Transparent light emitting device with light emitting diodes

Information

  • Patent Grant
  • 10658557
  • Patent Number
    10,658,557
  • Date Filed
    Thursday, September 12, 2019
    5 years ago
  • Date Issued
    Tuesday, May 19, 2020
    4 years ago
Abstract
A transparent light emitting diode (LED) includes a plurality of III-nitride layers, including an active region that emits light, wherein all of the layers except for the active region are transparent for an emission wavelength of the light, such that the light is extracted effectively through all of the layers and in multiple directions through the layers. Moreover, the surface of one or more of the III-nitride layers may be roughened, textured, patterned or shaped to enhance light extraction.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention

The present invention is related to light extraction from light emitting diodes (LEDs).


2. Description of the Related Art

(Note: This application references a number of different publications as indicated throughout the specification. In addition, a list of a number of different publications can be found below in the section entitled “References.” Each of these publications is incorporated by reference herein.)


In order to increase the light output power from the front side of a light emitting diode (LED), the emitted light is reflected by a mirror placed on the backside of the substrate or is reflected by a mirror coating on the lead frame, even if there are no mirrors on the backside of the substrate, if the bonding material is transparent on the emission wavelength. However, this reflected light is re-absorbed by the emitting layer (active layer), because the photon energy is almost same as the band-gap energy of the light emitting species, such as AlInGaN multiple quantum wells (MQWs). The efficiency or output power of the LEDs is decreased due to this re-absorption of the light by the emitting layer. See, for example, FIGS. 1, 2 and 3, which are described in more detail below. See also Jpn. J. Appl. Phys., 34, L797-99 (1995) and Jpn. J. Appl. Phys., 43, L180-82 (2004).


What is needed in the art are LED structures that more effectively extract light. The present invention satisfies that need.


SUMMARY OF THE INVENTION

The present invention describes a transparent light emitting diode. Generally, the present invention describes a light emitting device comprised of a plurality of III-nitride layers, including an active region that emits light, wherein all of the layers except for the active region are transparent for an emission wavelength of the light, such that the light is extracted effectively through all of the layers and in multiple directions through the layers. Moreover, the surface of one or more of the III-nitride layers may be roughened, textured, patterned or shaped to enhance light extraction.


In one embodiment, the III-nitride layers reside on a transparent substrate or sub-mount, wherein the III-nitride layers are wafer bonded with the transparent substrate or sub-mount using a transparent glue, a transparent epoxy, or other transparent material, and light is extracted through the transparent substrate or sub-mount. The transparent substrate or sub-mount are electrically conductive, as is the transparent glue, transparent epoxy, or other transparent material.


A lead frame supports the III-nitride layers (as well as the transparent substrate or sub-mount), which reside on a transparent plate in the lead frame. Thus, the light emitted from the III-nitride layers is transmitted through the transparent plate in the lead frame. Moreover, the device may include one or more transparent conducting layers that are positioned to electrically connect the III-nitride layers, and one or more current spreading layers that are deposited on the III-nitride layers, wherein the transparent conducting layers are deposited on the current spreading layers. Mirrors or mirrored surfaces are eliminated from the device to minimize internal reflections in order to minimize re-absorption of the light by the active region.


In another embodiment, the III-nitride layers are embedded in or combined with a shaped optical element, and the light is extracted from more than one surface of the III-nitride layers before entering the shaped optical element and subsequently being extracted. Specifically, at least a portion of the light entering the shaped optical element lies within a critical angle and is extracted. Moreover, one or more surfaces of the shaped optical element may be roughened, textured, patterned or shaped to enhance light extraction. Further, the shaped optical element may include a phosphor layer, which may be roughened, textured, patterned or shaped to enhance light extraction. The shaped optical element may be an inverted cone shape, wherein the III-nitride layers are positioned within the inverted cone shape such that the light is reflected by sidewalls of the inverted cone shape.


In yet another embodiment, an insulating layer covering the III-nitride layers is partially removed, and a conductive layer is deposited within a hole or depression in the surface of the insulating layer to make electrical contact with the III-nitride layers.





BRIEF DESCRIPTION OF THE DRAWINGS

Referring now to the drawings in which like reference numbers represent corresponding parts throughout:



FIGS. 1, 2 and 3 are cross-sectional schematic illustrations of conventional LEDs.



FIGS. 4A and 4B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 5A and 5B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 6 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 7 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 8A and 8B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 9 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 10A and 10B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 11 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 12A and 12B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 13 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 14 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 15A and 15B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 16 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIG. 17 is a schematic illustration of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 18A and 18B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 19A and 19B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 20A and 20B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 21A and 21B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.



FIGS. 22A and 22B are schematic and plan view illustrations, respectively, of an improved LED structure according to the preferred embodiment of the present invention.





DETAILED DESCRIPTION OF THE INVENTION

In the following description of the preferred embodiment, reference is made to the accompanying drawings which form a part hereof, and in which is shown by way of illustration a specific embodiment in which the invention may be practiced. It is to be understood that other embodiments may be utilized and structural changes may be made without departing from the scope of the present invention.


Overview


In the following description of the figures, the details of the LED structures are not shown. Only the emitting layer (usually AlInGaN MQW), p-type GaN layer, n-type GaN layer and sapphire substrate are shown. Of course, there may be other layers in the LED structure, such as a p-AlGaN electron blocking layer, InGaN/GaN super lattices and others. In this invention, the most important aspects are the surfaces of the LED structure, because the light extraction efficiency is determined mainly by the surface layer or condition of the epitaxial wafers. Consequently, only some aspects (the surface layers) of the LED are shown in all of the figures.


Conventional LED Structures



FIGS. 1, 2 and 3 are schematic illustrations of conventional LEDs.


In conventional LEDs, in order to increase the light output power from the front side of the LED, the emitting light is reflected by the mirror on the backside of the sapphire substrate or the mirror coating on the lead frame even if there is no mirrors on the backside of the sapphire substrate and if the bonding material is transparent on the emission wavelength. This reflected light is re-absorbed by the emitting layer (active layer) because the photon energy is almost same as the band-gap energy of the quantum well of AlInGaN multi-quantum well (MQW). Then, the efficiency or output power of the LEDs is decreased due to the re-absorption by the emitting layer.


In FIG. 1, a conventional LED includes a sapphire substrate 100, emitting layer 102 (active layer), and semi-transparent or transparent electrodes 104, such as ITO or ZnO. The LED is die-bonded on a lead frame 106 with a clear epoxy molding 108 without any mirror on the back side of the sapphire substrate 100. In this case, the coating material on the lead frame 106, or the surface of the lead frame 106, becomes a mirror 110. If there is a mirror 110 on the back side of the substrate 100, the LED chip is die-bonded using an Ag paste. The active layer 102 emits light 112 towards the substrate 100 and emits light 114 towards the electrodes 104. The emitting light 112 is reflected by the mirror 110 towards the electrode 104, becoming reflected light 116 which is transmitted by the electrode 104 to escape the LED. The LED is wire bonded 118 to the lead frame 106.


In FIG. 2, the conventional LED is similar to that shown in FIG. 1, except that it is a flip-chip LED. The LED includes a sapphire substrate 200 and emitting layer 202 (active layer), and a highly reflective mirror 204. The LED is die-bonded 206 onto a lead frame 208 and embedded in a clear epoxy molding 210. The active layer 202 emits light 212 towards the substrate 200 and emits light 214 towards the highly reflective mirror 204. The emitting light 214 is reflected by the mirror 204 towards the substrate 200, becoming reflected light 216 which is transmitted by the substrate 200 to escape the LED.


In FIG. 3, the conventional LED includes a conducting sub-mount 300, high reflectivity mirror 302 (with Ag>94% reflectivity (R)), a transparent ITO layer 304, a p-GaN layer 306, an emitting or active layer 308, and an n-GaN layer 310. The LED is shown without the epoxy molding, although similar molding may be used. The emitting layer 308 emits LED emissions 312 towards the mirror 302 and emits LED emissions 314 towards the n-GaN layer 310. The emission 312 of the emitting layer 308 is reflected by the mirror 302, where the reflective light emissions 316 are re-absorbed by the emitting layer 308. The efficiency of the LED is decreased due to this re-absorption. The n-GaN layer may be roughened 317 to enhance extraction 318 of LED emissions 314.


Improved LED Structures


The present invention describes a transparent LED. Generally, the present invention describes a light emitting device comprised of a plurality of III-nitride layers, including an active region that emits light, wherein all of the layers except for the active region are transparent for an emission wavelength of the light, such that the light is extracted effectively through all of the layers and in multiple directions through the layers. The surface of one or more of the III-nitride layers may be roughened, textured, patterned or shaped to enhance light extraction.



FIG. 4A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an emitting layer 400, an n-type GaN layer 402, a p-type GaN layer 404, a first ITO layer 406, a second ITO layer 408, and a glass layer 410. The n-type GaN layer 402 may have surface 412 that is roughened, textured, patterned or shaped (e.g., a cone shaped surface), and the glass layer 410 may have a surface 414 that is roughened, textured, patterned or shaped (e.g., a cone shaped surface). The LED is wire bonded 416 to a lead frame 418 via bonding pads 420, 422. FIG. 4B shows a top view of the lead frame 418.


In FIG. 4A, the LED structure is grown on a sapphire substrate, which is removed using a laser de-bonding technique. Thereafter, the first ITO layer 406 is deposited on the p-type GaN layer 404. The LED structure is then attached to the glass layer 410, which is coated by the second ITO layer 408, using an epoxy as a glue. The LED structure is then wire bonded 416 to the lead frame 418.


In FIG. 4A, there are no intentional mirrors at the front or back sides of the LED. Instead, the lead frame 418 is designed to effectively extract light 424 from both sides of the LED, because the frame 418 does not obstruct the surfaces 412 and 414, i.e., the back side 426 of the LED as well as the front side 428 of the LED. FIG. 4B shows that the frame 418 supports the LED at the edges of the glass layer 410, leaving the emitting surface of the glass layer 410 and LED unobstructed.


An ohmic contact may be placed below the bonding pad 420 on the n-GaN layer 402, but is not shown in the figure for simplicity.



FIG. 5A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an InGaN multiple quantum well (MQW) layer as an emitting layer 500, an n-type GaN layer 502, a p-type GaN layer 504, an ITO or ZnO layer 506, a transparent insulating layer 508, and transparent conductive glue 510 for bonding the ITO or ZnO layer 506 to a transparent conductive substrate 512. The transparent conductive substrate 512 may have a surface 514 that is roughened, textured, patterned or shaped (e.g., a cone shaped surface), and the n-GaN layer 504 may have a surface 516 that is roughened, textured, patterned or shaped (e.g., a cone shaped surface). Preferably, the layers 500, 502, 504 and 506 have a combined thickness 518 of approximately 5 microns, and the substrate 512 and glue 510 have a combined thickness 520 of approximately 400 microns. Finally, ohmic electrode/bonding pads 522, 524 are placed on the LED.


The LED structure may be grown on a sapphire substrate, which is removed using a laser de-bonding technique. The ITO layer 506 is then deposited on the p-type GaN layer 504. Before deposition of the ITO layer 506, the insulating layer 508, which may comprise SiO2 or SiN, is deposited as a current spreading layer. Without the current spreading layer 508, the emission intensity of the LED becomes small due to non-uniform current flows. The transparent conductive substrate 512, which may be ZnO, Ga2O3, or another material that is transparent at the desired wavelengths, is wafer bonded or glued to the ITO layer 506 using the transparent conductive glue 510. Then, an n-GaN ohmic electrode/bonding pad 522 and an p-GaN ohmic electrode/bonding pad 524 are formed on both sides of the LED structure. Finally, the nitrogen-face (N-face) of the n-type GaN layer 502 is roughened, textured, patterned or shaped 516 to enhance light extraction, for example, using a wet etching, such as KOH or HCL, to form a cone-shaped surface 516.



FIG. 5B is a plan view of the LED of FIG. 5A, and shows the LED placed on a transparent plate 526, which resides on a lead frame 528, both of which work to remove heat from the LED. The p-side of the LED (i.e., the side with the substrate 512) is attached to the transparent plate 526. Wire bonding is performed between the bonding pad 524 of the n-type GaN layer 502 and the lead frame 528.


There are no intentional mirrors at the front 530 or back sides 532 of the LED. Instead, the lead frame 528 is designed to effectively extract light from both sides of the LED, i.e., the back side 532 of the LED as well as the front side 530 of the LED.


Finally, an ohmic contact may be placed below the bonding pad 524 of the n-GaN layer 502. However, this ohmic contact is not shown in the figure for simplicity.



FIG. 6 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an InGaN MQW active layer 600, an n-GaN layer 602, a p-GaN layer 604, an epoxy layer 606 (which is approximately 400 microns thick 608), a bonding pad 610, an ohmic electrode/bonding pad 612, and an ITO or ZnO layer 614. The combined thickness 616 of the n-GaN layer 602, active layer 600 and p-GaN layer 604 is approximately 5 microns.



