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8-068064 | Mar 1996 | JPX | |
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5130772 | Choi | Jul 1992 | |
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5561319 | Owens et al. | Oct 1996 | |
5652459 | Chen | Jul 1997 | |
5731238 | Cavins et al. | Mar 1998 | |
5747866 | Ho et al. | May 1998 |
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64-34009 | Feb 1989 | JPX |
2-311765 | Nov 1990 | JPX |
5-296592 | Nov 1993 | JPX |
Entry |
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"Improvement of Water-Related Hot-Carrier Reliability by Using ECR Plasma-SiO.sub.2 " by Machida et al., "Transactions of Electron Devices," IEEE, vol. 41, No. 5, May 1994, pp. 709-714. |
"Improvement of Gate Oxide Reliability with LPCVD-SiN" by Uraoka et al. Shingaku Gihou, SDM 88-42, 1988 pp. 13-18, 1988. |