Wiring substrate and manufacturing method of the same along with electroless copper plating solution used therefor

BACKGROUND OF THE INVENTION

[0001] The present invention relates to wiring substrates, more particularly, to a multilayer wiring substrate comprising a copper layer formed at a fine or “micro” opening such as via-hole for interconnection between a plurality of wiring leads, to a manufacturing method of the same, and to an electroless copper plating solution used therefor.

[0002] Currently available electroless copper plating solutions contain copper ions, a complexing agent of copper ions, a reducing agent of the copper ions, and a pH adjuster, and further contain an additive agent mixed thereinto for purposes of improving the mechanical characteristics of a plated film(s) or alternatively improving plating solution stabilities.

[0003] One typical electroless copper plating solution containing these additive agents is disclosed, for example, in JP-A-51-105932 (1976). The plating solution taught by this Japanese document contains as its additive agents at least one of 2,2′-bipyridyl, 2-(2-pyridyl)benzimidazole and 2,2′-diquinolyl; at least one of polyalkylene glycol and/or 1,10-phenanthroline group; and polyalkylene glycol.

[0004] JP-A-52-17334 (1977)) discloses an electroless copper plating solution containing as an additive agent at least one of murexide, eriochrome black T, and methyl violet.

[0005] JP-A-52-17335 (1977) discloses an electroless copper plating solution containing as an additive agent at least one selected from the group consisting of pyridine, 4-vinylpyridine, 2-aminopyridine, 2-methylpyridine, 3-methylpyridine-4-methylpyridine, 2-ethylpyridine, 3-(n-propyl)pyridine, and 2-hydroxypyridine.

[0006] JP-A-52-20339 (1977) teaches an electroless copper plating solution containing as additive agents at least one of metal salts of Ni, Co, Pb and Sn, and also nonreactive aliphatic group polymer.

[0007] JP-A-52-21226 (1977) discloses an electroless copper plating solution containing more than one of materials selected from the group consisting of allyl alcohol, α-chloro-allyl alcohol, β-chloroallyl alcohol, α-methylallyl alcohol, and β-methylallyl alcohol.

[0008] Furthermore, JP-A-52-85936 (1977) discloses an electroless copper plating solution containing oxime as an additive agent. JP-A-56-105468 (1981) discloses an electroless copper plating solution containing as additive agents polyethylene glycol stearylamine, 2,2′-bipyridyl, and Ag2S. JP-A-57-26156 (1982) discloses an electroless copper plating solution with cyclic polyether added as its additive agent. JP-A-5-156459 (1993) teaches an electroless copper plating solution added with iodine compounds and 2,2′-bipyridyl.

[0009] Any one of the additive agents stated above is for purposes of improving the mechanical characteristics of a plated film and/or stabilities of a plating solution used. In recent years, the quest for further miniaturization or “downsizing” in electronic equipment results in parts-mounting substrates being under strict requirements for achievement of higher integration densities. To meet such needs, built-up substrates offering high-integration mountability have been vigorously studied and developed by many engineers until today. Build-up substrates are typically designed to employ a via-hole structure using through-going holes as selectively formed only at necessary interlayer portions for electrical interconnection, rather than traditional through-hole interconnection schemes using interlayer connection structures as in conventional printed circuit boards.

[0010] In accordance with increasing the integration densities,such via-holes decrease in diameter,and result in an increase in aspect ratios of via-holes to be connected by metal plating processes. In cases where plating is applied to one-side closed via-holes for achievement of the intended electrical interlayer connection, it becomes more difficult to uniformly perform metal plating within such via-holes with an increase in via-hole aspect ratios. This difficulty might often serve as a serious bar or “process neck” in the manufacture of highly integrated parts-mount substrates.

[0011] In brief, a need is felt to develop a specific technique for coating, with good reproducibility, a copper layer of uniform thickness on or over the surface of a “closed” bottom portion and/or the surface of a sidewall within an opening with large aspect ratios, wherein the film is substantially the same in thickness as a copper layer being coated on or over an upper surface.

[0012] It is therefore a primary object of the present invention to provide a new and improved wiring substrate capable of offering enhanced parts mountability with high integration densities.

[0013] It is another object of this invention to provide an improved multilayer wiring substrate with high-integration parts mountability including a metal-plated wiring layer as formed at one-side closed ultrafine via-holes of high aspect ratios.

[0014] It is yet another object of the invention to provide an improved electroless copper plating solution excellent in uniformity of deposition properties of a copper layer relative to such via-holes.

SUMMARY OF THE INVENTION

[0015] A summary of some representative principal concepts of the invention as disclosed herein will be set forth below.

[0016] Firstly, an electroless copper plating solution in accordance with the instant invention excellent in copper layer's deposition uniformity is specifically arranged to contain therein copper ions, a complexing agent of such copper ions plus a reducing agent of these ions as well as a “pH” adjuster, with at least one of mandelonitrile and triethyltetramine being added thereto as an additive agent.

[0017] Another electroless copper plating solution in accordance with the invention excellent in copper layer's deposition uniformity is arranged to contain a copper ion, a complexing agent of the copper ion, a copper ion reducing agent, pH adjuster and an additive agent of at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline, wherein at least one of mandelonitrile, triethyltetramine and eriochrome black T being further added as additive agent.

[0018] The intended multilayer wiring substrate preferably embodying the invention with a wiring layer formed through uniform plating at more than one ultrafine or “micro” via-hole of high aspect ratios is manufacturable with increased reproducibility through electroless copper plating processes using the specific plating solution stated supra.

[0019] Practically the above-noted electroless copper plating solution is used to apply electroless copper plating to a wiring structure of the interest which includes more than one opening having on a dielectric body surface an ultrafine diameter φ ranging from 50 to 150 μm and a closed bottom portion deeper than such diameter, i.e. whose depth is greater in value than its width, thereby enabling fabrication of a continuous copper layer with an almost uniform thickness on or over sidewall and bottom surfaces within the opening and the dielectric body surface. This in turn makes it possible to manufacture with good reproducibility the intended wiring substrate wherein the thickness of a copper layer on the sidewall/bottom surfaces within the micro-opening of aspect ratios ranging from 1.0 to 2.0 is more than 0.9 times greater than that of a copper layer overlying the dielectric body surface.

[0020] A further feature of the invention lies in an ability to provide with increased reproducibility a multilayer wiring substrate having a microfabricated high-density wiring structure, by application to an opening having a substantially perpendicular cross-section or profile having a specified angle β the sidewall surface within the opening forms with the dielectric body surface, wherein the angle falls within a range of from 90 to 100 degrees.

BRIEF DESCRIPTION OF THE DRAWINGS

[0021]
FIG. 1 is a diagram showing a cross-sectional view of main part of a wiring substrate for explanation of the present invention.

[0022]
FIG. 2 is a diagram showing a sectional view of main part of a multilayer wiring substrate as formed by a method incorporating the principles of this invention.

[0023]
FIG. 3 is a diagram showing, in cross-section, main part of a multilayer wiring substrate for comparative explanation of effects of the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0024] Preferred embodiments of the present invention will be explained below.

[0025] (Embodiment 1)

[0026] In this embodiment, a “basic” electroless copper plating solution is the one which contains a copper salt, copper ion complexing agent, reducing agent, and pH adjuster. The copper salt may be presently available soluble copper salts including but not limited to copper sulfate, copper nitrate, copper chloride, and copper formate.

