Number | Name | Date | Kind |
---|---|---|---|
2706992 | Friedman et al. | Apr 1955 | |
3285458 | Wojciechowski | Nov 1966 | |
3343812 | Moulton | Sep 1967 | |
3469686 | Gutsche et al. | Sep 1969 | |
3487948 | Haidegger | Jan 1970 | |
3534862 | Shambelan | Oct 1970 | |
3760822 | Evans | Sep 1973 | |
3826377 | Bachman | Jul 1974 | |
3834349 | Dietze et al. | Sep 1974 | |
3877134 | Shanahan | Apr 1975 | |
3923156 | Wallestad | Dec 1975 | |
3926305 | Wallestad | Dec 1975 | |
3998333 | Kamada | Dec 1976 | |
4015615 | Weber et al. | Apr 1977 | |
4077416 | Johnson, Jr. et al. | Mar 1978 | |
4132567 | Blackwood | Jan 1979 | |
4153164 | Hofmeister et al. | May 1979 | |
4197000 | Blackwood | Apr 1980 | |
4228902 | Schulte | Oct 1980 | |
4256229 | Lee | Mar 1981 | |
4286541 | Blackwood | Sep 1981 | |
4318749 | Mayer | Mar 1982 | |
4321654 | Nakajo et al. | Mar 1982 | |
4328081 | Fazlin | May 1982 | |
4395348 | Lee | Jul 1983 |
Entry |
---|
Book of SEMI Standards, Semiconductor Equipment and Materials Institute, Inc., 1983, pp. 1-9. |