Thermally confined electrode for programmable resistance memory

Abstract

A memory device includes a plurality of side-wall electrodes formed on a first side-wall of a trench within an insulating layer over a first plurality of contacts in an array of contacts in a substrate. The plurality of side-wall electrodes contact respective top surfaces of the first plurality of contacts. The side-wall electrodes respectively comprise a layer of tantalum nitride, having a composition TaxNy, where y is greater than x, and a layer of electrode material having a lower electrical resistivity and a lower thermal resistivity than the layer of tantalum nitride. Top surfaces of the plurality of side-wall electrodes contact memory material. A second plurality of side-wall electrodes may be formed on a second side-wall of the trench over a second plurality of contacts in the array of contacts.

Description

PARTIES TO A JOINT RESEARCH AGREEMENT

International Business Machines Corporation, a New York Corporation, and Macronix International Corporation, Ltd., a Taiwan corporation, are parties to a Joint Research Agreement.

FIELD OF THE INVENTION

The present invention relates to high density memory devices based on phase change memory materials, like chalcogenides, and on other programmable resistance materials, and methods for manufacturing such devices. More particularly, the present invention relates to electrode structures.

BACKGROUND OF THE INVENTION

Phase change materials exhibit a large resistivity contrast between crystalline (low resistivity) and amorphous (high resistivity) phases. An electrical current passed through a phase change material can set or reset a phase change memory (PCM) device. To set a PCM device into the crystalline phase, a medium electrical current pulse can be used. To reset a PCM device into the amorphous phase, a large electrical current pulse for a short time period can be used. To read the state of a PCM device, a small electrical current is required. Accordingly, applications of phase change memory can be limited by the high current required to reset the PCM device.

Electrodes can be significant sources of heat loss away from the active region of the device. Heat loss outside the active region is wasted, and causes a demand for more current during the reset operation. Device density in the PCM memory array can be determined by the size of the memory cell access device, typically a diode or transistor. The size of the access device is decided in part by the peak reset current required to pass through the device. Therefore reducing reset current is desirable for scalability, high-density, and low power consumption in memory devices, including PCM and other programmable resistance memory types.

SUMMARY

A memory, such as a PCM is described that includes a sidewall electrode having a layer of tantalum nitride, which thermally insulates a layer of more highly conductive electrode material from the bulk conductive structure, to reduce the heat loss and thereby reduce the reset current. Since much of the wasted power is by heat loss through the electrode structures, the engineering of one or both electrodes for better power efficiency is important. In one example, a tantalum-nitride/titanium-nitride/tantalum-nitride (TaN/TiN/TaN) thermal confining electrode structure is used to confine the heat dissipation and to focus the heat in the active region of the memory device. A method to fabricate a memory with the thermally confining electrode structure is also described. Embodiments of the thermally confined side-wall electrode are described which achieve 10× reduction in peak reset current in PCM devices using the structure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1C illustrate a first embodiment of an array of thermally confined side-wall electrodes suitable for use in a phase change memory device, or other programmable resistance device.

FIGS. 2A and 2B illustrate a second embodiment of an array of thermally confined side-wall electrodes.

FIGS. 3A and 3B illustrate a third embodiment of an array of thermally confined side-wall electrodes.

FIGS. 4A-14 are cross-sectional views and top views illustrating sub-assemblies in a fabrication sequence of phase change memory devices having thermally confined side-wall electrodes.

FIG. 15 is a schematic diagram of a memory array comprising phase change memory elements in accordance with an embodiment.

FIG. 16 is a block diagram of an integrated circuit device including a phase change memory array in accordance with an embodiment.

DETAILED DESCRIPTION

A detailed description of embodiments of thermally confined side-wall electrodes for phase change memory devices and methods for manufacturing such electrodes are provided with reference to FIGS. 1-16.

An embodiment of the present invention includes a plurality of side-wall electrodes formed on a first side-wall of a trench within an insulating layer over a first plurality of contacts in an array of contacts in a substrate. The plurality of side-wall electrodes contacts respective top surfaces of the first plurality of contacts. A second plurality of side-wall electrodes may be formed on a second side-wall of the trench over a second plurality of contacts in the array of contacts. The array of contacts may be coupled with an array of access devices. FIG. 15 and the description of FIG. 15 provide more information about access devices.