[0027] Examples of the complexing agent usable in this embodiment include, inter alia, ethylenediaminetetraacetic acid, hydroxy-ethylethylenetriacetic acid, cyclohexane-diaminetetraacetic acid, diethylenetriaminepentaacetic acid, and tetrakis(2-hydroxypropyl)ethylenediamine.

[0028] Examples of the reducing agent employable herein are formaldehyde, paraformaldehyde, and glyoxylic acid. Two or more materials as selected therefrom may also be used in combination when the need arises.

[0029] Example of the pH adjuster may be alkali hydroxides such as lithium hydroxide, sodium hydroxide and potassium hydroxide, and organic alkali such as tetramethyl-ammoniumhydroxide, tetraethylammoniumhydroxide or the like. While the optimal pH value range is somewhat variable depending upon the kind of a reducing agent used, it is generally recommendable that the pH value as measured at 20° C. falls within a range of from 11.5 to 13.5; preferably, the pH value is as greater as possible in a view point of plating rates.

[0030] The additive agent used in this embodiment for improvement of mechanical characteristics of resultant plated film and the stability of plating solution may include 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline, polyalkylene glycol, or other known similar suitable materials.

[0031] With the electroless copper plating solution merely consisting of the above-noted basic components and additive agent(s), it was impossible to fabricate any intended copper plated film of uniform thickness on inside wall and bottom surfaces of certain via-holes having an aspect ratio of 1.0 or greater. The uniformity of copper plated film thickness on the inside wall and bottom surfaces of via-holes is variable with changes in via-hole shape, plating solution's stirring condition, plating solution temperature, plating rate, and plating solution's main components. It is considered that the uniformity of deposition or “precipitation” to via-holes decreases because of the fact that the copper ions (complex) and reducing agent plus hydroxides—these are main components for plating reaction—decrease in concentration at certain portions such as inside of bottom-closed via-holes whereat the plating solution used fails to offer sufficient convection current.

[0032] The inventors of the present invention have carefully studied such various factors to find that the uniformity of deposition to via-hole inner wall surfaces greatly decreases in cases where the reducing agent concentration becomes deficient, in particular.

[0033] Here, an explanation will be given of one typical deposition form of a copper-plated film onto via-hole's inner wall surfaces including its bottom face with reference to FIG. 1, which pictorially illustrates, in cross-section, main part of a substrate having a via-hole 3. In this drawing, reference numeral “1” is used to designate an underlying or “undercoat” substrate made of a chosen electrical insulative or dielectric material; numeral 2 denotes a dielectric layer formed thereon; 3 indicates an opening such as a via-hole or the like, which has a diameter φ with its bottom surface being closed; 4 is a copper plate layer deposited.

[0034] Letting the thickness of a plated film on a substrate surface (i.e. top surface of dielectric layer 2) adjacent to an external entrance be represented by “a” and the thickness of a plated film as deposited at the bottom of the via-hole 3 be given as “b,” a thickness ratio “b/a” is defined as expressed in percentage (%). Based on this ratio b/a, the deposition uniformity has been evaluated. In case the deposition uniformity stays good, the ratio is nearly equal to 100%; if the former is bad then the latter becomes almost 0% in value. Our evaluation was done by using for example a method having the steps of cutting a specified portion including the via-hole of interest away from a wiring substrate, embedding it into a chosen resin material, polishing the resulting body for causing exposure of a cross-section or profile at right angles to a diameter direction at the center of such via-hole, removing residual irregular polished portions of a copper plate film by use of soft etching techniques to thereby obtain the structure shown in FIG. 1, and then observing it by microscope equipment.

[0035] It should be noted that in various examples of this invention as will be set forth later in the description, explanation is given while using as the representative the thickness “b” of such copper-plated layer on or over the inner bottom face of via-hole 3 which is predicted to be the smallest in copper film thickness values in view of the fact that in most cases a thickness “c” of a copper layer being plated on inner sidewall surfaces of via-hole 3 often becomes substantially greater in value than the thickness b of copper layer as plated on the bottom face thereof.

[0036] In this embodiment, one significant concept is that the electroless copper plating solution further contains therein at least one of mandelonitrile and triethyltetramine in addition to the above-stated basic components thereof—i.e. the copper salt, copper ion complexing agent, reducing agent, and pH adjuster stated supra—to thereby enable fabrication of a uniform plated film at a via-hole of high aspect ratios. Merely adding mandelonitrile and/or triethyltetramine to the basic components of the electroless copper plating solution makes it possible to improve the deposition uniformity, resulting in demonstrable improvement of via-hole interconnection reliability of build-up substrates having via-hole structures.

[0037] Another advantage of the mandelonitrile/triethyltetramine addition lies in an ability to achieve an enhanced plating rate adjustability. The term “plating rate” as used herein is represented by a thickness of copper deposited on a unit area after elapse of a unit time, usually expressed in micrometers per hour (m/h).

[0038] Although it has already been stated that the inventors have found out that the shortage of the reducing agent within via-holes can cause reduction of the uniformity of deposition to via-hole inner wall surfaces, it is further found that the mandelonitrile and/or triethyltetramine as newly added may also serve to compensate for such reducing agent shortage within the via-holes concerned.

[0039] An explanation will next be given of a function mechanism as to improvements in uniformity of deposition to via-holes due to additional mixture of mandelonitrile and/or triethyltetramine, in particular, with co-use of formaldehyde as the reducing agent by way of example.

[0040] Typically the formaldehyde is oxidized through the following elementary reaction, thus generating and releasing electrons.

HCHO+H2O=CH2(OH)2 (1)

CH2(OH)2+OH−=CH2CHO−+H2O (2)

CH2CHO−=CHCHO−(ad)+H(ad) (3)

CHCHO−(ad)+OH−=HCOO−+H2O+e− (4)

2H(ad)=H2 (5)

[0041] In the primary reaction above, suffix “(ad)” is used to indicate that a reactive intermediate material with this suffix added thereto has been adsorbed onto the surface of a target plating body of interest. Here, a specific reactive intermediate represented as “CHOHO−(ad)” as found in reaction formulas (3) and (4) behaves to activate deposition reaction of copper, which may be local cathode reaction during plating reaction. This has been studied by Harm Wiese et al. and disclosed in Ber. Bunsenges. Phys. Chem. 91, pp. 619-626 (1987).

[0042] Accordingly, a decrease in formaldehyde concentration results not only in a decrease in plating rates due to reduction of concentration of formaldehyde for use as an electron supplier, but also in a decreaae of concentration of the reactive intermediate which is adsorbed on the surface to activate the copper deposition reaction. Whereby, the resultant plating rate at part whereat the formaldehyde concentration has decreased tends to noticeably decrease when compared to plating rates at other portions with significant formaldehyde concentration values.

[0043] In other words, the plating deposit ion amount within via-holes less in formaldehyde concentration becomes much smaller than those on substrate surfaces having large formaldehyde concentrations, resulting in a likewise decrease in uniformity of deposition to inside of via-holes. This can be said because not only differences of local formaldehyde concentrations within via-holes and on surfaces thereof but also differences of the adsorption amount of formaldehyde reaction intermediate thereonto would serve to accelerate reduction of the deposition uniformity.

