Bhadri Varadarajan

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
- Patent number 11,920,239
- Issue date Mar 5, 2024
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,894,227
- Issue date Feb 6, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doped or undoped silicon carbide deposition and remote hydrogen pla...
- Patent number 11,848,199
- Issue date Dec 19, 2023
- Lam Research Corporation
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidation resistant protective layer in chamber conditioning
- Patent number 11,761,079
- Issue date Sep 19, 2023
- Lam Research Corporation
- Fengyuan Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,732,350
- Issue date Aug 22, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,708,634
- Issue date Jul 25, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,680,314
- Issue date Jun 20, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,680,315
- Issue date Jun 20, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,264,234
- Issue date Mar 1, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 11,209,729
- Issue date Dec 28, 2021
- Lam Research Corporation
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,101,164
- Issue date Aug 24, 2021
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 11,011,379
- Issue date May 18, 2021
- Lam Research Corporation
- Reza Arghavani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote plasma based deposition of boron nitride, boron carbide, and...
- Patent number 10,840,087
- Issue date Nov 17, 2020
- Lam Research Corporation
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma based deposition of oxygen doped silicon carbide films
- Patent number 10,832,904
- Issue date Nov 10, 2020
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,831,096
- Issue date Nov 10, 2020
- Lam Research Corporation
- Jeffrey Marks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of encapsulation
- Patent number 10,763,107
- Issue date Sep 1, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 10,604,841
- Issue date Mar 31, 2020
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Staircase encapsulation in 3D NAND fabrication
- Patent number 10,580,690
- Issue date Mar 3, 2020
- Lam Research Corporation
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of encapsulation
- Patent number 10,566,186
- Issue date Feb 18, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 10,559,468
- Issue date Feb 11, 2020
- Lam Research Corporation
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,514,598
- Issue date Dec 24, 2019
- Lam Research Corporation
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to obtain SiC class of films of desired composition and film...
- Patent number 10,472,714
- Issue date Nov 12, 2019
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 10,325,773
- Issue date Jun 18, 2019
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for depositing silicon oxide on metal layers
- Patent number 10,319,582
- Issue date Jun 11, 2019
- Lam Research Corporation
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote plasma based deposition of graded or multi-layered silicon c...
- Patent number 10,297,442
- Issue date May 21, 2019
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma based deposition of SiOC class of films
- Patent number 10,211,310
- Issue date Feb 19, 2019
- Novellus Systems, Inc.
- Bhadri Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of encapsulation
- Patent number 10,157,736
- Issue date Dec 18, 2018
- Lam Research Corporation
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV and reducing treatment for K recovery and surface clean in semic...
- Patent number 10,037,905
- Issue date Jul 31, 2018
- Novellus Systems, Inc.
- Bhadri Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION AND TREATMENT OF NANO-GRAPHENE AT LOW TEMPERATURES
- Publication number 20240395544
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Kashish SHARMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RADICAL-ACTIVATED CARBON FILM DEPOSITION
- Publication number 20240282570
- Publication date Aug 22, 2024
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20240218509
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE-CAPPED COPPER IN DUAL DAMASCENE INTERCONNECT
- Publication number 20240213159
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Asish Parbatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20240063015
- Publication date Feb 22, 2024
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDATION RESISTANT PROTECTIVE LAYER IN CHAMBER CONDITIONING
- Publication number 20230383401
- Publication date Nov 30, 2023
- LAM RESEARCH CORPORATION
- Fengyuan LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING
- Publication number 20230332291
- Publication date Oct 19, 2023
- LAM RESEARCH CORPORATION
- Bhadri VARADARAJAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230273516
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230266662
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION USING GRAPHENE AS AN INHIBITOR
- Publication number 20230245924
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Ieva NARKEVICIUTE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...
- Publication number 20230203646
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
GRAPHENE INTEGRATION
- Publication number 20220399230
- Publication date Dec 15, 2022
- LAM RESEARCH CORPORATION
- Bhadri N. VARADARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE GRAPHENE DEPOSITION USING REMOTE PLASMA
- Publication number 20220375722
- Publication date Nov 24, 2022
- LAM RESEARCH CORPORATION
- Bhadri N. VARADARAJAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20220238333
- Publication date Jul 28, 2022
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SixNy AS A NUCLEATION LAYER FOR SiCxOy
- Publication number 20220235463
- Publication date Jul 28, 2022
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20220238334
- Publication date Jul 28, 2022
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220609
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220608
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220611
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220610
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20220145459
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20220148875
- Publication date May 12, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220098727
- Publication date Mar 31, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20220075260
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20210391171
- Publication date Dec 16, 2021
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20210371982
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Bhadri Varadarajan

Person

Patents Grantslast 30 patents

Integrated showerhead with thermal control for delivering radical a...

Minimizing radical recombination using ALD silicon oxide surface co...

Conformal deposition of silicon carbide films

Doped or undoped silicon carbide deposition and remote hydrogen pla...

Oxidation resistant protective layer in chamber conditioning

Films of desired composition and film properties

Films of desired composition and film properties

Films of desired composition and film properties

Films of desired composition and film properties

Integrated showerhead with thermal control for delivering radical a...

Conformal deposition of silicon carbide films

Vacuum-integrated hardmask processes and apparatus

Integrated showerhead with thermal control for delivering radical a...

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Remote plasma based deposition of boron nitride, boron carbide, and...

Remote plasma based deposition of oxygen doped silicon carbide films

Vacuum-integrated hardmask processes and apparatus

Methods of encapsulation

Integrated showerhead with thermal control for delivering radical a...

Staircase encapsulation in 3D NAND fabrication

Methods of encapsulation

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Vacuum-integrated hardmask processes and apparatus

Method to obtain SiC class of films of desired composition and film...

Conformal deposition of silicon carbide films

Methods and apparatus for depositing silicon oxide on metal layers

Remote plasma based deposition of graded or multi-layered silicon c...

Remote plasma based deposition of SiOC class of films

Methods of encapsulation

UV and reducing treatment for K recovery and surface clean in semic...

Patents Applicationslast 30 patents

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

DEPOSITION AND TREATMENT OF NANO-GRAPHENE AT LOW TEMPERATURES

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

RADICAL-ACTIVATED CARBON FILM DEPOSITION

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

GRAPHENE-CAPPED COPPER IN DUAL DAMASCENE INTERCONNECT

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...

OXIDATION RESISTANT PROTECTIVE LAYER IN CHAMBER CONDITIONING

REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

SELECTIVE DEPOSITION USING GRAPHENE AS AN INHIBITOR

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

GRAPHENE INTEGRATION

SELECTIVE GRAPHENE DEPOSITION USING REMOTE PLASMA

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...

SixNy AS A NUCLEATION LAYER FOR SiCxOy

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...