Number | Name | Date | Kind |
---|---|---|---|
4990410 | Saitoh et al. | Feb 1991 | |
5345108 | Kikkawa | Sep 1994 |
Number | Date | Country |
---|---|---|
472733 | Jun 1992 | JP |
629405 | Apr 1994 | JP |
Entry |
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Journal of Vacuum Science and Technology, Part A, vol. 5, No. 4, Jul., 1987-Aug. 1987, New York US, pp. 2088-2091, XP002005739 T. Kobayashi et al. |