Wiring board

Information

  • Patent Grant
  • 12177971
  • Patent Number
    12,177,971
  • Date Filed
    Wednesday, October 23, 2019
    5 years ago
  • Date Issued
    Tuesday, December 24, 2024
    10 days ago
Abstract
A wiring board includes an insulating layer comprising organic resin with inorganic particles, a first metal layer on a first surface, and a second metal layer disposed on a second surface. The insulating layer has a thickness of 75-1000 μm and a storage modulus of 4 GPa-7 GPa. The first metal layer has a thickness of 1.5-10 μm and a coverage of 5%-25%. The second metal layer has a thickness of 3-10 μm or 25-100 μm and a coverage of 85% or more. A surface part of the insulating layer on the first metal layer side has a higher ratio of organic resin than a surface part of the insulating layer on the second metal layer side.
Description
TECHNICAL FIELD

The present disclosure relates to a wiring board.


BACKGROUND

In the automotive industry, a millimeter wave radar has been rapidly spreading in recent years for purposes such as collision prevention. A transmission line for transmitting high-frequency signals is required to be compact and have low transmission loss. Examples of such a transmission line include strip lines, microstrip lines, and coplanar lines. Among these transmission lines, for example, a microstrip line is composed of a rectangular-shaped patch conductor on one main surface of an insulation layer and a ground (earth) conductor on an opposite main surface. In order to suppress the attenuation of transmission signals due to dielectric loss, such a transmission line requires an insulating layer having a low relative permittivity and a low dielectric dissipation factor. For example, an insulating layer mainly composed of organic resin such as Teflon (registered trademark) can be mentioned (see Patent Documents 1, 2 and 3).


PRIOR ART DOCUMENTS
Patent Documents





    • Patent Document 1: Japanese Unexamined Patent Publication No. 2017-187379

    • Patent Document 2: Japanese Unexamined Patent Publication No. 2003-37420

    • Patent Document 3: International Publication No. 2005/013418





SUMMARY OF THE INVENTION

A wiring board of the present disclosure includes an insulating layer which is mainly composed of organic resin and has inorganic particles, a first metal layer which is disposed on a first surface of the insulating layer, and a second metal layer which is disposed on a second surface on an opposite side of the first surface, in which

    • the insulating layer has
    • a thickness of 75 μm or more and 1000 μm or less,
    • a storage modulus of 4 GPa or more and 7 GPa or less,
    • the first metal layer has
    • a thickness of 1.5 μm or more and 10 μm or less,
    • a coverage of 5% or more and 25% or less,
    • the second metal layer has
    • a thickness of 3 μm or more and 10 μm or less or 25 μm or more and 100 μm or less,
    • a coverage of 85% or more, and
    • a surface part of the insulating layer on a side where the first metal layer is provided has a higher ratio of organic resin than a surface part of the insulating layer on a side where the second metal layer is provided.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a perspective view of a wiring board according to one embodiment of the present disclosure.



FIG. 2 is a sectional view of line ii-ii in FIG. 1.



FIG. 3 is a perspective view illustrating another embodiment of a wiring board of the present disclosure.



FIG. 4 is a perspective view illustrating another embodiment of a wiring board of the present disclosure.



FIG. 5 is a perspective view illustrating another embodiment of a wiring board of the present disclosure.



FIG. 6 is a perspective view illustrating another embodiment of a wiring board of the present disclosure.



FIG. 7 is a perspective view illustrating another embodiment of a wiring board of the present disclosure.



FIG. 8 is a sectional view of line viii-viii in FIG. 6.



FIG. 9 is a sectional view illustrating another embodiment of a wiring board of the present disclosure.



FIG. 10 is a partial sectional view in line x-x in FIG. 6.





EMBODIMENTS FOR CARRYING OUT THE INVENTION

Organic resin that configures the conventional wiring board described above originally has a low storage modulus. Therefore, depending on the size and placement of the rectangular-shaped patch conductor and the ground (earth) conductor provided on both main surfaces of the insulating layer, the wiring board tends to warp. The present disclosure aims to address this problem and to obtain a wiring board that can reduce warpage.



FIG. 1 is a perspective view of a wiring board according to one embodiment of the present disclosure. FIG. 2 is a sectional view of line ii-ii in FIG. 1. A wiring board A of the present disclosure includes a first metal layer 3a which is disposed on a first surface 1a of an insulating layer 1, and a second metal layer 3b which is disposed on a second surface 1b on an opposite side of the first surface 1a. The insulating layer 1 is mainly composed of organic resin and includes inorganic particles.


In the present disclosure, the wiring board A having small warpage can be obtained if the insulating layer 1, the first metal layer 3a, and the second metal layer 3b satisfy the following conditions. In this case, the value of warpage is satisfied immediately after the wiring board A is manufactured as well as after the wiring board A is exposed to the conditions of general reliability tests.


As for the conditions of each member that configures the wiring board A, the insulating layer 1 has a thickness of 75 μm or more and 1000 μm or less, and a storage modulus of 4 GPa or more and 7 GPa or less. The first metal layer 3a has a thickness of 1.5 μm or more and 10 μm or less, and a coverage of 5% or more and 25% or less. Here, the coverage is an area ratio of the first metal layer 3a to the first surface 1a of the insulating layer 1. The second metal layer 3b has a thickness of 3 μm or more and 10 μm or less or 25 μm or more and 100 μm or less, and a coverage of 85% or more. In this case, the coverage is an area ratio of the second metal layer 3b to the second surface 1b of the insulating layer 1.


Furthermore, in the wiring board A, a surface part 1c of the insulating layer 1 on a side where the first metal layer 3a is provided has a higher ratio of organic resin than a surface part 1d of the insulating layer 1 on a side where the second metal layer 3b is provided.


In addition to the conditions of the thickness and the coverage of the first metal layer 3a and the second metal layer 3b which are respectively provided on the first surface 1a and the second surface 1b of the insulating layer 1, when the ratio of organic resin is different on both sides of the insulating layer 1, the warpage of the wiring board A can be reduced by disposing a metal layer having a low coverage on the surface part 1c where the ratio of organic resin is high. As an example of the level of warpage, if the area of a plane of the wiring board A is 50 mm×50 mm, the warpage is 2 mm or less. The warpage of the wiring board A is the average of the maximum values when the warpage is measured by scanning on two intersecting diagonal lines if the wiring board A is rectangular in shape. A three-dimensional laser displacement meter, for example, is used to measure the warpage.


Organic resin as a main component means a state in which a volume ratio of organic resin is the highest in the insulating layer 1. As for inorganic particles, among various inorganic particles, particulate silica is suitable due to its low relative permittivity. In this case, the thermal expansion coefficient of organic resin is preferably higher than the thermal expansion coefficient of inorganic particles. Copper is also suitable as a material for the first metal layer 3a and the second metal layer 3b. Copper is suitable because it has relatively low electrical resistance, and for example, it can be formed by plating films in addition to the method of transferring metal foils, and furthermore, it is inexpensive. The surface parts 1c and 1d of the insulating layer 1 are set to a depth of up to 10 μm from the surface. The ratio of inorganic particles in the surface parts 1c and 1d of the insulating layer 1 is determined by observing a cross-section of the prepared wiring board A using a scanning electron microscope having an analyzer, and from the area ratio of inorganic particles in a unit area region of a cross-sectional photograph taken. The ratio of organic resin is calculated by subtracting the area ratio of inorganic particles from the unit area of the cross-sectional photograph taken.