FIG. 1A illustrates a cross-section of a basic structure of a partial memory device 100 including plugs 121 and 141 surrounded by dielectric material 110, a first side-wall electrode 120, a second side-wall electrode 140, dielectric material 160 separating the electrode 120 from the electrode 140, and insulating material 150 defining a trench for the electrodes 120 and 140. An insulating spacer 125, 145 overlies the sidewall electrodes 120, 140, and can be used in the formation of the L-shaped cross-section of the sidewall electrodes 120, 140 as explained below.

Plug 121 is an example of a contact in the first plurality of contacts in an array of contacts. Plug 141 is an example of a contact in the second plurality of contacts in an array of contacts. In general, contacts in the array of contacts may be interlayer metal plugs as illustrated in FIG. 1A, or other electrical contacts, like a source or drain terminal of a transistor, a layer of silicide on a doped semiconductor, or other pad on which the side-wall electrode can make contact.

The first side-wall electrode 120 is an example of a side-wall electrode in the plurality of side-wall electrodes formed on a first side-wall of the trench. The second side-wall electrode 140 is an example of a side-wall electrode in the second plurality of side-wall electrodes formed on the second side-wall of the trench. Although FIG. 1A only illustrates a single side-wall electrode 120 for the first side-wall and a single side-wall electrode 140 for the second side-wall of the trench, the trench accommodates the plurality of side-wall electrodes on its first side-wall and the second plurality of side-wall electrodes on its second side-wall. Furthermore, the embodiment may have more than one trench.

FIG. 1B illustrates a top view of four pairs of isolated side-wall electrodes in two trenches. The electrode 120 is positioned partially over a top surface 128 of the plug 121. The electrode 120 comprises a first layer 122 of a first material, a second layer 124 of a second material deposited over the first layer 122, and a third layer 126 of the third material deposited over the second layer 124.

FIG. 1C illustrates a structure of the first side-wall electrode 120. The first layer 122 is shown to have a thickness 182 for the first material. The second layer 124 is shown to have a thickness 184 for the second material. The third layer 126 is shown to have a thickness 186 for the third material. The side-wall electrode includes a vertical portion, or leg 127, which lies on the sidewall of a corresponding trench. In the preferred embodiments described here, the side-wall electrode includes a horizontal portion, or foot 129, that lies on the top surface of the underlying contact. The foot provides an increased area of electrical contact from the electrode structure to the underlying contact. Also, the foot can improve the structural integrity and reliability of the side-wall electrode structure. The first layer 122 separates the second layer 124 at the low end of the leg 127, and in the foot 129, from the bulk of the underlying contact, inhibiting heat loss through direct contact of the more conductive electrode material of the second layer 124 to the thermal bulk of the underlying contact structure.

The electrode 140 is positioned partially over a top surface 148 of the plug 141. The electrode 140 comprises a first layer 142 of the first material, a second layer 144 of a second material deposited over the first layer 142, and a third layer 146 of the third material deposited over the second layer 144.

The first layer 122 of the first side-wall electrode 120 and the first layer 142 of the second side-wall electrode 140 are in contact with the top surface 128 of the plug 121 and the top surface 148 of the plug 141, respectively. The first layer 122 of the first side-wall electrode 120 and the first layer 142 of the second side-wall electrode 140 are thermally insulating nitride rich tantalum nitride layers separating top surfaces 128 and 148 of plugs 121 and 142 from the more conductive layers 124 and 144, respectively.

The first material serves as a thermal barrier to suppress heat loss through plugs that can have large thermal mass and have good thermal conductivity. The first material described herein consists of a nitride rich tantalum nitride (Ta_xN_y, where the x/y ratio is less than 1). The Ta_xN_y can be for example, Ta₃N₅, Ta₂N₃, or a mixture thereof. Ta_xN_y can be fabricated by physical vapor deposition (PVD), chemical vapor deposition (CVD), and atomic layer deposition (ALD).