[0044] The inventors of the present invention have found out that any possible influence of the above-noted formaldehyde reaction intermediate concentration reduction may be suppressed by additional mixture of mandelonitrile and/or triethyltetramine to the electroless copper plating solution used. We consider that this is because mandelonitrile and triethyltetramine per se behave to adsorb on target surfaces being plated and then mutually react with other formaldehyde reactive intermediates that have also been adsorbed thereon. Another cause considered is mutual reaction between such surface-adsorbed mandelonitrile/triethyltetramine and copper ions involved.

[0045] The above is considered to be the function mechanism for improvement in the uniformity of deposition to inside of via-holes in the event that mandelonitrile and triethyltetramine are additionally mixed into the plating solution used.

[0046] On the contrary, in regard to an electroless copper plating solution with eriochrome black T added thereto, it has been recited in JP-A-52-17334 (1977); however, this Japanese document is silent about the plating deposition uniformity. This prior art as taught thereby is such that addition of eriochrome black T is merely for improving the elasticity or plasticity of plated films—in particular, extensibility thereof.

[0047] Although we have studied and discussed this issue while adding eriochrome black T to the plating solution used, it was found out that addition of eriochrome black T alone fails to offer any appreciable improvements in the uniformity of deposition to via-holes. More specifically the deposition uniformity is no longer improved in the case of mere addition of eriochrome black T to the electroless copper plating solution which consists of the aforesaid main components of copper salt, copper ion complexing agent, reducing agent, and pH adjuster. We have discovered through studies about many kinds of additive agents that in cases where eriochrome black T is employed, deposition uniformity improvements are obtainable with co-use of at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline.

[0048] Typically, plated films are improved in mechanical characteristics upon additional mixture of at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline into the electroless copper plating solution; similarly, plated film extensibilities are also improved by addition of 2,2′-bipyridyl, 1,10-phenanthroline and/or 2,9-dimethyl-1,10-phenanthroline in the case of co-use of eriochrome black T also. Furthermore, in the case of using mandelonitrile and/or triethyltetramine as the additive agent(s) also, addition of at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline results in an improvement in plated film's mechanical properties, particularly extensibilities thereof, thus permitting resultant plated films to become resiliency-rich ones. As stated above, adding at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline to an electroless copper plating solution that contains at least one of mandelonitrile, triethyltetramine and eriochrome black T makes it possible to improve mechanical physical properties of the resulting plated film while at the same time letting a wiring substrate with via-hole interconnections completed using this plating solution offer significantly superior via-hole interconnection reliability.

[0049] A further effect of the present invention being presently found is that addition of at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline to the electroless copper plating solution containing at least one of mandelonitrile and triethyltetramine as mixed thereinto results in a further improvement in uniformity of deposition to via-holes concerned. It was found that when compared to the case of adding mandelonitrile or triethyltetramine alone, further addition of at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline advantageously leads to improvements in uniformity of deposition to via-holes.

[0050] Mere addition of mandelonitrile or triethyltetramine alone to an electroless copper plating solution results in achievement of the effect of improving the uniformity of deposition to via-holes. Regarding the eriochrome black T, its sole use lacks such effect; however, the co-use with at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline permits achievement of demonstrable improvements in uniformity of deposition to via-holes, as compared to the case of adding eriochrome black T alone to the electroless copper plating solution or alternatively the case of simply adding at least one of 2,2-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline to such electroless copper plating solution.

[0051] Additionally, in case of the co-use of at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline with mandelonitrile or triethyltetramine also, the resultant deposition uniformity improves more significantly than the case of sole use, resulting in further improvement of mechanical physical properties of plated films thus fabricated.

[0052] The intended plated film which is excellent in uniformity of deposition to via-holes is obtainable by addition of mandelonitrile and/or triethyltetramine to the electroless copper plating solution. Similar results may also be obtained by addition of mandelonitrile, triethyltetramine and/or eriochrome black T to the electroless copper plating solution with at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline being added thereto.

[0053] Also importantly, a wiring substrate with wiring leads including via-hole interconnections as fabricated by use of the plating solution containing therein mandelonitrile and/or triethyltetramine or alternatively at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline along with mandelonitrile, triethyltetramine and/or eriochrome black T advantageously offers excellent connection reliability.

[0054] This advantage is due to the fact that the use of the electroless copper plating solution incorporating the principles of this invention ensures establishment of uniform deposition of a plated film onto a via-hole with its one side closed, i.e. the one having a bottom portion, resulting in an increase in reliability of electrical connection to conductors such as wiring layers or else. Further, owing to such enhanced ability for deposition to such via-hole, the invention may also be applied to wiring substrates with ultrafine or “micro” via-holes while simultaneously much improving the degree of freedom or flexibility of substrate wiring designs, when compared to prior art schemes.

[0055] Consequently a method for manufacturing a multilayer wiring substrate of the build-up type including the steps of forming a dielectric layer on or over an underlying “undercoat” substrate having a wiring layer, forming in this dielectric layer more than one via-hole deep enough to reach the wiring layer on the surface of the substrate, applying electroless copper plating to at least part of the dielectric layer surface including inner wall faces of the via-hole to thereby form a second conductive layer, and forming a wiring lead pattern on or over said dielectric layer surface, wherein via-hole plating is done by use of a specific electroless copper plating solution containing at least one of mandelonitrile and triethyltetramine as mixed thereinto for use as additive agent, has an advantage as to the capability to obtain any intended wiring substrate which is excellent in electrical interconnection reliability.

[0056] The electroless copper plating solution is replaceable by the one that contains as additives at least one of 2,2′-bipyridyl, 1,10-phenanthroline and 2,9-dimethyl-1,10-phenanthroline with any one of mandelonitrile, triethyltetramine and eriochrome black T being further added thereto.

[0057] Furthermore, a significant advantage of the wiring substrate manufacturing method lies in its demonstrable ability to improve wiring substrate manufacturing throughputs. This can be said because a time taken to perform plating processes can be shortened owing to the use of such plating solution excellent in uniformity of deposition to via-holes. This is due to the fact that although a plated film being deposited within a via-hole should be required to increase in thickness in order to provide the required connection reliability of the wiring substrate, the electroless copper plating solution designed for use with the wiring substrate manufacturing method of this invention is more excellent in uniformity of deposition to via-holes than prior known ones so that via-hole plating processing required for achievement of higher reliability may be completed with a shortened plating time period as compared to prior art methods.

[0058] It was also confirmed by the inventors, through studies about not only via-hole diameters and aspect ratios but also cross-sectional shapes thereof along with deposit ion uniformities of electroless copper plated layers, that the above-stated effects and advantages of the invention are also achievable even in wiring structures having tightly slanted or precipitous profiles in which an angle that is formed between the surface of dielectric layer 2 shown in FIG. 1 and the sidewall surface of a via-hole defined by dielectric layer 3 falls within a range of 90 to 100 degrees. This is significantly effective for accomplishment of multilayer wiring structures of higher densities.

[0059] An explanation will be given of several examples of the present invention below. Additionally some examples for comparison purposes only as will be set forth later in the description are the ones that make use of electroless copper plating solutions incorporating none of the principles of this invention.

[0060] (Embodiment 1)

[0061] While employing copper sulfate as a copper ion source and formalin as a copper ion reducing agent, electroless copper plating was performed with sodium hydroxide being used as pH adjuster.

[0062] Presented below is the composition of a plating liquid or solution along with several plating process conditions.

1Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydroxide0.01 mol/l*mandelonitrile0.0005 mol/l

[0063] Note here that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 on a case-by-case basis.

2Plating Conditions:*pH12.3*liquid temperature70° C.

