Number | Date | Country | Kind |
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9-036190 | Feb 1997 | JPX |
Number | Name | Date | Kind |
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5710620 | Taniguchi | Jan 1998 |
Number | Date | Country |
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57-62052 | Apr 1982 | JPX |
62-67514 | Mar 1987 | JPX |
2166719 | Jun 1990 | JPX |
2256985 | Oct 1990 | JPX |
697040 | Apr 1994 | JPX |
811409 | May 1996 | JPX |
Entry |
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Effect of Lens Aberration on Hole Pattern Fabrication Using Halftone Phase-Shifting Masks; Akihiro Otaka et al.; Digest of Papers Photomask Japan 1997. |