The second material for the second layers 124 and 144 comprises an electrode material that has a lower electrical resistivity and lower thermal resistivity than the first material. The electrode material can include titanium nitride (TiN) or other material chosen for compatibility with the first material. The electrode material can include a material or combination of materials selected from the group of Ta_xN_y where the x/y ratio is greater than 1, e.g. Ta, W, W-silicide, Pt, Ru, RuO₂, Ir, and IrO₂. The second layers 124 and 144 can provide the primary conducting paths for the sidewall electrodes 120 and 140.

The electrical conductivity of TiN is 5˜1000 times of that of nitride rich tantalum nitride. The electrical conductivity ratio of the preferred nitride rich tantalum nitride over TiN can be 0.001˜0.2. The thermal conductivity ratio of the nitride rich tantalum nitride over TiN can be 0.001˜0.9. The thickness range of nitride rich tantalum nitride can be from 1 nanometer to 20 nanometers and the thickness range of TiN can be from 0.4 nanometers to 10 nanometers.

The dielectric material 110 may be SiO₂, another silicon oxide, or other insulating material including some low-k dielectric materials, suitable for use as an interlayer dielectric. The insulating material 150 may be a silicon nitride. The material of the spacers 125, 145 may also be a silicon nitride. Plugs in general are used for interconnects to underlying selectors or access devices. The plugs 121 and 141 may silicide (WSi, CoSi, NiSi etc.), or metal (W, TiN, Cu etc.). The dielectric material 160 may be SiN, SiO₂, and other insulating materials including some low-k dielectric materials, usable for interlayer dielectrics in these setting. The plugs 121 and 141 in this example are coupled to an underlying substrate that includes an array of access devices or other access structures (e.g. word lines or bit lines), used for selecting memory cells that include the sidewall electrodes. Also, the plugs may include vertical transistors or diodes which act as access devices. In other embodiments, the array of access devices may be coupled to another electrode, e.g. an overlying electrode, for the memory devices, while the contacts are coupled to a more passive access structure (e.g. word line or bit line).

FIG. 2A and FIG. 2B illustrate a second embodiment 200 of the present invention. In the first embodiment illustrated by FIG. 1A and FIG. 1B, both sides of second layers 124 and 144 made of the electrode material for conducting paths are insulated by a thermal barrier of nitride rich tantalum nitride. In the second embodiment, the outer side of second layers 124 and 144 is insulated by nitride rich tantalum nitride in the leg and foot portions of the structure. The specifications for materials in the second embodiment can be the same as in the first embodiment.

In comparison to FIG. 1A and FIG. 1B, the first layer 122 of the first side-wall electrode 120 and the first layer 142 of the second side-wall electrode 140 are absent. The second layer 124 of the first side-wall electrode 220 and the second layer 144 of the second side-wall electrode 240 are in contact with the top surface 128 of the plug 121 and the top surface 148 of the plug 141, respectively.

FIG. 3A and FIG. 3B illustrate a third embodiment 300 of the present invention. In the first embodiment illustrated by FIG. 1A and FIG. 1B, both sides of second layers 124 and 144 made of TiN for conducting paths are insulated by a thermal barrier of material Ta_xN_y. In the third embodiment, the inner sides of second layers 124 and 144 are insulated by the layer of nitride rich tantalum nitride in both the leg and foot portions of the side-wall electrode. The specifications for materials in the third embodiment are the same as in the first embodiment.

In comparison to FIG. 1A and FIG. 1B, the third layer 126 of the first side-wall electrode 120 and the third layer 146 of the second side-wall electrode 140 are absent. The first layer 122 of the first side-wall electrode 320 and the first layer 144 of the second side-wall electrode 340 are in contact with the top surface 128 of the plug 121 and the top surface 148 of the plug 141, respectively.

In addition to TiN, the high electrical conductivity materials, surrounded by the thermal barrier Ta_xN_y with low thermal conductivity, may be TaN, Ta, W, W-silicide, Pt, Ru, RuO₂, Ir, IrO₂ etc. for all embodiments.

