectric layer 502. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1553 in the dielectric layer 502. However, different implementations may use different processes to form the plurality of cavities 1553.
Stage 11 of
Stage 12 of
The plurality of cavities 1561 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 503. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1561 in the dielectric layer 503. However, different implementations may use different processes to form the plurality of cavities 1561. The plurality of cavities 1563 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 504. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1563 in the dielectric layer 504. However, different implementations may use different processes to form the plurality of cavities 1563.
Stage 13 of
Stage 14 of
The plurality of cavities 1571 are formed through a surface (e.g., first surface, top surface) of the dielectric layer 505. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1571 in the dielectric layer 505. However, different implementations may use different processes to form the plurality of cavities 1571. The plurality of cavities 1573 are formed through a surface (e.g., second surface, bottom surface) of the dielectric layer 506. A laser process (e.g., laser ablation process) may be used to form the plurality of cavities 1573 in the dielectric layer 506. However, different implementations may use different processes to form the plurality of cavities 1573.
Stage 15 of
The method forms (at 1635) at least one solder resist layer. Stage 16 of
Stage 16 also illustrates and describes an example of a state after a solder resist layer 209 is formed and patterned. The solder resist layer 209 may be coupled to the dielectric layer 1590. A deposition, a lamination, an exposure, a development and/or an etching process may be used to form and pattern the solder resist layer 209.
The method couples (at 1640) a plurality of solder interconnects to interconnects of the substrate. In some implementations, a plurality of solder interconnects may be coupled to interconnects of the substrate 401 through openings in the solder resist layer 207 and/or openings in the solder resist layer 209.
Once the substrate (e.g., 401) is provided and/or fabricated, an integrated device (e.g., 103) may be coupled to the substrate through at least a plurality of bump interconnects (e.g., 130). The substrate and the integrated device may then be coupled to a board (e.g., 105) through a plurality of solder interconnects (e.g., 140).
Exemplary Sequence for Fabricating a Substrate with an Embedded Frame
It should be noted that the sequence of
Stage 1, as shown in
Stage 2 illustrates a state after the plurality of solder interconnects 140 and a frame 607 are coupled to the substrate 101. A solder reflow process may be used to couple the plurality of solder interconnects 140 to the substrate. An adhesive or a solder may be used to couple the frame 607 to the substrate 101. The plurality of solder interconnects 140 and the frame 607 may be coupled to a bottom side and/or a bottom surface of the substrate 101. The bottom surface of the substrate 101 may be a landside surface of the substrate 101.
Stage 3 illustrates a state after the integrated device 103 is coupled to the substrate 101 through at least a plurality of bump interconnects 130. A plurality of bump interconnects 130 may include a plurality of pillar interconnects and/or a plurality of solder interconnects. A solder reflow process may be used to couple the integrated device 103 to the substrate 101. Stage 3 also illustrates a frame 605 that is coupled to a surface of the substrate 101. An adhesive or a solder may be used to couple the frame 605 to the substrate 101. The plurality of bump interconnects 130 and the frame 605 may be coupled to a top side and/or a top surface of the substrate 101. The top surface of the substrate 101 may be a die side surface of the substrate 101. Stage 3 may illustrate an example of the package 600 that includes a substrate 101, an embedded frame 107, a frame 605 and a frame 607. The embedded frame 107, the frame 605 and/or the frame 607 are configured as stiffeners to help strengthen the substrate 101 and/or the package 600.
One or more of the components, processes, features, and/or functions illustrated in
It is noted that the figures in the disclosure may represent actual representations and/or conceptual representations of various parts, components, objects, devices, packages, integrated devices, integrated circuits, and/or transistors. In some instances, the figures may not be to scale. In some instances, for purpose of clarity, not all components and/or parts may be shown. In some instances, the position, the location, the sizes, and/or the shapes of various parts and/or components in the figures may be exemplary. In some implementations, various components and/or parts in the figures may be optional.