FIG. 7 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an InGaN MQW active layer 700, an n-GaN layer 702, a p-GaN layer 704, an epoxy layer 706 (approximately 400 microns thick 708), a narrow stripe Au connection 710, a bonding pad 712, an ohmic electrode/bonding pad 714, and ITO or ZnO 716. The thickness 718 of the n-GaN 702, active layer 700 and p-GaN layer 704 is approximately 5 microns.


In both FIGS. 6 and 7, a thick epoxy layer 606, 706 is used, rather than the glass layer 410 shown in FIG. 4. To make electrical contact, the epoxy insulating layers 606, 706 are partially removed, and the ITO layer 614, which is a transparent metal oxide, or a narrow stripe of Au or other metal layer 710, are deposited on the epoxy layers 606, 706, as well as within a hole or depression 618, 720 in the surface of the epoxy layers 606, 706, to make electrical; contact with the p-GaN layer 604, 704.


In addition, both FIGS. 6 and 7 show that roughened, textured, patterned or shaped surfaces 620, 722 are formed on the nitrogen face (N-face) of the n-type GaN layers 602, 702. These roughened, textured, patterned or shaped surfaces 620, 722 enhance light extraction. Note that, if a GaN substrate is used instead of a sapphire substrate, laser de-bonding would not be required and, a result, the sub-mounts 606, 706 would not be required. Moreover, if the LED structure is created on a GaN substrate, the ITO layer 614 would be deposited on the p-type GaN layer 604 and the backside of the GaN substrate, which is an N-face GaN, could be etched using a wet etching, such as KOH and HCL in order to form surfaces 620, 722 that are roughened, textured, patterned or shaped on the n-type GaN layers 602, 702.


Note also that, if the surface of the ITO layer 614 is roughened, textured, patterned or shaped, light extraction is increased through the ITO layer 614. Even without the ITO layer 614 on the p-type GaN layer 604, the roughening, texturing, patterning or shaping of the surface of the p-type GaN layer 604 is effective to increase the light extraction through the p-type GaN layer 604.


Finally, an ohmic contact for the n-type GaN layer 612, and the ITO or ZnO layer 614 may be used after the surface 620 roughening, texturing, patterning or shaping of the n-type GaN layer 602. The ITO or ZnO layer 614 has a similar refractive index as GaN and, as a result, the light reflection at the interface between the ITO, ZnO and GaN is minimized. FIG. 8A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an emitting layer 800, an n-type GaN layer 802, a p-type GaN layer 804, a first ITO layer 806, a second ITO layer 808, and a glass layer 810. The n-type GaN layer 802 has a surface 812 that is roughened, textured, patterned or shaped (e.g., a cone shape surface), and the glass layer 810 has a surface 814 that is roughened, textured, patterned or shaped (e.g., a cone shape surface). The LED is wire bonded 816 to a lead frame or sub-mount 818 using the bonding pads 820, 822.


The LED may be embedded with or contained in a molding or shaped optical element 824, such as a sphere made of epoxy or glass, forming, for example, a lens. The shaped optical element 824 may include a phosphor layer 826, which may be remote from the LED, that is roughened, textured, patterned or shaped, for example, on an outer surface of the shaped optical element 824. In this embodiment, the emitting layer 800 emits light 828 towards the surfaces 812 and 814, where the light can be extracted 830.


In this embodiment, because the shaped optical element 824 is a sphere, the LED structure can be considered a small spot light source, because the direction of all of the light emitted from the LED is substantially normal to the interface between air and the sphere 824, and the light therefrom is effectively extracted to air through the interface between air and the sphere 824.


In addition, if the phosphor layer 826 is placed on or near the outer surface of the shaped optical element, the conversion efficiency, for example, from blue light to white light, is increased due to reduced re-absorption of the light 828 resulting from reduced back scattering of the light 828 by the phosphor layer 826. Moreover, if the surface 834 of the phosphor layer 826 is roughened, textured, patterned or shaped, light extraction is again increased.


Finally, FIG. 8B is a top view of the device in FIG. 8A, illustrating the lead frame 818.



FIG. 9 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an InGaN MQW emitting layer 900, an n-type GaN layer 902, a p-type GaN layer 904, an ITO layer 906 having a surface 908 that is roughened, textured, patterned or shaped, a bonding pad 910, an ohmic contact/bonding pad 912, a surface 914 of the n-type GaN layer 902 that is roughened, textured, patterned or shaped, and an epoxy layer 916 that is deposited on the 908. The LED may be embedded with or contained in a molding or shaped optical element 918, such as a sphere made of epoxy or glass, forming, for example, a lens. The shaped optical element 918 may include a phosphor layer 920, which may be remote from the LED, that is roughened, textured, patterned or shaped, for example, on an outer surface of the shaped optical element 918.


In FIG. 9, the ITO or ZnO layer 906 is roughened, textured, patterned or shaped to improve light extraction through the ITO or ZnO layer 906. In addition, the epoxy 918 is sub-mounted. Otherwise, the structure of FIG. 9 is the same as that shown in FIGS. 6-8.



FIG. 10A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an InGaN MQW emitting layer 1000, an n-type GaN layer 1002, a p-type GaN layer 1004, an ITO layer 1006, a bonding pad 1008, an ohmic contact/bonding pad 1010, a surface 1012 of the ITO layer 1006 that is roughened, textured, patterned or shaped, a surface 1014 of the n-type GaN layer 1002 that is roughened, textured, patterned or shaped, and an epoxy layer 1016 that is deposited on the surface 1012.


The LED may be embedded with or contained in a molding or shaped optical element 1018, such as a sphere made of epoxy or glass, forming, for example, a lens. The shaped optical element 1018 may include a phosphor layer 1020, which may be remote from the LED, that is roughened, textured, patterned or shaped, for example, on an outer surface of the shaped optical element 1018.


The LED may also include a current spreading layer 1022, which may comprise SiN, SiO2, or some other insulating material, for example, is deposited before the ITO or ZnO layer 1006 to flow the current uniformly through the p-type GaN layer 1004.


Finally, the LED is wire bonded 1024 to a lead frame 1026. FIG. 10B shows a top view of the lead frame 1026.



FIG. 11 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an InGaN MQW emitting layer 1100, an n-type GaN layer 1102, a p-type GaN layer 1104, an ITO layer 1106, a bonding pad 1108, an ohmic contact/bonding pad 1110, a surface 1112 of the ITO layer 1106 that is roughened, textured, patterned or shaped, a surface 1114 of the p-type GaN layer 1102 that is roughened, textured, patterned or shaped, and an epoxy layer 1116 that is deposited on the surface 1112.


The LED may be embedded with or contained in a molding or shaped optical element 1118, such as a sphere made of epoxy or glass, forming, for example, a lens. The shaped optical element 1118 may include a phosphor layer 1120, which may be remote from the LED, that is roughened, textured, patterned or shaped, for example, on an outer surface of the shaped optical element 1118.


The LED may also include a current spreading layer 1122, which may comprise SiN, SiO2, or some other insulating material, for example, that is deposited before the ITO or ZnO layer 1106 to flow the current uniformly through the p-type GaN layer 1104.


Finally, the LED is wire bonded 1124 to a lead frame 1126. FIG. 11B shows a top view of the lead frame 1126.


In the embodiment of FIG. 11, a mirror 1128 is placed outside of the shaped optical element 1118, in order to obtain more light from a front side 1130 of the device. The shape of the mirror is designed to prevent reflected light from reaching the LED, in order to reduce re-absorption of the light by the LED.



FIG. 12A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an emitting layer 1200, an n-type GaN layer 1202, a p-type GaN layer 1204, an ITO or ZnO layer 1206, and a substrate 1208, which may be a flat sapphire substrate or a patterned sapphire substrate (PSS). The LED is wire bonded 1210 to a lead frame 1212, and embedded in or combined with moldings or shaped optical elements 1214, 1216, such as inverted cone shapes made of epoxy or glass, forming, for example, lenses. In this embodiment, the shaped optical elements 1214, 1216 are formed on opposite sides, e.g., the top/front and bottom/back sides of the LED, wherein the emitting layer 1200 emits light 1222 that is extracted from both the top/front and bottom/back sides of the LED.


The LED is electrically connected to the lead frame 1218 via bonding pads 1224, 1226. The bonding pad 1224 is deposited on the ITO or ZnO layer 1206, and the ohmic contact/bonding pad 1226 is deposited on the n-type GaN layer 1202 after the n-type GaN 1202 layer is exposed by a selective etch through the p-type GaN layer 1204.


As noted above, the LED may be combined with epoxy or glass and molded as an inverted cone-shapes 1214, 1216 for both the front 1218 and back sides 1220, wherein the inverted cone molding shape 1214, 1216 provides enhanced light extraction. Specifically, most of the light entering the inverted cone shapes 1214, 1216 lies within a critical angle and is extracted. The light is reflected to a top or emitting surface of the inverted cone shape 1214 by the side walls of the inverted cone shape 1214 for emission through the top surface of the inverted cone shape 1214, and similarly, the light is reflected to a bottom or emitting surface of the inverted cone shape 1216 by the side walls of the inverted cone shape 1216 for emission through the bottom surface of the inverted cone shape 1214.


Finally, note that a patterned sapphire substrate (PSS) 1208 improves the light extraction efficiency through the interface 1228 between the n-GaN layer 1202 and the substrate 1208. In addition, the backside 1230 of the sapphire substrate 1208 may be roughened, textured, patterned or shaped (e.g., a cone shaped surface) to increase the light extraction efficiency.



FIG. 12B shows a top view of the lead frame 1212.



FIG. 13 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an emitting layer 1300, an n-type GaN layer 1302, a p-type GaN layer 1304, an ITO or ZnO layer 1306, and a substrate 1308, which may be a flat sapphire substrate or a patterned sapphire substrate (PSS). The LED is wire bonded 1310 to a lead frame 1312, and embedded in or combined with moldings or shaped optical elements 1314, 1316, such as inverted cone shapes made of epoxy or glass, forming, for example, lenses. In this embodiment, the shaped optical elements 1314, 1316 are formed on opposite sides, e.g., the top/front and bottom/back sides of the LED, wherein the emitting layer 1300 emits light 1322 that is extracted from both the top/front and bottom/back sides of the LED.


The LED is electrically connected to the lead frame 1318 via bonding pads 1324, 1326. The bonding pad 1324 is deposited on the ITO or ZnO layer 1306, and the ohmic contact/bonding pad 1326 is deposited on the n-type GaN layer 1302 after the n-type GaN 1302 layer is exposed by a selective etch through the p-type GaN layer 1304.


As noted above, the LED may be combined with epoxy or glass and molded as an inverted cone-shapes 1314, 1316 for both the front 1318 and back sides 1320, wherein the inverted cone molding shape 1314, 1316 provides enhanced light extraction. Specifically, most of the light entering the inverted cone shapes 1314, 1316 lies within a critical angle and is extracted. The light is reflected to a top or emitting surface of the inverted cone shape 1314 by the side walls of the inverted cone shape 1314 for emission through the top surface of the inverted cone shape 1314, and similarly, the light is reflected to a bottom or emitting surface of the inverted cone shape 1316 by the side walls of the inverted cone shape 1316 for emission through the bottom surface of the inverted cone shape 1314. Moreover, the top/front surface 1328 of the shaped optical elements 1314, and the bottom/back surface 1330 of the shaped optical element 1316 may be roughened, textured, patterned, or shaped to increase the light extraction through the elements 1314, 1316.



FIG. 14 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure 1400 includes an emitting layer 1402 and a substrate 1404 (as well as other layers), and the substrate 1404 is a flat or patterned sapphire substrate. The LED 1400 is wire bonded 1406 to a lead frame 1408, and embedded in or combined with moldings or shaped optical elements 1410, 1412, such as inverted cone shapes made of epoxy or glass, forming, for example, lenses. In this embodiment, the shaped optical elements 1410, 1412 are formed on opposite sides, e.g., the top/front side 1414 and bottom/back side 1416 of the LED 1400, wherein the emitting layer 1402 emits light 1418 that is extracted from both the top/front side 1414 and bottom/back side 1416 of the LED 1400.


In FIG. 14, phosphor layers 1420 may be placed near the top/front surface 1422 of the shaped optical element 1410 and the bottom/back surface 1424 of the shaped optical element 1412. Preferably, the phosphor layers 1420 should be positioned as far away as possible from the LED 1400. In this case, the conversion efficiency of the blue light to white light is increased, due to reduced re-absorption of the emitted light by the LED 1400 resulting from reduced back-scattering of the light by the phosphor layers 1420 to the LED 1400. Moreover, the surfaces 1426 of the phosphor layers 1420 may be roughened, textured, patterned or shaped to improve light extraction.



