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Wafers transfer device
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Patent number 5,125,784
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Issue date Jun 30, 1992
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Tel Sagami Limited
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Takanobu Asano
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H01 - BASIC ELECTRIC ELEMENTS
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Apparatus for treatment using gas
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Patent number 5,016,567
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Issue date May 21, 1991
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Tel Sagami Limited
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Katsuhiko Iwabuchi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing method
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Patent number 5,011,705
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Issue date Apr 30, 1991
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Tel Sagami Limited
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Susumu Tanaka
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus for reaction treatment
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Patent number 4,989,540
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Issue date Feb 5, 1991
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Tel Sagami Limited
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Noboru Fuse
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
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Patent number 4,970,435
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Issue date Nov 13, 1990
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Tel Sagami Limited
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Susumu Tanaka
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H01 - BASIC ELECTRIC ELEMENTS
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Apparatus for holding plates
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Patent number 4,955,649
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Issue date Sep 11, 1990
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Tel Sagami Limited
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Katsumi Ishii
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Wafer support device
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Patent number 4,952,115
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Issue date Aug 28, 1990
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Tel Sagami Limited
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Wataru Ohkase
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H01 - BASIC ELECTRIC ELEMENTS
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Heat-treating apparatus
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Patent number 4,950,870
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Issue date Aug 21, 1990
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Tel Sagami Limited
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Hiroyuki Mitsuhashi
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C30 - CRYSTAL GROWTH
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Heat-treating apparatus
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Patent number 4,943,235
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Issue date Jul 24, 1990
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Tel Sagami Limited
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Ken Nakao
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C30 - CRYSTAL GROWTH
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Wafer transfer method
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Patent number 4,938,655
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Issue date Jul 3, 1990
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Tel Sagami Limited
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Takanobu Asano
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H01 - BASIC ELECTRIC ELEMENTS