Number | Name | Date | Kind |
---|---|---|---|
4004153 | Obser et al. | Jan 1977 | |
4265545 | Slaker | May 1981 | |
4441124 | Heebner et al. | Apr 1984 | |
4449818 | Yamaguchi | May 1984 | |
4468120 | Tanimoto et al. | Aug 1984 | |
4601576 | Galbraith | Jul 1986 | |
4626101 | Ogawa et al. | Dec 1986 |
Entry |
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IBM Technical Disclosure Bulletin, "Patterned Wafter Scanner", J. S. Batchelder, vol. 27, No. 10B, Mar., 1985, pp. 6273-6275. |