FIG. 3 is a perspective view illustrating another embodiment of a wiring board of the present disclosure. A wiring board B illustrated in FIG. 3 includes an antenna pattern 10 of microstrip type as the first metal layer 3a. The antenna pattern 10 includes a patch conductor 11, a linear conductor 13, and a power supply part 15. The second metal layer 3b is a ground conductor 17.


The antenna pattern 10 in the wiring board B illustrated in FIG. 3 is in the form of a plurality of patch conductors 11 connected in parallel to the linear conductor 13. The power supply part 15 is provided at an end part of the linear conductor 13. The wiring board B includes two antenna patterns 10a and 10b on a main surface 1a of the insulating layer 1. In this case, the areas of the two antenna patterns 10a and 10b are equal in the ratio to the area of the first surface 1a of the insulating layer 1. Equal in the area ratio is defined as when the area between two antenna patterns 10a and 10b is within 10 points in % display difference. The two antenna patterns 10a and 10b illustrated in FIG. 3 have a longitudinal direction of the antenna pattern 10 (10a and 10b) facing an X direction on the first surface 1a. The two antenna patterns 10a and 10b are aligned in the direction perpendicular to the longitudinal direction (a Y direction).



FIG. 4 is a perspective view illustrating another embodiment of a wiring board of the present disclosure. A wiring board C illustrated in FIG. 4 includes three antenna patterns 10a, 10b, and 10c on the first surface 1a of the insulating layer 1. The antenna pattern 10 includes the patch conductor 11, the linear conductor 13, and the power supply part 15. The second metal layer 3b is the ground conductor 17. The antenna patterns 10a, 10b, and 10c have the linear conductor 13 branched into two. A plurality of patch conductors 11 are connected in parallel to each of the branched linear conductors 13. In this case, the area of the three antenna patterns 10a, 10b, and 10c is also within 10 points in % display difference between the three antenna patterns 10a, 10b, and 10c, as in the case of the wiring board B described above.


In the wiring board C, two antenna patterns 10a and 10b out of three antenna patterns 10a, 10b, and 10c are disposed so as to be aligned in the Y direction on the first surface 1a. The other antenna pattern 10c is disposed at a distance in the X direction from the two antenna patterns 10a and 10b. The placement is non-linearly symmetrical in at least one direction when the direction of the plane at the first surface 1a of the insulating layer 1 is the X direction and the Y direction, which are perpendicular to each other.


More details are explained. First, the first surface 1a of the wiring board C has a rectangular shape. A virtual line L is set on the first surface 1a. The virtual line L faces a direction perpendicular to one side of the first surface 1a. The virtual line L is drawn to pass through the center of the first surface 1a. The region on the left side of the wiring board C (the insulating layer 1) is 1A, and the region on the right side is 1B. Two antenna patterns 10a and 10b out of three antenna patterns 10a, 10b, and 10c are disposed in the region 1A on the left side. On the other hand, one antenna pattern 10c is disposed in the region 1B on the right side. The number of antenna patterns 10 differs between the region 1A on the left and the region 1B on the right. The antenna patterns 10a and 10b and the antenna pattern 10c are disposed in a non-linear symmetry with respect to the virtual line L. In other words, the area of the antenna pattern 10 (10a, 10b) or the area ratio of the antenna pattern 10 to the area of the first surface 1a of the insulating layer 1 is different between the region 1A on the left side and the region 1B on the right side of the wiring board C.


The present disclosure can reduce the warpage of the wiring board C even if the antenna pattern 10 is not evenly disposed on the first surface 1c of the wiring board C, as illustrated in FIG. 4 using the wiring board C as an example. As a result, the degradation of antenna characteristics can be reduced.



FIG. 5 is a perspective view illustrating another embodiment of a wiring board of the present disclosure. The wiring board D illustrated in FIG. 5 has a 90° rotated orientation of one antenna pattern (in this case, the antenna pattern of reference numeral 10c) among a plurality of antenna patterns 10a, 10b, and 10c disposed with respect to the wiring board C illustrated in FIG. 4. The longitudinal direction of the linear conductor 13 forming the antenna pattern 10c in the wiring board C illustrated in FIG. 4 is in the X direction. In contrast, in the wiring board D illustrated in FIG. 5, the longitudinal direction of the linear conductor 13 forming the antenna pattern 10c is in the Y direction. That is, in the wiring board D illustrated in FIG. 5, when a plurality of antenna patterns 10 are disposed on the insulating layer 1, at least one of the antenna patterns (in this case, reference numeral 10c) is disposed to face a different direction from the other antenna patterns 10. The present disclosure can reduce the warpage of the wiring board even if a plurality of antenna patterns 10 are formed on the insulating layer 1 and at least one of the antenna patterns 10 (in this case, reference numeral 10c) is disposed to face a different direction from the other antenna patterns 10. In this case, the ratio of the antenna patterns 10 that are disposed in a different direction from the other antenna patterns 10 among the plurality of antenna patterns 10 formed on the insulating layer 1 is preferably within a range of 20% or more and 45% or less when the total area of the antenna patterns is 100%.


In the wiring boards C and D, if the first surface 1a is a rectangular shape, and a virtual line L is set at a right angle to one side of the first surface 1a and at the center of the first surface 1a, the plurality of antenna patterns 10a, 10b, 10c differ in at least one of number, area, and orientation between the two regions 1A and 1B across the virtual line L.



FIG. 6 is a perspective view further illustrating another embodiment of a wiring board of the present disclosure. A wiring board E is illustrated in FIG. 6. The antenna pattern 10 which is provided in the wiring board E is a basic shape of the antenna pattern 10 in the wiring board B illustrated in FIG. 3, and the shape of the linear conductor 13 is changed.


A wiring conductor E illustrated in FIG. 6 is a planar curved shape of the linear conductor 13 in the antenna pattern 10. If the linear conductor 13 has such a curved shape, it is possible to dispose more patch conductors 3a between adjacent linear conductors 13 even if the area of the first surface 1a is limited.


If the linear conductor 13 has a curved shape, the intervals between the patch conductors 13 can be adjusted. This makes it possible to reduce phase shifts of the radio waves radiated respectively from a plurality of patch conductors 13.


If the linear conductor 13 is bent at a right angle like the wiring boards B, C, and D, an electric field tends to radiate into space from a part that is bent at a right angle when supplying the electric field from the power supply part 15 to the patch conductor 13.


On the other hand, if the linear conductor 13 has a curved shape, the electric field can be suppressed from radiating into space. As a result, the radiation characteristics from the antenna pattern 10 can be enhanced.



FIG. 7 is a perspective view illustrating another embodiment of a wiring board of the present disclosure. A wiring board F illustrated in FIG. 7 has a basic shape of the antenna pattern 10 in the wiring board D illustrated in FIG. 5, and the shape of the linear conductor 13 is changed.


