Patent Grant
11557480
This application claims the priority of Chinese Patent Application No. 201911174539.8, filed on Nov. 26, 2019, the content of which is incorporated by reference in its entirety.
The present disclosure generally relates to the field of semiconductor manufacturing technology and, more particularly, relates to semiconductor structures and fabrication methods.
In the process of manufacturing semiconductor devices, a photolithography process is usually used to transfer patterns from a mask to a substrate. The photolithography process usually includes providing a semiconductor substrate; forming a photoresist layer on the semiconductor substrate; and exposing and developing the photoresist layer to form a patterned photoresist layer to allow the patterns on the mask to be transferred to the photoresist layer. The semiconductor substrate is etched using the patterned photoresist layer as an etching mask such that the patterns on the patterned photoresist layer are transferred to the semiconductor substrate. After transferring the patterns to the semiconductor substrate, the patterned photoresist layer may be removed.
As the size of semiconductor devices continues to shrink, the critical dimensions of the lithography process are gradually approaching or even exceeding the physical limits of photolithography, which poses more severe challenges to the lithography technology. To further reduce the size of semiconductor devices on the basis of the photolithography process, a multiple patterning process has be developed. Such a process has application prospects because of its ability to form a mask with a smaller size, and the unreachable limit of a single patterning process may be overcome.
However, there is a need to further improve the multiple patterning process. The disclosed methods and semiconductor structures are directed to solve one or more problems set forth above and other problems in the art.
One aspect of the present disclosure provides a method for forming a semiconductor structure. The method may include providing a to-be-etched layer; forming a first sacrificial film on the to-be-etched layer; and forming a plurality of second sacrificial layers discrete to each other on the first sacrificial film. A first trench is between adjacent second sacrificial layers of the plurality of second sacrificial layers; a second trench is between adjacent second sacrificial layers of the plurality of second sacrificial layers; a width of the second trench is greater than a width of the first trench; and a width direction of the first trench and a width direction of the second trench are consistent with an arrangement direction of the plurality of second sacrificial layers. The method may also include forming a first sidewall spacer on a sidewall surface of a second sacrificial layer of the plurality of second sacrificial layers. A ratio between the width of the first trench and a thickness of the first sidewall spacer is greater than 2:1. Further, the method may include removing the plurality of second sacrificial layers; etching the first sacrificial film using the first sidewall spacer as an etching mask to form a plurality of first sacrificial layers discrete to each other. A third trench is between adjacent first sacrificial layers of the plurality of first sacrificial layers; a fourth trench is between adjacent second sacrificial layers of the plurality of first sacrificial layers; a width of the fourth trench is greater than a width of the third trench, and a width direction of the third trench and a width direction of the fourth trench are consistent with an arrangement direction of the plurality of first sacrificial layers. Further, the method may include forming a second sidewall spacer in the third trench to fill the third trench; and forming a third sidewall spacer on a sidewall surface of a first sacrificial layer of the plurality of first sacrificial layers.
Optionally, the to-be-etched layer may include a multiple-layer structure. The multiple layer structure may include a substrate, a mask structure on the substrate and a first stop layer on the mask structure.
Optionally, forming the plurality of second sacrificial layers may include forming a second stop layer on the first sacrificial film; forming a second sacrificial film on the second stop layer; forming a plurality of patterned structures discrete to each other on the second sacrificial film; etching the second sacrificial film using the plurality of patterned structures as an etching mask until the second stop layer is exposed to form the plurality of second sacrificial layers; and removing the plurality of patterned structures after forming the plurality of second sacrificial layers.
Optionally, forming the first sidewall spacer may include forming a first sidewall film on exposed portions of a top surface of the second stop layer, and sidewall surfaces and top surfaces of the plurality of second sacrificial layers; and etching-back the first sidewall film on the exposed portions of the top surface of the second stop layer and the top surfaces of the plurality of second sacrificial layers until the exposed portions of the top surface of the second stop layer and the top surfaces of the plurality of second sacrificial layers are exposed to form the first sidewall spacer.
Optionally, forming the first sidewall film may include an atomic layer deposition process.
Optionally, etching-back the first sidewall film may include one of an anisotropic dry etching process and an anisotropic wet etching process.
Optionally, a material of the first sidewall film includes one of silicon nitride and silicon oxynitride.
Optionally, forming the second sidewall spacer may include forming a second sidewall film on exposed portions of a top surface of the to-be-etched layer and sidewall surfaces and top surfaces of the plurality of first sacrificial layers; and etching the second sidewall film on a surface of the fourth trench and the top surfaces of the plurality of first sacrificial layers until the exposed portions of the top surface of the to-be-etched layer the top surface of the plurality of first sacrificial layers are exposed to form the second sidewall spacer.
