WAFER-LEVEL CHIP PACKAGE PROCESS

Abstract

A wafer-level chip package process is provided. First, a transparent substrate having a chip sealing layer and a transparent layer is provided. Then, the chip sealing layer is cut to form a first groove of a predetermined depth, and an adhesive is formed on the chip sealing layer. Next, a wafer having a back surface and an active surface is provided, and the transparent substrate is disposed on the active surface of the wafer, wherein the chip sealing layer is adhered to the active surface by the adhesive. Next, the transparent layer is cut to form a second groove corresponding to the first groove. Next, the back surface of the wafer is cut to form a third groove corresponding to the first groove. After that, the wafer and the transparent substrate are singulated to form a plurality of chip package structures.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

FIGS. 1A˜1D are flowcharts illustrating a conventional wafer-level chip package process.

FIGS. 2A˜2G are flowcharts illustrating a wafer-level chip package process according to an exemplary embodiment of the present invention.

Claims

1. A wafer-level chip package process, comprising: providing a transparent substrate having a chip sealing layer and a transparent layer;cutting the chip sealing layer to form a first groove of a predetermined depth;forming an adhesive on the chip sealing layer;providing a wafer having a back surface and an active surface;disposing the transparent substrate on the active surface of the wafer, and the chip sealing layer being adhered to the active surface by the adhesive;cutting the transparent layer to form a second groove of a predetermined depth, and the second groove is corresponding to the first groove;cutting the back surface of the wafer to form a third groove of a predetermined depth, and the third groove is corresponding to the first groove; andsingulating the wafer and the transparent substrate to form a plurality of chip packages.

2. The wafer-level chip package process as claimed in claim 1, wherein the transparent layer is a glass wafer and the chip sealing layer is a silicon substrate.

3. The wafer-level chip package process as claimed in claim 1, wherein the first groove is formed by cutting the chip sealing layer along a predetermined path with a cutter, and the depth of the first groove is smaller than the thickness of the chip sealing layer.

4. The wafer-level chip package process as claimed in claim 1, wherein the second groove is formed by cutting the transparent layer along a predetermined path with a cutter, and the depth of the second groove is smaller than the thickness of the transparent layer.

5. The wafer-level chip package process as claimed in claim 1, wherein the third groove is formed by cutting the back surface of the wafer along a predetermined path with a cutter, and the depth of the third groove is smaller than the thickness of the wafer.

6. The wafer-level chip package process as claimed in claim 1, wherein a micro structure is disposed on the active surface of the wafer.

7. The wafer-level chip package process as claimed in claim 6, wherein the micro structure comprises micro lens or micro-electro-mechanical device.

8. The wafer-level chip package process as claimed in claim 1, wherein the wafer comprises a plurality of active devices disposed on the active surface of the wafer.

9. The wafer-level chip package process as claimed in claim 8, wherein the active devices comprise complementary metal oxide semiconductor (CMOS) devices.