For the wiring board F illustrated in FIG. 7, the linear conductor 13 is a curved shape, similar to the wiring board E illustrated in FIG. 6. The wiring board F also has a shape that is able to adjust the intervals between the patch conductors 13. This makes it possible to reduce phase shifts of the radio waves radiated respectively from a plurality of patch conductors 13. In addition, the electric field can be suppressed from radiating into space because the linear conductor 13 has a curved shape. Compared to the wiring board E, the wiring board F can enhance the radiation characteristics from the antenna pattern 10.



FIG. 8 is a sectional view of line viii-viii in FIG. 6. FIG. 9 is a sectional view illustrating another embodiment of a wiring board of the present disclosure. A wiring board G illustrated in FIG. 9 is a sectional view illustrating a state in which the second metal layer 3b is layered in the thickness direction to the wiring board E illustrated in FIGS. 6 and 8.


In the wiring board E illustrated in FIGS. 6 and 8, the second metal layer 3b, which is the ground conductor 17, is a single-layered structure. In contrast, in the wiring board G illustrated in a sectional view in FIG. 9, the second metal layer 3b, which is the ground conductor 17, is layered in the thickness direction. In this case, the second metal layer 3b has a structure through an interface. Whether the second metal layer 3b is layered or not is determined by microscopic observation such as a scanning electron microscope. In this case, the thickness of the second metal layer 3b is preferably 25 μm or more and 100 μm or less, especially 25 μm or more and 50 μm or less.


The second metal layer 3b, which forms the ground conductor 17, occupies a large area relative to the second surface 1b of the insulating layer 1. If the second metal layer 3b has a structure that forms a layer, the second metal layer 3b tends to shear and deform at this interface because the bond in the thickness direction is weaker compared to the case where the second metal layer 3b is layered. As a result, the wiring board G exhibits high flexibility. It is also difficult for cracks to occur on the surface of the wiring board F even if the wiring board F is bent.



FIG. 10 is a partial sectional view in line x-x in FIG. 6. FIG. 10 is a partial sectional view of the power supply part 15 of the wiring board E illustrated in FIG. 6. As illustrated in FIG. 10, in the wiring board E, the power supply part 15, which is composed of the antenna pattern 10, includes a through-via 18 that penetrates the wiring board E in the thickness direction. In FIG. 10, the through-via 18 is areas surrounded by dashed-dotted lines. The through-via 18 is composed of a through-hole and a metal film. Hereinafter, the metal film provided on an inner wall 19a where the insulating layer 1 is exposed is referred to as a third metal layer 21. The third metal layer 21 plays a role as a via conductor in the wiring board E. That is, the through-via 18 includes the third metal layer 21 on the inner wall 19a where the insulating layer 1 is exposed. As illustrated in FIG. 10, the through-via 18 does not fill a through-hole 19 when viewing the wiring board E in cross-section, but partially leaves a structure that is penetrated. In this case, the third metal layer 21 is disposed so as to extend from the inner wall 19a of the through-hole 19 to the surface of the insulating layer 1. In other words, the third metal layer 21 is formed on the insulating layer so as to form a layer with the first metal layer 3a and the second metal layer 3b, without filling the through-hole 19.


The wiring board E has a structure in which the third metal layer 21, which plays a role as a conductor part of the through-via 18, does not fill the through-hole 19, but extends from the inner wall 19a of the through-hole 19 onto the respective surfaces of the first metal layer 3a and the second metal layer 3b. In other words, because the third metal layer 21 is a layered structure with the first metal layer 3a or the second metal layer 3b, the bond between the layers is weaker than that of a structure in which the third metal layer 21 and the first metal layer 3a or the second metal layer 3b are integrated. Therefore, the third metal layer 21 also tends to shear and deform respectively at the interface with the first metal layer 3a and the interface with the second metal layer 3b. As a result, even though the wiring board E has the through-via 18, it exhibits high flexibility, and it is difficult for cracks to occur on the surface of the wiring board E when the wiring board E is bent. Although the wiring board E illustrated in FIG. 6 is shown as an example of a wiring board having the third metal layer 21, the present disclosure is not limited to this, and it is needless to say that similar effects can be obtained for the wiring boards B, C, D, F, and G.


Organic resin included in the insulating layer 1 that configures the wiring boards (A to G) of the disclosure can be applied as suitable if it is an organic material having low relative permittivity and dielectric dissipation factor. In this case, thermosetting organic resin is preferred. As an example of organic resin, one from the group of cyclic olefin copolymer, polyphenylene ether, and polytetrafluoroethylene is preferred.


Inorganic particles may be 5% or more and 50% or less by a volume ratio in the insulating layer 1. Besides this, auxiliaries such as flame retardants and stress relievers may also be included. The ratio of these auxiliaries is preferably 2% or more and 20% or less by volume, respectively, in the insulating layer 1.


The wiring boards A to G can be obtained, for example, through the steps of: preparing a resin composition that becomes the above-mentioned insulating layer 1, forming a semi-cured insulating sheet by forming this resin composition into a sheet shape, attaching metal foils that become the first metal layer and the second metal layer to the surface of this insulating sheet, heating and pressurizing the insulating sheet on which the first metal layer and the second metal layer are formed under predetermined conditions (temperature, pressure, and atmosphere), and etching the metal foils into predetermined patterns. After this, if necessary, through-holes are formed in the wiring boards A to F using a mold or laser processing machine. The third metal layer 21, which becomes the through-via 18 by plating the through hole 19, is also formed.


If the second metal layer 3b is layered, it is preferable to set the plating speed to a faster condition than usual when forming a metal layer on the outermost surface side of the second metal layer 3b. This also applies to the case where the third metal layer 21 is formed in layers on the first metal layer 3a and the second metal layer 3b. In this case, it is needless to say that usual conditions for cleaning, degreasing, reducing or the like are applied to the surface of the metal film to be plated.


EXAMPLES

First, a sheet-like molded body was prepared. For the sheet-like molded body, cyclic olefin copolymer modified to thermosetting type was used as organic resin. Silica (specific gravity: 2) was used as inorganic particles. “SAYTEX8010 (manufactured by Albemarle Corporation)” (specific gravity: 2.8) was used as flame retardant. Inorganic particles were added at a rate of 20 mass parts per 100 mass parts of organic resin. Flame retardant was added at a rate of 30 mass parts per 100 mass parts of organic resin.


Next, the resulting resin composition was dissolved in xylene to obtain resin varnish. The mass ratio of the resin composition to xylene was 40:60. The resulting resin varnish was then formed into a sheet using a bar coater and dried at 150° C. The drying time was varied from 3 to 60 minutes depending on the thickness of the sheet-like molded body to obtain a sheet-like molded body in a semi-cured state.


Next, a copper clad laminate was obtained by attaching copper foils to both main surfaces of the sheet-like molded body in the semi-cured state and performing pressurizing and heating treatment. The resulting copper clad laminate was then subjected to resist processing and etching to form the antenna pattern. The area of a plane of the wiring board is 50 mm×50 mm. When forming the second metal layer in a two-layer structure, the second metal layer was plated at twice the speed of the plating when preparing a wiring board having a one-layer structure. Plating was carried out at 3 A/dm2 for 50 minutes.


