Cheng-Hsiung Tsai

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition ring for physical vapor deposition chamber
- Patent number D1040304
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- David Gunther
- D15 - Machines not elsewhere specified
Information Patent Grant
High temperature detachable very high frequency (VHF) electrostatic...
- Patent number 12,014,906
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- William R. Johanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit having tall deposition ring for PVD chamber
- Patent number 11,961,723
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support for reduced damage substrate backside
- Patent number 11,955,362
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Joel M Huston
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for precleaning and treating wafer surfaces
- Patent number 11,939,666
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detachable biasable electrostatic chuck for high temperature applic...
- Patent number 11,887,878
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Shreesha Yogish Rao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactive cleaning of substrate support
- Patent number 11,772,137
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Xi Chen
- B08 - CLEANING
Information Patent Grant
Inline microwave batch degas chamber
- Patent number 11,629,409
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with edge seal
- Patent number 11,508,610
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Base plate for a processing chamber substrate support
- Patent number D960216
- Issue date Aug 9, 2022
- Applied Materials, Inc.
- Shreesha Yogish Rao
- D15 - Machines not elsewhere specified
Information Patent Grant
Base plate for a processing chamber substrate support
- Patent number D947914
- Issue date Apr 5, 2022
- Applied Materials, Inc.
- Shreesha Yogish Rao
- D15 - Machines not elsewhere specified
Information Patent Grant
Pre-clean chamber with integrated shutter garage
- Patent number 11,251,028
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Cheng-Hsiung Matt Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D942516
- Issue date Feb 1, 2022
- Applied Materials, Inc.
- Manjunatha P. Koppa
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate position calibration for substrate supports in substrate...
- Patent number 11,201,078
- Issue date Dec 14, 2021
- Applied Materials, Inc.
- Tomoharu Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition ring for a substrate processing chamber
- Patent number D933725
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Manjunatha P. Koppa
- D15 - Machines not elsewhere specified
Information Patent Grant
Two piece shutter disk assembly with self-centering feature
- Patent number 11,043,406
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition (PVD) electrostatic chuck with improved t...
- Patent number 11,031,273
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Bonnie T Chia
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
PVD buffer layers for LED fabrication
- Patent number 11,011,676
- Issue date May 18, 2021
- Applied Materials, Inc.
- Mingwei Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing a substrate using non-contact t...
- Patent number 10,950,475
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Vinodh Ramachandran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin assembly
- Patent number 10,892,180
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Bonnie T. Chia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for shutter disk assembly detection
- Patent number 10,851,453
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High conductance process kit
- Patent number 10,763,086
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Bonnie T. Chia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Base plate for a processing chamber substrate support
- Patent number D893441
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Shreesha Yogish Rao
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D891382
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Manjunatha P. Koppa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Apparatus to improve substrate temperature uniformity
- Patent number 10,711,348
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit design for in-chamber heater and wafer rotating mechanism
- Patent number 10,704,147
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition ring for physical vapor deposition chamber
- Patent number D888903
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- David Gunther
- D23 - Environmental heating and cooling
Information Patent Grant
Substrate support for plasma etch operations
- Patent number 10,593,521
- Issue date Mar 17, 2020
- Applied Materials, Inc.
- Larry Frazier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for reducing substrate sliding in process cham...
- Patent number 10,262,877
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with improved RF return
- Patent number 10,134,615
- Issue date Nov 20, 2018
- Applied Materials, Inc.
- Aravind Miyar Kamath
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Finger Electrostatic Chuck for High Resistance Substrate Chucking
- Publication number 20250015733
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Mukund SUNDARARAJAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrostatic Chuck
- Publication number 20240266200