A detailed description of methods for manufacturing embodiments of thermally confined side-wall electrodes for phase change memory devices is provided with reference to FIGS. 4-14.

To manufacture side-wall electrodes, an array of access devices or other access structure (not shown) is first fabricated in the substrate. The array of access devices is coupled to the array of contacts. A memory cell is to be coupled to an access device in the array of access devices. The access device may be a transistor or a diode. The access device and the memory cell are typically electrically coupled in series between a bit line and a source line in a memory array.

FIG. 4A illustrates a cross-section of a partially fabricated substrate 400 including plugs 421 and 441, exemplary of contacts in the array of contacts in the substrate. Plugs 421 and 441 are surrounded by dielectric material 410 which may be SiO₂. The dielectric material 410 and the plugs 421 and 441 are planarized to provide a first planarized surface 480. A first insulating layer 450 of insulating material, e.g. SiN, is formed on the first planarized surface 480. FIG. 4B is a top view of the substrate 400 showing the first insulating layer 450 prior to patterning.

In reference to FIG. 5A, a region 510 is defined on the first insulating layer 450 with a first lithography pattern 520 of photoresist material, such that the region 510 is aligned partially over top surfaces 528 and 548 of the plugs 421 and 441, respectively. FIG. 5B shows a top view of two instances of the region 510 surrounded by the first lithography pattern 520. In a large array, the region 510 is elongated on a row or column of contacts in the array of contacts, which can include a very large number of contacts.

In reference to FIG. 6A, an etching process removes a portion of the first insulating layer 450 under the region 510 defined by the first lithography pattern 520 to partially expose the top surfaces 528 and 548 of the plugs 421 and 441, respectively, and to expose a portion 610 of the dielectric material 410 surrounding the plugs 421 and 441. FIG. 6B shows a top view of the exposed portions of the top surfaces 528 and 548 of the plugs 421 and 441, and the exposed portion 610 of the dielectric material 410 surrounding the plugs 421 and 441. In FIG. 6A, a cross-section of one pair of plugs in one region 510 is shown. In FIG. 6B, a top view of four pairs of partially exposed plugs in two such regions are shown.

In reference to FIG. 7A and FIG. 7B, the first lithography pattern 520 of photoresist material is stripped such that the first insulating layer 450 is exposed. A trench 710 is formed, including a sidewall 720 above the plug 421, a sidewall 740 above the plug 442, and exposing portions of the top surfaces 528 and 548 of the plugs 421 and 442, and the portion 610 of the dielectric material 410 surrounding the exposed portions of the top surfaces 528 and 548. FIG. 7B illustrates a top view of two instances of the trench 710.

In reference to FIG. 8A, a sequence of layers of materials is deposited in a blanket or unpatterned deposition in the area of the memory array. A first layer 810 of a first material is deposited over the trench 710 and over the first insulating layer 450 surrounding the trench 710. A second layer 820 of a second material is deposited over the first layer 810. A third layer 830 of the first material is deposited over the second layer 820. A second insulating layer 840 of insulating spacer material is then deposited over the third layer 830. FIG. 8B is a top view of the second insulating layer 840.

The first material serving as a thermal barrier comprises nitride rich tantalum nitride. Nitride rich tantalum nitride can be fabricated by physical vapor deposition (PVD), chemical vapor deposition (CVD), and atomic layer deposition (ALD). The second material has higher electrical conductivity and may be titanium nitride (TiN) or other electrode material, as discussed above.

In reference to FIG. 9A, a spacer etching removes the first layer 810, the second layer 820, the third layer 830, and the second insulating layer 840 in a center region 750 of the trench 710 and outside the trench 710 while keeping the same four layers lining vertical surfaces 720 and 740 of the trench 710 and the partially exposed top surfaces 528 and 548 of the plugs 421 and 441, respectively. A spacer 825 and a spacer 925 overlie the first, second and third layers. The thickness of the spacers 825, 925 results in the foot portions of the sidewall electrodes having widths that correlate with the thickness of the layer 840. FIG. 9B is a top view of two trenches 710 showing top surfaces 910 of the first layer 810, the second layer 820, and the third layer 830. The top surfaces 910 are surrounded by the first insulating layer 450.