Optionally, a ratio between the width of the third trench and a thickness of the second sidewall spacer is smaller than 2:1; and a ratio between the width of the fourth trench and the thickness of the second sidewall spacer is greater than 2:1.
Optionally, forming the second sidewall film includes an atomic layer deposition process.
Optionally, etching the second sidewall film includes one of an isotropic dry etching process and an isotropic wet etching process.
Optionally, a material of the second sidewall film includes silicon carbonitride.
Optionally, forming the third sidewall spacer may include forming a third sidewall film on exposed portions of a top surface of the to-be-etched layer, top surfaces and sidewall surfaces of the plurality of first sacrificial layers and a top surface of the second sidewall spacer; etching-back the third sidewall film on the exposed portions of the top surface of the to-be-etched layer, the top surfaces of the plurality of first sacrificial layers and the top surface of the second sidewall spacer to form the third sidewall spacer; and removing the plurality of first sacrificial layers and the second sidewall spacer after forming the third sidewall spacer.
Optionally, forming the third sidewall film may include an atomic layer deposition process.
Optionally, a material of the third sidewall film may include one of silicon nitride and silicon oxynitride.
Optionally, etching-back the third sidewall film may include one of an anisotropic dry etching process and an isotropic wet etching process.
Optionally, after forming the third sidewall spacer, the method may include etching the to-be-etched layer using the third sidewall spacer as an etching mask to form a plurality of fins discrete to each other.
Another aspect of the present disclosure provides a semiconductor structure formed by the disclosed method
Other aspects or embodiments of the present disclosure can be understood by those skilled in the art in light of the description, the claims, and the drawings of the present disclosure.
The technical solutions of the present disclosure may have at least the following beneficial effects.
In the disclosed fabrication method, a ratio between the width of the first trench and the thickness of the first sidewall spacer may be greater than 2:1. The width of the first trench may be increased to decrease the width difference between the first trench and the second trench. Accordingly, the process requirement for forming the second sacrificial layer may be reduced; and the fabrication process may be simplified; and the production efficiency may be improved. By subsequently using the second sidewall spacer to fill the third trench and not to fill the fourth trench, the requirements for forming fins with different densities may be met.
Further, in the present disclosure, the third sidewall spacers may be used as an etching mask to etch the to-be-etched layer to form the plurality of fins. The plurality of fins may be subsequently used to form semiconductor devices.
The following drawings are merely examples for illustrative purposes according to various disclosed embodiments and are not intended to limit the scope of the present disclosure.
Reference will now be made in detail to exemplary embodiments of the disclosure, which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.
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In the above fabrication method, to finally form the fins 107 with different densities, the first sidewall spacer 105 is used to fill the first trench 103, but the first sidewall spacer 105 is not formed in the second trench 104. However, to ensure that the first sidewall spacer 105 is filled in the first trench 103 and is not formed in the second trench 104, the width the first trench 103 is required to be significantly greater than the width of the second trench 104. That is, the distances between adjacent second sacrificial layers 102 are significantly different. However, the requirements for forming the second sacrificial layers 102 with relatively large distance differences are relatively high, and the manufacturing process is relatively complicated. Accordingly, the efficiency of forming the final semiconductor structures is reduced.
The present disclosure provides a semiconductor structure and a method for forming a semiconductor structure. By increasing the width of the first trench, the width difference between the first trench and the second trench may be reduced. Thus, the requirements of the formation of the second trench may be reduced; the fabrication process may be simplified; and the production efficiency may be increased. Subsequently, the third trench may be filled with the second sidewall spacer and the second sidewall spacer may not be formed in the fourth trench to meet the final requirement of forming fins with different densities.
To make the above-mentioned objects, features and advantages of the present disclosure more obvious and understandable, specific embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.
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In one embodiment, the to-be-etched layer 200 may include a multiple-layer structure. The to-be-etched layer 200 may include a substrate 202, a mask structure on the substrate 202, and a second stop layer 203 on the mask structure.
In one embodiment, the material of the substrate 202 may be silicon. In some embodiments, the material of the substrate may also be germanium, silicon germanium, silicon carbide, gallium arsenide, or indium gallium, etc.
In one embodiment, the mask structure may include a first mask layer 204 and a second mask layer 205 disposed on the first mask layer 204.
In one embodiment, the material of the first mask layer 204 is silicon oxide, and the material of the second mask layer 205 is silicon nitride.
