Number | Date | Country | Kind |
---|---|---|---|
10-269056 | Sep 1998 | JP |
Number | Name | Date | Kind |
---|---|---|---|
4294538 | Ban | Oct 1981 | A |
4362384 | Engelbrecht et al. | Dec 1982 | A |
5194893 | Nishi | Mar 1993 | A |
5315629 | Jewell et al. | May 1994 | A |
5339346 | White | Aug 1994 | A |
5393623 | Kamon | Feb 1995 | A |
5439781 | MacDowell et al. | Aug 1995 | A |
5473410 | Nishi | Dec 1995 | A |
5524039 | Kamon | Jun 1996 | A |
5591958 | Nishi et al. | Jan 1997 | A |
5640284 | Tanitsu et al. | Jun 1997 | A |
5669708 | Mashima et al. | Sep 1997 | A |
5677754 | Makinouchi | Oct 1997 | A |
5677939 | Oshino | Oct 1997 | A |
5737137 | Cohen et al. | Apr 1998 | A |
5854671 | Nishi | Dec 1998 | A |
5896438 | Miyake et al. | Apr 1999 | A |
6268906 | Suzuki | Jul 2001 | B1 |
Number | Date | Country |
---|---|---|
0 633 506 | Jan 1995 | EP |
08005796 | Jan 1996 | JP |
08160200 | Jun 1996 | JP |
10284408 | Oct 1998 | JP |
Entry |
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William C. Sweatt, “High-Efficiency Condenser Design for Illuminating a Ring Field,” OSA Proceedings on Soft X-Ray Projection Lithography, vol. 18 (1993). |
Stulen et al., “Developing a Soft X-Ray Projection Lithography Tool,” AT&T Technical Journal 70 No. 6 (Nov./Dec. 1991). |