The word “exemplary” is used herein to mean “serving as an example, instance, or illustration.” Any implementation or aspect described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other aspects of the disclosure. Likewise, the term “aspects” does not require that all aspects of the disclosure include the discussed feature, advantage or mode of operation. The term “coupled” is used herein to refer to the direct or indirect coupling (e.g., mechanical coupling) between two objects. For example, if object A physically touches object B, and object B touches object C, then objects A and C may still be considered coupled to one another-even if they do not directly physically touch each other. The term “electrically coupled” may mean that two objects are directly or indirectly coupled together such that an electrical current (e.g., signal, power, ground) may travel between the two objects. Two objects that are electrically coupled may or may not have an electrical current traveling between the two objects. The use of the terms “first”, “second”, “third” and “fourth” (and/or anything above fourth) is arbitrary. Any of the components described may be the first component, the second component, the third component or the fourth component. For example, a component that is referred to a second component, may be the first component, the second component, the third component or the fourth component. The term “encapsulating” means that the object may partially encapsulate or completely encapsulate another object. A first component that is “located” in a second component may mean that the first component is “partially located” in the second component or “completely located” in the second component. A first component that is “embedded” in a second component may mean that the first component is “partially embedded” in the second component or “completely embedded” in the second component. The terms “top” and “bottom” are arbitrary. A component that is located on top may be located over a component that is located on a bottom. A top component may be considered a bottom component, and vice versa. As described in the disclosure, a first component that is located “over” a second component may mean that the first component is located above or below the second component, depending on how a bottom or top is arbitrarily defined. In another example, a first component may be located over (e.g., above) a first surface of the second component, and a third component may be located over (e.g., below) a second surface of the second component, where the second surface is opposite to the first surface. It is further noted that the term “over” as used in the present application in the context of one component located over another component, may be used to mean a component that is on another component and/or in another component (e.g., on a surface of a component or embedded in a component). Thus, for example, a first component that is over the second component may mean that (1) the first component is over the second component, but not directly touching the second component, (2) the first component is on (e.g., on a surface of) the second component, and/or (3) the first component is in (e.g., embedded in) the second component. A first component that is located “in” a second component may be partially located in the second component or completely located in the second component. The term “about ‘value X’”, or “approximately value X”, as used in the disclosure means within 10 percent of the ‘value X’. For example, a value of about 1 or approximately 1, would mean a value in a range of 0.9-1.1.
In some implementations, an interconnect is an element or component of a device or package that allows or facilitates an electrical connection between two points, elements and/or components. In some implementations, an interconnect may include a trace, a via, a pad, a pillar, a metallization layer, a redistribution layer, and/or an under bump metallization (UBM) layer/interconnect. In some implementations, an interconnect may include an electrically conductive material that may be configured to provide an electrical path for a signal (e.g., a data signal), ground and/or power. An interconnect may include more than one element or component. An interconnect may be defined by one or more interconnects. An interconnect may include one or more metal layers. An interconnect may be part of a circuit. Different implementations may use different processes and/or sequences for forming the interconnects. In some implementations, a chemical vapor deposition (CVD) process, a physical vapor deposition (PVD) process, a sputtering process, a spray coating, and/or a plating process may be used to form the interconnects.
Also, it is noted that various disclosures contained herein may be described as a process that is depicted as a flowchart, a flow diagram, a structure diagram, or a block diagram. Although a flowchart may describe the operations as a sequential process, many of the operations can be performed in parallel or concurrently. In addition, the order of the operations may be re-arranged. A process is terminated when its operations are completed.
In the following, further examples are described to facilitate the understanding of the disclosure.
Aspect 1: A package comprising an integrated device; and a substrate coupled to the integrated device through at least a plurality of solder interconnects. The substrate comprises at least one dielectric layer; a frame at least partially located in the at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer.
Aspect 2: The package of aspect 1, wherein the substrate includes a core layer, wherein the frame is surrounded at least partially by the core layer.
Aspect 3: The package of aspect 2, wherein the frame touches the at least one dielectric layer.
