ASM AMERICA, INC

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PHOENIX, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Switching circuit
- Patent number 12,119,206
- Issue date Oct 15, 2024
- ASM AMERICA, INC.
- Anton Mavretic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combined RF generator and RF solid-state matching network
- Patent number 11,948,775
- Issue date Apr 2, 2024
- ASM AMERICA, INC.
- Imran Ahmed Bhutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for adjusting a pedestal assembly for a reactor
- Patent number 11,417,563
- Issue date Aug 16, 2022
- ASM America, Inc.
- Michael Haplin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for rapid bake of semiconductor substrate with upper linear...
- Patent number 10,480,095
- Issue date Nov 19, 2019
- ASM America, Inc.
- Michael W. Halpin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction system for growing a thin film
- Patent number 10,468,291
- Issue date Nov 5, 2019
- ASM America, Inc.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 10,370,761
- Issue date Aug 6, 2019
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective etching of reactor surfaces
- Patent number 10,358,599
- Issue date Jul 23, 2019
- ASM America, Inc.
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 10,266,946
- Issue date Apr 23, 2019
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process feed management for semiconductor substrate processing
- Patent number 9,892,908
- Issue date Feb 13, 2018
- ASM America, Inc.
- Fred Pettinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid bake of semiconductor substrate with upper linear heating ele...
- Patent number 9,885,123
- Issue date Feb 6, 2018
- ASM America, Inc.
- Michael W. Halpin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of metal carbide films using aluminum hydro...
- Patent number 9,631,272
- Issue date Apr 25, 2017
- ASM America, Inc.
- Dong Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor delivery system
- Patent number 9,593,416
- Issue date Mar 14, 2017
- ASM America, Inc.
- Kyle Fondurulia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 9,574,268
- Issue date Feb 21, 2017
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction apparatus having multiple adjustable exhaust ports
- Patent number 9,551,069
- Issue date Jan 24, 2017
- ASM America, Inc.
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective etching of reactor surfaces
- Patent number 9,481,937
- Issue date Nov 1, 2016
- ASM America, Inc.
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced atomic layer deposition of conductive material over...
- Patent number 9,466,574
- Issue date Oct 11, 2016
- ASM America, Inc.
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 9,394,608
- Issue date Jul 19, 2016
- ASM America, Inc.
- Eric Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor flow control apparatus for atomic layer deposition
- Patent number 9,388,492
- Issue date Jul 12, 2016
- ASM America, Inc.
- Carl L. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction system for growing a thin film
- Patent number 9,359,672
- Issue date Jun 7, 2016
- ASM America, Inc.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater jacket for a fluid line
- Patent number 9,341,296
- Issue date May 17, 2016
- ASM America, Inc.
- Andrew M. Yednak
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Selective epitaxial formation of semiconductive films
- Patent number 9,312,131
- Issue date Apr 12, 2016
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart temperature measuring device
- Patent number 9,297,705
- Issue date Mar 29, 2016
- ASM America, Inc.
- Ravinder K. Aggarwal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thermocouple assembly with guarded thermocouple junction
- Patent number 9,267,850
- Issue date Feb 23, 2016
- ASM America, Inc.
- Ravinder K. Aggarwal
- G01 - MEASURING TESTING
Information Patent Grant
Structure comprises an As-deposited doped single crystalline Si-con...
- Patent number 9,190,515
- Issue date Nov 17, 2015
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doping with ALD technology
- Patent number 9,139,906
- Issue date Sep 22, 2015
- ASM America, Inc.
- Chang-Gong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing an epitaxial silicon germanium layer having...
- Patent number 9,127,345
- Issue date Sep 8, 2015
- ASM America, Inc.
- Nyles W. Cody
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High concentration water pulses for atomic layer deposition
- Patent number 9,117,773
- Issue date Aug 25, 2015
- ASM America, Inc.
- Eric J. Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition valve assembly and method of heating the same
- Patent number 9,096,931
- Issue date Aug 4, 2015
- ASM America, Inc.
- Andrew M. Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ pre-clean prior to epitaxy
- Patent number 9,093,269
- Issue date Jul 28, 2015
- ASM America, Inc.
- Nyles W. Cody
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process feed management for semiconductor substrate processing
- Patent number 9,017,481
- Issue date Apr 28, 2015
- ASM America, Inc.
- Fred Pettinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
RF IMPEDANCE MATCHING NETWORK WITH SERIES-CONNECTED DIODE SWITCHES
- Publication number 20240234095
- Publication date Jul 11, 2024
- ASM America, Inc.
- Ronald Anthony DECKER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF IMPEDANCE MATCHING NETWORK WITH CLAMPING CIRCUIT