The ratio of organic resin and inorganic particles in the surface part of the insulating layer was determined by observing a cross-section of the prepared wiring board using a scanning electron microscope having an analyzer, and from the area ratio of inorganic particles in the unit area region of the cross-sectional photographs taken. The area where the cross-sectional photographs were taken was 10 μm in depth and 50 μm in width from the surface. For each sample, the cross-sectional photographs of the center part of both main surfaces were taken at one location, respectively.


For the storage modulus, the metal foil was peeled off from the resulting wiring board, the insulating layer was processed to 50 mm (length)×8 mm (width), and the dynamic mechanical analysis (DMA) was performed to obtain a value at room temperature (25° C.)


Among the evaluation items listed in the table, the antenna pattern illustrated in FIG. 1 was used to measure the warpage and flexibility of the wiring board. FIG. 1 is a structure in which the first metal layer and the second metal layer are respectively disposed at the center of both main surfaces of the insulating layer.


The warpage of the wiring board was measured using a 3D laser displacement meter to the copper clad laminate obtained after pressurizing and heating treatment. In this case, the surface of the first metal layer side of the wiring board was measured along two intersecting diagonal lines. The number of samples was five, and the average value was calculated.


For the flexibility of the wiring board, the resulting wiring board was cut to prepare a sample (2 mm×20 mm). Stainless steel (SUS304) rods having diameters of 3 mm, 3.5 mm, 4 mm, and 4.5 mm were prepared, and the resulting samples were placed on each rod and bent 180°. The presence of cracks was checked by visually observing the bent parts. The minimum diameters of the rods where cracks occurred are shown in Tables 1 to 3. It was determined that it had superior flexibility when it was 4 mm or less. In Tables 1 to 3, only the values of the samples for which the flexibility was measured are given.


The antenna characteristics were evaluated by measuring the radiation characteristics and the gain using a network analyzer for the samples shown in Tables 12 to 14. In this case, the value of the sample having the maximum value of gain was normalized to 1 for each antenna pattern having a similar shape, as shown in Tables 12 to 14, respectively. For the samples that evaluated the antenna characteristics shown in Tables 12 to 14, the wiring board, in which the thickness of the insulating layer was 100 μm, the storage modulus was 5 GPa, the coverage of the first metal layer was 17%, the coverage of the second metal layer was 95%, and the thickness was 50 μm, and the first metal layer was formed on the surface of the side with a high ratio of organic resin in the insulating layer, was used. The samples with varying thickness of the first metal layer and number of layers of the second metal layer were used. The warpage of the wiring board was also measured for each sample after the antenna characteristics were measured.












TABLE 1









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
GPa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 1
100
5
3
1.5
85
3
1
First Metal Layer
104.5
4