[0064] With the electroless copper plating solution, plating was applied to more than one via-hole formed on a test substrate; then, the resulting uniformity of deposition to inner wall faces of the via-hole was evaluated by profile observation. This test substrate was fabricated by a method as will be described below.

[0065] (Test Substrate Fabrication Method)

[0066] A copper-bonded glass epoxy substrate having on its surface a copper foil with a thickness of 18 μm was prepared. A layer of photosensitive resist was then formed on the substrate surface. After completion of patterned, an inner layer copper circuit was formed by etching techniques. After peel-off of the resist, the inner layer copper circuit was subjected to blackening processing for making the surface rough. Next, a chosen epoxy resin film, APL-4001 commercially available from Sumitomo Bakelite Co., which has on its surface a copper foil with a thickness of 12 μm, was thermally adhered onto the glass epoxy substrate at 150° C. for thirty minutes. This film measures 80 μm in thickness.

[0067] Thereafter, a surface portion of the copper foil was etched away; then, a carbon dioxide gas laser manufactured by Hitachi Via Mechanics Co. was used to form via-holes with various diameters of φ60 μm, φ80 μm, φ100 μm, φ120 μm and φ140 μm. The pitch of these via-holes was set at 500 μm, resulting in formation of 2,000 holes with respective dimensions in a square substrate of 100 mm long in each side.

[0068] After having formed the via-holes, desmear processing was performed by known methods using a permanganic alkali aqueous solution, followed by washing of the resulting substrate surface. Thereafter, a chosen plating catalyst processing liquid, e.g. HS-101 manufactured by Hitachi Kasei Kougyo Sha, was used to add catalyst through standard processes; then, electroless copper plating was effectuated to a thickness of about 1 μm, by using a thin-add electroless copper plating solution, e.g. CAST-2000 available from Hitachi Kasei Kougyo Sha. Next, backing was done at 160° C. for one hour, thus completing the test substrate.

[0069] (Physical Property Measurement-Use Plated Film Fabrication Method)

[0070] A plated film used for measurement of physical properties (mechanical characteristics of plated film) as used herein is the one with a thickness of 30 μm as formed on a stainless plate.

[0071] Let the stainless plate be put into the plating solution for effectuation of electroless copper plating while setting the liquid at a temperature of 70° C. with a load of 1 dm2/l. This plate is the one that has fabricated through the process steps of pre-immersion into a 17-% hydrochloric acid aqueous solution for two minutes, immersion into a single-fluid palladium colloid catalyzer solution (acidified aqueous solution containing a sensitizer HS101B from Hitachi Kasei Kougyo Kabushiki Kaisha) for 10 minutes, water washing, processing by a chosen accelerating agent with diluted hydrochloric acid being as its main component for 5 minutes, and water washing again. During plating process, the plating solution was stirred while letting flesh air be introduced constantly. During plating, supplementary feed was done to ensure that any one of the copper ions and copper ion reducing agent are kept constant in concentration while simultaneously causing the pH value to stay at a specified level.

[0072] First, evaluation of the uniformity of plated film deposition to via-holes was carried out using the test substrate shown in FIG. 1. Plating was applied to such test substrate using the above-noted plating solution under the plating conditions for 3.0 hours. The plating rate at this time was at 8.3 μm/h; thus the resulting plated film thickness was 24.9 μm. Profile polishing was then performed for evaluation of the deposition uniformity in units of various size via-hole groups, each consisting of 100 holes. The deposition uniformity evaluation was done based on the percentage (%) of a specific ratio (b/a×100) of the plated film thickness “a” on the dielectric layer surface shown in FIG. 1 to the plated film thickness “b” at the via-hole's bottom portion.

[0073] In this embodiment the percentage of a plated film thickness at the via-hole bottom portion of each diameter relative to the thickness value, 24.9 μm, of a plated film on the substrate surface represents the deposition uniformity. Upon execution of plating under the plating conditions of this embodiment, the deposition uniformity was as follows: 68% for a via-hole of φ60 μm, 77% for a via-hole of φ80 μm, 89% for a via-hole of φ100 μm, 96% for a via-hole of φ120 μm, and 100% for a via-hole of φ140 μm, wherein excellent deposition uniformity was obtained in each case irrespective of the fact that the plating rate is set as high as 8.3 μm/h.

[0074] Further, the physical properties of the plated film obtained using the plating solution under the plating conditions of this embodiment have been evaluated. This evaluation was done by a process having the steps of pealing a plated coat film off from the stainless plate, cutting it into portions each having a size of 1.25 cm×10 cm, and then measuring the mechanical strength of such plated coat film by using a standard tension testing machine. As a result, the plated coat film's rate of elongation or “extensibility” was at 3.2%. This is a sufficient level of plated film physical property for provision of the intended connection reliability of a build-up substrate.

[0075] From the foregoing, it has been affirmed that the electroless copper plating solution which contains therein mandelonitrile as additive agent is excellent in uniformity of deposition onto via-holes, convincing the presence of effects of the invention. Further, the plated film's physical properties are at a level high enough to permit achievement of the intended build-up substrate connection reliability; thus, it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this example.

[0076] (Embodiment 2)

[0077] Presented below is the composition of a plating solution used in this embodiment along with plating process conditions.

3Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*triethylenetetramine0.01 mol/l

[0078] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

4Plating Conditions:*pH12.3*liquid temperature70° C.

[0079] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1 stated above. The resultant plating rate with use of the plating solution of this embodiment was 5.5 μm/h. Plating was applied to the top surface of the test substrate for 4.5 hours, thereby forming a plated film with a thickness of about 25 μm. Evaluation results of the deposition uniformity are as follows: 92% for a via-hole of φ60 μm, 99% for a via-hole of φ80 μm, and 100% for via-holes of φ100 μm, φ120 μm and φ140 μm. Excellent deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 5.5 μm/h.

[0080] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's rate of elongation or extensibility was 3.8%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0081] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein triethyltetramine as additive agent is excellent in uniformity of deposition onto via-holes, convincing the presence of effects of the invention. Further, the plated film's physical properties are at a level high enough to permit achievement of the intended build-up substrate connection reliability; thus, it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0082] (Embodiment 3)

[0083] Shown below is the composition of a plating solution used in this embodiment along with plating process conditions.

5Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*triethylenetetramine0.02 mol/l

[0084] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

6Plating Conditions:*pH12.3*liquid temperature70° C.

[0085] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1 stated above. The resultant plating rate with use of the plating solution of this embodiment was 4.3 μm/h. Plating was applied to the top surface of the test substrate for 6 hours, thereby forming a plated film with a thickness of about 26 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of φ60 μm to φ140 μm. Excellent deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.3 μm/h.

[0086] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was 3.4%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0087] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein triethyltetramine as additive agent is excellent in uniformity of deposition onto via-holes, convincing the presence of effects of the invention. Further, the plated film's physical properties are at a level high enough to permit achievement of the intended build-up substrate connection reliability; thus, it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0088] (Embodiment 4)

[0089] Shown below is the composition of a plating solution used in this embodiment along with plating process conditions.

7Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*mandelonitrile0.0005 mol/l*2,2′-bipyridyl0.0002 mol/l

[0090] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

8Plating Conditions:*pH12.5*liquid temperature74° C.