- Publication number 20240235517
- Publication date Jul 11, 2024
- ASM AMERICA, INC
- Ronald Anthony DECKER
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SYSTEM FOR RAPID BAKE OF SEMICONDUCTOR SUBSTRATE WITH UPPER LINEAR...
- Publication number 20180155851
- Publication date Jun 7, 2018
- ASM AMERICA, INC
- Michael W. Halpin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED VALVE MANIFOLD FOR ATOMIC LAYER DEPOSITION
- Publication number 20170121818
- Publication date May 4, 2017
- ASM AMERICA, INC
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ETCHING OF REACTOR SURFACES
- Publication number 20170009136
- Publication date Jan 12, 2017
- ASM AMERICA, INC
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR FLOW CONTROL APPARATUS FOR ATOMIC LAYER DEPOSITION
- Publication number 20160281232
- Publication date Sep 29, 2016
- ASM AMERICA, INC
- Carl L. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION SYSTEM FOR GROWING A THIN FILM
- Publication number 20160233124
- Publication date Aug 11, 2016
- ASM America, Inc,
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FEED MANAGEMENT FOR SEMICONDUCTOR SUBSTRATE PROCESSING
- Publication number 20150187568
- Publication date Jul 2, 2015
- ASM AMERICA, INC
- Fred Pettinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...
- Publication number 20140127405
- Publication date May 8, 2014
- ASM AMERICA, INC
- Dong Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN PRECURSORS FOR VAPOR DEPOSITION AND DEPOSITION PROCESSES
- Publication number 20140087544
- Publication date Mar 27, 2014
- ASM AMERICA, INC
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...
- Publication number 20140008803
- Publication date Jan 9, 2014
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER
- Publication number 20130239879
- Publication date Sep 19, 2013
- ASM AMERICA, INC
- Ravinder K. Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS AND APPARATUSES FOR EPITAXIAL FILMS WITH HIGH GERMANIUM CON...
- Publication number 20130233240
- Publication date Sep 12, 2013
- ASM AMERICA, INC
- Nyles W. Cody
- C30 - CRYSTAL GROWTH
Information Patent Application
VAPOR FLOW CONTROL APPARATUS FOR ATOMIC LAYER DEPOSITION
- Publication number 20130160709
- Publication date Jun 27, 2013
- ASM AMERICA, INC
- Carl L. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU PRE-CLEAN PRIOR TO EPITAXY
- Publication number 20130153961
- Publication date Jun 20, 2013
- ASM AMERICA, INC
- Nyles W. Cody
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMOCOUPLE ASSEMBLY WITH GUARDED THERMOCOUPLE JUNCTION
- Publication number 20130148693
- Publication date Jun 13, 2013
- ASM AMERICA, INC
- Ravinder K. Aggarwal
- G01 - MEASURING TESTING
Information Patent Application
SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION
- Publication number 20130109192
- Publication date May 2, 2013
- ASM AMERICA, INC
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER JACKET FOR A FLUID LINE
- Publication number 20130104988
- Publication date May 2, 2013
- ASM AMERICA, INC
- Andrew M. Yednak
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
DEPOSITION VALVE ASSEMBLY AND METHOD OF HEATING THE SAME
- Publication number 20130104992
- Publication date May 2, 2013
- ASM AMERICA, INC
- Andrew M. Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for a Gas Panel with Constant Gas Flow
- Publication number 20130029496
- Publication date Jan 31, 2013
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSURE TRANSMITTER FOR A SEMICONDUCTOR PROCESSING ENVIRONMENT
- Publication number 20130023129
- Publication date Jan 24, 2013
- ASM AMERICA, INC
- Joseph Charles Reed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MINIMIZING CONTAMINATION IN SEMICONDUCTOR PROCESSING CHA...
- Publication number 20130004288
- Publication date Jan 3, 2013
- ASM AMERICA, INC
- Joseph C. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMOCOUPLE
- Publication number 20120310440
- Publication date Dec 6, 2012
- ASM AMERICA, INC
- Buz Darabnia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH THROUGHPUT CYCLICAL EPITAXIAL DEPOSITION AND ETCH PROCESS
- Publication number 20120295427
- Publication date Nov 22, 2012
- ASM AMERICA, INC
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION SYSTEM FOR GROWING A THIN FILM
- Publication number 20120266821
- Publication date Oct 25, 2012
- ASM AMERICA, INC
- Mohith Verghese
- C30 - CRYSTAL GROWTH
Information Patent Application
SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTIVE FILMS
- Publication number 20120244688
- Publication date Sep 27, 2012
- ASM AMERICA, INC
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE UNIFORMITY DURING RAPID SUBSTRATE HEATING
- Publication number 20120234230
- Publication date Sep 20, 2012
- ASM AMERICA, INC
- Michael W. Halpin
- C30 - CRYSTAL GROWTH
Information Patent Application
PRECURSOR DELIVERY SYSTEM
- Publication number 20120156108
- Publication date Jun 21, 2012
- ASM AMERICA, INC
- Kyle Fondurulia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES
- Publication number 20120100308
- Publication date Apr 26, 2012
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS MIXER AND MANIFOLD ASSEMBLY FOR ALD REACTOR
- Publication number 20120079984
- Publication date Apr 5, 2012
- ASM AMERICA, INC
- Ryan M. Schmidt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Trademarklast 30 trademarks

