The disclosure pertains to a gas injection system for a plasma reactor employed in processing a workpiece such as a semiconductor wafer.
Control of process gas distribution in the chamber of a plasma reactor affects process control of etch rate distribution or deposition rate distribution on a workpiece during plasma processing. A tunable gas injection nozzle mounted on the chamber ceiling may have different injection slits directed to different zones, such as a center zone and a side zone. Separate gas inputs may feed the different injection slits, and separate flow rate control may be provided for each gas input. Each gas input may feed different portions of the corresponding injection slit through different gas flow paths. It is desirable that the different gas flow paths from a particular gas input be of equal lengths, for the sake of uniformity. However, it has not seemed possible to make the gas input-to-nozzle path lengths equal for all inputs and nozzles, leading to non-uniformities in gas distribution.
An annular lid plate in a gas delivery system for a plasma reactor chamber with a gas nozzle of inner and outer gas injection passages. The annular lid plate defines a central opening and comprises: (a) first and second pluralities of gas outlets coupled to respective ones of the inner and outer gas injection passages, the gas outlets in each of the first and second pluralities of gas outlets being spaced apart by a first arc length, (b) a gas delivery block comprising first and second gas supply passages and (c) first and second pluralities of gas distribution channels in respective upper and lower levels. Each of the first and second pluralities of gas distribution channels comprises: (a) an arcuate gas delivery channel having a pair of ends connected to a corresponding pair of the gas outlets, and (b) an arcuate gas supply channel comprising an input end connected to a corresponding one of the first and second gas supply passages, and an output end coupled to a middle zone of the arcuate gas delivery channel.
In an embodiment, the gas delivery block is disposed at a location that is offset from the output end of each of the gas supply channels by a second arc length such that the gas supply channels of the first and second pluralities of gas distribution channels are of the same length.
In an embodiment, the gas outlets of the first and second pluralities of gas outlets are distributed with respect to a circumference of the annular lid plate, and the first plurality of gas outlet alternates with the second plurality of gas outlets along the circumference.
In a related embodiment, the first plurality of gas outlets comprises a first pair of gas outlets and the arc length corresponds to a half circle, and the second plurality of gas outlets comprises a second pair of gas outlets offset from the first pair of gas outlets by a quarter circle.
In a further related embodiment, the gas delivery block is disposed at a location that is offset from the output end of each of the gas supply channels by an arc length of a quarter circle.
In one embodiment, each of the first and second pluralities of gas distribution channels further comprises a flow transition element connected between the output end of the gas supply channel and the middle zone of the gas delivery channel. The flow transition element comprises: (a) a radial transition conduit, (b) an axial input conduit coupled between the output end of the gas supply channel and one end of the radial transition conduit, and (c) an axial output conduit connected between the middle zone of the gas feed channel and the other end of the radial transition conduit.
In an embodiment, the axial input conduit meets an opening in the output end of the gas supply channel, and the axial output conduit meets an opening in the middle zone of the gas feed channel.
In a further embodiment, the gas nozzle comprises: (a) a first plurality of radial elevated feed lines having respective input ends coupled to respective ones of the first plurality of gas outlets and respective output ends overlying the inner gas injection passage, (b) a second plurality of radial elevated feed lines having respective input ends coupled to respective ones of the second plurality of gas outlets and respective output ends overlying the inner gas injection passage, (c) a first plurality of axial drop lines connected between the respective output ends and the inner gas injection passages, (d) a second plurality of axial drop lines connected between the respective output ends and the outer gas injection passages.
In a related embodiment, (a) the first plurality of axial drop lines intersect the inner gas injection passage at respective drop points evenly spaced along the inner gas injection passage, and (b) the second plurality of axial drop lines intersect the outer gas injection passage at respective drop points evenly spaced along the outer gas injection passage.