[0091] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1 stated above. The resultant plating rate with use of the plating solution of this embodiment was 5.1 μm/h. Plating was applied to the top surface of the test substrate for 5 hours, thereby forming a plated film with a thickness of about 25.5 μm. Evaluation results of the deposition uniformity are as follows: 90% for a via-hole of φ60 μm, 99% for a via-hole of φ80 μm, and 100% for via-holes of φ100 μm, φ120 μm and φ140 μm. Excellent deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 5.1 μm/h.

[0092] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was 15.3%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0093] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein mandelonitrile as additive agent is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the co-use with 2,2′-bipyridyl results in the plated film's physical properties becoming demonstrably excellent, which well demonstrates the presence of an ability to achieve sufficiently high connection reliability of a build-up substrate manufactured. Accordingly, it has been affirmed that the wiring substrate manufacturing method employing the electroless copper plating solution shown herein is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0094] (Embodiment 5)

[0095] Presented below is the composition of a plating solution used in this embodiment along with plating process conditions.

9Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*triethylenetetramine0.01 mol/l*2,2′-bipyridyl0.0002 mol/l

[0096] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

10Plating Conditions:*pH12.5*liquid temperature74° C.

[0097] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1 stated above. The resultant plating rate with use of the plating solution of this embodiment was 4.8 μm/h. Plating was applied to the top surface of the test substrate for 5 hours, thereby forming a plated film with a thickness of about 24 μm. Evaluation results of the deposition uniformity are as follows: 97% for a via-hole of φ60 μm, and 100% for all the via-holes of φ80 μm to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.8 μm/h.

[0098] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's rate of elongation or extensibility was 7.8%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0099] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein triethyltetramine as additive agent is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the co-use with 2,2′-bipyridyl results in the plated film's physical properties becoming demonstrably excellent, which well demonstrates the presence of an ability to achieve sufficiently high connection reliability of a build-up substrate manufactured. Accordingly, it has been affirmed that the wiring substrate manufacturing method employing the electroless copper plating solution shown herein is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0100] (Embodiment 6)

[0101] Shown below is the composition of a plating solution used in this embodiment along with plating process conditions.

11Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0002 mol/l*2,2′-bipyridyl0.0002 mol/l

[0102] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

12Plating Conditions:*pH12.5*liquid temperature74° C.

[0103] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 5.8 μm/h. Plating was applied to the top surface of the test substrate for 4.5 hours, thereby forming a plated film with a thickness of about 26 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 5.8 μm/h.

[0104] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's rate of elongation or extensibility was 8.5%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0105] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein eriochrome black T and 2,2′-bipyridyl as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate. Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0106] (Embodiment 7)

[0107] Shown below is the composition of a plating solution used in this embodiment along with plating process conditions.

13Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0005 mol/l*2,2′-bipyridyl0.0002 mol/l

[0108] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

14Plating Conditions:*pH12.5*liquid temperature74° C.

[0109] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 6.0 μm/h. Plating was applied to the top surface of the test substrate for 4 hours, thereby forming a plated film with a thickness of about 24 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 6.0 μm/h.

[0110] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 7.6%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0111] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein eriochrome black T and 2,2′-bipyridyl as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate. Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0112] (Embodiment 8)

[0113] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

15Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*glyoxylic acid0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0005 mol/l*2,2′-bipyridyl0.0002 mol/l

[0114] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

16Plating Conditions:*pH12.3*liquid temperature70° C.

[0115] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 4.7 μm/h. Plating was applied to the top surface of the test substrate for 5.5 hours, thereby forming a plated film with a thickness of about 26 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.7 μm/h.

[0116] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 9.6%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0117] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein eriochrome black T and 2,2′-bipyridyl as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which indicates that it is possible to achieve sufficiently high connection reliability of a build-up substrate. Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0118] (Embodiment 9)

[0119] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

17Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*mandelonitrile0.0005 mol/l*polyethylene glycol (average molecular weight 600)0.009 mol/l

[0120] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

18Plating Conditions:*pH12.3*liquid temperature70° C.

[0121] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 7.6 μm/h. Plating was applied to the top surface of the test substrate for 3.3 hours, thereby forming a plated film with a thickness of about 25 μm. Evaluation results of the deposition uniformity are as follows: 72% for a via-hole of φ60 μm, 79% for a via-hole of φ80 μm, 93% for a via-hole of φ100 μm, and 100% for via-holes of φ120 μm and φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 7.6 μm/h.

[0122] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 7.6%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0123] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein mandelonitrile and polyethylene glycol as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate. Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0124] (Embodiment 10)

[0125] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

19Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*triethyltetramine0.01 mol/l*polyethylene glycol (average molar weight 600)0.009 mol/l

[0126] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

20Plating Conditions:*pH12.5*liquid temperature74° C.

[0127] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 4.9 μm/h. Plating was applied to the top surface of the test substrate for 5 hours, thereby forming a plated film with a thickness of about 25 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.9 μm/h.

[0128] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 6.8%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate. From the foregoing, it has been affirmed that the electroless copper plating solution containing therein triethyltetramine and polyethylene glycol as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate.

[0129] From the foregoing, it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0130] (Embodiment 11)

[0131] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

21Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0005 mol/l*polyethylene glycol (average molar weight 600)0.03 mol/l

[0132] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

22Plating Conditions:*pH12.5*liquid temperature74° C.

[0133] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 7.5 μm/h. Plating was applied to the top surface of the test substrate for 3.5 hours, thereby forming a plated film with a thickness of about 26 μm. Evaluation results of the deposition uniformity are as follows: 75% for a via-hole of φ60 μm, 83% for a via-hole of φ80 μm, 96% for a via-hole of φ100 μm, and 100% for via-holes of φ120 μm and φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 7.5 μm/h.

[0134] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 5.4%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0135] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein eriochrome black T and polyethylene glycol as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate.

[0136] Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0137] (Embodiment 12)

[0138] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

23Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0005 mol/l*2,9-dimethyl-1,10-phenanthroline0.0001 mol/l

[0139] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

24Plating Conditions:*pH12.5*liquid temperature74° C.

[0140] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 6.7 μm/h. Plating was applied to the top surface of the test substrate for 4.0 hours, thereby forming a plated film with a thickness of about 27 μm. Evaluation results of the deposition uniformity are as follows: 77% for a via-hole of φ60 μm, 88% for a via-hole of φ80 μm, 96% for a via-hole of φ100 μm, and 100% for via-holes of φ120 μm and φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 6.7 μm/h.

[0141] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 5.2%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0142] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein eriochrome black T and 2,9-dimethyl-1,10-phenanthroline as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate. Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this example.

[0143] (Embodiment 13)

[0144] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

25Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*mandelonitrile0.0005 mol/l*2,9-dimethyl-1,10-phenanthroline0.0003 mol/l

[0145] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

26Plating Conditions:*pH12.5*liquid temperature74° C.

[0146] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 5.3 μm/h. Plating was applied to the top surface of the test substrate for 5.0 hours, thereby forming a plated film with a thickness of about 26 μm. Evaluation results of the deposition uniformity are as follows: 91% for a via-hole of φ60 μm, and 100% for via-holes of φ80 μm, φ100 μm, φ120 μm and φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 5.3 μm/h.

[0147] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 6.8%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0148] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein mandelonitrile and 2,9-dimethyl-1,10-phenanthroline as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate.

[0149] Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this example.

[0150] (Embodiment 14)

[0151] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

27Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*triethyltetramine0.005 mol/l*2,9-dimethyl-1,10-phenanthroline0.0002 mol/l

[0152] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

28Plating Conditions:*pH12.5*liquid temperature74° C.

