This application claims priority under 35 USC §119(e)(1) of provisional application No. 60/170,748 filed Dec. 14, 1999.
Number | Name | Date | Kind |
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5695601 | Kodera et al. | Dec 1997 | A |
6254457 | Perrin et al. | Jul 2001 | B1 |
6301006 | Doan | Oct 2001 | B1 |
6361647 | Halley | Mar 2002 | B1 |
6364742 | Fukuzawa | Apr 2002 | B1 |
Entry |
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Patel, Nital S., et al., “Device Dependent Control of Chemical-Mechanical Polishing of Dielectric Films,” IEEE Transactions on Semiconductor Manufacturing , vol. 13, No. 3, Aug. 2000, pp. 331-343. |
Number | Date | Country | |
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60/170748 | Dec 1999 | US |