In a related embodiment, the gas nozzle further comprises: (a) a first plurality of supply ports evenly spaced around a periphery of the gas nozzle and connected to respective ones of the first plurality of gas outlets, (b) a second plurality of supply ports evenly spaced around a periphery of the gas nozzle and connected to respective ones of the second plurality of gas outlets, and offset from the first plurality of supply ports, (c) wherein the first plurality of supply ports are connected to respective pairs of the first plurality of radial elevated feed lines, and the second plurality of supply ports are connected to respective pairs of the second plurality of radial elevated feed lines.
In related embodiment further comprises: (a) a first plurality of radial gas delivery conduits connected between respective ones of the first plurality of gas outlets and the first plurality of supply ports, and (b) a second plurality of radial gas delivery conduits connected between respective ones of the second plurality of gas outlets and the second plurality of supply ports.
In accordance with a related aspect, an annular lid plate for a plasma reactor comprises: (a) first and second pluralities of gas outlets, the gas outlets in each of the first and second pluralities of gas outlets being spaced apart by a first arc length, (b) a gas delivery block comprising first and second gas supply passages, (c) first and second pluralities of gas distribution channels in respective upper and lower levels. Each of the first and second pluralities of gas distribution channels comprises: (a) an arcuate gas delivery channel having a pair of ends connected to a corresponding pair of the gas outlets, and (b) an arcuate gas supply channel comprising an input end connected to a corresponding one of the first and second gas supply passages, and an output end coupled to a middle zone of the arcuate gas delivery channel.
In one embodiment of the annular lid plate, the gas delivery block is disposed at a location that is offset from the output end of each of the gas supply channels by a second arc length such that the gas supply channels of the first and second pluralities of gas delivery channels are of the same length.
In a one embodiment of the annular lid plate, the gas outlets of the first and second pluralities of gas outlets are distributed with respect to a circumference of the annular lid plate, and wherein the first plurality of gas outlet alternates with the second plurality of gas outlets along the circumference.
In a related embodiment of the annular lid plate, the first plurality of gas outlets comprises a first pair of gas outlets and the arc length corresponds to a half circle, and the second plurality of gas outlets comprises a second pair of gas outlets offset from the first pair of gas outlets by a quarter circle.
In an embodiment of the annular lid plate, the gas delivery block is disposed at a location that is offset from the output end of each of the gas supply channels by an arc length of a quarter circle.
In a further embodiment, of the annular lid plate, each of the first and second pluralities of gas distribution channels further comprises a flow transition element connected between the output end of the gas supply channel and the middle zone of the gas delivery channel. In one embodiment, the flow transition element comprises: (a) a radial transition conduit, (b) an axial input conduit coupled between the output end of the gas supply channel and one end of the radial transition conduit, and (c) an axial output conduit connected between the middle zone of the gas feed channel and the other end of the radial transition conduit.
So that the manner in which the exemplary embodiments of the present invention are attained can be understood in detail, a more detailed description of the invention, briefly summarized above, may be obtained by reference to the embodiments thereof which are illustrated in the appended drawings. It is to be appreciated that certain well known processes are not discussed herein in order to not obscure the invention.
To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. It is to be noted, however, that the appended drawings illustrate only exemplary embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
The problem to be solved involves gas delivery to injectors through gas channels formed in a lid plate of the chamber. The lid plate in some designs is annular and defines a circular center opening framing a dielectric window through which RF power is coupled into the chamber. All the gas inputs are adjacent one another at a gas supply block, complicating the gas delivery. In order that all the gas flow paths from each gas input be of equal lengths, it has been necessary for the gas channels to provide recursive paths that reverse direction abruptly. This introduces turbulence, with effects that hamper process control. Moreover, the recursive gas channels occupy a large area, requiring the annular lid plate to be of a large area, which limits the size of the dielectric window relative to the chamber, a significant problem. Further, depending upon the location of the gas supply block, the path lengths differ significantly.
The tunable gas nozzle has circular channels feeding its different injection slits. Gas feed to the tunable gas nozzle from each gas input is along a straight gas line, which must intersect the corresponding circular channel. However, the momentum of the gas fed to the circular channel is along a single direction, and therefore the gas flow from the straight-line path has a preference for a single rotational direction in the circular channel of the tunable gas nozzle. This leads to undesirable asymmetry and non-uniformity.