[0153] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 4.9 μm/h. Plating was applied to the top surface of the test substrate for 5.0 hours, thereby forming a plated film with a thickness of about 25 μm. Evaluation results of the deposition uniformity are as follows: 92% for a via-hole of φ60 μm, and 100% for via-holes of φ80 μm, φ100 μm, φ120 μm and φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.9 μm/h.

[0154] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was as good as 6.9%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0155] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein triethyltetramine and 2,9-dimethyl-1,10-phenanthroline as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate.

[0156] Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this example.

[0157] (Embodiment 15)

[0158] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

29Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*mandelonitrile0.0005 mol/l*polyethylene glycol (average molar weight 600)0.0009 mol/l*2,2′-bipyridyl0.0001 mol/l

[0159] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

30Plating Conditions:*pH12.5*liquid temperature74° C.

[0160] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 4.8 μm/h. Plating was applied to the top surface of the test substrate for 5 hours, thereby forming a plated film with a thickness of about 24 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm up to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.8 μm/h.

[0161] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was 18.3% and thus significantly excellent. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0162] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein mandelonitrile and polyethylene glycol plus 2,2′-bipyridyl as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate.

[0163] Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0164] (Embodiment 16)

[0165] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

31Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*triethyltetramine0.01 mol/l*polyethylene glycol (average molar weight 600)0.009 mol/l*2,2′-bipyridyl0.0001 mol/l

[0166] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

32Plating Conditions:*pH12.5*liquid temperature74° C.

[0167] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 4.1 μm/h. Plating was applied to the top surface of the test substrate for 6 hours, thereby forming a plated film with a thickness of about 25 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm up to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.1 μm/h.

[0168] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was at a very good value of 8.6%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0169] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein triethyltetramine and polyethylene glycol plus 2,2′-bipyridyl as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further,the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate. Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0170] (Embodiment 17)

[0171] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

33Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0005 mol/l*polyethylene glycol (average molar weight 600)0.009 mol/l*2,2′-bipyridyl0.0001 mol/l

[0172] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

34Plating Conditions:*pH12.5*liquid temperature74° C.

[0173] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 5.9 μm/h. Plating was applied to the top surface of the test substrate for 4.2 hours, thereby forming a plated film with a thickness of about 25 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm up to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 5.9 μm/h.

[0174] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was 8.4% and thus significantly excellent. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0175] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein eriochrome black T and polyethylene glycol plus 2,2′-bipyridyl as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate.

[0176] Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0177] (Embodiment 18)

[0178] Below is the composition of a plating solution used in this embodiment along with plating process conditions.

35Plating Solution Composition:*copper sulfate pentahydrate0.05 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*mandelonitrile0.0006 mol/l*polyethylene glycol (average molar weight 600)0.01 mol/l*2,2′-bipyridyl0.0001 mol/l

[0179] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

36Plating Conditions:*pH12.5*liquid temperature74° C.

[0180] The deposition uniformity and plated film's physical properties were evaluated by using a test substrate and method for fabricating a physical property measuring plated film plus deposition uniformity evaluation method, all of which are similar to those in Embodiment 1. The resultant plating rate with use of the plating solution of this embodiment was 4.5 μm/h. Plating was applied to the top surface of the test substrate for 5.5 hours, thereby forming a plated film with a thickness of about 25 μm. Evaluation results of the deposition uniformity are as follows: 100% for all the via-holes of from φ60 μm up to φ140 μm. Good deposition uniformity was obtained irrespective of the fact that the plating rate is as high as 4.5 μm/h.

[0181] Further, the physical properties of the plated film obtained using the plating solution and the plating conditions of this embodiment were evaluated. As a result, the plated film's extensibility was at a very excellent value of 18.6%. This is a sufficient level of plated film physical property for achievement of the intended connection reliability of a build-up substrate.

[0182] From the foregoing, it has been affirmed that the electroless copper plating solution containing therein mandelonitrile and polyethylene glycol plus 2,2′-bipyridyl as additive agents is excellent in uniformity of deposition to via-holes, convincing the presence of effects of this embodiment. Further, the plated film's physical properties also are excellent, which suggests that it is possible to achieve sufficiently high connection reliability of a build-up substrate.

[0183] Thus it has been affirmed that the wiring substrate manufacturing method using the electroless copper plating solution shown in this embodiment is suitable for use as a method of manufacturing build-up substrates having via-hole connection structures, leading to affirmance of effects of this embodiment.

[0184] (Embodiment 19)

[0185] A layer of photosensitive resist material was formed on the surface of a copper-bonded glass epoxy substrate having thereon a copper foil with a thickness of 18 μm; after completion of patterning, an inner layer circuit was formed by etching techniques. This circuit measures 75 μm in width and 75 μm in space, wherein square interlayer connection pads with each side of 250 μm are formed and disposed with a pitch of 1.27 mm. After having peeled off the resist, the inner layer copper circuit surface is made coarser through blackening processes. An epoxy resin film APL-4001 commercially available from Sumitomo Bakelite Co., which has on its surface a copper foil with a thickness of 12 μm, was adhered by thermo-compression bonding techniques at a temperature of 150° C. for 30 minutes. This film is 80 μm thick. Thereafter, a surface portion of the copper foil was etched away; then, a carbon dioxide gas laser manufactured by Hitachi Via Mechanics Co. was used to form a via-hole(s) of 80 μm in diameter on an interlayer connection pad(s) as formed at the inner layer. After completion of such via-hole formation, standard methodology was used to perform desmear processing using a permanganate alkaline aqueous solution; after having washed the resulting substrate surface, a plating catalytic processing liquid, e.g. HS-101 manufactured by Hitachi Kasei Kougyo Sha, was used to add catalyst through known processes; thereafter, electroless copper plating was applied thereto using a thin-add electroless copper plating solution, here CAST-2000 also available from Hitachi Kasei Kougyo Sha. Then, backing was carried out at 160° C. for one hour; next, electroless copper plating was done to a thickness of 25 μm using a chosen plating solution and plating process conditions given below.

37Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*mandelonitrile0.0005 mol/l

[0186] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

38Plating Conditions:*pH12.3*liquid temperature70° C.

[0187] After completion of the 25μ-m thickness plating processing with the plating solution composition under the plating conditions stated above, a photosensitive resist was formed on a copper-plated film, which was then subject to pattering. The pattern thus formed has its structure with a linear array of 2,500 via-holes, which structure is used for measurement of the chain resistivity of these via-holes. Actually these 2,500 via-holes' chain resistance value immediately after completion of plating was measured for comparison with a resistance value at the same substrate after a thermal shock test. This test was done under the following conditions.

[0188] (Test Conditions)

[0189] 125° C., 120 minutes→room temp., 5 minutes→−65° C., 120 minutes

[0190] Let this be one cycle.

[0191] While an increase in cycle number of the thermal shock test results in a likewise increase in via-hole resistivity thus measured, a specific cycle number until the resistivity rise-up rate reaches 10% was used as a parameter that well reflects the reliability of such substrate. Thus it can be said that the greater this cycle number, the higher the reliability of a substrate obtained.

