Number | Date | Country | Kind |
---|---|---|---|
10-367619 | Dec 1998 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5258257 | Sinta et al. | Nov 1993 | A |
5707776 | Kawabe et al. | Jan 1998 | A |
5968712 | Thackeray et al. | Oct 1999 | A |
5968713 | Nozaki et al. | Oct 1999 | A |
5985512 | Hatakeyama et al. | Nov 1999 | A |
6103447 | Chen et al. | Aug 2000 | A |
6403288 | Nishimura et al. | Jun 2002 | B1 |
6576392 | Sato et al. | Jun 2003 | B1 |
Number | Date | Country |
---|---|---|
11-218927 | Aug 1999 | JP |
9837458 | Aug 1998 | WO |
Entry |
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“Standard Developer Available ArF Resist and Performance”, Uetani, Y. et al, Proc.SPIE, 3333, pt. 1, Feb. 1998, 546-553.* |
CA abstract of JP 11-218927, Aug. 1999 and machine translation of example section of JP 11-218927, Aug. 1999.* |
JPO abstract of JP 11-218927, Aug. 1999. |