In one embodiment, the material of the first sacrificial film 201 is amorphous silicon. In some embodiments, the material of the first sacrificial film may also be silicon nitride, silicon carbide, silicon carbonitride, silicon oxycarbonitride, silicon oxynitride, boron nitride, or boron carbonitride, etc.
A plurality of discrete second sacrificial layers may be formed on the first sacrificial film 201, a first trench may be between adjacent second sacrificial layers, and a second trench may be between two adjacent second sacrificial layers. The width of the second trench may be greater than the width of the first trench. The width direction of the first trench and the width direction of the second trench may be consistent with the arrangement direction of the second sacrificial layers.
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In one embodiment, the second stop layer 206 may function to stop the etching process when the second sacrificial film 207 is subsequently etched to prevent the etching process from continuing to damage the first sacrificial film 201.
In one embodiment, the material of the second stop layer 206 may be different from the material of the second sacrificial film 207. The purpose for using different materials for the second stop layer 206 and the second sacrificial film 207 may be to stop the subsequent process for etching the second sacrificial film 207 at the top surface of the second stop layer 206. The material of the second stop layer 206 may be silicon oxide.
In one embodiment, the material of the second sacrificial film 207 is amorphous silicon. In some embodiments, the material of the first sacrificial film may also be silicon nitride, silicon carbide, silicon carbonitride, silicon oxycarbonitride, silicon oxynitride, boron nitride, or boron carbonitride, etc.
In one embodiment, the material of the patterned structures 208 is photoresist.
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The process for forming the plurality of patterned structures 208 may include a photolithography patterning process. The process for removing the plurality of patterned structures 208 may include a wet stripping process, or an ashing process, etc.
In one embodiment, the process for removing the plurality of patterned structures 208 is an ashing process. The gas of the ashing process may be an oxygen-containing gas, such as oxygen, or ozone, etc.
After removing the plurality of patterned structures 208, a first sidewall spacer may be formed on the sidewall surface of the second sacrificial layer 209. The ratio between the width of the first trench 210 and the thickness of the first sidewall spacer may be greater than 2:1.
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In one embodiment, the formation process of the first sidewall film 212 may include an atomic layer deposition (ALD) process, and the first sidewall film 212 formed by the ALD process may have a better step coverage, and the deposited thickness of the first sidewall film 212 may be more uniform and easy to control.
The material of the first sidewall film 212 may include silicon nitride or silicon oxynitride. In one embodiment, the material of the first sidewall film 212 is silicon nitride.
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In one embodiment, by setting the width of the first trench 210 to be greater than twice the thickness of the first sidewall spacer 213 to increase the width of the first trench 210, the difference between the width of the first trench 210 and the width of the second trench 211 may be reduced. Thus, the requirements for the process of forming the second sacrificial layers 209 may be reduced; the process steps may be simplified; and the production efficiency may be improved.
The process used for etching-back the first sidewall film 212 may include an anisotropic dry etching process, or an anisotropic wet etching process, etc.
In one embodiment, the process used to etch-back the first sidewall film 212 is an anisotropic dry etching. The etching gases may include one or more of fluorine-containing gases, such as CF4, CHF3, or C2F6, etc.
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In one embodiment, when the first sacrificial film 201 is etched using the first sidewall spacers 213 as an etching mask, the second stop layer 206 on the first sacrificial film 201 may also be etched.
By using the first sidewall spacers 213 as the etching mask to etch the first sacrificial film 201 to form the first sacrificial layers 218, the pattern transfer may be completed in time to avoid the subsequent formation of second sidewall spacers on the second stop layer 206. The number of etching processes on the surface of the second stop layer 206 may be reduced. Accordingly, the damage to the second stop layer 206 and the first sacrificial film 201 may be reduced, and the morphology and dimensional accuracy of the structures formed in the subsequent pattern transfer process may be improved.
In one embodiment, the material of the first stop layer 203 may be different from the material of the first sacrificial film 201. Thus, the etching process of the first sacrificial film 201 may be stop at the first stop layer 203. In particular, the material of the first stop layer 203 may be silicon oxide.
In one embodiment, the material of the first sacrificial film 201 is amorphous silicon. In some embodiments, the material of the first sacrificial film may also be silicon nitride, silicon carbide, silicon carbonitride, silicon oxycarbonitride, silicon oxynitride, boron nitride, or boron carbonitride, etc.
In one embodiment, after forming the first sacrificial layers 218, a second sidewall spacer may be formed in the third trench 214. The second sidewall spacer may fill the third trench 214.
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In one embodiment, the formation process of the second sidewall film 216 may include an atomic layer deposition process.