[0192] The above-noted thermal shock test results in that a substrate sample fabricated was such that the resistance rise-up rate exceeded 10% after elapse of 180 cycles. This thermal shock test result demonstrates that the substrate exhibits sufficient reliability in view of build-up substrate connection reliability evaluation results; thus it has been affirmed that the wiring substrate manufacturing method of the present invention is capable of obtaining the intended wiring substrate with excellent connection reliability.

[0193] From the foregoing, it is apparent that the use of the electroless copper plating solution of the invention as disclosed herein which is excellent in uniformity of deposition to inside of via-holes makes it possible to obtain substrates with excellent connection reliability; thus the effects of this embodiment could be affirmed.

[0194] (Embodiment 20)

[0195] A test was done, which is similar to that of Embodiment 19 with the plating solution and plating conditions being replaced with the following ones.

39Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*triethyltetramine0.01 mol/l

[0196] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

40Plating Conditions:*pH12.3*liquid temperature70° C.

[0197] As a result, a substrate sample fabricated in this embodiment was such that the resistance rise-up rate exceeds 10% after elapse of 180 cycles in a similar way to that in Example 19. This thermal shock test result suggests that the substrate exhibits sufficient reliability in view of build-up substrate connection reliability evaluation results; thus it has been affirmed that the wiring substrate manufacturing method of the present invention is capable of obtaining the intended wiring substrate with excellent connection reliability.

[0198] From the foregoing, it is apparent that the use of the electroless copper plating solution of the invention as disclosed herein which is excellent in uniformity of deposition to inside of via-holes makes it possible to obtain substrates with excellent connection reliability; thus the effects of this example could be affirmed.

[0199] (Embodiment 21)

[0200] A test was done, which is similar to that of Embodiment 19 with the plating solution and plating conditions being replaced with the following ones.

41Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*mandelonitrile0.0005 mol/l*2,2′-bipyridyl0.0002 mol/l

[0201] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

42Plating Conditions:*pH12.5*liquid temperature74° C.

[0202] As a result, a substrate sample fabricated in this embodiment was such that the resistance rise-up rate exceeds 10% after 200 cycles, which is a slightly better result than those of Embodiments 19 and 20. It is considered that this is because addition of 2,2′-bipyridyl results in improvement of mechanical physical properties of the resulting plated film. Additionally this thermal shock test result demonstrates that the substrate exhibits sufficient reliability in view of build-up substrate connection reliability evaluation results; thus it has been affirmed that the wiring substrate manufacturing method of the present invention is capable of obtaining the intended wiring substrate with excellent connection reliability.

[0203] From the foregoing, it is apparent that the use of the electroless copper plating solution of the invention as disclosed herein which is excellent in uniformity of deposition to inside of via-holes makes it possible to obtain substrates with excellent connection reliability; thus the effects of this embodiment could be affirmed.

[0204] (Embodiment 22)

[0205] A test was done, which is similar to that of Embodiment 19 with the plating solution and plating conditions being replaced with the following ones.

43Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0002 mol/l*2,2′-bipyridyl0.0002 mol/l

[0206] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.5 is established.

44Plating Conditions:*pH12.5*liquid temperature74° C.

[0207] As a result, as in Embodiment 21, a substrate sample fabricated in this embodiment was such that the resistance rise-up rate exceeds 10% after 200cycles, which is a slightly better result than those of Embodiments 19 and 20. It is considered that this is because addition of 2,2′-bipyridyl results in improvement of mechanical physical properties of the resulting plated film. Additionally, this thermal shock test result demonstrates that the substrate exhibits sufficient reliability in view of build-up substrate connection reliability evaluation results; thus it has been affirmed that the wiring substrate manufacturing method of the present invention is capable of obtaining the intended wiring substrate with excellent connection reliability.

[0208] From the foregoing, it is apparent that the use of the electroless copper plating solution of the invention as disclosed herein which is excellent in uniformity of deposition to inside of via-holes makes it possible to obtain substrates with excellent connection reliability; thus the effects of this embodiment could be affirmed.

[0209] (Embodiment 23)

[0210] A test was done, which is similar to that of Embodiment 19 with the plating solution and plating conditions being replaced with the following ones.

45Plating Solution Composition:*copper sulfate pentahydrate0.04 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*eriochrome black T0.0005 mol/l*2,2′-bipyridyl0.0002 mol/l

[0211] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

46Plating Conditions:*pH12.3*liquid temperature70° C.

[0212] As a result, as in Embodiments 21-22, a substrate sample fabricated in this embodiment was such that the resistance rise-up rate exceeds 10% after 200 cycles, which is a slightly better result than those of Examples 19 and 20. It is considered that this is because addition of 2,2′-bipyridyl results in improvement of mechanical physical properties of the resulting plated film.

[0213] Additionally, this thermal shock test result demonstrates that the substrate exhibits sufficient reliability in view of build-up substrate connection reliability evaluation results; thus it has been affirmed also in the case of employing glyoxylic acid as the required reducing agent that the wiring substrate manufacturing method of the present invention is capable of obtaining the intended wiring substrate with excellent connection reliability.

[0214] From the foregoing, it is apparent that the use of the electroless copper plating solution of the invention as disclosed herein which is excellent in uniformity of deposition to inside of via-holes makes it possible to obtain substrates with excellent connection reliability; thus the effects of this embodiment could be affirmed.

[0215] (Comparative Example 1)

[0216] Next, there will be shown the composition and plating process conditions of a plating solution that was used for explanation in comparison with the various examples of the invention stated supra.

47Plating Solution Composition:*copper sulfate pentahydrate0.05 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l

[0217] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

48Plating Conditions:*pH12.3*liquid temperature70° C.

[0218] In this example for comparison purposes, the plating solution contains no additive agents. Its deposition uniformity and plated film s physical properties have been evaluated by use of a test substrate, physical property measurement plated film fabrication method and deposition uniformity evaluation method, all of which are the same as those of Embodiment 1. In the plating solution used in this comparative example, the plating rate was measured to be 15.8 μm/h. After applying plating to the top surface of test substrate for 1.5 hours, a plated film was formed to a thickness of about 24 μm. For the purpose evaluation of its deposition uniformity, the cross-section or profile of each via-hole was observed to thereby find that no plated film components are deposited within via-holes and also that deposition characteristics are at almost 0% with respect to all the via-holes concerned, including φ60 μm via-holes up to φ140 μm ones.

[0219] Further, the resultant plated film thus obtained using the plating solution under the plating conditions of the comparative example was very crumbly: our physical property evaluation results indicate that the degree of extensibility was as less as 0.3%. In addition, the plating solution was undesirably decomposed after completion of plating processing for 2 hours, resulting in copper components being deposited on wall surfaces of a plating bath used.

[0220] From the foregoing, it has been found that the plating solution of this comparative example containing therein no additive agents is less or “bad” in deposition uniformity. Accordingly it could be affirmed that the plating solution of the present invention containing mandelonitrile, triethyltetramine and/or eriochrome black T as stated previously is excellent in deposition uniformity, thus proving the presence of effects of the plating solution of the invention. Additionally the wiring substrate manufacturing method using the electroless copper plating solution of the above-noted comparative example is bad in uniformity of deposition to via-holes and also bad in mechanical characteristics of resultant plated film, which makes it impossible to provide any required wiring substrate reliability, and thus is not preferable in any way. From this fact also, it could be made sure that the manufacturing method of the invention is very effective for use as wiring substrate manufacturing methodology, which is an advantage unique to the invention.

[0221] (Comparative Example 2)

[0222] Next, the composition and plating conditions of a plating solution that was used in another example for comparison will be given below.