In reference to FIG. 10A and FIG. 10B, the trench 710 is filled with a dielectric material 1050 and then planarized to provide a second planarized surface 1080 co-planar with the top surfaces 910 of the first layer 810, the second layer 820, and the third layer 830.

In reference to FIG. 11A, a second lithography pattern 1120 of photo resist material defines an electrode width on the second planarized surface 1080 so as to divide the sidewall layers and form isolated side-wall electrodes. FIG. 11B illustrates that the second lithography pattern 1120 is positioned in stripes over areas where isolated side-wall electrodes are to be formed.

In reference to FIG. 12A, an etching process removes materials outside the second lithography pattern 1120 to expose the first planarized surface 480. The materials removed include portions of the first layer 810, the second layer 820, and the third layer 830 of materials, the dielectric material 1050, and the first insulating layer 450. FIG. 12B is a top view of the second lithography pattern 1120 and the exposed portion of the first insulating layer 450.

In reference to FIG. 13A, the second lithography pattern 1120 is stripped. Dielectric material 1050 is filled in the area where materials outside the second lithography pattern 1120 have been removed. Dielectric material 1050 is then planarized to expose isolated side-wall electrodes 1310 and 1320 for subsequent processing. FIG. 13B illustrates four pairs of such exposed isolated side-wall electrodes. The top surfaces of the side-wall electrodes have areas that are defined by the thickness of the first, second and third layers, in this example, and by the width defined by the stripes of the second lithography pattern. In other examples, the side-wall electrodes can be tapered or otherwise processed to reduce the width dimension.

Side-wall electrodes formed in this embodiment have the material composition of Ta_xN_y—TiN—Ta_xN_y such that the high electrical conductivity material such as TiN is surrounded by a thermal barrier of nitride rich tantalum nitride on both sides. In another embodiment, the material composition for side-wall electrodes may be Ta_xN_y—TiN or TiN—Ta_xN_y such that the high electrical conductivity material such as TiN is surrounded by a thermal barrier of nitride rich tantalum nitride on only one side.

FIG. 14 illustrates one example of a completed a phase change memory device with composite Ta_xN_y—TiN—Ta_xN_y side-wall electrodes 1310 and 1312. Phase change memory material 1420 and 1422 are positioned between, in contact with, and electrically coupled to the electrode top surfaces of the side-wall electrodes 1310 and 1312 and bottom surfaces of top electrodes 1430 and 1432, respectively. The side-wall electrodes 1310 and 1320 are electrically coupled to plugs 421 and 441, and to phase change memory material 1420 and 1422, respectively. Top electrodes 1430 and 1432 are electrically coupled to phase change memory material 1420 and 1422, and to metal vias 1440 and 1442, respectively. Metal lines 1450 and 1452 are electrically coupled to metal vias 1440 and 1442, respectively. Other programmable resistance materials can be used as well.

FIG. 15 is a schematic diagram of a portion of a memory cell array 1500 implemented using phase change memory cells, as is typical of integrated circuit memory designs. The array 1500 comprises a plurality of bit lines 1540a-1540d extending in parallel in a first direction and in electrical communication with bit line decoder 1541. A plurality of word lines 1530a, 1530b, 1530c, 1530d extend in parallel in a second direction and are in electrical communication with word line decoder/driver 1531. In the schematic diagram of FIG. 15, each of the memory cells (e.g. a cell including phase change memory element 1525) of array 1500 is coupled to an access device (e.g. transistor 1515) arranged in electrical series between a bit line in the set of bit lines 1540a-1540d, that is in turn coupled to a bit line decoder 1541, and a source line 1520a-1520d. Other devices can be arranged to act as access devices including, for example, bipolar junction transistors and diodes, in memory arrays of this sort.

Memory cell 1510 is representative of memory cells in array 1500 and includes a side-wall electrode on a plug coupled to an access device such as a field effect transistor 1515, which includes a phase change memory element 1525, comprising a phase change material, for example, and includes a top electrode coupled to the phase change memory element 1525. In the example described herein, the phase change memory element 1525 includes a thermally confined side-wall electrode. The memory element 1525 and transistor 1515 are arranged electrically in series between the bit line (e.g. 1540b) and the corresponding source line termination circuits 1560 via the source line 1520b. The word line 1530b controls the gate terminal of the transistor 1515.