In one embodiment, the material of the second sidewall film 216 may be different from the material of the first sacrificial film 201, and the purpose may be to prevent the subsequent etching process of the second sidewall film 216 from damaging the first sacrificial layers. In particular, the material of the second sidewall film 216 may be silicon carbonitride.
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In one embodiment, the etching process of the second sidewall film 216 may be stopped on the surface of the first stop layer 203.
In one embodiment, the ratio between the width of the third trench 214 and the thickness of the second sidewall spacer 217 may be less than 2:1. The ratio between the width of the fourth trench 215 and the thickness of the second sidewall spacer 217 may be greater than 2:1.
By setting the width of the third trench 214 to be less than twice the thickness of the second sidewall spacer 217, while the width of the fourth trench 215 may be set to be greater than twice the thickness of the second sidewall spacer 217, it may be ensured that, after the second sidewall film 216 is etched, the formed second sidewall spacer 217 may fill the third trench 214 without being formed in the fourth trench 215. Accordingly, the second sidewall spacer 217 may be merged with the second sacrificial layers 218 at both sides of the third trench 214. In the subsequent pattern transfer process, the portion of the to-be-etched layer 200 corresponding to the merged second sacrificial layers 218 and the second sidewall spacer 217 may not form a fin. Thus, the requirements for forming fins with different densities may be met.
The process used to etch the second sidewall film 216 may include an isotropic dry etching process, or an isotropic wet etching process, etc. The isotropic etching process may ensure the second sidewall spacer 217 to be only formed in the third trench 214 but not be formed in the fourth trench 215.
In one embodiment, the process used for etching the second sidewall film 216 may include an isotropic dry etching process. The isotropic dry etching process may include following parameters. The flow rate of CF4 may be in a range of approximately 50 sccm-500 sccm. The flow rate of CHF3 may be in a range of approximately 0 sccm-200 sccm. The flow rate of O2 may be in range of approximately 0 sccm-100 sccm. The flow rate of N2 may be in a range of approximately 0 sccm-200 sccm.
After forming the second sidewall spacer 217, third sidewall spacers may be formed on the sidewall surfaces of the first sacrificial layers 218.
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In one embodiment, the formation process of the third sidewall film 219 may include an atomic layer deposition process.
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In one embodiment, the etching-back process of the third sidewall film 219 may be stopped at the first stop layer 203. Thus, the material of the first stop layer 203 may be different from the material of the third sidewall film 219. In particular, the material of the third sidewall film 219 may be silicon nitride.
The process used to etch-back the third sidewall film 219 may include an anisotropic dry etching process, or an anisotropic wet etching process, etc. In one embodiment, the process used to etch-back the third sidewall film 219 is an anisotropic dry etching process.
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In one embodiment, the plurality of fins 221 may be formed in the substrate 202; and may be used for the subsequent fabrication of semiconductor devices.
The fins 221 formed by an etching process using the third sidewall spacers 220 as an etching mask may have different spacings to meet the requirements for subsequently forming semiconductor devices.
In one embodiment, referring to
The present disclosure also provides a semiconductor structure.
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The technical solutions of the present disclosure may have at least the following beneficial effects.
In the disclosed fabrication method, a ratio between the width of the first trench and the thickness of the first sidewall spacer may be greater than 2:1. The width of the first trench may be increased to decrease the width difference between the first trench and the second trench. Accordingly, the process requirement for forming the second sacrificial layers may be reduced; and the fabrication process may be simplified; and the production efficiency may be improved. By subsequently using the second sidewall spacer to fill the third trench and not to fill the fourth trenches, the requirements for forming fins with different densities may be met.
Further, in the present disclosure, the third sidewall spacers may be used as an etching mask to etch the to-be-etched layer to form the plurality of fins. The plurality of fins may be subsequently used to form semiconductor devices.
The above detailed descriptions only illustrate certain exemplary embodiments of the present disclosure, and are not intended to limit the scope of the present disclosure. Those skilled in the art can understand the specification as whole and technical features in the various embodiments can be combined into other embodiments understandable to those persons of ordinary skill in the art. Any equivalent or modification thereof, without departing from the spirit and principle of the present disclosure, falls within the true scope of the present disclosure.
| Number | Date | Country | Kind |
|---|---|---|---|
| 201911174539.8 | Nov 2019 | CN | national |
| Number | Name | Date | Kind |
|---|---|---|---|
| 20060199391 | Nakata | Sep 2006 | A1 |
| Number | Date | Country | |
|---|---|---|---|
| 20210159078 A1 | May 2021 | US |
