Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

Abstract

A semiconductor device manufacturing method includes the steps of filling a cavity and a resin reservoir hole in a lower metal mold with a liquid-state resin, holding a semiconductor element between the lower metal mold and an upper metal mold, injecting the resin in the resin reservoir hole into the cavity to seal the semiconductor device with the resin. Thus, the semiconductor device having almost no voids and less material loss is manufactured with high accuracy.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings which are given by way of illustration only, and thus are not limitative of the present invention, and wherein:

FIG. 1A shows a schematic sectional view of a semiconductor device manufacturing apparatus according to a first embodiment of the present invention, and a first step of a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 1B shows a schematic sectional view of a second step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the first embodiment;

FIG. 1C shows a schematic sectional view of a third step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the first embodiment;

FIG. 1D shows a schematic sectional view of a fourth step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the first embodiment;

FIG. 1E shows a schematic sectional view of a fifth step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the first embodiment;

FIG. 2A shows a schematic sectional view of a semiconductor device manufacturing apparatus according to a second embodiment of the present invention;

FIG. 2B shows a schematic sectional view of a first step of a semiconductor device manufacturing method with use of the manufacturing apparatus of the second embodiment;

FIG. 2C shows a schematic sectional view of a second step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the second embodiment;

FIG. 3 shows a schematic sectional view of a semiconductor device manufacturing apparatus according to a third embodiment of the present invention and a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 4A shows a schematic sectional view of a semiconductor device manufacturing apparatus according to a fourth embodiment of the present invention and a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 4B shows a schematic sectional view of a semiconductor device manufactured by using the manufacturing apparatus and the manufacturing method of the fourth embodiment;

FIG. 5A shows a schematic sectional view of the semiconductor device manufacturing apparatus according to a fifth embodiment of the present invention and a first step of a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 5B shows a schematic sectional view of the second step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the fifth embodiment;

FIG. 5C shows a schematic sectional view of the third step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the fifth embodiment;

FIG. 6A shows a schematic sectional view of a sixth embodiment of the semiconductor device manufacturing apparatus and a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 6B shows a schematic sectional view of the semiconductor device manufactured with use of the manufacturing apparatus and the manufacturing method of the sixth embodiment;

FIG. 7A shows a schematic sectional view of a seventh embodiment of the semiconductor device manufacturing apparatus and the first step of a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 7B shows a schematic sectional view of the second step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the seventh embodiment;

FIG. 8A shows a schematic sectional view of an eighth embodiment of the semiconductor device manufacturing apparatus and the first step of a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 8B shows a schematic sectional view of the second step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the eighth embodiment;

FIG. 9 shows a schematic sectional view of a ninth embodiment of the semiconductor device manufacturing apparatus and a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 10A shows a schematic sectional view of a tenth embodiment of the semiconductor device manufacturing apparatus and a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 10B shows a schematic sectional view of the semiconductor device manufactured with use of the manufacturing apparatus and the manufacturing method of the tenth embodiment;

FIG. 11A shows a schematic sectional view of a comparative example of the semiconductor device manufacturing apparatus and a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 11B shows a schematic sectional view of the semiconductor device manufactured with use of the manufacturing apparatus and the manufacturing method of the comparative example;

FIG. 12A shows a schematic sectional view of an eleventh embodiment of the semiconductor device manufacturing apparatus and the first step of a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 12B shows a schematic sectional view of the second step of the semiconductor device manufacturing method with use of the manufacturing apparatus of the eleventh embodiment;

FIG. 13 shows a schematic sectional view of a twelfth embodiment of the semiconductor device manufacturing apparatus and a semiconductor device manufacturing method with use of the manufacturing apparatus;

FIG. 14A shows a schematic sectional view of the semiconductor device manufactured with use of the manufacturing apparatus and the manufacturing method of the twelfth embodiment;

FIG. 14B shows a schematic sectional view of the semiconductor device manufactured with use of the manufacturing apparatus and the manufacturing method of the twelfth embodiment;

FIG. 15A shows a schematic sectional view of a first step of a general manufacturing method for a semiconductor device;

FIG. 15B shows a schematic sectional view of a second step of the general manufacturing method for the semiconductor device;

FIG. 15C shows a schematic sectional view of a third step of the general manufacturing method for the semiconductor device;

FIG. 16A shows a schematic sectional view of a metal mold in one-pot type transfer molding;

FIG. 16B shows a schematic sectional view of the metal mold in multi-pot type transfer molding;

FIG. 16C shows a schematic sectional view of the metal mold in cylindrical pot type transfer molding;

FIG. 17 shows an explanatory view of a casting method; and

FIG. 18 shows an explanatory view of a potting method.