FIG. 15A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure 1500 comprises an emitting layer 1502, an n-type GaN layer 1504, a p-type GaN layer 1506, an ITO or ZnO layer 1508, and a substrate 1510, which may be a flat sapphire substrate or a patterned sapphire substrate (PSS).


The LED 1500 is wire bonded 1512 to a lead frame 1514, wherein FIG. 15B is a schematic illustration showing the top view of the lead frame 1514.


In this embodiment, the LED 1500 is embedded in or combined with moldings or shaped optical elements 1516, 1518, such as inverted cone shapes made of epoxy or glass, forming, for example, lenses. The shaped optical elements 1516, 1518 are formed on opposite sides, e.g., the top/front side 1520 and bottom/back side 1522 of the LED 1500, wherein the emitting layer 1502 emits light 1524 that is extracted from both the top/front side 1520 and bottom/back side 1522 of the LED 1500.


A mirror 1526 may be placed inside the shaped optical element 1518 to increase the light output to the front side 1528 of the LED 1500. Moreover, the shape of the mirror 1526 is designed to prevent reflections of the light 1530 emitted from the LED 1500 from being re-absorbed by the LED 1500, which would reduce the output power or the efficiency of the LED. Instead, the mirror 1526 guides the reflected light 1530 away from the LED 1500.


In addition, the mirror 1526 is only partially attached (or not attached at all) to the LED 1500 or the substrate 1510. This differs from conventional LEDs, where mirrors are attached to the entire surface of the LED, for example, as shown in FIGS. 1-3.



FIG. 16 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure comprises an emitting layer 1600, an n-type GaN layer 1602, a p-type GaN layer 1604, an ITO or ZnO layer 1606, and a substrate 1608, which may be a flat sapphire substrate or a patterned sapphire substrate (PSS). The LED is wire bonded 1610 to a lead frame 1612.


In this embodiment, the LED is embedded in or combined with moldings or shaped optical elements 1614, 1616, such as inverted cone shapes made of epoxy or glass, forming, for example, lenses. The shaped optical elements 1614, 1616 are formed on opposite sides, e.g., the top/front side 1618 and bottom/back side 1620 of the LED, wherein the emitting layer 1602 emits light 1622 that is extracted from both the top/front side 1618 and bottom/back side 1620 of the LED.


A mirror 1624 may be placed inside the shaped optical element 1616 to increase the light output to the front side 1626 of the LED. Moreover, the shape of the mirror 1624 is designed to prevent reflections of the light 1628 emitted from the LED from being re-absorbed by the LED, which would reduce the output power or the efficiency of the LED. Instead, the mirror 1624 guides the reflected light 1628 away from the LED.


In addition, the mirror 1624 is only partially attached (or not attached at all) to the LED or the substrate 1608. This differs from conventional LEDs, where mirrors are attached to the entire surface of the LED, for example, as shown in FIGS. 1-3.


Finally, the top/front surface 1630 of the shaped optical element 1614 is roughened, textured, patterned or shaped to improve light extraction efficiency.



FIG. 17 is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure 1700 includes an emitting layer 1702 and a substrate 1704 (as well as other layers), and the substrate 1704 is a flat or patterned sapphire substrate. The LED 1700 is wire bonded 1706 to a lead frame 1708, and embedded in or combined with moldings or shaped optical elements 1710, 1712, such as inverted cone shapes made of epoxy or glass, forming, for example, lenses. In this embodiment, the shaped optical elements 1710, 1712 are formed on opposite sides, e.g., the top/front side 1714 and bottom/back side 1716 of the LED 1700, wherein the emitting layer 1702 emits light 1718 that is extracted from both the top/front side 1714 and bottom/back side 1716 of the LED 1700.


In FIG. 17, a mirror 1720 may be placed inside the shaped optical element 1712 to increase the light output directed to the front side 1720 of the LED 1700. Moreover, a phosphor layer 1722 may be placed near the top surface 1724 of the shaped optical element 1710. Preferably, the phosphor layer 1722 is positioned as far away as possible from the LED 1700. In this case, the conversion efficiency of the blue light to white light is increased, due to reduced re-absorption of the light 1718 emitted from the LED 1700 resulting from reduced back-scattering by the phosphor layer 1722. In addition, the surface 1726 of the phosphor layer 1722 may be roughened, textured, patterned or shaped to improve light extraction through the phosphor layer 1722.



FIG. 18A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure 1800 includes an emitting layer 1802 and a substrate 1804 (as well as other layers). The LED 1800 is wire bonded 1806 to a lead frame 1808, wherein FIG. 18B is an illustration showing the top view of the lead frame 1808.


In this embodiment, the LED 1800 is embedded in or combined with a molding or shaped optical element 1810, such as an inverted cone shape made of epoxy or glass, forming, for example, a lens. Light 1812 emitted by the emitting layer 1802 is reflected by mirrors 1814 positioned within the shaped optical element 1810, towards the front side 1816 of the shaped optical element 1810, away from the back side 1818 of the shaped optical element 1810, wherein the reflected light 1820 is output from the shaped optical element 1810.



FIG. 19A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure 1900 includes an emitting layer 1902 and a substrate 1904 (as well as other layers). The LED 1900 is wire bonded 1906 to a lead frame 1908, wherein FIG. 19B is an illustration showing the top view of the lead frame 1908.


In this embodiment, the LED 1900 is embedded in or combined with a molding or shaped optical element 1910, such as an inverted cone shape made of epoxy or glass, forming, for example, a lens. Light 1912 emitted by the emitting layer 1902 is reflected by the sidewalls 1914 of the shaped optical element 1910, towards the front side 1916 of the shaped optical element 1910, wherein the reflected light 1918 is output from the shaped optical element 1910, and away from the back side 1920 of the shaped optical element 1910.


Preferably, the LED 1900 is positioned within the shaped optical element 1910 such that the light 1912 emitted by the LED is reflected by mirrored surfaces 1922 of the sidewalls 1914, wherein the mirrored surfaces 1922 are deposited or attached to the sidewalls 1914. The angle 1924 of the sidewalls 1914 relative to the base 1920 of the shaped optical element 1910 is a critical angle that reflects the light 1912 emitted from the LED 1900 to the front side 1916 of the shaped optical element 1910. For example, the refractive index of epoxy is n2=1.5, the refractive index of the air is n1=1, and, as a result, the critical angle of the reflection is sin−1 (1/1.5). Therefore, the angle 1924 of the sidewalls 1914 should be more than sin−1 (1/1.5). This results in the reflected light 1912 from the LED 1900 being effectively extracted from the top surface 1928 of the shaped optical element in the direction labeled by 1926.



FIG. 20A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure includes an emitting layer 2000 and a substrate 2002 (as well as other layers). The LED is wire bonded 2004 to a lead frame 2006, wherein FIG. 20B is a top view of the lead frame 2006.


In this embodiment, the LED is embedded in or combined with a molding or shaped optical element 2008, such as an inverted cone shape made of epoxy or glass, forming, for example, a lens. Light 2010 emitted by the emitting layer 2002 is reflected by the sidewalls 2012 of the shaped optical element 2008, towards the front side 2014 of the shaped optical element 2008, wherein the reflected light 2016 is output from the shaped optical element 2008, and away from the back side 2018 of the shaped optical element 2008.


Preferably, the LED is positioned within the shaped optical element 2008 such that the light 2010 emitted by the LED is reflected by the sidewalls 2012. Moreover, the front or top surface 2020 of the shaped optical element 2008 is roughened, textured, patterned or shaped to increase light extraction.


The angle 2022 of the sidewalls 2012 relative to the base 2018 of the shaped optical element 2008 is a critical angle that reflects the 2010 emitted from the LED to the front side 2014 of the shaped optical element 2008. For example, the refractive index of epoxy is n2=1.5, the refractive index of the air is n1=1, and, as a result, the critical angle of the reflection is sin−1 (1/1.5). Therefore, the angle 2022 of the sidewalls 2012 should be more than sin−1 (1/1.5). This results in the reflected light 2010 from the LED being effectively extracted from the front surface 2020 of the shaped optical element 2008.



FIG. 21A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure 2100 includes an emitting layer 2102 and a substrate 2104 (as well as other layers). The LED 2100 is wire bonded 2106 to a lead frame 2108, wherein FIG. 21B shows a top view of the lead frame 2108.


In this embodiment, the LED 2100 is embedded in or combined with a molding or shaped optical element 2110, such as an inverted cone shape made of epoxy or glass, forming, for example, a lens. Preferably, the LED 2100 is positioned within the shaped optical element 2110 such that the light 2112 emitted by the LED is reflected by the sidewalls 2114 of the shaped optical element 2110, towards the front side 2116 of the shaped optical element 2110, wherein the reflected light 2118 is output from the shaped optical element 2110, and away from the back side 2120 of the shaped optical element 2110.


A phosphor layer 2122 may be placed on or near the front or top surface 2124 of the shaped optical element 2110. Preferably, the phosphor layer 2122 is placed as far away as possible from the LED 2100. In this example, the conversion efficiency of blue light to white light is increased due to reduced re-absorption of the light 2112 by the LED 2100 resulting from reduced back-scattering by the phosphor layer 2122. In addition, the surface 2126 of the phosphor layer 2122 may be roughened, textured, patterned or shaped to increase light extraction.



FIG. 22A is a schematic illustrating a specific improved LED structure according the preferred embodiment of the present invention, wherein the improved LED structure 2200 includes an emitting layer 2202 and a substrate 2204 (as well as other layers). The LED 2200 is wire bonded 2206 to a lead frame 2208, wherein FIG. 22B shows a top view of the lead frame 2208.


The LED 2200 is embedded in or combined with moldings or shaped optical elements 2210, 2212, such as inverted cone shapes made of epoxy or glass, forming, for example, lenses. In this embodiment, the shaped optical elements 2210, 2212 are formed on opposite sides, e.g., the top/front side 2214 and bottom/back side 2216 of the LED 2200, wherein the emitting layer 2200 emits light 2218 that is extracted from both the top/front side 2214 and bottom/back side 2216 of the LED 2200.


The lead frame 2208 includes a transparent plate 2220, wherein the LED 2200 is bonded to the transparent plate 2220 using a transparent/clear epoxy 2222 as a die-bonding material. The transparent plate 2220 may be comprised of glass, quartz, sapphire, diamond or other material transparent for the desired emission wavelength, wherein the transparent glass plate 2220 effectively extracts the light 2218 emitted from the LED 2200 to the shaped optical element 2212.


Advantages and Improvements

One advantage of the present invention is that all of the layers of the LED are transparent for the emission wavelength, except for the emitting layer, such that the light is extracted effectively through all of the layers.


Moreover, by avoiding the use of intentional mirrors with the LED, re-absorption of light by the LED is minimized, light extraction efficiency is increased, and light output power is increased.


The combination of a transparent electrode with roughened, textured, patterned or shaped surfaces, with the LED embedded within a shaped optical element or lens, results in increased light extraction.


REFERENCES

The following references are incorporated by reference herein:

  • 1. Appl. Phys. Lett., 56, 737-39 (1990).
  • 2. Appl. Phys. Lett., 64, 2839-41 (1994).
  • 3. Appl. Phys. Lett., 81, 3152-54 (2002).
  • 4. Jpn. J. Appl. Phys., 43, L1275-77 (2004).
  • 5. Jpn. J. Appl. Phys., 45, L1084-L1086 (2006).
  • 6. Jpn. J. Appl. Phys., 34, L797-99 (1995).
  • 7. Jpn. J. Appl. Phys., 43, L180-82 (2004).
  • 8. Fujii T., Gao Y., Sharma R., Hu E. L., DenBaars S. P., Nakamura S., “Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening,” Applied Physics Letters, vol. 84, no. 6, 9 Feb. 2004, pp. 855-7.


CONCLUSION

This concludes the description of the preferred embodiment of the present invention. The foregoing description of one or more embodiments of the invention has been presented for the purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed. Many modifications and variations are possible in light of the above teaching.