Embodiments described below provide gas distribution that is completely symmetrical, having uniform path lengths for all gas inputs, and having gas distribution channels without abrupt path reversals in the plane of channels, and occupying a smaller annular area. Further provided is a gas feed to the tunable gas injection nozzle that has minimal or no directional preference in the manner in which gas is introduced into the circular channels of the tunable gas injection nozzle.
Referring to
Process gas is received at a gas delivery block 124 and is distributed to different ports of the gas distribution hub 120 through upper and lower groups of gas distribution channels 130, 140 inside the annular lid plate 110. The upper group of gas distribution channels 130 (
Referring to
The gas delivery block 124 extends outwardly from a peripheral edge of the annular lid plate 110, and includes an upper gas inlet 162 connected to the upper group of gas distribution channels 130 and a lower gas inlet 164 connected to the lower group of gas distribution channels 140. The gas delivery block 124 is located along the circumference of the annular lid plate 110 at a 45 degree angular position relative to the adjacent radial gas delivery conduits 150 and 154.
The top view of
The upper group of gas distribution channels 130 referred to in
The upper group of gas distribution channels 130 further includes an arcuate gas feed channel 136 subtending 180 degrees of arc between a pair of ends 136-1, 136-2. The ends 136-1 and 136-2 include axial gas openings 137-1 and 137-2, that are coupled to radially outward ends 150-1 and 152-1 of the gas conduits 150 and 152, respectively, of
Referring to
The gas supply channel 136 has two halves on either side of the middle zone 136-3, in which gas flow is in opposite rotational directions. A problem solved by the flow transition element 134 is how to evenly distribute gas flow in the two halves of the gas distribution channel 136 given the counter-clockwise direction of gas flow in the gas supply channel 132. The axial input port 172 transforms the counter clockwise momentum distribution of the gas flow from the gas supply channel end 132-2 to an axial distribution, removing any preference for a particular rotational direction. The axial gas output port 174 enables the axial gas flow momentum to be evenly split between the opposite rotational directions in the two halves of the gas distribution channel 136. In one embodiment, this provides uniform gas distribution.
The lower group of gas distribution channels 140 referred to in
The lower group of gas distribution channels 140 further includes an arcuate gas feed channel 236 subtending 180 degrees of arc between a pair of ends 236-1 and 236-2. The ends 236-1 and 236-2 are coupled to axial gas passages 237-1 and 237-2. The axial gas passages 237-1 and 237-2 extend to top surface 110b of the annular lid plate 110, and are visible in the top view of
Referring to
As shown in
The disposition of the upper and lower groups of gas channels 130, 140 in different planes allows the gas channels to overlie one another, thereby reducing the annular area of the annular lid plate 110. This feature increases the diameter of the central opening 110a (
Referring now to
Gas flow to the gas supply port 120-1 is split between a pair of radial elevated feed lines 302 and 306 that feed axial drop lines 304 and 308 respectively. The radially inward ends of the radial elevated feed lines 302 and 306 are elevated above the top of the annular outer gas injection passage 118. Gas flow to the gas supply port 120-2 is split between a pair of radial elevated feed lines 310 and 314 that feed axial drop lines 312 and 316 respectively. The radially inward ends of the radial elevated feed lines 310 and 314 are elevated above the top of the annular outer gas injection passage 118.
The four axial drop lines 304, 308, 312 and 316 terminate at four uniformly spaced locations along the annular outer gas injection passage 118. The four axial drop lines 304, 308, 312 and 316 are elongate enclosed hollow lines. In one embodiment, each of the four axial drop lines 304, 308, 312 and 316 is cylindrical and defines a hollow center passage.
