SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFERRING METHOD

Abstract

A substrate processing apparatus includes a substrate holding and rotating mechanism for holding and rotating a substrate; a positioning member disposed on the substrate holding and rotating mechanism for positioning a substrate at a predetermined substrate holding position; a substrate transfer mechanism for transferring a substrate to the substrate holding and rotating mechanism; and a pressing unit disposed on the substrate transfer mechanism for pressing a substrate toward the positioning member.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross section view illustrating the arrangement of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view of the spin chuck provided on the substrate processing apparatus, illustrating how a substrate is carried in by the substrate holding hand.

FIG. 3 is a partial cross section view illustrating the arrangement of the support unit disposed on the spin chuck.

FIG. 4 is an enlarged perspective view of a positioning guide.

FIG. 5 is a plan view of a front-side dropping guide disposed on the substrate holding hand.

FIGS. 6 (a) and 6 (b) are enlarged views illustrating the arrangement relating to a rear-side dropping guide disposed on the substrate holding hand.

FIGS. 7 (a) to 7 (h) are schematic views successively illustrating the operational steps (according to a first embodiment) of transferring a substrate from the substrate holding hand to the spin chuck.

FIGS. 8 (a) to 8 (f) are schematic views successively illustrating the operational steps (according to a second embodiment) of transferring a substrate from the substrate holding hand to the spin chuck.

Claims

1. A substrate processing apparatus, comprising: a substrate holding and rotating mechanism for holding and rotating a substrate;a positioning member provided on the substrate holding and rotating mechanism for positioning the substrate at a predetermined substrate holding position;a substrate transfer mechanism for transferring the substrate to the substrate holding and rotating mechanism; anda pressing unit disposed on the substrate transfer mechanism for pressing the substrate toward the positioning member.

2. A substrate processing apparatus according to claim 1, wherein the pressing unit comprises: a substrate contact portion arranged to come in contact with an end face of the substrate; and a substrate-contact-portion moving mechanism for moving the substrate contact portion toward the positioning member.

3. A substrate processing apparatus according to claim 2, wherein the substrate transfer mechanism comprises a substrate holding hand for holding the substrate; the substrate contact portion is disposed on the substrate holding hand; andthe substrate-contact-portion moving mechanism comprises a hand driving mechanism for moving the substrate holding hand toward the positioning member.

4. A substrate processing apparatus according to claim 3, wherein the substrate-contact-portion moving mechanism further comprises a relative moving mechanism for relatively moving the substrate contact portion with respect to the substrate holding hand.

5. A substrate processing apparatus according to claim 2, wherein the substrate transfer mechanism comprises a substrate holding hand for holding the substrate; the substrate contact portion is disposed on the substrate holding hand; andthe substrate-contact-portion moving mechanism comprises a relative moving mechanism for relatively moving the substrate contact portion with respect to the substrate holding hand.

6. A substrate processing apparatus according to claim 1, further comprising a to-be-positioned substrate supporting portion for supporting the substrate movably toward the positioning member at a position where an end face of the substrate is opposite to the positioning member.

7. A substrate processing apparatus according to claim 6, wherein the to-be-positioned substrate supporting portion is disposed on the substrate holding and rotating mechanism.

8. A substrate processing apparatus according to claim 6, wherein the to-be-positioned substrate supporting portion is disposed on the substrate transfer mechanism.

9. A substrate processing apparatus according to claim 1, wherein the substrate holding and rotating mechanism comprises a to-be-processed substrate supporting portion for supporting the substrate while coming in contact with one surface of the substrate when the substrate is processed.

10. A substrate processing apparatus according to claim 9, further comprising a fluid supply unit for supplying a fluid to the other surface of the substrate supported by the to-be-processed substrate supporting portion, such that the substrate is pressed to the to-be-processed substrate supporting portion.

11. A substrate transferring method comprising the steps of: disposing a positioning member on a substrate holding and rotating mechanism, the positioning member being arranged to position a substrate at a predetermined substrate holding position, the substrate holding and rotating mechanism being arranged to hold and rotate a substrate;pressing a substrate to the positioning member by a pressing unit disposed on a substrate transfer mechanism arranged to transfer the substrate to the substrate holding and rotating mechanism; andtransferring the substrate from the substrate transfer mechanism to the substrate holding and rotating mechanism.