Information Trademark
75435162 - EPSILON 2500
- Serial number 75435162
- Registration number 2234090
- Filing date Feb 17, 1998
- ASM AMERICA, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

ASM AMERICA, INC

Organization

Patents Grantslast 30 patents

Switching circuit

Combined RF generator and RF solid-state matching network

Apparatus and method for adjusting a pedestal assembly for a reactor

System for rapid bake of semiconductor substrate with upper linear...

Reaction system for growing a thin film

Pulsed valve manifold for atomic layer deposition

Selective etching of reactor surfaces

Pulsed valve manifold for atomic layer deposition

Process feed management for semiconductor substrate processing

Rapid bake of semiconductor substrate with upper linear heating ele...

Atomic layer deposition of metal carbide films using aluminum hydro...

Precursor delivery system

Pulsed valve manifold for atomic layer deposition

Reaction apparatus having multiple adjustable exhaust ports

Selective etching of reactor surfaces

Plasma-enhanced atomic layer deposition of conductive material over...

Semiconductor processing reactor and components thereof

Vapor flow control apparatus for atomic layer deposition

Reaction system for growing a thin film

Heater jacket for a fluid line

Selective epitaxial formation of semiconductive films

Smart temperature measuring device

Thermocouple assembly with guarded thermocouple junction

Structure comprises an As-deposited doped single crystalline Si-con...

Doping with ALD technology

Methods for depositing an epitaxial silicon germanium layer having...

High concentration water pulses for atomic layer deposition

Deposition valve assembly and method of heating the same

In-situ pre-clean prior to epitaxy

Process feed management for semiconductor substrate processing

Patents Applicationslast 30 patents

RF IMPEDANCE MATCHING NETWORK WITH SERIES-CONNECTED DIODE SWITCHES

RF IMPEDANCE MATCHING NETWORK WITH CLAMPING CIRCUIT

SYSTEM FOR RAPID BAKE OF SEMICONDUCTOR SUBSTRATE WITH UPPER LINEAR...

PULSED VALVE MANIFOLD FOR ATOMIC LAYER DEPOSITION

SELECTIVE ETCHING OF REACTOR SURFACES

VAPOR FLOW CONTROL APPARATUS FOR ATOMIC LAYER DEPOSITION

REACTION SYSTEM FOR GROWING A THIN FILM

PROCESS FEED MANAGEMENT FOR SEMICONDUCTOR SUBSTRATE PROCESSING

ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...

TIN PRECURSORS FOR VAPOR DEPOSITION AND DEPOSITION PROCESSES

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...

LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER

METHODS AND APPARATUSES FOR EPITAXIAL FILMS WITH HIGH GERMANIUM CON...

VAPOR FLOW CONTROL APPARATUS FOR ATOMIC LAYER DEPOSITION

IN-SITU PRE-CLEAN PRIOR TO EPITAXY

THERMOCOUPLE ASSEMBLY WITH GUARDED THERMOCOUPLE JUNCTION

SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION

HEATER JACKET FOR A FLUID LINE

DEPOSITION VALVE ASSEMBLY AND METHOD OF HEATING THE SAME

Methods and Apparatus for a Gas Panel with Constant Gas Flow

PRESSURE TRANSMITTER FOR A SEMICONDUCTOR PROCESSING ENVIRONMENT

METHOD FOR MINIMIZING CONTAMINATION IN SEMICONDUCTOR PROCESSING CHA...

THERMOCOUPLE

HIGH THROUGHPUT CYCLICAL EPITAXIAL DEPOSITION AND ETCH PROCESS

REACTION SYSTEM FOR GROWING A THIN FILM

SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTIVE FILMS

SUBSTRATE TEMPERATURE UNIFORMITY DURING RAPID SUBSTRATE HEATING

PRECURSOR DELIVERY SYSTEM

TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES

GAS MIXER AND MANIFOLD ASSEMBLY FOR ALD REACTOR

Trademarklast 30 trademarks

75435162 - EPSILON 2500