Claims
  • 1. A light emitting device, comprising: a sapphire plate, a cathode on a first end of the sapphire plate and an anode on a second end of the sapphire plate, wherein the cathode and anode provide structural support to the sapphire plate and are adapted to provide an electrical connection between the light emitting device and a structure outside the light emitting device;a plurality of III-nitride light emitting diodes (LEDs), each comprising a sapphire growth substrate and each in mechanical communication with the sapphire plate, and the LEDs and sapphire plate configured to extract light emitted by the LEDs through the sapphire plate; anda molding comprising a phosphor and surrounding the LEDs, the molding configured to extract light from both a front side of the light emitting device and a back side of the light emitting device.
  • 2. The light emitting device of claim 1, wherein the sapphire growth substrate is a patterned sapphire substrate (PSS).
CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation under 35 U.S.C. § 120 of: U.S. Utility patent application Ser. No. 16/567,275, filed on Sep. 11, 2019, by Shuji Nakamura, Steven P. DenBaars, and Hirokuni Asamizu, entitled, “FILAMENT LED LIGHT BULB,”, which application is a continuation under 35 U.S.C. § 120 of: U.S. Utility patent application Ser. No. 16/422,323, filed on May 24, 2019, by Shuji Nakamura, Steven P. DenBaars, and Hirokuni Asamizu, entitled, “TRANSPARENT LIGHT EMITTING DIODES,”, now U.S. Pat. No. 10,454,010, issued Oct. 22, 2019, which application is a continuation under 35 U.S.C. § 120 of: U.S. Utility patent application Ser. No. 16/238,736, filed on Jan. 3, 2019, by Shuji Nakamura, Steven P. DenBaars, and Hirokuni Asamizu, entitled, “TRANSPARENT LIGHT EMITTING DIODES,”, which application is a continuation under 35 U.S.C. § 120 of: U.S. Utility patent application Ser. No. 14/461,151, filed on Aug. 15, 2014, by Shuji Nakamura, Steven P. DenBaars, and Hirokuni Asamizu, entitled, “TRANSPARENT LIGHT EMITTING DIODES,”, now U.S. Pat. No. 10,217,916, issued Feb. 26, 2019, which application is a continuation under 35 U.S.C. § 120 of: U.S. Utility patent application Ser. No. 13/622,884, filed on Sep. 19, 2012, by Shuji Nakamura, Steven P. DenBaars, and Hirokuni Asamizu, entitled, “TRANSPARENT LIGHT EMITTING DIODES,”, now U.S. Pat. No. 8,835,959, issued Sep. 16, 2014, which application is a continuation under 35 U.S.C. § 120 of: U.S. Utility patent application Ser. No. 11/954,154, filed on Dec. 11, 2007, by Shuji Nakamura, Steven P. DenBaars, and Hirokuni Asamizu, entitled, “TRANSPARENT LIGHT EMITTING DIODES,”, now U.S. Pat. No. 8,294,166, issued Oct. 23, 2012, which application claims the benefit under 35 U.S.C. Section 119(e) of: U.S. Provisional Patent Application Ser. No. 60/869,447, filed on Dec. 11, 2006, by Shuji Nakamura, Steven P. DenBaars, and Hirokuni Asamizu, entitled, “TRANSPARENT LEDS,”; all of which applications are incorporated by reference herein. This application is related to the following co-pending and commonly-assigned applications: U.S. Utility application Ser. No. 10/581,940, filed on Jun. 7, 2006, by Tetsuo Fujii, Yan Gao, Evelyn. L. Hu, and Shuji Nakamura, entitled “HIGHLY EFFICIENT GALLIUM NITRIDE BASED LIGHT EMITTING DIODES VIA SURFACE ROUGHENING,” now U.S. Pat. No. 7,704,763, issued Apr. 27, 2010, which application claims the benefit under 35 U.S.C Section 365(c) of PCT Application Serial No. US2003/03921, filed on Dec. 9, 2003, by Tetsuo Fujii, Yan Gao, Evelyn L. Hu, and Shuji Nakamura, entitled “HIGHLY EFFICIENT GALLIUM NITRIDE BASED LIGHT EMITTING DIODES VIA SURFACE ROUGHENING,”; U.S. Utility application Ser. No. 11/054,271, filed on Feb. 9, 2005, by Rajat Sharma, P. Morgan Pattison, John F. Kaeding, and Shuji Nakamura, entitled “SEMICONDUCTOR LIGHT EMITTING DEVICE,” now U.S. Pat. No. 8,227,820, issued Jul. 24, 2012; U.S. Utility application Ser. No. 11/175,761, filed on Jul. 6, 2005, by Akihiko Murai, Lee McCarthy, Umesh K. Mishra and Steven P. DenBaars, entitled “METHOD FOR WAFER BONDING (Al, In, Ga)N and Zn(S, Se) FOR OPTOELECTRONICS APPLICATIONS,” now U.S. Pat. No. 7,344,958, issued Mar. 18, 2008, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/585,673, filed Jul. 6, 2004, by Akihiko Murai, Lee McCarthy, Umesh K. Mishra and Steven P. DenBaars, entitled “METHOD FOR WAFER BONDING (Al, In, Ga)N and Zn(S, Se) FOR OPTOELECTRONICS APPLICATIONS,”; U.S. Utility application Ser. No. 11/697,457, filed Apr. 6, 2007, by, Benjamin A. Haskell, Melvin B. McLaurin, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “GROWTH OF PLANAR REDUCED DISLOCATION DENSITY M-PLANE GALLIUM NITRIDE BY HYDRIDE VAPOR PHASE EPITAXY,” now U.S. Pat. No. 7,956,360, issued Jun. 7, 2011, which application is a continuation of U.S. Utility application Ser. No. 11/140,893, filed May 31, 2005, by, Benjamin A. Haskell, Melvin B. McLaurin, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “GROWTH OF PLANAR REDUCED DISLOCATION DENSITY M-PLANE GALLIUM NITRIDE BY HYDRIDE VAPOR PHASE EPITAXY,” now U.S. Pat. No. 7,208,393, issued Apr. 24, 2007, which application claims the benefit under 35 U.S.C. Section 119(e) of U.S. Provisional Application Ser. No. 60/576,685, filed Jun. 3, 2004, by Benjamin A. Haskell, Melvin B. McLaurin, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “GROWTH OF PLANAR REDUCED DISLOCATION DENSITY M-PLANE GALLIUM NITRIDE BY HYDRIDE VAPOR PHASE EPITAXY,”; U.S. Utility application Ser. No. 11/067,957, filed Feb. 28, 2005, by Claude C. A. Weisbuch, Aurelien J. F. David, James S. Speck and Steven P. DenBaars, entitled “HORIZONTAL EMITTING, VERITCAL EMITTING, BEAM SHAPED, DISTRIBUTED FEEDBACK (DFB) LASERS BY GROWTH OVER A PATTERNED SUBSTRATE,” now U.S. Pat. No. 7,723,745, issued May 25, 2010; U.S. Utility application Ser. No. 11/923,414, filed Oct. 24, 2007, by Claude C. A. Weisbuch, Aurelien J. F. David, James S. Speck and Steven P. DenBaars, entitled “SINGLE OR MULTI-COLOR HIGH EFFICIENCY LIGHT EMITTING DIODE (LED) BY GROWTH OVER A PATTERNED SUBSTRATE,” now U.S. Pat. No. 7,755,096, issued Jul. 13, 2010, which application is a continuation of U.S. Pat. No. 7,291,864, issued Nov. 6, 2007, to Claude C. A. Weisbuch, Aurelien J. F. David, James S. Speck and Steven P. DenBaars, entitled “SINGLE OR MULTI-COLOR HIGH EFFICIENCY LIGHT EMITTING DIODE (LED) BY GROWTH OVER A PATTERNED SUBSTRATE,” now U.S. Pat. No. 7,291,864, issued Nov. 6, 2007; U.S. Utility application Ser. No. 11/067,956, filed Feb. 28, 2005, by Aurelien J. F. David, Claude C. A Weisbuch and Steven P. DenBaars, entitled “HIGH EFFICIENCY LIGHT EMITTING DIODE (LED) WITH OPTIMIZED PHOTONIC CRYSTAL EXTRACTOR,” now U.S. Pat. No. 7,582,910, issued Sep. 1, 2009; U.S. Utility application Ser. No. 11/621,482, filed Jan. 9, 2007, by Troy J. Baker, Benjamin A. Haskell, Paul T. Fini, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “TECHNIQUE FOR THE GROWTH OF PLANAR SEMI-POLAR GALLIUM NITRIDE,” now U.S. Pat. No. 7,704,331, issued Apr. 27, 2010, which application is a continuation of U.S. Utility application Ser. No. 11/372,914, filed Mar. 10, 2006, by Troy J. Baker, Benjamin A. Haskell, Paul T. Fini, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “TECHNIQUE FOR THE GROWTH OF PLANAR SEMI-POLAR GALLIUM NITRIDE,” now U.S. Pat. No. 7,220,324, issued May 22, 2007, which application claims the benefit under 35 U.S.C. Section 119(e) of U.S. Provisional Application Ser. No. 60/660,283, filed Mar. 10, 2005, by Troy J. Baker, Benjamin A. Haskell, Paul T. Fini, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “TECHNIQUE FOR THE GROWTH OF PLANAR SEMI-POLAR GALLIUM NITRIDE,”; U.S. Utility application Ser. No. 11/403,624, filed Apr. 13, 2006, by James S. Speck, Troy J. Baker and Benjamin A. Haskell, entitled “WAFER SEPARATION TECHNIQUE FOR THE FABRICATION OF FREE-STANDING (AL, IN, GA)N WAFERS,”, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/670,810, filed Apr. 13, 2005, by James S. Speck, Troy J. Baker and Benjamin A. Haskell, entitled “WAFER SEPARATION TECHNIQUE FOR THE FABRICATION OF FREE-STANDING (AL, IN, GA)N WAFERS,”; U.S. Utility application Ser. No. 11/403,288, filed Apr. 13, 2006, by James S. Speck, Benjamin A. Haskell, P. Morgan Pattison and Troy J. Baker, entitled “ETCHING TECHNIQUE FOR THE FABRICATION OF THIN (AL, IN, GA)N LAYERS,” now U.S. Pat. No. 7,795,146, issued Sep. 14, 2010, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/670,790, filed Apr. 13, 2005, by James S. Speck, Benjamin A. Haskell, P. Morgan Pattison and Troy J. Baker, entitled “ETCHING TECHNIQUE FOR THE FABRICATION OF THIN (AL, IN, GA)N LAYERS,”; U.S. Utility application Ser. No. 11/454,691, filed on Jun. 16, 2006, by Akihiko Murai, Christina Ye Chen, Daniel B. Thompson, Lee S. McCarthy, Steven P. DenBaars, Shuji Nakamura, and Umesh K. Mishra, entitled “(Al,Ga,In)N AND ZnO DIRECT WAFER BONDING STRUCTURE FOR OPTOELECTRONIC APPLICATIONS AND ITS FABRICATION METHOD,” now U.S. Pat. No. 7,719,020, issued May 18, 2010, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/691,710, filed on Jun. 17, 2005, by Akihiko Murai, Christina Ye Chen, Lee S. McCarthy, Steven P. DenBaars, Shuji Nakamura, and Umesh K. Mishra, entitled “(Al, Ga, In)N AND ZnO DIRECT WAFER BONDING STRUCTURE FOR OPTOELECTRONIC APPLICATIONS, AND ITS FABRICATION METHOD,”, U.S. Provisional Application Ser. No. 60/732,319, filed on Nov. 1, 2005, by Akihiko Murai, Christina Ye Chen, Daniel B. Thompson, Lee S. McCarthy, Steven P. DenBaars, Shuji Nakamura, and Umesh K. Mishra, entitled “(Al, Ga, In)N AND ZnO DIRECT WAFER BONDED STRUCTURE FOR OPTOELECTRONIC APPLICATIONS, AND ITS FABRICATION METHOD,”, and U.S. Provisional Application Ser. No. 60/764,881, filed on Feb. 3, 2006, by Akihiko Murai, Christina Ye Chen, Daniel B. Thompson, Lee S. McCarthy, Steven P. DenBaars, Shuji Nakamura, and Umesh K. Mishra, entitled “(Al,Ga,In)N AND ZnO DIRECT WAFER BONDED STRUCTURE FOR OPTOELECTRONIC APPLICATIONS AND ITS FABRICATION METHOD,”; U.S. Utility application Ser. No. 11/444,084, filed May 31, 2006, by Bilge M, Imer, James S. Speck, and Steven P. DenBaars, entitled “DEFECT REDUCTION OF NON-POLAR GALLIUM NITRIDE WITH SINGLE-STEP SIDEWALL LATERAL EPITAXIAL OVERGROWTH,” now U.S. Pat. No. 7,361,576, issued Apr. 22, 2008, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Application Ser. No. 60/685,952, filed on May 31, 2005, by Bilge M, Imer, James S. Speck, and Steven P. DenBaars, entitled “DEFECT REDUCTION OF NON-POLAR GALLIUM NITRIDE WITH SINGLE-STEP SIDEWALL LATERAL EPITAXIAL OVERGROWTH,”; U.S. Utility application Ser. No. 11/870,115, filed Oct. 10, 2007, by Bilge M, Imer, James S. Speck, Steven P. DenBaars and Shuji Nakamura, entitled “GROWTH OF PLANAR NON-POLAR M-PLANE III-NITRIDE USING METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD),” now U.S. Pat. No. 8,097,481, issued Jan. 17, 2012, which application is a continuation of U.S. Utility application Ser. No. 11/444,946, filed May 31, 2006, by Bilge M, Imer, James S. Speck, and Steven P. DenBaars, entitled “GROWTH OF PLANAR NON-POLAR {1-100} M-PLANE GALLIUM NITRIDE WITH METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD),” now U.S. Pat. No. 7,338,828, issued Mar. 4, 2008, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Application Ser. No. 60/685,908, filed on May 31, 2005, by Bilge M, Imer, James S. Speck, and Steven P. DenBaars, entitled “GROWTH OF PLANAR NON-POLAR {1-100} M-PLANE GALLIUM NITRIDE WITH METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD),”; U.S. Utility application Ser. No. 11/444,946, filed Jun. 1, 2006, by Robert M. Farrell, Troy J. Baker, Arpan Chakraborty, Benjamin A. Haskell, P. Morgan Pattison, Rajat Sharma, Umesh K. Mishra, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “TECHNIQUE FOR THE GROWTH AND FABRICATION OF SEMIPOLAR (Ga, Al, In, B)N THIN FILMS, HETEROSTRUCTURES, AND DEVICES,” now U.S. Pat. No. 7,846,757, issued Dec. 7, 2010, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Application Ser. No. 60/686,244, filed on Jun. 1, 2005, by Robert M. Farrell, Troy J. Baker, Arpan Chakraborty, Benjamin A. Haskell, P. Morgan Pattison, Rajat Sharma, Umesh K. Mishra, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “TECHNIQUE FOR THE GROWTH AND FABRICATION OF SEMIPOLAR (Ga, Al, In, B)N THIN FILMS, HETERO STRUCTURES, AND DEVICES,”; U.S. Utility application Ser. No. 11/251,365 filed Oct. 14, 2005, by Frederic S. Diana, Aurelien J. F. David, Pierre M. Petroff, and Claude C. A. Weisbuch, entitled “PHOTONIC STRUCTURES FOR EFFICIENT LIGHT EXTRACTION AND CONVERSION IN MULTI-COLOR LIGHT EMITTING DEVICES,” now U.S. Pat. No. 7,768,023, issued Aug. 3, 2010; U.S. Utility application Ser. No. 11/633,148, filed Dec. 4, 2006, Claude C. A. Weisbuch and Shuji Nakamura, entitled “IMPROVED HORIZONTAL EMITTING, VERTICAL EMITTING, BEAM SHAPED, DISTRIBUTED FEEDBACK (DFB) LASERS FABRICATED BY GROWTH OVER A PATTERNED SUBSTRATE WITH MULTIPLE OVERGROWTH,” now U.S. Pat. No. 7,768,024, issued Aug. 3, 2010, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/741,935, filed Dec. 2, 2005, Claude C. A. Weisbuch and Shuji Nakamura, entitled “IMPROVED HORIZONTAL EMITTING, VERTICAL EMITTING, BEAM SHAPED, DFB LASERS FABRICATED BY GROWTH OVER PATTERNED SUBSTRATE WITH MULTIPLE OVERGROWTH,”; U.S. Utility application Ser. No. 11/517,797, filed Sep. 8, 2006, by Michael Iza, Troy J. Baker, Benjamin A. Haskell, Steven P. DenBaars, and Shuji Nakamura, entitled “METHOD FOR ENHANCING GROWTH OF SEMIPOLAR (Al, In, Ga, B)N VIA METALORGANIC CHEMICAL VAPOR DEPOSITION,” now U.S. Pat. No. 7,575,947, issued Aug. 18, 2009, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Application Ser. No. 60/715,491, filed on Sep. 9, 2005, by Michael Iza, Troy J. Baker, Benjamin A. Haskell, Steven P. DenBaars, and Shuji Nakamura, entitled “METHOD FOR ENHANCING GROWTH OF SEMIPOLAR (Al, In, Ga, B)N VIA METALORGANIC CHEMICAL VAPOR DEPOSITION,”; U.S. Utility application Ser. No. 11/593,268, filed on Nov. 6, 2006, by Steven P. DenBaars, Shuji Nakamura, Hisashi Masui, Natalie N. Fellows, and Akihiko Murai, entitled “HIGH LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING DIODE (LED),” now U.S. Pat. No. 7,994,527, issued Aug. 9, 2011, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/734,040, filed on Nov. 4, 2005, by Steven P. DenBaars, Shuji Nakamura, Hisashi Masui, Natalie N. Fellows, and Akihiko Murai, entitled “HIGH LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING DIODE (LED),”; U.S. Utility application Ser. No. 11/608,439, filed on Dec. 8, 2006, by Steven P. DenBaars, Shuji Nakamura and James S. Speck, entitled “HIGH EFFICIENCY LIGHT EMITTING DIODE (LED),” now U.S. Pat. No. 7,956,371, issued Jun. 7, 2011, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/748,480, filed on Dec. 8, 2005, by Steven P. DenBaars, Shuji Nakamura and James S. Speck, entitled “HIGH EFFICIENCY LIGHT EMITTING DIODE (LED),”, and U.S. Provisional Application Ser. No. 60/764,975, filed on Feb. 3, 2006, by Steven P. DenBaars, Shuji Nakamura and James S. Speck, entitled “HIGH EFFICIENCY LIGHT EMITTING DIODE (LED),”; U.S. Utility application Ser. No. 11/676,999, filed on Feb. 20, 2007, by Hong Zhong, John F. Kaeding, Rajat Sharma, James S. Speck, Steven P. DenBaars and Shuji Nakamura, entitled “METHOD FOR GROWTH OF SEMIPOLAR (Al,In,Ga,B)N OPTOELECTRONIC DEVICES,” now U.S. Pat. No. 7,858,996, issued Dec. 28, 2010, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Application Ser. No. 60/774,467, filed on Feb. 17, 2006, by Hong Zhong, John F. Kaeding, Rajat Sharma, James S. Speck, Steven P. DenBaars and Shuji Nakamura, entitled “METHOD FOR GROWTH OF SEMIPOLAR (Al,In,Ga,B)N OPTOELECTRONIC DEVICES,”; U.S. Utility patent application Ser. No. 11/840,057, filed on Aug. 16, 2007, by Michael Iza, Hitoshi Sato, Steven P. DenBaars, and Shuji Nakamura, entitled “METHOD FOR DEPOSITION OF MAGNESIUM DOPED (Al, In, Ga, B)N LAYERS,” now U.S. Pat. No. 7,755,172, issued Jul. 13, 2010, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Patent Application Ser. No. 60/822,600, filed on Aug. 16, 2006, by Michael Iza, Hitoshi Sato, Steven P. DenBaars, and Shuji Nakamura, entitled “METHOD FOR DEPOSITION OF MAGNESIUM DOPED (Al, In, Ga, B)N LAYERS,”; U.S. Utility patent application Ser. No. 11/940,848, filed on Nov. 15, 2007, by Aurelien J. F. David, Claude C. A. Weisbuch and Steven P. DenBaars entitled “HIGH LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING DIODE (LED) THROUGH MULTIPLE EXTRACTORS,”, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,014, filed on Nov. 15, 2006, by Aurelien J. F. David, Claude C. A. Weisbuch and Steven P. DenBaars entitled “HIGH LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING DIODE (LED) THROUGH MULTIPLE EXTRACTORS,”, and U.S. Provisional Patent Application Ser. No. 60/883,977, filed on Jan. 8, 2007, by Aurelien J. F. David, Claude C. A. Weisbuch and Steven P. DenBaars entitled “HIGH LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING DIODE (LED) THROUGH MULTIPLE EXTRACTORS,”; U.S. Utility patent application Ser. No. 11/940,853, filed on Nov. 15, 2007, by Claude C. A. Weisbuch, James S. Speck and Steven P. DenBaars entitled “HIGH EFFICIENCY WHITE, SINGLE OR MULTI-COLOUR LIGHT EMITTING DIODES (LEDS) BY INDEX MATCHING STRUCTURES,”, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,026, filed on Nov. 15, 2006, by Claude C. A. Weisbuch, James S. Speck and Steven P. DenBaars entitled “HIGH EFFICIENCY WHITE, SINGLE OR MULTI-COLOUR LED BY INDEX MATCHING STRUCTURES,”; U.S. Utility patent application Ser. No. 11/940,866, filed on Nov. 15, 2007, by Aurelien J. F. David, Claude C. A. Weisbuch, Steven P. DenBaars and Stacia Keller, entitled “HIGH LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING DIODE (LED) WITH EMITTERS WITHIN STRUCTURED MATERIALS,” now U.S. Pat. No. 7,977,694, issued Jul. 12, 2011, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,015, filed on Nov. 15, 2006, by Aurelien J. F. David, Claude C. A. Weisbuch, Steven P. DenBaars and Stacia Keller, entitled “HIGH LIGHT EXTRACTION EFFICIENCY LED WITH EMITTERS WITHIN STRUCTURED MATERIALS,”; U.S. Utility patent application Ser. No. 11/940,876, filed on Nov. 15, 2007, by Evelyn L. Hu, Shuji Nakamura, Yong Seok Choi, Rajat Sharma and Chiou-Fu Wang, entitled “ION BEAM TREATMENT FOR THE STRUCTURAL INTEGRITY OF AIR-GAP III-NITRIDE DEVICES PRODUCED BY PHOTOELECTROCHEMICAL (PEC) ETCHING,”, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,027, filed on Nov. 15, 2006, by Evelyn L. Hu, Shuji Nakamura, Yong Seok Choi, Rajat Sharma and Chiou-Fu Wang, entitled “ION BEAM TREATMENT FOR THE STRUCTURAL INTEGRITY OF AIR-GAP III-NITRIDE DEVICES PRODUCED BY PHOTOELECTROCHEMICAL (PEC) ETCHING,”; U.S. Utility patent application Ser. No. 11/940,885, filed on Nov. 15, 2007, by Natalie N. Fellows, Steven P. DenBaars and Shuji Nakamura, entitled “TEXTURED PHOSPHOR CONVERSION LAYER LIGHT EMITTING DIODE,”, now U.S. Pat. No. 8,860,051, issued Oct. 14, 2014, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,024, filed on Nov. 15, 2006, by Natalie N. Fellows, Steven P. DenBaars and Shuji Nakamura, entitled “TEXTURED PHOSPHOR CONVERSION LAYER LIGHT EMITTING DIODE,”; U.S. Utility patent application Ser. No. 11/940,872, filed on Nov. 15, 2007, by Steven P. DenBaars, Shuji Nakamura and Hisashi Masui, entitled “HIGH LIGHT EXTRACTION EFFICIENCY SPHERE LED,”, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,025, filed on Nov. 15, 2006, by Steven P. DenBaars, Shuji Nakamura and Hisashi Masui, entitled “HIGH LIGHT EXTRACTION EFFICIENCY SPHERE LED,”; U.S. Utility patent application Ser. No. 11/940,883, filed on Nov. 15, 2007, by Shuji Nakamura and Steven P. DenBaars, entitled “STANDING TRANSPARENT MIRRORLESS LIGHT EMITTING DIODE,” now U.S. Pat. No. 7,687,813, issued Mar. 30, 2010, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,017, filed on Nov. 15, 2006, by Shuji Nakamura and Steven P. DenBaars, entitled “STANDING TRANSPARENT MIRROR-LESS (STML) LIGHT EMITTING DIODE,”; U.S. Utility patent application Ser. No. 11/940,898, filed on Nov. 15, 2007, by Steven P. DenBaars, Shuji Nakamura and James S. Speck, entitled “TRANSPARENT MIRRORLESS LIGHT EMITTING DIODE,” now U.S. Pat. No. 7,781,789, issued Aug. 24, 2010, which application claims the benefit under 35 U.S.C Section 119(e) of U.S. Provisional Patent Application Ser. No. 60/866,023, filed on Nov. 15, 2006, by Steven P. DenBaars, Shuji Nakamura and James S. Speck, entitled “TRANSPARENT MIRROR-LESS (TML) LIGHT EMITTING DIODE,”; U.S. Utility patent application Ser. No. 11/954,163, filed on Dec. 11, 2007, by Steven P. DenBaars and Shuji Nakamura, entitled “LEAD FRAME FOR TRANSPARENT MIRRORLESS LIGHT EMITTING DIODE,” which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Patent Application Ser. No. 60/869,454, filed on Dec. 11, 2006, by Steven P. DenBaars and Shuji Nakamura, entitled “LEAD FRAME FOR TM-LED,”; U.S. Utility patent application Ser. No. 12/001,286, filed on Dec. 11, 2007, by Mathew C. Schmidt, Kwang Choong Kim, Hitoshi Sato, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) GROWTH OF HIGH PERFORMANCE NON-POLAR III-NITRIDE OPTICAL DEVICES,” now U.S. Pat. No. 7,842,527, issued Nov. 30, 2010, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Patent Application Ser. No. 60/869,535, filed on Dec. 11, 2006, by Mathew C. Schmidt, Kwang Choong Kim, Hitoshi Sato, Steven P. DenBaars, James S. Speck, and Shuji Nakamura, entitled “MOCVD GROWTH OF HIGH PERFORMANCE M-PLANE GAN OPTICAL DEVICES,”; U.S. Utility patent application Ser. No. 12/001,227, filed on Dec. 11, 2007, by Steven P. DenBaars, Mathew C. Schmidt, Kwang Choong Kim, James S. Speck, and Shuji Nakamura, entitled, “NON-POLAR AND SEMI-POLAR EMITTING DEVICES,” now U.S. Pat. No. 9,130,119, issued Sep. 8, 2015, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Patent Application Ser. No. 60/869,540, filed on Dec. 11, 2006, by Steven P. DenBaars, Mathew C. Schmidt, Kwang Choong Kim, James S. Speck, and Shuji Nakamura, entitled, “NON-POLAR (M-PLANE) AND SEMI-POLAR EMITTING DEVICES,”; and U.S. Utility patent application Ser. No. 11/954,172, filed on Dec. 11, 2007, by Kwang Choong Kim, Mathew C. Schmidt, Feng Wu, Asako Hirai, Melvin B. McLaurin, Steven P. DenBaars, Shuji Nakamura, and James S. Speck, entitled, “CRYSTAL GROWTH OF M-PLANE AND SEMIPOLAR PLANES OF (AL, IN, GA, B)N ON VARIOUS SUBSTRATES,”, which claims the benefit under 35 U.S.C. 119(e) of U.S. Provisional Patent Application Ser. No. 60/869,701, filed on Dec. 12, 2006, by Kwang Choong Kim, Mathew C. Schmidt, Feng Wu, Asako Hirai, Melvin B. McLaurin, Steven P. DenBaars, Shuji Nakamura, and James S. Speck, entitled, “CRYSTAL GROWTH OF M-PLANE AND SEMIPOLAR PLANES OF (AL, IN, GA, B)N ON VARIOUS SUBSTRATES,”; all of which applications are incorporated by reference herein.