Claims

1. A semiconductor device manufacturing method comprising: a first step of filling a cavity formed in a lower metal mold and a resin reservoir hole formed in the lower metal mold and connected to the cavity with a liquid-state resin;a second step of holding a semiconductor element between the lower metal mold and an upper metal mold; anda third step of sealing the semiconductor element with the resin by injecting the resin of the resin reservoir hole into the cavity.

2. The semiconductor device manufacturing method as set forth in claim 1, wherein the first step comprises:placing a filling jig on the lower metal mold in such a way that a resin injection hole, which is formed in the filling jig and filled with the resin, is aligned with the cavity of the lower metal mold; andfilling the cavity and the resin reservoir hole with the resin through the resin injection hole by opening a gate section formed in the filling jig to close or open the resin injection hole.

3. The semiconductor device manufacturing method as set forth in claim 1, wherein the first step comprises:placing a tube extending from a resin feeder filled with the resin on the lower metal mold in such a way that an opening of the tube is aligned with the cavity of the lower metal mold; andfilling the cavity and the resin reservoir hole with the resin through the opening of the tube via the tube from the resin feeder.

4. The semiconductor device manufacturing method as set forth in claim 1, wherein the third step comprises:injecting the resin of the resin reservoir hole into the cavity by extruding the resin into the cavity with use of an injection member moving in the resin reservoir hole; andpushing the semiconductor element sealed with the resin out of the lower metal mold with use of the injection member after the resin is hardened.

5. The semiconductor device manufacturing method as set forth in claim 1, wherein the third step comprises:injecting the resin of the resin reservoir hole into the cavity by extruding the resin into the cavity with use of an injection member moving in the resin reservoir hole; andforming a lens portion of the hardened resin by pressurizing the resin during a hardening process with use of an end face formed in a lens-like shape of the injection member.

6. A semiconductor device manufacturing apparatus comprising: a lower metal mold having a cavity and a resin reservoir hole directly connected to the cavity;an upper metal mold relatively coming close to or away from the lower metal mold and holding a semiconductor element together with the lower metal mold;a filling device filling the cavity and the resin reservoir hole in the lower metal mold with a liquid-state resin; andan injection member placed in the resin reservoir hole so as to reciprocate in the resin reservoir hole and injecting the resin of the resin reservoir hole into the cavity by extruding the resin into the cavity with use of the injection member.

7. The semiconductor device manufacturing apparatus as set forth in claim 6, wherein an end face of the injection member, which end face is placed on a side of the cavity in the lower metal mold, is formed into a lens-like shape.

8. The semiconductor device manufacturing method as set forth in claim 1, wherein the first step comprises:placing the filling jig on the lower metal mold in such a way that a resin injection hole, which is formed in the filling jig and filled with the resin, is aligned with the cavity of the lower metal mold; andfilling the cavity and the resin reservoir hole with the resin through the resin injection hole by opening a gate section formed in the filling jig to close or open the resin injection hole and by moving an injection member, which is placed in the upper metal mold, in the resin injection hole of the filling jig.

9. The semiconductor device manufacturing method as set forth in claim 8, wherein, a lens portion of the hardened resin is formed by pressurizing the resin during hardening the resin by using an end face of the injection member placed in the upper metal mold, which end face is formed into a lens-like shape.

10. The semiconductor device manufacturing method as set forth in claim 8, wherein the semiconductor element sealed with the resin is pushed out of the cavity formed in the lower metal mold by using the injection member placed in the upper metal mold after the resin is hardened.

11. The semiconductor device manufacturing method as set forth in claim 2, wherein a hole of the gate section of the filling jig, via which the resin passes when the lower metal mold is filled with the resin through the resin injection hole of the filling jig, is tapered in such a way that the hole gradually decreases in diameter toward the lower metal mold.

12. The semiconductor device manufacturing method as set forth in claim 1, wherein the third step comprises:injecting the resin of the resin reservoir hole into the cavity by extruding the resin into the cavity with use of an injection member moving in the resin reservoir hole;retreating the injection member from a side of the cavity after the resin is hardened; andpushing the semiconductor element sealed with the resin out of the lower metal mold by discharging air from the resin reservoir hole toward the cavity.

13. The semiconductor device manufacturing apparatus as set forth in claim 6, wherein an outer periphery of a bottom of the cavity coincides in shape with an inner periphery of the resin reservoir hole; andan outer periphery of an end face of the injection member on a side of the cavity coincides in shape with the inner periphery of the resin reservoir hole.

14. The semiconductor device manufacturing apparatus as set forth in claim 6, wherein the lower metal mold has a plurality of the cavities, andcommunication passages, through which all the cavities communicate at least in series with one another, are formed on mutually facing surfaces of the upper and lower metal molds when the upper and lower metal molds contact with each other.

15. The semiconductor device manufacturing apparatus as set forth in claim 6, wherein a subcavity, which communicates with the cavity of the lower metal mold, is formed on mutually facing surfaces of the upper and lower metal molds when the upper and lower metal molds contact with each other.