I- 2
100
5
30
1.5
85
3
1
First Metal Layer
104.5
4


I- 3
100
5
3
5
85
3
1
First Metal Layer
108
4


I- 4
100
5
30
5
85
3
1
First Metal Layer
108
4


I- 5
100
5
3
10
85
3
1
First Metal Layer
113
4


I- 6
100
5
30
10
85
3
1
First Metal Layer
113
4


I- 7
100
5
3
1.5
95
3
1
First Metal Layer
104.5
4


I- 8
100
5
30
1.5
95
3
1
First Metal Layer
104.5
4


I- 9
100
5
3
1.5
99
3
1
First Metal Layer
104.5
4


I- 10
100
5
30
1.5
99
3
1
First Metal Layer
104.5
4


I- 11
100
5
5
1
85
3
1
First Metal Layer
104
5


I- 12
100
5
25
13
85
3
1
First Metal Layer
116
4


I- 13
100
5
17
1
85
3
1
First Metal Layer
104
5


I- 14
100
5
17
13
85
3
1
First Metal Layer
116
4


I- 15
100
5
5
1
95
3
1
First Metal Layer
104
5


I- 16
100
5
25
13
95
3
1
First Metal Layer
116
4


I- 17
100
5
17
1
95
3
1
First Metal Layer
104
5


I- 18
100
5
17
13
95
3
1
First Metal Layer
116
4


I- 19
100
5
5
1
99
3
1
First Metal Layer
104
5


I- 20
100
5
25
13
99
3
1
First Metal Layer
116
4


I- 21
100
5
17
1
99
3
1
First Metal Layer
104
5


I- 22
100
5
17
13
99
3
1
First Metal Layer
116
4


I- 23
100
5
5
5
80
3
1
First Metal Layer
108
5


I- 24
100
5
25
5
80
3
1
First Metal Layer
108
4


I- 25
100
5
5
5
80
10
1
First Metal Layer
115
5


I- 26
100
5
25
5
80
10
1
First Metal Layer
115
4


I- 27
100
5
5
5
80
25
1
First Metal Layer
130
5


I- 28
100
5
25
5
80
25
1
First Metal Layer
130
4


I- 29
100
5
5
5
80
100
2
First Metal Layer
205
5


I- 30
100
5
25
5
80
100
2
First Metal Layer
205
4



















TABLE 2









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total




















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-




Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage
Flexibility


No.
μm
Gpa
%
μm
%
μm
Layers
Organic Resin
μm
mm
mm





















I- 31
100
5
5
5
95
2
1
First Metal Layer
107
5



I- 32
100
5
25
5
95
2
1
First Metal Layer
107
5



I- 33
100
5
5
5
95
13
1
First Metal Layer
118
4



I- 34
100
5
25
5
95
13
1
First Metal Layer
118
4



I- 35
100
5
5
5
95
20
1
First Metal Layer
125
4



I- 36
100
5
25
5
95
20
1
First Metal Layer
125
4



I- 37
100
5
5
5
95
130
2
First Metal Layer
235
4



I- 38
100
5
25
5
95
130
2
First Metal Layer
235
4



I- 39
100
5
17
1.5
95
2
1
First Metal Layer
103.5
4



I- 40
100
5
17
5
95
2
1
First Metal Layer
107
4



I- 41
100
5
17
10
95
2
1
First Metal Layer
112
4



I- 42
100
5
17
1.5
95
13
1
First Metal Layer
114.5
5



I- 43
100
5
17
5
95
13
1
First Metal Layer
118
5



I- 44
100
5
17
10
95
13
1
First Metal Layer
123
5



I- 45
100
5
17
1.5
95
20
1
First Metal Layer
121.5
4



I- 46
100
5
17
5
95
20
1
First Metal Layer
125
4



I- 47
100
5
17
10
95
20
1
First Metal Layer
130
4



I- 48
100
5
17
1.5
95
130
2
First Metal Layer
231.5
4



I- 49
100
5
17
5
95
130
2
First Metal Layer
235
4



I- 50
100
5
17
10
95
130
2
First Metal Layer
240
4



I- 51
100
5
17
1
95
50
2
First Metal Layer
151
5
3.5


I- 52
100
5
17
13
95
50
2
First Metal Layer
163
4
3.5


I- 53
100
5
5
5
85
3
1
First Metal Layer
108
2



I- 54
100
5
25
5
85
3
1
First Metal Layer
108
2



I- 55
100
5
5
5
85
10
1
First Metal Layer
115
2



I- 56
100
5
25
5
85
100
1
First Metal Layer
115
2



I- 57
100
5
5
5
85
25
1
First Metal Layer
130
2



I- 58
100
5
25
5
85
25
1
First Metal Layer
130
2



I- 59
100
5
5
5
85
100
2
First Metal Layer
205
2



I- 60
100
5
25
5
85
100
2
First Metal Layer
205
2




















TABLE 3









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total




















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-




Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage
Flexibility


No
μm
Gpa
%
μm
%
μm
Layers
Organic Resin
μm
mm
mm





















I- 61
100
5
17
1.5
95
25
1
First Metal Layer
126.5
2



I- 62
100
5
17
5
95
25
1
First Metal Layer
130
2



I- 63
100
5
17
10
95
25
1
First Metal Layer
135
2
3.5


I- 64
100
5
17
5
95
50
1
First Metal Layer
155
2
4  


I- 65
100
5
17
5
95
50
2
First Metal Layer
155
2
3.5


I- 66
100
5
17
1.5
95
100
2
First Metal Layer
201.5
2



I- 67
100
5
17
5
95
100
2
First Metal Layer
205
2



I- 68
100
5
17
10
95
100
2
First Metal Layer
210
2



I- 69
100
5
5
5
95
3
1
First Metal Layer
108
2



I- 70
100
5
25
5
95
3
1
First Metal Layer
108
2



I- 71
100
5
5
5
95
10
1
First Metal Layer
115
2



I- 72
100
5
25
5
95
10
1
First Metal Layer
115
2



I- 73
100
5
5
5
95
25
1
First Metal Layer
130
2



I- 74
100
5
5
5
95
50
1
First Metal Layer
155
2
4  


I- 75
100
5
5
5
95
50
2
First Metal Layer
155
2
3.5


I- 76
100
5
25
5
95
25
1
First Metal Layer
130
2



I- 77
100
5
25
5
95
50
1
First Metal Layer
155
2
4  


I- 78
100
5
25
5
95
50
2
First Metal Layer
155
2
3.5


I- 79
100
5
5
5
95
100
2
First Metal Layer
205
2



I- 80
100
5
25
5
95
100
2
First Metal Layer
205
2



I- 81
100
5
5
5
99
3
1
First Metal Layer
108
2



I- 82
100
5
25
5
99
3
1
First Metal Layer
108
2



I- 83
100
5
5
5
99
10
1
First Metal Layer
115
2



I- 84
100
5
25
5
99
10
1
First Metal Layer
115
2



I- 85
100
5
5
5
99
25
1
First Metal Layer
130
2



I- 86
100
5
25
5
99
25
1
First Metal Layer
130
2



I- 87
100
5
5
5
99
100
2
First Metal Layer
205
2



I- 88
100
5
25
5
99
100
2
First Metal Layer
205
2



I- 89
100
5
17
1.5
95
3
1
First Metal Layer
104.5
2



I- 90
100
5
17
5
95
3
1
First Metal Layer
108
2




















TABLE 4









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
Gpa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 91
100
5
17
10
95
3
1
First Metal Layer
113
2


I- 92
100
5
17
5
95
5
1
First Metal Layer
110
2


I- 93
100
5
17
1.5
95
10
1
First Metal Layer
111.5
2


I- 94
100
5
17
5
95
10
1
First Metal Layer
115
2


I- 95
100
5
17
10
95
10
1
First Metal Layer
120
2


I- 96
100
5
17
10
95
20
1
First Metal Layer
130
2


I- 97
100
5
17
1.5
95
25
1
First Metal Layer
126.5
2


I- 98
100
5
17
5
95
25
1
First Metal Layer
130
2


I- 99
100
5
17
10
95
25
1
First Metal Layer
135
2


I- 100
100
5
17
5
95
50
2
First Metal Layer
155
2


I- 101
100
5
17
15
95
100
2
First Metal Layer
201.5
2


I- 102
100
5
17
5
95
100
2
First Metal Layer
205
2


I- 103
100
5
17
10
95
100
2
First Metal Layer
210
2


I- 104
100
5
5
5
95
3
1
First Metal Layer
108
2


I- 105
100
5
25
5
95
3
1
First Metal Layer
108
2


I- 106
100
5
5
5
95
10
1
First Metal Layer
115
2


I- 107
100
5
25
5
95
10
1
First Metal Layer
115
2


I- 108
100
5
5
5
95
25
1
First Metal Layer
130
2


I- 109
100
5
25
5
95
25
1
First Metal Layer
130
2


I- 110
100
5
5
5
95
100
2
First Metal Layer
205
2


I- 111
100
5
25
5
95
100
2
First Metal Layer
205
2


I- 112
100
5
5
5
99
3
1
First Metal Layer
108
2


I- 113
100
5
25
5
99
3
1
First Metal Layer
108
2


I- 114
100
5
5
5
99
10
1
First Metal Layer
115
2


I- 115
100
5
25
5
99
10
1
First Metal Layer
115
2


I- 116
100
5
5
5
99
25
1
First Metal Layer
130
2


I- 117
100
5
25
5
99
25
1
First Metal Layer
130
2


I- 118
100
5
5
5
99
100
2
First Metal Layer
205
2


I- 119
100
5
25
5
99
100
2
First Metal Layer
205
2


I- 120
75
5
5
5
85
3
1
First Metal Layer
83
2



















TABLE 5









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
Gpa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 121
75
5
25
5
85
3
1
First Metal Layer
83
2


I- 122
75
5
5
5
85
10
1
First Metal Layer
90
2


I- 123
75
5
25
5
85
10
1
First Metal Layer
90
2


I- 124
75
5
5
5
85
25
1
First Metal Layer
105
2


I- 125
75
5
25
5
85
25
1
First Metal Layer
105
2


I- 126
75
5
5
5
85
100
2
First Metal Layer
180
2


I- 127
75
5
25
5
85
100
2
First Metal Layer
180
2


I- 128
75
5
17
1.5
95
25
1
First Metal Layer
101.5
2


I- 129
75
5
17
5
95
25
1
First Metal Layer
105
2


I- 130
75
5
17
10
95
25
1
First Metal Layer
110
2


I- 131
75
5
17
5
95
50
2
First Metal Layer
130
2


I- 132
75
5
17
1.5
95
100
2
First Metal Layer
176.5
2


I- 133
75
5
17
5
95
100
2
First Metal Layer
180
2


I- 134
75
5
17
10
95
100
2
First Metal Layer
185
2


I- 135
75
5
5
5
95
3
1
First Metal Layer
83
2


I- 136
75
5
25
5
95
3
1
First Metal Layer
83
2


I- 137
75
5
5
5
95
10
1
First Metal Layer
90
2


I- 138
75
5
25
5
95
10
1
First Metal Layer
90
2


I- 139
75
5
5
5
95
25
1
First Metal Layer
105
2


I- 140
75
5
25
5
95
25
1
First Metal Layer
105
2


I- 141
75
5
5
5
95
100
2
First Metal Layer
180
2


I- 142
75
5
25
5
95
100
2
First Metal Layer
180
2


I- 143
75
5
5
5
99
3
1
First Metal Layer
83
2


I- 144
75
5
25
5
99
3
1
First Metal Layer
83
2


I- 145
75
5
5
5
99
10
1
First Metal Layer
90
2


I- 146
75
5
25
5
99
10
1
First Metal Layer
90
2


I- 147
75
5
5
5
99
25
1
First Metal Layer
105
2


I- 148
75
5
25
5
99
25
1
First Metal Layer
105
2


I- 149
75
5
5
5
99
100
2
First Metal Layer
180
2


I- 150
75
5
25
5
99
100
2
First Metal Layer
180
2



















TABLE 6









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
Gpa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 151
75
5
17
1.5
95
3
1
First Metal Layer
79.5
2