US Referenced Citations (471)
Number Name Date Kind
3607463 Kinoshita et al. Sep 1971 A
3938177 Hansen et al. Feb 1976 A
3999280 Hansen et al. Dec 1976 A
4026692 Bartholomew May 1977 A
4346275 Iwakiri et al. Aug 1982 A
4497974 Deckman et al. Feb 1985 A
5087949 Haltz Feb 1992 A
5376580 Kish et al. Dec 1994 A
5416870 Chun et al. May 1995 A
5696389 Ishikawa et al. Dec 1997 A
5705834 Egalon et al. Jan 1998 A
5708280 Lebby et al. Jan 1998 A
5775792 Wiese Jul 1998 A
5779924 Krames et al. Jul 1998 A
5780867 Fritz et al. Jul 1998 A
5905275 Nunoue et al. May 1999 A
5932048 Furukawa et al. Aug 1999 A
5952681 Chen Sep 1999 A
6015719 Kish, Jr. et al. Jan 2000 A
6022760 Lebby et al. Feb 2000 A
6133589 Krames Oct 2000 A
6155699 Miller et al. Dec 2000 A
6229160 Krames et al. May 2001 B1
6294800 Duggal et al. Sep 2001 B1
6310364 Uemura Oct 2001 B1
6331063 Kamada et al. Dec 2001 B1
6331356 Angelopoulos et al. Dec 2001 B1
6335548 Roberts et al. Jan 2002 B1
6357889 Duggal et al. Mar 2002 B1
6373188 Johnson et al. Apr 2002 B1
6376851 Worley Apr 2002 B1
6396082 Fukasawa et al. May 2002 B1
6417019 Mueller et al. Jul 2002 B1
6429462 Shveykin Aug 2002 B1
6452217 Wojnarkowski et al. Sep 2002 B1
6482664 Lee et al. Nov 2002 B1
6483196 Wojnarowski et al. Nov 2002 B1
6486499 Krames et al. Nov 2002 B1
6509584 Suzuki Jan 2003 B2
6514782 Wierer et al. Feb 2003 B1
6515308 Kneissl et al. Feb 2003 B1
6525335 Krames Feb 2003 B1
6525464 Chin Feb 2003 B1
6547423 Marshall et al. Apr 2003 B2
6548956 Forrest et al. Apr 2003 B2
6550953 Ichikawa et al. Apr 2003 B1
6569544 Alain et al. May 2003 B1
6573530 Sargent et al. Jun 2003 B1
6573537 Steigerwald et al. Jun 2003 B1
6576488 Collins, III et al. Jun 2003 B2
6586882 Harbers Jul 2003 B1
6607286 West et al. Aug 2003 B2
6607931 Streubel Aug 2003 B2
6608333 Lee et al. Aug 2003 B1
6608439 Sokolik et al. Aug 2003 B1
6614058 Lin et al. Sep 2003 B2
6635902 Lin Oct 2003 B1
6649939 Wirth Nov 2003 B1
6657767 Bonardi et al. Dec 2003 B2
6674096 Sommers Jan 2004 B2
6677610 Choi et al. Jan 2004 B2
6682950 Yang et al. Jan 2004 B2
6686218 Lin et al. Feb 2004 B2
6686676 McNulty et al. Feb 2004 B2
6700137 Horiuchi et al. Mar 2004 B2
6717362 Lee et al. Apr 2004 B1
6719936 Carlton et al. Apr 2004 B2
6729746 Suehiro et al. May 2004 B2
6730939 Eisert et al. May 2004 B2
6737532 Chen et al. May 2004 B2
6746295 Sorg Jun 2004 B2
6759804 Ellens et al. Jul 2004 B2
6765236 Sakurai Jul 2004 B2
6774401 Nakada et al. Aug 2004 B2
6777871 Duggal et al. Aug 2004 B2
6784460 Ng et al. Aug 2004 B2
6791116 Takahashi et al. Sep 2004 B2
6791119 Slater et al. Sep 2004 B2
6794685 Hata et al. Sep 2004 B2
6798136 Sommers Sep 2004 B2
6803607 Chan et al. Oct 2004 B1
6809345 Watanabe Oct 2004 B2
6841934 Wang et al. Jan 2005 B2
6844572 Sawaki et al. Jan 2005 B2
6870311 Mueller et al. Mar 2005 B2
6874910 Sugimoto et al. Apr 2005 B2
6876149 Miyashita Apr 2005 B2
6893890 Takekuma et al. May 2005 B2
6903376 Shen et al. Jun 2005 B2
6903381 Lin et al. Jun 2005 B2
6909108 Tang et al. Jun 2005 B2
6914267 Fukasawa et al. Jul 2005 B2
6914268 Shei et al. Jul 2005 B2
6917057 Stokes et al. Jul 2005 B2
6921927 Ng et al. Jul 2005 B2
6922424 Weigert et al. Jul 2005 B2
6936761 Pichler Aug 2005 B2
6936859 Uemura et al. Aug 2005 B1
6936864 Kondo Aug 2005 B2
6940704 Stalions Sep 2005 B2
6955985 Narayan Oct 2005 B2
6961190 Tamaoki et al. Nov 2005 B1
6964877 Chen et al. Nov 2005 B2
6969874 Gee et al. Nov 2005 B1
6969946 Steranka et al. Nov 2005 B2
6972208 Hsieh et al. Dec 2005 B2
6972212 Eisert et al. Dec 2005 B2
6980710 Farahi et al. Dec 2005 B2
6982522 Omoto Jan 2006 B2
6987613 Pocius et al. Jan 2006 B2
6989555 Goetz et al. Jan 2006 B2
6997580 Wong Feb 2006 B2
6998281 Taskar et al. Feb 2006 B2
7008858 Liu et al. Mar 2006 B2
7009213 Camras et al. Mar 2006 B2
7009217 Liu et al. Mar 2006 B2
7009220 Oohata Mar 2006 B2
7015514 Baur et al. Mar 2006 B2
7018859 Liao et al. Mar 2006 B2
7019456 Yasukawa et al. Mar 2006 B2
7026261 Hirose et al. Apr 2006 B2
7026657 Bogner et al. Apr 2006 B2
7048412 Martin et al. May 2006 B2
7053419 Camras et al. May 2006 B1
7064355 Camras et al. Jun 2006 B2
7067849 Yoo Jun 2006 B2
7070304 Imai Jul 2006 B2
7070312 Tatsukawa Jul 2006 B2
7071034 Ueda et al. Jul 2006 B2
7072096 Holman et al. Jul 2006 B2
7084435 Sugimoto et al. Aug 2006 B2
7091653 Ouderkirk et al. Aug 2006 B2
7091661 Ouderkirk et al. Aug 2006 B2
7098589 Erchak et al. Aug 2006 B2
7105860 Shei et al. Sep 2006 B2
7112916 Goh et al. Sep 2006 B2
7119271 King et al. Oct 2006 B2
7126159 Itai et al. Oct 2006 B2
7129635 Tsujimura Oct 2006 B2
7135709 Wirth et al. Nov 2006 B1
7148514 Seo et al. Dec 2006 B2
7157745 Blonder et al. Jan 2007 B2
7161189 Wu Jan 2007 B2
7169632 Baur et al. Jan 2007 B2
7188981 Barros et al. Mar 2007 B2
7195991 Kamutsch et al. Mar 2007 B2
7199520 Fujii et al. Apr 2007 B2
7210806 Holman et al. May 2007 B2
7217004 Park et al. May 2007 B2
7223620 Jäger et al. May 2007 B2
7223998 Schwach et al. May 2007 B2
7227304 Tsujimura et al. Jun 2007 B2
7235817 Yano et al. Jun 2007 B2
7250728 Chen et al. Jul 2007 B2
7253447 Oishi et al. Aug 2007 B2
7253448 Roberts et al. Aug 2007 B2
7262440 Choi et al. Aug 2007 B2
7264378 Loh Sep 2007 B2
7268371 Krames et al. Sep 2007 B2
7273291 Kim et al. Sep 2007 B2
7281818 You et al. Oct 2007 B2
7282853 Yano et al. Oct 2007 B2
7286296 Chaves et al. Oct 2007 B2
7291864 Weisbuch et al. Nov 2007 B2
7306351 Chao et al. Dec 2007 B2
7309882 Chen Dec 2007 B2
7312573 Chang et al. Dec 2007 B2
7314291 Tain et al. Jan 2008 B2
7317210 Brabec et al. Jan 2008 B2
7319246 Soules et al. Jan 2008 B2
7323704 Itai Jan 2008 B2
7329982 Conner et al. Feb 2008 B2
7332747 Uemura et al. Feb 2008 B2
7344902 Basin et al. Mar 2008 B2
7344958 Murai et al. Mar 2008 B2
7345298 Weisbuch et al. Mar 2008 B2
7352006 Beeson et al. Apr 2008 B2
7358537 Yeh et al. Apr 2008 B2
7358539 Venugopalan et al. Apr 2008 B2
7374958 Pan et al. May 2008 B2
7380962 Chaves et al. Jun 2008 B2
7390117 Leatherdale et al. Jun 2008 B2
7391153 Suehiro et al. Jun 2008 B2
7397177 Takahashi et al. Jul 2008 B2
7400439 Holman Jul 2008 B2
7408204 Tung Aug 2008 B2
7414270 Kim et al. Aug 2008 B2
7423297 Leatherdale et al. Sep 2008 B2
7427145 Jang et al. Sep 2008 B2
7431477 Chou et al. Oct 2008 B2
7439551 Hata Oct 2008 B2
7449789 Chen Nov 2008 B2
7463419 Weber Dec 2008 B2
7465962 Kametani et al. Dec 2008 B2
7479662 Soules et al. Jan 2009 B2
7479664 Williams Jan 2009 B2
7489075 Lee Feb 2009 B2
7498734 Suehiro et al. Mar 2009 B2
7504671 Ishidu et al. Mar 2009 B2
7509012 Zoorob et al. Mar 2009 B2
7510289 Takekuma Mar 2009 B2
7518149 Maaskant et al. Apr 2009 B2
7521782 Ishii Apr 2009 B2
7525126 Leatherdale et al. Apr 2009 B2
7531835 Heeger et al. May 2009 B2
7534634 Jäger et al. May 2009 B2
7541610 Haase Jun 2009 B2
7545042 Yang Jun 2009 B2
7579629 Inoguchi Aug 2009 B2
7582910 David et al. Sep 2009 B2
7585083 Kim et al. Sep 2009 B2
7586127 Nomura et al. Sep 2009 B2
7602118 Cok et al. Oct 2009 B2
7633092 Ng et al. Dec 2009 B2
7646146 Cok Jan 2010 B2
7670872 Yan Mar 2010 B2
7679283 Nimura Mar 2010 B2
7687813 Nakamura et al. Mar 2010 B2
7687815 Kim Mar 2010 B2
7692205 Wang et al. Apr 2010 B2
7693360 Shimizu et al. Apr 2010 B2
7704763 Fujii et al. Apr 2010 B2
7717589 Nishioka et al. May 2010 B2
7719020 Murai et al. May 2010 B2
7719182 Cok et al. May 2010 B2
7733011 Cina et al. Jun 2010 B2
7742677 Eberhard et al. Jun 2010 B2
7745986 Ito et al. Jun 2010 B2
7748879 Koike et al. Jul 2010 B2
7755096 Weisbuch et al. Jul 2010 B2
7766508 Villard et al. Aug 2010 B2
7772597 Inoue Aug 2010 B2
7781787 Suehiro et al. Aug 2010 B2
7781789 Denbaars et al. Aug 2010 B2
7847302 Basin et al. Dec 2010 B2
7851815 Diamantidis Dec 2010 B2
7860356 Montfort et al. Dec 2010 B2
7868341 Diana et al. Jan 2011 B2
7872275 Diamantidis Jan 2011 B2
7932111 Edmond Apr 2011 B2
7950831 Moon May 2011 B2
7956371 Denbaars et al. Jun 2011 B2
RE42636 Chen et al. Aug 2011 E
7994527 Denbaars et al. Aug 2011 B2
8022423 Nakamura et al. Sep 2011 B2
8035117 DenBaars et al. Oct 2011 B2
8071997 Scotch et al. Dec 2011 B2
8109635 Allon et al. Feb 2012 B2
8124991 Iso et al. Feb 2012 B2
8158987 Nabekura et al. Apr 2012 B2
8162493 Skiver et al. Apr 2012 B2
8212262 Emerson et al. Jul 2012 B2
8258519 Hsu Sep 2012 B2
8294166 Nakamura et al. Oct 2012 B2
8334151 Murai et al. Dec 2012 B2
8368109 Iso et al. Feb 2013 B2
8378368 Hsu et al. Feb 2013 B2
8395167 Kang et al. Mar 2013 B2
8405307 Yano et al. Mar 2013 B2
8455909 Negley Jun 2013 B2
8541788 DenBaars et al. Sep 2013 B2
8558446 Miki et al. Oct 2013 B2
