Number | Name | Date | Kind |
---|---|---|---|
3046212 | Sato et al. | Mar 1962 | |
4893163 | Rudeck | Jan 1990 | |
5128274 | Yabu et al. | Jul 1992 | |
5966618 | Sun et al. | Oct 1999 |
Number | Date | Country |
---|---|---|
0 478 072 | Apr 1992 | EP |
60-063921 | Aug 1985 | JP |
03049212 | May 1991 | JP |
Entry |
---|
Wolf, et al., “Silicon Processing for the VLSI Era,” 1986, pp. 471-476. |