I- 152
75
5
17
5
95
3
1
First Metal Layer
83
2


I- 153
75
5
17
10
95
3
1
First Metal Layer
88
2


I- 154
75
5
17
5
95
5
1
First Metal Layer
85
2


I- 155
75
5
17
1.5
95
10
1
First Metal Layer
86.5
2


I- 156
75
5
17
5
95
10
1
First Metal Layer
90
2


I- 157
75
5
17
10
95
10
1
First Metal Layer
95
2


I- 158
75
5
17
10
95
20
1
First Metal Layer
105
2


I- 159
75
5
17
1.5
95
25
1
First Metal Layer
101.5
2


I- 160
75
5
17
5
95
25
1
First Metal Layer
105
2


I- 161
75
5
17
10
95
25
1
First Metal Layer
110
2


I- 162
75
5
17
5
95
50
2
First Metal Layer
130
2


I- 163
75
5
17
1.5
95
100
2
First Metal Layer
176.5
2


I- 164
75
5
17
5
95
100
2
First Metal Layer
180
2


I- 165
75
5
17
10
95
100
2
First Metal Layer
185
2


I- 166
75
5
5
5
95
3
1
First Metal Layer
83
2


I- 167
75
5
25
5
95
3
1
First Metal Layer
83
2


I- 168
75
5
5
5
95
10
1
First Metal Layer
90
2


I- 169
75
5
25
5
95
10
1
First Metal Layer
90
2


I- 170
75
5
5
5
95
25
1
First Metal Layer
105
2


I- 171
75
5
25
5
95
25
1
First Metal Layer
105
2


I- 172
75
5
5
5
95
100
2
First Metal Layer
180
2


I- 173
75
5
25
5
95
100
2
First Metal Layer
180
2


I- 174
75
5
5
5
99
3
1
First Metal Layer
83
2


I- 175
75
5
25
5
99
3
1
First Metal Layer
83
2


I- 175
75
5
5
5
99
10
1
First Metal Layer
90
2


I- 177
75
5
25
5
99
10
1
First Metal Layer
90
2


I- 178
75
5
5
5
99
25
1
First Metal Layer
105
2


I- 179
75
5
25
5
99
25
1
First Metal Layer
105
2


I- 180
75
5
5
5
99
100
2
First Metal Layer
180
2



















TABLE 7









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
Gpa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 181
75
5
25
5
99
100
2
First Metal Layer
180
2


I- 182
1000
5
5
5
85
3
1
First Metal Layer
1008
1


I- 183
1000
5
25
5
85
3
1
First Metal Layer
1008
1


I- 184
1000
5
5
5
85
10
1
First Metal Layer
1015
1


I- 185
1000
5
25
5
85
10
1
First Metal Layer
1015
1


I- 186
1000
5
5
5
85
25
1
First Metal Layer
1030
1


I- 187
1000
5
25
5
85
25
1
First Metal Layer
1030
1


I- 188
1000
5
5
5
85
100
2
First Metal Layer
1105
0.5


I- 189
1000
5
25
5
85
100
2
First Metal Layer
1105
0.5


I- 190
1000
5
17
1.5
95
25
1
First Metal Layer
1027
1


I- 191
1000
5
17
5
95
25
1
First Metal Layer
1030
1


I- 192
1000
5
17
10
95
25
1
First Metal Layer
1035
1


I- 193
1000
5
17
5
95
50
2
First Metal Layer
1055
1


I- 194
1000
5
17
1.5
95
100
2
First Metal Layer
1102
0.5


I- 195
1000
5
17
5
95
100
2
First Metal Layer
1105
0.5


I- 196
1000
5
17
10
95
100
2
First Metal Layer
1110
0.5


I- 197
1000
5
5
5
95
3
1
First Metal Layer
1008
1


I- 198
1000
5
25
5
95
3
1
First Metal Layer
1008
1


I- 199
1000
5
5
5
95
10
1
First Metal Layer
1015
1


I- 200
1000
5
25
5
95
10
1
First Metal Layer
1015
1


I- 201
1000
5
5
5
95
25
1
First Metal Layer
1030
3


I- 202
1000
5
25
5
95
25
1
First Metal Layer
1030
1


I- 203
1000
5
5
5
95
100
2
First Metal Layer
1105
0.5


I- 204
1000
5
25
5
95
100
2
First Metal Layer
1105
0.5


I- 205
1000
5
5
5
99
3
1
First Metal Layer
1008
1


I- 206
1000
5
25
5
99
3
1
First Metal Layer
1008
1


I- 207
1000
5
5
5
99
10
1
First Metal Layer
1015
1


I- 208
1000
5
25
5
99
10
1
First Metal Layer
1015
1


I- 209
1000
5
5
5
99
25
1
First Metal Layer
1030
1


I- 210
1000
5
25
5
99
25
1
First Metal Layer
1030
1



















TABLE 8









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
Gpa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 211
1000
5
5
5
99
100
2
First Metal Layer
1105
0.5


I- 212
1000
5
25
5
99
100
2
First Metal Layer
1105
0.5


I- 213
1000
5
17
1.5
95
3
1
First Metal Layer
1005
1


I- 214
1000
5
17
5
95
3
1
First Metal Layer
1008
1


I- 215
1000
5
17
10
95
3
1
First Metal Layer
1013
1


I- 216
1000
5
17
5
95
5
1
First Metal Layer
1010
1


I- 217
1000
5
17
1.5
95
10
1
First Metal Layer
1012
1


I- 218
1000
5
17
5
95
10
1
First Metal Layer
1015
1


I- 219
1000
5
17
10
95
10
1
First Metal Layer
1020
1


I- 220
1000
5
17
10
95
20
1
First Metal Layer
1030
1


I- 221
1000
5
17
1.5
95
25
1
First Metal Layer
1027
1


I- 222
1000
5
17
5
95
25
1
First Metal Layer
1030
1


I- 223
1000
5
17
10
95
25
1
First Metal Layer
1035
1


I- 224
1000
5
17
5
95
50
2
First Metal Layer
1055
1


I- 225
1000
5
17
1.5
95
100
2
First Metal Layer
1102
0.5


I- 226
1000
5
17
5
95
100
2
First Metal Layer
1105
0.5


I- 227
1000
5
17
10
95
100
2
First Metal Layer
1110
0.5


I- 228
1000
5
5
5
95
3
1
First Metal Layer
1008
1


I- 229
1000
5
25
5
95
3
1
First Metal Layer
1008
1


I- 230
1000
5
5
5
95
10
1
First Metal Layer
1015
1


I- 231
1000
5
25
5
95
10
1
First Metal Layer
1015
1


I- 232
1000
5
5
5
95
25
1
First Metal Layer
1030
1


I- 233
1000
5
25
5
95
25
1
First Metal Layer
1030
1


I- 234
1000
5
5
5
95
100
2
First Metal Layer
1105
0.5


I- 235
1000
5
25
5
95
100
2
First Metal Layer
1105
0.5


I- 236
1000
5
5
5
99
3
1
First Metal Layer
1008
1


I- 237
1000
5
25
5
99
3
1
First Metal Layer
1008
1


I- 238
1000
5
5
5
99
10
1
First Metal Layer
1015
1


I- 239
1000
5
25
5
99
10
1
First Metal Layer
1015
1


I- 240
1000
5
5
5
99
25
1
First Metal Layer
1030
1



















TABLE 9









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
GPa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 241
1000
5
25
5
99
25
1
First Metal Layer
1030
1