8637892 Egoshi et al. Jan 2014 B2
8710535 Jo et al. Apr 2014 B2
8835959 Nakamura et al. Sep 2014 B2
8860051 Fellows et al. Oct 2014 B2
8882290 Hsieh et al. Nov 2014 B2
8889440 Chen et al. Nov 2014 B2
9240529 Fellows Demille et al. Jan 2016 B2
9276156 King et al. Mar 2016 B2
9705059 Park Jul 2017 B2
9859464 Fellows Demille et al. Jan 2018 B2
10103306 Kim Oct 2018 B2
10217916 Nakamura et al. Feb 2019 B2
10312422 Camras et al. Jun 2019 B2
10374003 Choi et al. Aug 2019 B2
10454010 Nakamura Oct 2019 B1
20010002049 Reeh et al. May 2001 A1
20010033135 Duggal et al. Oct 2001 A1
20020006040 Kamada et al. Jan 2002 A1
20020085601 Wang et al. Jul 2002 A1
20020117103 Hooper Aug 2002 A1
20020121637 Ito Sep 2002 A1
20020123204 Torvik et al. Sep 2002 A1
20020130327 Wu et al. Sep 2002 A1
20020131726 Lin et al. Sep 2002 A1
20020141006 Pocius et al. Oct 2002 A1
20020158578 Eliashevich et al. Oct 2002 A1
20020171087 Krames et al. Nov 2002 A1
20030010975 Gibb Jan 2003 A1
20030015959 Tomoda et al. Jan 2003 A1
20030039119 Cao Feb 2003 A1
20030075723 Heremans et al. Apr 2003 A1
20030100140 Lin et al. May 2003 A1
20030124754 Farahi et al. Jul 2003 A1
20030141506 Sano Jul 2003 A1
20030145885 Kang et al. Aug 2003 A1
20030213969 Wang et al. Nov 2003 A1
20030215766 Fischer et al. Nov 2003 A1
20040004434 Nishi et al. Jan 2004 A1
20040007709 Kondo Jan 2004 A1
20040012027 Keller et al. Jan 2004 A1
20040012958 Hashimoto et al. Jan 2004 A1
20040036074 Kondo Feb 2004 A1
20040046179 Johannes et al. Mar 2004 A1
20040070014 Lin Apr 2004 A1
20040079408 Fetzer et al. Apr 2004 A1
20040089868 Hon et al. May 2004 A1
20040094772 Hon et al. May 2004 A1
20040095502 Losehand May 2004 A1
20040155565 Holder Aug 2004 A1
20040164311 Uemura Aug 2004 A1
20040173810 Lin Sep 2004 A1
20040184495 Kondo Sep 2004 A1
20040188689 Shono et al. Sep 2004 A1
20040188700 Fukasawa et al. Sep 2004 A1
20040188791 Horng et al. Sep 2004 A1
20040211970 Hayashimoto et al. Oct 2004 A1
20040227148 Camras et al. Nov 2004 A1
20040239611 Huang et al. Dec 2004 A1
20040245531 Fuii et al. Dec 2004 A1
20040257797 Suehiro et al. Dec 2004 A1
20040263064 Huang Dec 2004 A1
20050029528 Ishikawa Feb 2005 A1
20050032257 Camras et al. Feb 2005 A1
20050035354 Lin et al. Feb 2005 A1
20050040410 Ledentsov et al. Feb 2005 A1
20050062830 Taki et al. Mar 2005 A1
20050077532 Ota et al. Apr 2005 A1
20050082562 Ou et al. Apr 2005 A1
20050093008 Suehiro et al. May 2005 A1
20050110032 Saito et al. May 2005 A1
20050111240 Yonekubo May 2005 A1
20050121688 Nagai et al. Jun 2005 A1
20050133810 Roberts et al. Jun 2005 A1
20050145864 Sugiyama et al. Jul 2005 A1
20050145865 Okuyama et al. Jul 2005 A1
20050156510 Chua et al. Jul 2005 A1
20050161779 Peng et al. Jul 2005 A1
20050184300 Tazima et al. Aug 2005 A1
20050189551 Peng et al. Sep 2005 A1
20050189555 Lin et al. Sep 2005 A1
20050194598 Kim et al. Sep 2005 A1
20050196887 Liu Sep 2005 A1
20050205884 Kim et al. Sep 2005 A1
20050205887 Shei Sep 2005 A1
20050211997 Suehiro et al. Sep 2005 A1
20050212002 Sanga et al. Sep 2005 A1
20050218790 Blumel Oct 2005 A1
20050224830 Blonder et al. Oct 2005 A1
20050243570 Chaves et al. Nov 2005 A1
20050248271 Ng et al. Nov 2005 A1
20050265404 Ashdown Dec 2005 A1
20050274956 Bhat Dec 2005 A1
20050274970 Ludowise Dec 2005 A1
20060000964 Ye et al. Jan 2006 A1
20060001035 Suehiro et al. Jan 2006 A1
20060001036 Jacob et al. Jan 2006 A1
20060006408 Suehiro et al. Jan 2006 A1
20060008941 Haskell et al. Jan 2006 A1
20060009006 Murai et al. Jan 2006 A1
20060012299 Suehiro et al. Jan 2006 A1
20060017055 Cropper et al. Jan 2006 A1
20060022214 Morgan et al. Feb 2006 A1
20060038187 Ueno Feb 2006 A1
20060043399 Miyagaki et al. Mar 2006 A1
20060054905 Schwach et al. Mar 2006 A1
20060063028 Leurs Mar 2006 A1
20060091376 Kim et al. May 2006 A1
20060091788 Yan May 2006 A1
20060125385 Lu et al. Jun 2006 A1
20060138439 Bogner et al. Jun 2006 A1
20060145170 Cho Jul 2006 A1
20060154392 Tran et al. Jul 2006 A1
20060163586 Denbaars et al. Jul 2006 A1
20060163601 Harle et al. Jul 2006 A1
20060164836 Suehiro Jul 2006 A1
20060171152 Suehiro et al. Aug 2006 A1
20060175624 Sharma et al. Aug 2006 A1
20060175625 Yokotani et al. Aug 2006 A1
20060186418 Edmond et al. Aug 2006 A1
20060186424 Fujimoto et al. Aug 2006 A1
20060189026 Cropper et al. Aug 2006 A1
20060192217 David et al. Aug 2006 A1
20060194359 Weisbuch et al. Aug 2006 A1
20060194363 Giesberg et al. Aug 2006 A1
20060202219 Ohashi et al. Sep 2006 A1
20060202226 Weisbuch et al. Sep 2006 A1
20060233969 White et al. Oct 2006 A1
20060234486 Speck et al. Oct 2006 A1
20060237732 Nagai et al. Oct 2006 A1
20060239006 Chaves et al. Oct 2006 A1
20060243993 Yu Nov 2006 A1
20060246722 Speck et al. Nov 2006 A1
20060267026 Kim et al. Nov 2006 A1
20060273336 Fujikura et al. Dec 2006 A1
20060273343 Nakahata et al. Dec 2006 A1
20060289892 Lee Dec 2006 A1
20070001185 Lu et al. Jan 2007 A1
20070001186 Murai et al. Jan 2007 A1
20070001591 Tanaka Jan 2007 A1
20070012931 Lee et al. Jan 2007 A1
20070012940 Suh et al. Jan 2007 A1
20070019409 Nawashiro et al. Jan 2007 A1
20070029560 Su Feb 2007 A1
20070057624 Angelopoulos et al. Mar 2007 A1
20070065960 Fukshima et al. Mar 2007 A1
20070072324 Krames et al. Mar 2007 A1
20070085075 Yamazaki et al. Apr 2007 A1
20070085100 Diana et al. Apr 2007 A1
20070102721 Denbaars et al. May 2007 A1
20070114549 Yu May 2007 A1
20070120135 Soules et al. May 2007 A1
20070121690 Fujii et al. May 2007 A1
20070125995 Weisbuch et al. Jun 2007 A1
20070139949 Tanda et al. Jun 2007 A1
20070145397 Denbaars et al. Jun 2007 A1
20070147072 Scobbo et al. Jun 2007 A1
20070189013 Ford Aug 2007 A1
20070252164 Zhong et al. Nov 2007 A1
20070257267 Leatherdale Nov 2007 A1
20070257271 Ouderkirk Nov 2007 A1
20070284603 Haase Dec 2007 A1
20070290224 Ogawa Dec 2007 A1
20080012034 Thielen et al. Jan 2008 A1
20080030691 Godo Feb 2008 A1
20080030974 Abu-Ageel Feb 2008 A1
20080087900 Yang Apr 2008 A1
20080101086 Lee May 2008 A1
20080111146 Nakamura May 2008 A1
20080121918 Denbaars et al. May 2008 A1
20080128730 Fellows et al. Jun 2008 A1
20080128731 Denbaars et al. Jun 2008 A1
20080135864 David et al. Jun 2008 A1
20080149949 Nakamura et al. Jun 2008 A1
20080149959 Nakamura et al. Jun 2008 A1
20080169752 Hattori et al. Jul 2008 A1
20080182420 Hu et al. Jul 2008 A1
20080191191 Kim Aug 2008 A1
20080191224 Emerson et al. Aug 2008 A1
20080245949 Morimoto et al. Oct 2008 A1
20080251809 Wolf et al. Oct 2008 A1
20090039267 Iso et al. Feb 2009 A1
20090039762 Park et al. Feb 2009 A1
20090078951 Miki et al. Mar 2009 A1
20090114928 Messere et al. May 2009 A1
20090121250 Denbaars et al. May 2009 A1
20090140630 Kijima et al. Jun 2009 A1
20090146170 Zhong et al. Jun 2009 A1
20090315055 Tamboli et al. Dec 2009 A1
20100059787 Hoshina et al. Mar 2010 A1
20100090240 Tamboli et al. Apr 2010 A1
20100187555 Murai et al. Jul 2010 A1
20100264434 Pioessl et al. Oct 2010 A1
20100283078 Denbaars et al. Nov 2010 A1
20100289043 Aurelien et al. Nov 2010 A1
20110079806 Hsu et al. Apr 2011 A1
20110089455 Diana et al. Apr 2011 A1
20110193061 Hsu Aug 2011 A1
20120043568 Yan Feb 2012 A1
20120056158 Iso et al. Mar 2012 A1
20120161180 Komatsu et al. Jun 2012 A1
20130020602 Nakamura et al. Jan 2013 A1
20140252396 Fujii et al. Sep 2014 A1
20140292618 Yamazaki et al. Oct 2014 A1
20140353707 Nakamura et al. Dec 2014 A1
20150014732 Fellows Demille et al. Jan 2015 A1
20150102378 Huang et al. Apr 2015 A1
20150270444 Liu Sep 2015 A1
20160133790 Fellows Demille et al. May 2016 A1
20180190888 Kim Jul 2018 A1
Foreign Referenced Citations (143)
Number Date Country
754353 Nov 2002 AU
756072 Jan 2003 AU
2010257325 Dec 2011 AU
19807758 Dec 1998 DE
10245932 Feb 2004 DE
10361801 Aug 2005 DE
102004028143 Dec 2006 DE
19807758 Aug 2008 DE
112007000313 Jul 2009 DE
1081771 Mar 2001 EP
1213773 Jun 2002 EP
1213773 Jun 2002 EP
1416543 May 2004 EP
1536487 Jun 2005 EP
2087563 Aug 2009 EP
2174351 Apr 2010 EP
1081771 Jun 2011 EP
2843716 Mar 2015 EP
2858859 Feb 2005 FR
2371679 Jul 2002 GB
2413698 Nov 2005 GB
53024300 Mar 1978 JP
S5324300 Mar 1978 JP
09018057 Jan 1997 JP
09027642 Jan 1997 JP
H0927642 Jan 1997 JP
09055540 Feb 1997 JP
H0955540 Feb 1997 JP
10200165 Jul 1998 JP
H10200165 Jul 1998 JP
H11-17223 Jan 1999 JP
2000277808 Oct 2000 JP
2000277808 Oct 2000 JP
2001024223 Jan 2001 JP
2001044491 Feb 2001 JP
2001068731 Mar 2001 JP
2001068731 Mar 2001 JP
2001111112 Apr 2001 JP
3172947 May 2001 JP
2001126515 May 2001 JP
2001126515 May 2001 JP
2002084002 Mar 2002 JP
2002008735 Jul 2002 JP
