Number | Date | Country | Kind |
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8-038100 | Feb 1996 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4775609 | McFarland | Oct 1988 | |
4869995 | Shirai et al. | Sep 1989 | |
5015559 | Ogawa | May 1991 | |
5278029 | Shirai et al. | Jan 1994 |
Number | Date | Country |
---|---|---|
0 515 212 | Nov 1992 | EPX |
0 519 128 | Dec 1992 | EPX |
0 691 674 | Jan 1996 | EPX |
Entry |
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Shirai, M. et al, "Photosensitive polymers bearing imino oxysulfonyl groups, A water soluble positive-type photoresist.", Die Makromolekulare Chemie; Macromolecular Chemistry and Physics, vol. 90, No. 9, Sep. 1989, pp. 2099-2107. |
Shirai et al, 114:63167, Chemical Abstracts, American Chemical Society, Columbus, Ohio, Abstract of J. Appl. Polym. Sci. (1990) vol. 41, No. 9-10, pp. 2527-2532. |