FIG. 16 is a simplified block diagram of an integrated circuit 1600 including a memory array 1612 implemented using phase change memory cells with side-wall electrodes as described herein. A memory plane termination circuit 1670 is coupled to the array and provides a common voltage to the memory plane of the array 1612. A word line decoder 1614 having read, set and reset modes is coupled to and in electrical communication with a plurality of word lines 1616 arranged along rows in the memory array 1612. A bit line (column) decoder 1618 is in electrical communication with a plurality of bit lines 1620 arranged along columns in the array 1612 for reading, setting, and resetting the phase change memory cells (not shown) in array 1612. Addresses are supplied on bus 1622 to word line decoder and drivers 1614 and bit line decoder 1618. Sense amplifiers and data-in structures in block 1624, including voltage and/or current sources for the read, set, and reset modes are coupled to bit line decoder 1618 via data bus 1626. Data is supplied via a data-in line 1628 from input/output ports on integrated circuit 1600, or from other data sources internal or external to integrated circuit 1600, to data-in structures in block 1624. Other circuitry 1616 may be included on integrated circuit 1600, such as a general purpose processor or special purpose application circuitry, or a combination of modules providing system-on-a-chip functionality supported by array 1612. Data is supplied via a data-out line 1632 from the sense amplifiers in block 1624 to input/output ports on integrated circuit 1600, or to other data destinations internal or external to integrated circuit 1600.

A controller 1634 implemented, in this example, using a bias arrangement state machine, controls the application of bias arrangement supply voltages and current sources 1636, such as read, set, reset, erase verify and program verify voltages and/or currents. Controller 1634 may be implemented using special-purpose logic circuitry as known in the art. In alternative embodiments, controller 1634 comprises a general-purpose processor, which may be implemented on the same integrated circuit to execute a computer program to control the operations of the device. In yet other embodiments, a combination of special-purpose logic circuitry and a general-purpose processor may be utilized for implementation of controller 1634.

The power generated in the side-wall electrode can be delivered to the memory element very efficiently (omitting power lost to thermal sinks other than the memory material) using the electrode described herein. One simulation has shown that for the same amount of current, thermally confined sidewall electrode structures of the present invention having nitride rich tantalum nitride thermal isolation between the more highly conductive TiN layer and the underlying bulk contact plug, can be on the order of 100 times more efficient than electrodes without such thermal isolation. Because of this improved power delivery efficiency, to generate a certain amount of power applied to an active region of a memory element, during a reset operation for example, the current required is much smaller with the thermally confined side-wall electrode structures of the present invention. The increase in power delivery efficiency is believed to be due at least to a large degree, to the effective thermal insulation by the nitride rich tantalum nitride layer from the underlying contact plug.

While the present invention is disclosed by reference to the preferred embodiments and examples detailed above, it is to be understood that these examples are intended in an illustrative rather than in a limiting sense. It is contemplated that modifications and combinations will readily occur to those skilled in the art, which modifications and combinations will be within the spirit of the invention and the scope of the following claims.

Claims

1. A memory device, comprising: an array of contacts having top surfaces;an insulating layer over the array of contacts, the insulating layer including a trench having at least a first side-wall aligned over the top surfaces of a first plurality of contacts in the array;a plurality of side-wall electrodes on the first side-wall of the trench contacting respective top surfaces of the contacts in the first plurality of contacts and having electrode top surfaces, the side-wall electrodes respectively comprising a layer of tantalum nitride, having a composition TaxNy, where y is greater than x, and a layer of electrode material having a lower electrical resistivity and a lower thermal resistivity than the layer of tantalum nitride; anda first element of memory material in direct contact with the electrode top surfaces of the plurality of side-wall electrodes.

2. The device of claim 1, wherein the layer of tantalum nitride is disposed between the layer of electrode material and the top surface of the corresponding contact.