Aspect 4: The package of aspects 2 through 3, wherein the core layer includes a cavity, and wherein the frame is located at least partially in the cavity of the core layer.
Aspect 5: The package of aspect 4, wherein at least part of the cavity of the core layer is occupied by the at least one dielectric layer.
Aspect 6: The package of aspects 1 through 5, wherein at least part of the frame is located along a periphery of the substrate.
Aspect 7: The package of aspects 1 through 6, wherein the frame includes a different material from the plurality of interconnects.
Aspect 8: The package of aspects 1 through 7, wherein the frame is an embedded frame, and wherein the package further comprises a second frame coupled to a surface of the substrate.
Aspect 9: The package of aspect 8, wherein the surface of the substrate is a landside surface of the substrate.
Aspect 10: The package of aspects 8 through 9, further comprising a second frame coupled to another surface of the substrate.
Aspect 11: A package comprising an integrated device; a substrate coupled to the integrated device through at least a first plurality of solder interconnects, wherein the integrated device is coupled to a first surface of the substrate. The substrate comprises at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer; a second plurality of solder interconnects coupled to a second surface of the substrate; and a first frame coupled to the second surface of the substrate.
Aspect 12: The package of aspect 11, further comprising a second frame coupled to the first surface of the substrate.
Aspect 13: The package of aspects 11 through 12, wherein the substrate includes a core layer.
Aspect 14: The package of aspects 11 through 13, wherein the substrate includes an embedded frame located in the substrate.
Aspect 15: The package of aspect 14, wherein the embedded frame touches the at least one dielectric layer.
Aspect 16: A substrate comprising at least one dielectric layer; a first frame at least partially located in the at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer.
Aspect 17: The substrate of aspect 16, wherein the substrate includes a core layer, wherein the first frame is surrounded at least partially by the core layer.
Aspect 18: The substrate of aspect 17, wherein the first frame touches the at least one dielectric layer.
Aspect 19: The substrate of aspects 17 through 18, wherein the core layer includes a cavity, and wherein the first frame is located at least partially in the cavity of the core layer.
Aspect 20: The substrate of aspect 19, wherein at least part of the cavity of the core layer is occupied by the at least one dielectric layer.
Aspect 21: A method for fabricating a package. The method provides a substrate comprising: at least one dielectric layer; a frame at least partially located in the at least one dielectric layer; and a plurality of interconnects located at least partially in the at least one dielectric layer. The method couples an integrated device to the substrate through at least a plurality of solder interconnects.
Aspect 22: The method of aspect 21, wherein the substrate includes a core layer, wherein the frame is surrounded at least partially by the core layer.
Aspect 23: The method of aspect 22, wherein the frame touches the at least one dielectric layer.
Aspect 24: The method of aspects 22 through 23, wherein the core layer includes a cavity, and wherein the frame is located at least partially in the cavity of the core layer.
Aspect 25: The method of aspect 24, wherein at least part of the cavity of the core layer is occupied by the at least one dielectric layer.
Aspect 26: The method of aspects 21 through 25, wherein at least part of the frame is located along a periphery of the substrate.
Aspect 27: The method of aspects 21 through 26, wherein the frame includes a different material from the plurality of interconnects.
Aspect 28: The method of aspects 21 through 27, wherein the frame is an embedded frame, and wherein the method further comprises coupling a second frame to a surface of the substrate.
Aspect 29: The method of aspect 28, wherein the surface of the substrate is a landside surface of the substrate.
Aspect 30: The method of aspects 28 through 29, further comprising coupling a third frame to another surface of the substrate.
The various features of the disclosure described herein can be implemented in different systems without departing from the disclosure. It should be noted that the foregoing aspects of the disclosure are merely examples and are not to be construed as limiting the disclosure. The description of the aspects of the present disclosure is intended to be illustrative, and not to limit the scope of the claims. As such, the present teachings can be readily applied to other types of apparatuses and many alternatives, modifications, and variations will be apparent to those skilled in the art.