I- 242
1000
5
5
5
99
100
2
First Metal Layer
1105
0.5


I- 243
1000
5
25
5
99
100
2
First Metal Layer
1105
0.5


I- 244
65
5
5
5
85
3
1
First Metal Layer
73
4


I- 245
65
5
25
5
85
3
1
First Metal Layer
73
4


I- 246
65
5
5
5
85
10
1
First Metal Layer
80
4


I- 247
65
5
25
5
85
10
1
First Metal Layer
80
4


I- 248
65
5
5
5
85
25
1
First Metal Layer
95
5


I- 249
65
5
25
5
85
25
1
First Metal Layer
95
5


I- 250
65
5
5
5
85
100
2
First Metal Layer
170
5


I- 251
65
5
25
5
85
100
2
First Metal Layer
170
5


I- 252
65
5
17
1.5
95
25
1
First Metal Layer
91.5
5


I- 253
65
5
17
5
95
25
1
First Metal Layer
95
5


I- 254
65
5
17
10
95
25
1
First Metal Layer
100
5


I- 255
65
5
17
5
95
50
2
First Metal Layer
120
5


I- 256
65
5
17
1.5
95
100
2
First Metal Layer
166.5
5


I- 257
65
5
17
5
95
100
2
First Metal Layer
170
5


I- 258
65
5
17
10
95
100
2
First Metal Layer
175
5


I- 259
65
5
5
5
95
3
1
First Metal Layer
73
4


I- 260
65
5
25
5
95
3
1
First Metal Layer
73
4


I- 261
65
5
5
5
95
10
1
First Metal Layer
80
4


I- 262
65
5
25
5
95
10
1
First Metal Layer
80
4


I- 263
65
5
5
5
95
25
1
First Metal Layer
95
5


I- 264
65
5
25
5
95
25
1
First Metal Layer
95
5


I- 265
65
5
5
5
95
100
2
First Metal Layer
170
5


I- 266
65
5
25
5
95
100
2
First Metal Layer
170
5


I- 267
65
5
5
5
99
3
1
First Metal Layer
73
4


I- 268
65
5
25
5
99
3
1
First Metal Layer
73
4


I- 269
65
5
5
5
99
10
1
First Metal Layer
80
4


I- 270
65
5
25
5
99
10
1
First Metal Layer
80
4



















TABLE 10









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
GPa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 271
65
5
5
5
99
25
1
First Metal Layer
95
5