Gas flow to the gas supply port 120-3 is split between a pair of radial elevated feed lines 318 and 322 that feed axial drop lines 320 and 324 respectively. The radially inward ends of the radial elevated feed lines 318 and 322 are elevated above the top of the annular inner gas injection passage 116. Gas flow to the gas supply port 120-4 is split between a pair of radial elevated feed lines 326 and 330 that feed axial drop lines 328 and 332 respectively. The radially inward ends of the radial elevated feed lines 326 and 330 are elevated above the top of the annular inner gas injection passage 116. The four axial drop lines 320, 324, 328 and 332 terminate at four uniformly spaced locations along the annular inner gas injection passage 116. The four axial drop lines 320, 324, 328 and 332 are elongate enclosed hollow lines. In one embodiment, each of the four axial drop lines 320, 324, 328 and 332 is cylindrical and defines a hollow center passage.
A problem solved by the embodiment of
This problem is solved in one embodiment by the provision of the axial drop lines 304, 308, 312 and 316 to the annular outer gas injection passage 118 and the axial drop lines 320, 324, 328 and 332 to the annular inner gas injection passage 116. Each axial drop line transforms a distribution of gas flow momentum confined to a single direction (as received from an elevated gas feed line) to a distribution evenly divided between clockwise and counter clockwise directions at an injection point in the corresponding annular gas injection passage (116 or 118), for a more uniform gas flow distribution.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/US2014/014391 | 2/3/2014 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2014/149200 | 9/25/2014 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
5571366 | Ishii | Nov 1996 | A |
5620523 | Maeda et al. | Apr 1997 | A |
5792272 | Van Os et al. | Aug 1998 | A |
5897713 | Tomioka et al. | Apr 1999 | A |
5948704 | Benjamin et al. | Sep 1999 | A |
6024826 | Collins | Feb 2000 | A |
6051073 | Chu | Apr 2000 | A |
6083344 | Hanawa et al. | Jul 2000 | A |
6089182 | Hama | Jul 2000 | A |
6129808 | Wicker et al. | Oct 2000 | A |
6200412 | Kilgore et al. | Mar 2001 | B1 |
6326597 | Lubomirsky | Dec 2001 | B1 |
6367410 | Leahey | Apr 2002 | B1 |
6414648 | Holland | Jul 2002 | B1 |
6450117 | Murugeshi et al. | Sep 2002 | B1 |
6451161 | Jeng | Sep 2002 | B1 |
6518190 | Lill et al. | Feb 2003 | B1 |
6527911 | Yen et al. | Mar 2003 | B1 |
6899787 | Nakano | May 2005 | B2 |
7785417 | Ni et al. | Aug 2010 | B2 |
7832354 | Katz | Nov 2010 | B2 |
7976671 | Chandrachood et al. | Jul 2011 | B2 |
8017029 | Chandrachood et al. | Sep 2011 | B2 |
8025731 | Ni et al. | Sep 2011 | B2 |
8858754 | Horiguchi et al. | Oct 2014 | B2 |
8933628 | Banna et al. | Jan 2015 | B2 |
9017481 | Pettinger | Apr 2015 | B1 |
9076634 | Brown et al. | Jul 2015 | B2 |
9218944 | Chandrachood et al. | Dec 2015 | B2 |
9892908 | Pettinger | Feb 2018 | B2 |
20010019048 | Ose | Sep 2001 | A1 |
20020023896 | Tachino et al. | Feb 2002 | A1 |
20020038791 | Okumura et al. | Apr 2002 | A1 |
20020121345 | Chen | Sep 2002 | A1 |