3. The device of claim 1, including a second layer of tantalum nitride, wherein the first mentioned layer of tantalum nitride is disposed between the layer of electrode material and the top surface of the corresponding contact, and the second layer of tantalum nitride overlies the layer of electrode material.

4. The device of claim 1, wherein the layer of electrode material consists of titanium nitride.

5. The device of claim 1, wherein the memory material comprises a phase change material.

6. The phase change memory device of claim 1, wherein tantalum nitride TaxNy is at least one of Ta3N5 and Ta2N3.

7. The device of claim 1 wherein the layer of electrode material consists of one or more materials selected from a group including TaxNy, having a lower electrical resistivity than said first mentioned layer of tantalum nitride, Ta, W, W-silicide, Pt, Ru, RuO2, Ir, and IrO2.

8. The device of claim 1, wherein the layer of tantalum nitride TaxNy is from 1 nanometer to 20 nanometers thick.

9. The device of claim 1, wherein the layer of electrode material consists of titanium nitride having thickness from 0.4 nanometers to 10 nanometers.

10. The device of claim 1, including an array of access devices coupled to the array of contacts.

11. The device of claim 1, wherein the trench has a second side-wall parallel with the first side-wall, and is aligned over the top surfaces of a second plurality of contacts in the array; a second plurality of side-wall electrodes on the second side-wall of the trench contacting respective top surfaces of the contacts in the second plurality of contacts and having electrode top surfaces, the side-wall electrodes respectively comprising a layer of tantalum nitride, having a composition TaxNy, where y is greater than x, and a layer of electrode material having a lower electrical resistivity and a lower thermal resistivity than the layer of tantalum nitride; anda second element of memory material in direct contact with the electrode top surfaces of the second plurality of side-wall electrodes.

12. A method for constructing a memory device, comprising: forming an array of contacts having top surfaces on a substrate;forming a trench within a first insulating layer on the array of contacts, the trench having a side-wall aligned over the top surfaces of a plurality of contacts in the array of contacts;depositing electrode material over the insulating layer and on the side-wall of the trench, the electrode material including a layer of tantalum nitride, having a composition TaxNy, where y is greater than x, and a layer of electrode material having a lower electrical resistivity and a lower thermal resistivity than the layer of tantalum nitride;depositing a second insulating spacer layer of insulating materials over the layers of materials;removing the electrode material and second insulating spacer layer in a center region of the trench and outside the trench while keeping the electrode material lining the sidewall of the trench and part of the top surfaces of the contacts;filling the trench with dielectric fill material to form a filled structure, and etching or polishing the filled structure to form a surface exposing a top edge of the electrode material;etching the electrode material in a pattern to form isolated side-wall electrodes contacting respective top surfaces of the contacts in the plurality of contacts and having electrode top surfaces; andforming elements of a memory material in direct contact with respective electrode top surfaces of the side-wall electrodes.

13. The method of claim 12, wherein the layer of tantalum nitride is disposed between the layer of electrode material and the top surface of the corresponding contact.

14. The method of claim 12, wherein the electrode material includes a second layer of tantalum nitride, wherein the first mentioned layer of tantalum nitride is disposed between the layer of electrode material and the top surface of the of the corresponding contact, and the second layer of tantalum nitride overlies the layer of electrode material.

15. The method of claim 12, wherein the electrode material is titanium nitride.

16. The method of claim 12, wherein the memory material comprises a phase change material.

17. The method of claim 12, wherein tantalum nitride TaxNy is at least one of Ta3N5 and Ta2N3.

18. The method of claim 12, wherein the electrode material consists of one or more materials selected from a group including TaxNy, having a lower electrical resistivity that said first mention layer of tantalum nitride, Ta, W, W-silicide, Pt, Ru, RuO2, Ir, and IrO2.

19. The method of claim 12, wherein the layer of tantalum nitride TaxNy is from 1 nanometer to 20 nanometers thick.

20. The method of claim 12, wherein the electrode material is titanium nitride having a thickness from 0.4 nanometers to 10 nanometers.

21. The method of claim 12, including forming an array of access devices coupled to the array of contacts.