I- 272
65
5
25
5
99
25
1
First Metal Layer
95
5


I- 273
65
5
5
5
99
100
2
First Metal Layer
170
5


I- 274
65
5
25
5
99
100
2
First Metal Layer
170
5


I- 275
65
5
17
1.5
95
3
1
First Metal Layer
69.5
4


I- 276
65
5
17
5
95
3
1
First Metal Layer
73
4


I- 277
65
5
17
10
95
3
1
First Metal Layer
78
4


I- 278
65
5
17
5
95
5
1
First Metal Layer
75
4


I- 279
65
5
17
1.5
95
10
1
First Metal Layer
76.5
4


I- 280
65
5
17
5
95
10
1
First Metal Layer
80
4


I- 281
65
5
17
10
95
10
1
First Metal Layer
85
4


I- 282
65
5
17
10
95
20
1
First Metal Layer
95
5


I- 283
65
5
17
1.5
95
25
1
First Metal Layer
91.5
4


I- 284
65
5
17
5
95
25
1
First Metal Layer
95
4


I- 285
65
5
17
10
95
25
1
First Metal Layer
100
4


I- 286
65
5
17
5
95
50
2
First Metal Layer
120
4


I- 287
65
5
17
1.5
95
100
2
First Metal Layer
166.5
4


I- 288
65
5
17
5
95
100
2
First Metal Layer
170
4


I- 289
65
5
17
10
95
100
2
First Metal Layer
175
4


I- 290
65
5
5
5
95
3
1
First Metal Layer
73
4


I- 291
65
5
25
5
95
3
1
First Metal Layer
73
4


I- 292
65
5
5
5
95
10
1
First Metal Layer
80
4


I- 293
65
5
25
5
95
10
1
First Metal Layer
80
4


I- 294
65
5
5
5
95
25
1
First Metal Layer
95
5


I- 295
65
5
25
5
95
25
1
First Metal Layer
95
5


I- 296
65
5
5
5
95
100
1
First Metal Layer
170
5


I- 297
65
5
25
5
95
100
1
First Metal Layer
170
5


I- 298
65
5
5
5
99
3
1
First Metal Layer
73
4


I- 299
65
5
25
5
99
3
1
First Metal Layer
73
4


I- 300
65
5
5
5
99
10
1
First Metal Layer
80
4



















TABLE 11









Second Metal Layer
















Insulating Layer
First Metal Layer

Number
Metal Layer on a
Total



















Thick-
Young's
Cover-
Thick-
Cover-
Thick-
of
Surface with a
Thick-



Sample
ness
Modulus
age
ness
age
ness
Layers
High Ratio of
ness
Warpage


No.
μm
GPa
%
μm
%
μm
Layers
Organic Resin
μm
mm




















I- 301
65
5
25
5
99
10
1
First Metal Layer
80
4


I- 302
65
5
5
5
99
25
1
First Metal Layer
95
5


I- 303
65
5
25
5
99
25
1
First Metal Layer
95
5


I- 304
65
5
5
5
99
100
2
First Metal Layer
170
5


I- 305
65
5
25
5
99
100
2
First Metal Layer
170
5


I- 306
100
4
17
1.5
95
25
1
First Metal Layer
126.5
2


I- 307
100
4
17
5
95
25
1
First Metal Layer
130
2


I- 308
100
4
17
10
95
25
1
First Metal Layer
136
2


I- 309
100
7
17
1.5
95
25
1
First Metal Layer
126.5
2


I- 310
100
7
17
5
95
25
1
First Metal Layer
130
2


I- 311
100
7
17
10
95
25
1
First Metal Layer
135
2


I- 312
100
3
17
5
95
25
1
First Metal Layer
130
4


I- 313
100
5
17
5
95
50
1
First Metal Layer
155
1.5


I- 314
100
5
5
5
95
3
1
Second Metal Layer
108
4


I- 315
100
5
25
5
95
3
1
Second Metal Layer
108
4


I- 316
100
5
5
5
95
10
1
Second Metal Layer
115
4


I- 317
100
5
25
5
95
10
1
Second Metal Layer
115
4


I- 318
100
5
5
5
95
25
1
Second Metal Layer
130
4


I- 319
100
5
25
5
95
25
1
Second Metal Layer
130
4


I- 320
100
5
5
5
95
100
2
Second Metal Layer
205
4


I- 321
100
5
25
5
95
100
2
Second Metal Layer
205
4





















TABLE 12










Radiation





Second

Characteristics





Metal

of Antenna




First
Layer

Ratio when the




Metal
Number

Maximum Value of




Layer
of

the Measured


Sample
Antenna
Thickness
Layers
Warpage
Antenna Gain


No.
Pattern
μm
Layers
mm
is set to 1




















II-1
FIG. 3
1
2
5
0.84


II-2
FIG. 3
13
2
4
0.84


II-3
FIG. 3
5
1
2
0.85


II-4
FIG. 3
5
2
2
0.85


II-5
FIG. 6
5
2
2
1





















TABLE 13










Radiation





Second

Characteristics





Metal

of Antenna




First
Layer

Ratio when the




Metal
Number

Maximum Value of




Layer
of

the Measured


Sample
Antenna
Thickness
Layers
Warpage
Antenna Gain


No.
Pattern
μm
Layers
mm
is set to 1




















III-1
FIG. 5
5
2
2
0.96


III-2
FIG. 7
5
2
2
1





















TABLE 14










Radiation





Second

Characteristics





Metal

of Antenna




First
Layer

Ratio when the




Metal
Number

Maximum Value of




Layer
of

the Measured


Sample
Antenna
Thickness
Layers
Warpage
Antenna Gain


No.
Pattern
μm
Layers
mm
is set to 1




















IV-1
FIG. 4
5
2
2
0.98


IV-2
FIG. 5
5
2
2
1









As is clear from the results in Tables 1 to 11, the warpage values of each sample were 2 mm or less for the wiring boards (Sample No. I-53 to I-243, I-306 to I-311 and I-313) in which the first metal layer was placed on the first surface of the insulating layer which was mainly composed of organic resin and included inorganic particles, the second metal layer was placed on the second surface on the opposite side of the first surface, the thickness of the insulating layer was 75 μm or more and 1000 μm or less, the storage modulus was 4 GPa or more and 7 GPa or less, the thickness of the first metal layer was 1.5 μm or more and 10 μm or less, its coverage was 5% or more and 25% or less, the thickness of the second metal layer was 3 μm or more and 10 μm or less or 25 μm or more and 100 μm, its coverage was in the range of 85% or more, and the surface part of the insulating layer on the side where the first metal layer was disposed had a higher ratio of organic resin than the surface part of the insulating layer on the side where the second metal layer was disposed. In addition, the sample in which the second metal layer was formed in a two-layer structure showed higher flexibility than the sample in which the second metal layer was in a one-layer structure if the thickness of the second metal layer was the same.


As is clear from Table 12, in the wiring boards of the antenna patterns illustrated in FIGS. 3 and 6, the sample (Sample No. II-5) in which the linear conductor was curved was recognized to have higher radiation characteristics than the samples (Sample No. II-1 to 4) in which the linear conductors were formed in a straight line.


The samples illustrated in Table 13 also showed that Sample No. III-2 in which the linear conductor was curved had higher radiation characteristics than Sample No. III-1.


Furthermore, Table 14 showed that in the wiring board where three antenna patterns were provided, the sample (Sample No. IV-2) in which one of the three antenna patterns was asymmetrical by changing its orientation by 90° with respect to the orientation of the linear conductors configuring the other antenna patterns had higher radiation characteristics than the sample (Sample No. IV-1) in which all three antenna patterns faced the same direction.


DESCRIPTION OF THE REFERENCE NUMERAL





    • A, B, C, D, E, F, G wiring board


    • 1 insulating layer


    • 1
      a first surface


    • 1
      b second surface


    • 1
      c, 1d surface part


    • 3 metal layer


    • 3
      a first metal layer


    • 3
      b second metal layer


    • 10, 10a, 10b, 10c antenna pattern


    • 11 patch conductor


    • 13 linear conductor


    • 15 power supply part


    • 17 ground conductor


    • 18 through-via


    • 19 through-hole


    • 19
      a inner wall


    • 21 third metal layer




Claims
  • 1. A wiring board comprises: an insulating layer having a first surface and a second surface on an opposite side of the first surface, and including organic resin having a highest volume in the insulating layer, and inorganic particles;a first metal layer which is disposed on the first surface; anda second metal layer which is disposed on the second surface, whereinthe insulating layer having: a thickness of 75 μm or more and 1000 μm or less, anda storage modulus of 4 GPa or more and 7 GPa or less, the first metal layer having:a thickness of 1.5 μm or more and 10 μm or less, anda first metal layer coverage of 5% or more and 25% or less, wherein the first metal layer coverage is an area ratio of the first metal layer to the first surfacethe second metal layer having: a thickness of 3 μm or more and 10 μm or less or 25 μm or more and 100 μm or less, anda second metal layer coverage of 85% or more, wherein the second metal layer coverage is an area ratio of the second metal layer to the second surface, anda first ratio of the organic resin on the first surface is larger than a second ratio of the organic resin on the second surface.
  • 2. The wiring board according to claim 1, wherein the first metal layer comprises a plurality of antenna patterns and each of the plurality of antenna patterns includes a patch conductor and a linear conductor,the first surface has a rectangular shape, andthe plurality of antenna patterns differ in at least one of number, area, and orientation between two regions across a virtual line, when the virtual line is perpendicular to a side of the insulating layer and is disposed at a center of the first surface.
  • 3. The wiring board according to claim 2, wherein the linear conductor is bent between two adjacent patch conductors.
  • 4. The wiring board according to claim 1, wherein the second metal layer has a layered structure if a thickness of the second metal layer is 25 μm or more and 100 μm or less.
  • 5. The wiring board according to claim 1, wherein the insulating layer, the first metal layer, and the second metal layer are penetrated by a through-hole in the thickness direction,a third metal layer is on an inner wall of the through-hole, andthe third metal layer extends from the inner wall and is layered with the first metal layer and the second metal layer, respectively.
Priority Claims (1)
Number Date Country Kind
2018-207462 Nov 2018 JP national
PCT Information
Filing Document Filing Date Country Kind
PCT/JP2019/041523 10/23/2019 WO
Publishing Document Publishing Date Country Kind
WO2020/090583 5/7/2020 WO A
US Referenced Citations (5)
Number Name Date Kind
20030016162 Sasada et al. Jan 2003 A1
20060227051 Yamamoto et al. Oct 2006 A1
20130134227 De Maquille May 2013 A1
20190089044 Kobuke Mar 2019 A1
20200128667 Nagasawa Apr 2020 A1
Foreign Referenced Citations (9)
Number Date Country
08-008639 Jan 1996 JP
08-307147 Nov 1996 JP
2001-111328 Apr 2001 JP
2003-037420 Feb 2003 JP
2015-084394 Apr 2015 JP
2017-187379 Oct 2017 JP
2018195766 Dec 2018 JP
2005013418 Feb 2005 WO
WO-2019116927 Jun 2019 WO
Non-Patent Literature Citations (2)
Entry
WO2019116927 Machine Translation via WIPO (Year: 2019).
JP2018-195766 Machine Translation via EPO (Year: 2018).
Related Publications (1)
Number Date Country
20210400809 A1 Dec 2021 US