20030213434 | Gondhalekar | Nov 2003 | A1 |
20040083971 | Holland et al. | May 2004 | A1 |
20040134611 | Kato | Jul 2004 | A1 |
20050178747 | Shibamoto | Aug 2005 | A1 |
20050178748 | Buchberger, Jr. et al. | Aug 2005 | A1 |
20050252885 | Tachino et al. | Nov 2005 | A1 |
20050257743 | Koshiishi et al. | Nov 2005 | A1 |
20070023145 | Bera et al. | Feb 2007 | A1 |
20090056629 | Katz | Mar 2009 | A1 |
20090057269 | Katz | Mar 2009 | A1 |
20090159213 | Bera et al. | Jun 2009 | A1 |
20090159425 | Liu et al. | Jun 2009 | A1 |
20090162262 | Bera et al. | Jun 2009 | A1 |
20090250169 | Carducci et al. | Oct 2009 | A1 |
20090272492 | Katz et al. | Nov 2009 | A1 |
20090294065 | Lai | Dec 2009 | A1 |
20100101728 | Iwasaki | Apr 2010 | A1 |
20100132615 | Kato et al. | Jun 2010 | A1 |
20110056626 | Brown | Mar 2011 | A1 |
20110094996 | Yamazawa et al. | Apr 2011 | A1 |
20110222038 | Yamashita et al. | Sep 2011 | A1 |
20110223334 | Yudovsky | Sep 2011 | A1 |
20120073756 | Yamazawa | Mar 2012 | A1 |
20120090990 | Cox | Apr 2012 | A1 |
20120248066 | Yamazawa | Oct 2012 | A1 |
20130256271 | Panagopoulos et al. | Oct 2013 | A1 |
20130278141 | Dorf et al. | Oct 2013 | A1 |
20130278142 | Dorf et al. | Oct 2013 | A1 |
20130284370 | Collins et al. | Oct 2013 | A1 |
20140020839 | Kenney | Jan 2014 | A1 |
20140237840 | Knyazik et al. | Aug 2014 | A1 |
20150068682 | Banna et al. | Mar 2015 | A1 |
20150087157 | Aubuchon et al. | Mar 2015 | A1 |
20150279621 | Brown et al. | Oct 2015 | A1 |
20150371826 | Rozenzon et al. | Dec 2015 | A1 |
20150371831 | Rozenzon et al. | Dec 2015 | A1 |
20160042917 | Chandrachood et al. | Feb 2016 | A1 |
20180211811 | Kenney | Jul 2018 | A1 |
20180218873 | Kenney | Aug 2018 | A1 |
Number | Date | Country |
---|---|---|
101604624 | Dec 2009 | CN |
102034666 | Apr 2011 | CN |
102204415 | Sep 2011 | CN |
11-514499 | Dec 1999 | JP |
2004-172622 | Jun 2004 | JP |
2004-200429 | Jul 2004 | JP |
2009-302324 | Dec 2009 | JP |
10-2004-0102300 | Dec 2004 | KR |
10-2009-0102257 | Sep 2009 | KR |
201006955 | Feb 2010 | TW |
WO 2008088110 | Jul 2008 | WO |
Entry |
---|
U.S. Appl. No. 13/966,614, filed Aug. 14, 2013, Carducci et al. |
U.S. Appl. No. 13/897,592, filed May 20, 2013, Kenney et al. |
U.S. Appl. No. 13/897,585, filed May 20, 2013, Kenney et al. |
U.S. Appl. No. 13/666,245, filed Nov. 1, 2012, Nguyen et al. |
U.S. Appl. No. 13/666,224, filed Nov. 1, 2012, Nguyen et al. |
U.S. Appl. No. 13/629,267, filed Sep. 27, 2012, Carducci et al. |
U.S. Appl. No. 14/319,089, filed Jun. 30, 2014, Carducci et al. |
U.S. Appl. No. 14/294,431, filed Jun. 3, 2014, Kenney et al. |
U.S. Appl. No. 14/270,578, filed May 6, 2014, Nguyen et al. |
International Search Report and Written Opinion in International Application No. PCT/US2014/014391, dated May 19, 2014, 11 pages. |
U.S. Appl. No. 60/887,774, Unpublished (filed Feb. 1, 2007) (Madhavi R. Chandrachood, et al., inventor). |
Japanese Office Action in Japanese Application No. 2016-500195, dated Sep. 27, 2017, 9 pages (English Translation). |
Number | Date | Country | |
---|---|---|---|
20150371826 A1 | Dec 2015 | US |
Number | Date | Country | |
---|---|---|---|
61789485 | Mar 2013 | US |