49Plating Solution Composition:*copper sulfate pentahydrate0.05 mol/l*ethylene-diaminetetraacetic acid0.1 mol/l*formaldehyde0.03 mol/l*sodium hydride0.01 mol/l*2,2′-bipyridyl0.0002 mol/l

[0223] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

50Plating Conditions:*pH12.3*liquid temperature70° C.

[0224] This comparative example is such that while 2,2′-bipyridyl is contained as additive agent in a plating solution, this solution contains none of mandelonitrile, triethyltetramine and eriochrome black T which are for use as the additive agents in order to improve the uniformity of deposition to via-holes. The deposition uniformity and plated film's physical properties thereof have been evaluated by use of a test substrate, physical property measurement plated film fabrication method and deposition uniformity evaluation method which are the same as those of Embodiment 1. In the plating solution used in this comparative example the plating rate was 5.5 μm/h. After applying plating to the test substrate's top surface for 4.5 hours, a plated film was formed to a thickness of about 25 μm. Deposition uniformity measurement results are as follows: 25% for φ60 μm via-holes, 30% for φ80 μm via-holes, 57% for φ100 μm via-holes, 67% for φ120 μm via-holes, and 87% for φ140 μm via-holes. This suggests that the to-the-via-hole deposit ion uniformities are unacceptably inferior when compared to the samples of the invention that exhibit similar plating rates.

[0225] From the foregoing, it has been found that the plating solution of the comparative example containing therein none of the additive agents with effects for improving the deposition uniformity is bad in deposition uniformity. Accordingly it could be affirmed that the plating solution of the present invention containing mandelonitrile, triethyltetramine and/or eriochrome black T is excellent in deposition uniformity, thus convincing the presence of effects of the plating solution of the invention. Additionally the wiring substrate manufacturing method using the electroless copper plating solution of the above-noted comparative example is bad in uniformity of deposition to via-holes, which makes it impossible to achieve any required wiring substrate reliability, and thus is not preferable in any way. From this fact also, it could be made sure that the manufacturing method of the invention is very effective for use as wiring substrate manufacturing methodology, which is an advantage unique to the invention.

[0226] (Comparative Example 3)

[0227] Next, the composition and plating conditions of a plating solution that was used in yet another comparative example will be shown below.

51Plating Solution Composition:copper sulfate pentahydrate0.05mol/lethylene-diaminetetraacetic acid0.1mol/lformaldehyde0.03mol/lsodium hydride0.01mol/leriochrome black T0.0005mol/l

[0228] Note that the concentration of sodium hydroxide was appropriately adjusted so that pH=12.3 is established.

52Plating Conditions:pH12.3liquid temperature70° C.

[0229] This comparative example is such that its plating solution contains therein eriochrome black T alone. The deposition uniformity and plated films s physical properties thereof have been evaluated by use of a test substrate, physical property measurement plated film fabrication method and deposition uniformity evaluation method, which are the same as those of Embodiment 1. In the plating solution used in this comparative example the plating rate was measured to be 10.4 μm/h. After applying plating to the test substrate top surface for 2.4 hours, a plated film was formed to a thickness of about 25 μm. Precipitation uniformity measurement results are as follows: 18% for φ60 μm via-holes, 25% for φ80 μm via-holes, 33% for φ100 μm via-holes, 48% for φ120 μm via-holes, and 60% for φ140 μm via-holes. This suggests that the to-the-via-hole deposition uniformities are unacceptably less when compared to the embodiments of the invention containing 2,2′-bipyridyl and/or polyalkylene glycol.

[0230] From the foregoing, it has been found that the electroless copper plating solution of the comparative example with only eriochrome black T being mixed into the plating liquid is bad in deposition uniformity. Thus it could be affirmed that the electroless copper plating solution of the present invention is excellent in precipitation uniformity, thus convincing the presence of effects of the plating solution of the invention. Additionally the wiring substrate manufacturing method using the electroless copper plating solution of the above-noted comparative example is bad in uniformity of deposition to via-holes, which makes it impossible to achieve any required wiring substrate reliability, and thus is not preferable in any way. From this fact also, it could be made sure that the manufacturing method of the invention is very effective for use as wiring substrate manufacturing methodology, which is an advantage unique to the invention.

[0231] (Another Status of Embodiment 2)

[0232] An explanation will next be given of a multilayer wiring substrate as manufactured by the method of the present invention with reference to FIG. 2 below.

[0233] See FIG. 2, which depicts an enlarged sectional view of main part of the multilayer wiring substrate, wherein a plurality of copper wiring lead layers 6, 7, 8 are formed inside of an electrical insulative or dielectric body 2 in such a manner that for interconnection between the lead layers 7 and 8 by an electroless copper-plated layer 4 an opening portion 3 with one end of a via-hole being closed is provided at an upper surface of the dielectric body 2 while letting the lead layers 7 and 8 be partly exposed; thereafter, a continuous plated layer made of copper is coated by using the above-stated electroless copper plating solution of the present invention within the opening 3 and also on the upper surface of the dielectric body 2 to have an almost uniform thickness, i.e. in the state of a=b=c in the same drawing. It should be noted that the opening 3 has its diameter φ ranging in value from 50 to 150 μm and also has a closed bottom portion at a position deeper than the diameter length thereof, wherein an aspect ratio is so set as to fall within a range of 1.0 to 2.0. Also note that this opening is desirably arranged as a circular groove when looking at from the upper part, although it may be modified into the form of a rectangle or alternatively into an elongate rectangular groove when the need arises.

[0234] It would be apparent from viewing FIG. 2 that the use of the copper-plated layer 4 of uniform thickness as coated on the bottom and wall surfaces within the opening provides the required reliability of electrical connection between the lead layers 7 and 8. Especially, in the manufacture of large-scale multilayer wiring substrates with multiple openings each similar in structure to the opening 3, this is demonstrably advantageous for improvement of production yields thereof while at the same time reducing manufacturing costs.

[0235] Turning now to FIG. 3, there is shown an enlarged sectional view of main part of a multilayer wiring substrate as fabricated using the copper plating solution of the aforesaid comparative example 2 or 3, wherein a copper-plated film 4 coated on bottom and sidewall surfaces within an opening is such that its thickness values “b” and “c” are each less than a thickness “a” of copper-plated layer 4 coated on the upper surface of dielectric body 2, resulting in that thickness irregular portions such as recesses or “dimples ” take place at the copper-plated layer 4 per se as indicated by numeral 9 in FIG. 3; thus it will no longer be expectable to achieve any intended reliability of electrical connection between wiring lead layers 7 and 8.

[0236] As would be readily understandable from the foregoing explanation of the present invention based on various embodiments and examples, the present invention is very effective for obtaining with increased reproducibility a wiring structure with a copper-plated film of uniform thickness being provided on inner wall and bottom surfaces of an opening of large aspect ratios having a closed bottom portion, which film has its thickness that is substantially the same as thickness at upper outside surface portions.

[0237] According to the present invention, it is possible to obtain at a connection portion of a via-hole structure as can be seen in built-up substrates an electroless copper plating solution capable of forming copper metals with increased uniformities. In addition, the use of this electroless copper plating solution makes it possible to obtain a wiring substrate with high wiring densities and high reliability with inside surfaces of via-holes being uniformly subjected to copper plating processes.

Wiring substrate and manufacturing method of the same along with electroless copper plating solution used therefor

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