2002208735 Jul 2002 JP
2002232020 Aug 2002 JP
2002280614 Sep 2002 JP
2002280614 Sep 2002 JP
2002314152 Oct 2002 JP
2002319708 Oct 2002 JP
2003011417 Jan 2003 JP
2003016808 Jan 2003 JP
2003017740 Jan 2003 JP
2003069085 Mar 2003 JP
2003069085 Mar 2003 JP
2003249692 Sep 2003 JP
2003249692 Sep 2003 JP
2003264317 Sep 2003 JP
2003318441 Nov 2003 JP
2003318441 Nov 2003 JP
2003347586 Dec 2003 JP
2004111981 Apr 2004 JP
2004111981 Apr 2004 JP
2004158557 Jun 2004 JP
2004521498 Jul 2004 JP
2004296999 Oct 2004 JP
2005056922 Mar 2005 JP
2005057310 Mar 2005 JP
2005093102 Apr 2005 JP
2005093102 Apr 2005 JP
2005117006 Apr 2005 JP
2005150261 Jun 2005 JP
2005191197 Jul 2005 JP
2005191197 Jul 2005 JP
2005191514 Jul 2005 JP
2005191514 Jul 2005 JP
2005267926 Sep 2005 JP
2005267926 Sep 2005 JP
2005268323 Sep 2005 JP
2005326757 Nov 2005 JP
2005347677 Dec 2005 JP
2005347677 Dec 2005 JP
2005353816 Dec 2005 JP
2006012916 Jan 2006 JP
2006024615 Jan 2006 JP
2006024616 Jan 2006 JP
2006032387 Feb 2006 JP
2006032387 Feb 2006 JP
2006041479 Feb 2006 JP
2006041479 Feb 2006 JP
2006060034 Mar 2006 JP
2006073618 Mar 2006 JP
2006128227 May 2006 JP
2006156590 Jun 2006 JP
2006165326 Jun 2006 JP
2006191103 Jul 2006 JP
2006210824 Aug 2006 JP
2006229259 Aug 2006 JP
2006237264 Sep 2006 JP
2006237264 Sep 2006 JP
2006261688 Sep 2006 JP
2006287113 Oct 2006 JP
2006294907 Oct 2006 JP
2006303258 Nov 2006 JP
2007165811 Jun 2007 JP
2007324220 Dec 2007 JP
2010510659 Apr 2010 JP
2010512662 Apr 2010 JP
2010534943 Nov 2010 JP
2014187397 Oct 2014 JP
200403690 Dec 2005 KR
100619441 Sep 2006 KR
100626365 Sep 2006 KR
100626365 Sep 2006 KR
100643582 Nov 2006 KR
100715580 May 2007 KR
100733903 Jul 2007 KR
100786798 Dec 2007 KR
100796670 Jan 2008 KR
100808705 Feb 2008 KR
100828174 May 2008 KR
100840637 Jun 2008 KR
20100059820 Jun 2010 KR
100618 Dec 2003 SG
586096 May 2004 TW
M293524 Jul 2006 TW
200830593 Jul 2008 TW
200843144 Nov 2008 TW
200924239 Jun 2009 TW
I460881 Nov 2014 TW
201448263 Dec 2014 TW
2002090825 Nov 2002 WO
WO 2002090825 Nov 2002 WO
WO 2004061969 Jul 2004 WO
2005064666 Jul 2005 WO
WO 2005064666 Jul 2005 WO
WO 2005083037 Sep 2005 WO
2006098545 Sep 2006 WO
WO 2007036198 Apr 2007 WO
WO 2007067758 Jun 2007 WO
WO 2008060586 May 2008 WO
WO 2008060615 May 2008 WO
WO 2008073400 Jun 2008 WO
WO 2009015386 Jan 2009 WO
Non-Patent Literature Citations (43)
Entry
PCT/US2006/023588 International Search Report and Written Opinion dated Jun. 16, 2006.
PCT/US2006/043317 International Search Report and Written Opinion dated Nov. 6, 2006.
PCT/US2007/025278 International Search Report and Written Opinion dated Apr. 3, 2008.
PCT/US2007/024062 International Search Report and Written Opinion dated Apr. 22, 2008.
PCT/US2007/023972 International Search Report and Written Opinion dated May 23, 2008.
PCT/US2008/071362 International Search Report and Written Opinion dated Sep. 22, 2008.
EP 06837048.5 Extended Search Report dated Dec. 1, 2010.
EP 07862038.2 Extended Search Report dated Jan. 6, 2012.
EP 14177879.5 Extended Search Report dated Mar. 27, 2015.
Carlin et al., High Quality AllnN for High Index Contrast Bragg Mirrors Lattice Matched to GaN, Applied Physics Letters, 2003, vol. 83(4).
Kawakami et al., Dimensionality of Excitons in InGaN-Based Light Emitting Devices, Phys, Stat. Sol., (a), 2000, vol. 178, pp. 331-336.
Murai et al., Hexagonal Pyramid shaped light-emitting diodes based on ZnO and GaN direct wafer bonding, Applied Physics Letters, 2006, vol. 89(17) pp. 17116-1-17116-3.
Nishida et al., Efficient and High-Power AIGaN-Based Ultraviolet Light-Emitting Diode Grown on Bulk GaN, Appl. Phys., Lett., 2001, vol. 79(6) pp. 711-712.
Oshima et al., Growth of the 2-in-Size Bulk Zn0 Single Crystals by the Hydrothermal Method, J. of Crystal Growth, 2004, vol. 260, pp. 166-170.
Sink et al., Cleaved GaN Facets by Wafer Fusion of GaN to InP, Applied Physics Letter, 1996, vol. 68(15).
Smathers et al., Nanometer Scale Surface Clustering on ZnSe Epilayers, Applied Physics Letters, 1998, vol. 72(10).
Someya et al., High Reflective GaN/AI0.34Ga0.66N Quarter-Wave Reflectors Grown by Metal Organic Chemical Vapor Deposition, Applied Physics Letter, 1998, vol. 73(25).
PCT/US2007/025343 International Search Report and Written Opinion dated Mar. 10, 2008.
Jasinski, J. et al., “Microstructure of GaAs/GaN interfaces produced by direct wafer fusion,” Appl. Phys. Lett., Oct. 21, 2002, pp. 3152-3154, vol. 81, No. 17.
Kish, F.A. et al., “Very high-efficiency semiconductor wafer-bonded transparent-substrate (AlxGz1-x)0.5In0.5P/GaP light-emitting diodes,” Appl. Phys. Lett., 23 May 1994, pp. 2839-2841, vol. 64, No. 21.
Liau, Z.L. et al., “Wafer fusion: A novel technique for optoelectronic device fabrication and monolithic integration,” Appl. Phys. Lett., Feb. 19, 1990, pp. 737-739, vol. 56, No. 8.
Murai, A. et al., “Wafer Bonding of GaN and ZnSSe for Optoelectronic Applications,” Jpn. J. Appl. Phys., 2004, pp. L1275-L1277, vol. 43, No. 10A.
Nakahara, K. et al., “Improved External Efficiency InGaN-Based Light-Emitting Diodes with Transparent Conductive Ga-Doped Zn0 as p-Electrodes,” Jpn. J. Appl. Phys., 2004, pp. L180-L182, vol. 43, No. 2A.
Nakamura, S. et al., “High-Brightness InGaN Blue, Green and Yellow Light-Emitting Diodes with Quantum Well Structures,” Jpn. J. Appl. Phys., Jul. 1, 1995, pp. L797-L799, vol. 34, Part 2, No. 7A.
Narukawa, Y. et al., “Ultra-High Efficiency White Light Emitting Diodes,” Jpn. J. Appl. Phys., 2006, pp. L1084-L1086, vol. 45, No. 41.
A.A. Bergh and P.J. Dean. Light-emitting diodes. Clarendon Press—Oxford. 1976.
Adachi S. “Properties of Gallium Arsenide” EMIS Data review Ser. 2 513 INSPEC (IEEE New York 1990).
Fujii, T. et al. Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening. Appl. Phys. Lett., Feb. 9, 2004, pp. 855-857, vol. 84, No. 6.
Hoefler G. E., Vanderwater D. A., DeFevere D. C., Kish F. A., Camras M. D., Steranka F. M., and Tan I.-H. (1996) “Wafer bonding of 50-mm diameter GaP to AlGaInP—GaP light-emitting diode wafers” Appl. Phys. Lett. 69, 803.
Kish F. A., Steranka F. M., DeFevere D. C., Vanderwater D. A., Park K. G., Kuo C. P., Osentowski T. D., Peanasky M. J., Yu J. G., Fletcher R. M., Steigerwald D. A., Craford M. G., and Robbins V. M. “Very high-efficiency semiconductor wafer-bonded transparent substrate (AlxGa1-x)0.5In0.5P/GaP light emitting diodes” Appl. Phys. Lett. 64, 2839 (1994).
Kish F. A., Vanderwater D. A., Peanasky M. J., Ludowise M. J., Hummel S. G., and Rosner S. J. “Low-resistance ohmic conduction across compound semiconductor wafer-bonded interfaces” Appl. Phys. Lett. 67, 2060 (1995).
Nakahara, K. et al., “Improved External Efficiency InGaN-Based Light-Emitting Diodes with Transparent Conductive Ga-Doped Zn0 as p-Electrodes,” Jpn. J. Appl. Phys., 2004, pp. L180-L182, vol. 43.
Narukawa, Y. et al., “Ultra-High Efficiency White Light Emitting Diodes,” Jpn. J. Appl. Phys., 2006, pp. L1084-L1086, vol. 45.
Noctron seeks Chinese partners to make innovative LED products (Aug. 2006)—News—LEDs Magazine.
Orita, S. Tamura, T. Takizawa, T. Ueda, M. Yuri, S. Takigawa, D. Ueda, Jpn. J. Appl. Phys. 43, 5809 (2004).
Tadatomo, H. Okagawa, Y. Ohuchi, T. Tsunekawa, T. Jyouichi, Y. Imada, M. Kato, H. Kudo, T. Taguchi, Phys. Status Solidi A 188, 121-125 (2001).
Yamada, T. Mitani, Y. Narukawa, S. Shioji, I. Niki, S. Sonobe, K. Deguchi, M. Sano, T. Mukai, Jpn. J. Appl. Phys. 41, L1431 (2002).
“Noctron seeks Chinese partners to make innovative LED products,” LEDs Magazine, Aug. 2006, https://web.archive.org/web/20061017131530/http://ledsmagazine.com/articles/news/3/8/23/1, pp. 1-2.
Han, D-S., et al., “Improvement of Light Extraction Efficiency of Flip-Chip Light-Emitting Diode by Texturing the Bottom Side Surface of Sapphire Substrate,” IEEE Photonics Technology Letters, Jul. 1, 2006, pp. 1406-1408, vol. 18, No. 13.
Schubert, E.F., Light-Emitting Diodes, 2003, p. 149, Cambridge University Press.
Stringfellow, G.B., et al., High Brightness Light Emitting Diodes, Semiconductors and Semimetals, 1997, pp. 176-177, 338-339, vol. 48, Academic Press.
Pankove, J.I., et al., Gallium Nitride (GaN) II, Semiconductors and Semimetals, 1999, p. 339, vol. 57, Academic Press.
Cuong, T. V., et al., “Calculation of the external quantum efficiency of light emitting diodes with different chip designs,” Phys. Stat. Sol. (c), 2004, pp. 2433-2437, vol. 1, No. 10.
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Child 16569120 US
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