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5744865 | Jeng et al. | Apr 1998 | A |
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5847443 | Cho et al. | Dec 1998 | A |
5870076 | Lee et al. | Feb 1999 | A |
5904576 | Yamaha et al. | May 1999 | A |
5914183 | Canham | Jun 1999 | A |
6017811 | Winton et al. | Jan 2000 | A |
6037634 | Akiyama | Mar 2000 | A |
6090724 | Shelton et al. | Jul 2000 | A |
6265303 | Lu et al. | Jul 2001 | B1 |
6287936 | Perea et al. | Sep 2001 | B1 |
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6407441 | Yuan | Jun 2002 | B1 |
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---|---|---|
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WO 9800862 | Jan 1998 | WO |
Entry |
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Poponiak et.al. “High Sheet Resistivity Resistors by the Porous Silicon”, Jun. 1975, IBM Tech Disclosure Bulletiin. |