Claims
- 1. A method for the formation of a patterned resist layer on the surface of a substrate which comprises the steps of:
- (A) exposing, pattern-wise to actinic rays through a phase shift photomask, the photoresist layer of a photoresist laminate comprising
- (a) a substrate;
- (b) an anti-reflection coating layer comprising, as a uniform mixture, an ultraviolet absorbing compound and either one or both of a crosslinking agent and a binder resin, said anti-reflection coating layer being formed on one surface of the substrate; and
- (c) a photoresist layer formed on the anti-reflection coating layer from a negative-working chemical-sensitization photoresist composition comprising, as a uniform mixture:
- (1) a film-forming resinous ingredient which is an alkali-soluble resin having phenolic hydroxyl groups or a resin having phenolic hydroxyl groups insolubilized in an alkali by substitution for a part of the hydroxyl groups by solubility-reducing substituent groups having no reactivity with an acid;
- (2) an oximesulfonate compound as an acid-generating agent; and
- (3) a crosslinkable compound;
- (B) subjecting the photoresist layer to a heat treatment;
- (C) subjecting the photoresist layer to a development treatment to dissolve away the photoresist layer in the areas unexposed to actinic rays in step (A) to pattern-wise expose the anti-reflection coating layer in the areas unexposed to the actinic rays leaving a patterned resist layer in the areas exposed to actinic rays; and
- (D) removing the anti-reflection coating layer exposed pattern-wise by dry etching with the patterned photoresist layer as an etching mask.
Priority Claims (1)
Number |
Date |
Country |
Kind |
8-239590 |
Sep 1996 |
JPX |
|
Parent Case Info
This is a divisional of Ser. No. 08/924,260, filed Sep. 5, 1997, U.S. Pat. No. 5,925,495.
US Referenced Citations (10)
Foreign Referenced Citations (7)
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0 044 115 |
Jan 1982 |
EPX |
0 241 423 |
Oct 1987 |
EPX |
0 361 907 |
Apr 1990 |
EPX |
635480 |
Jan 1995 |
EPX |
0 768 572 |
Apr 1997 |
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0 780 729 |
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8-87115 |
Apr 1996 |
JPX |
Divisions (1)
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Number |
Date |
Country |
Parent |
924260 |
Sep 1997 |
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