Number | Date | Country | Kind |
---|---|---|---|
4-326433 | Dec 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4360586 | Flanders et al. | Nov 1982 | |
4890309 | Smith et al. | Dec 1989 | |
5328807 | Tanaka et al. | Jul 1994 |
Number | Date | Country |
---|---|---|
62-50811 | Apr 1982 | JPX |
144453 | Jun 1991 | JPX |
269532 | Dec 1991 | JPX |
4-136854 | May 1992 | JPX |
Entry |
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Journal of Vacuum Science Technology, 16(6), Nov./Dec. 1979, "Spatial period division--A new technique for exposing submicrometer-line width periodic and quasiperiodic patterns", Flanders et al, pp. 1949-1952. |