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Sarath BABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
- Publication number 20240242947
- Publication date Jul 18, 2024
- Applied Materials, Inc.
- David GUNTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
- Publication number 20240183028
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Xiangjin XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process Chamber And Process Kits For Advanced Packaging
- Publication number 20230307211
- Publication date Sep 28, 2023
- Applied Materials, Inc.
- Aravind Miyar Kamath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POCKET HEATER WITH PURGE TO IMPROVE GAP TOLERANCE
- Publication number 20230265561
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE DETACHABLE VERY HIGH FREQUENCY (VHF) ELECTROSTATIC...
- Publication number 20230162954
- Publication date May 25, 2023
- William R. JOHANSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTIVE CLEANING OF SUBSTRATE SUPPORT
- Publication number 20230029265
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Xi Chen
- B08 - CLEANING
Information Patent Application
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...
- Publication number 20220099426
- Publication date Mar 31, 2022
- Tomoharu MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
- Publication number 20210371972
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Xiangjin XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE USING NON-CONTACT T...
- Publication number 20210057244
- Publication date Feb 25, 2021
- Applied Materials, Inc.
- VINODH RAMACHANDRAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETACHABLE BIASABLE ELECTROSTATIC CHUCK FOR HIGH TEMPERATURE APPLIC...
- Publication number 20200411354
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Shreesha Yogish RAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INLINE MICROWAVE BATCH DEGAS CHAMBER
- Publication number 20200378006
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- RIBHU GAUTAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for cleaning a substrate
- Publication number 20200230782
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Pulkit AGARWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
- Publication number 20200194243
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- DAVID GUNTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) ELECTROSTATIC CHUCK WITH IMPROVED...
- Publication number 20200185247
- Publication date Jun 11, 2020
- Applied Materials, Inc.
- BONNIE T CHIA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-CLEAN CHAMBER WITH INTEGRATED SHUTTER GARAGE
- Publication number 20190348264
- Publication date Nov 14, 2019
- Applied Materials, Inc.
- Cheng-Hsiung Matt Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO PIECE SHUTTER DISK ASSEMBLY WITH SELF-CENTERING FEATURE
- Publication number 20190326154
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- CHENG-HSIUNG TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH EDGE SEAL
- Publication number 20190326152
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- CHANG KE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SHUTTER DISK ASSEMBLY DETECTION
- Publication number 20190316251
- Publication date Oct 17, 2019
- CHENG-HSIUNG TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT FOR REDUCED DAMAGE SUBSTRATE BACKSIDE
- Publication number 20190080951
- Publication date Mar 14, 2019
- Joel M. HUSTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...
- Publication number 20180233396
- Publication date Aug 16, 2018
- TOMOHARU MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT DESIGN FOR IN-CHAMBER HEATER AND WAFER ROTATING MECHANISM
- Publication number 20180155838
- Publication date Jun 7, 2018
- Muhammad M. RASHEED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH CONDUCTANCE PROCESS KIT
- Publication number 20180130644
- Publication date May 10, 2018
- Applied Materials, Inc.
- Bonnie T. CHIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR REDUCING SUBSTRATE SLIDING IN PROCESS CHAM...
- Publication number 20170186631
- Publication date Jun 29, 2017
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for Cleaning a Substrate
- Publication number 20160322239
- Publication date Nov 3, 2016
- Applied Materials, Inc.
- Pulkit AGARWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD BUFFER LAYERS FOR LED FABRICATION
- Publication number 20160293798
- Publication date Oct 6, 2016
- Mingwei Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY
- Publication number 20160258061
- Publication date Sep 8, 2016
- Applied Materials, Inc.
- CHENG-HSIUNG TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH IMPROVED RF RETURN
- Publication number 20160240426
- Publication date Aug 18, 2016
- Applied Materials, Inc.
- ARAVIND MIYAR KAMATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE PROCESS KIT
- Publication number 20160189936
- Publication date Jun 30, 2016
- Applied Materials, Inc.
- Bonnie T. CHIA
- H01 - BASIC ELECTRIC ELEMENTS

Cheng-Hsiung Tsai

Person

Patents Grantslast 30 patents

Deposition ring for physical vapor deposition chamber

High temperature detachable very high frequency (VHF) electrostatic...

Process kit having tall deposition ring for PVD chamber

Substrate support for reduced damage substrate backside

Methods and apparatus for precleaning and treating wafer surfaces

Detachable biasable electrostatic chuck for high temperature applic...

Reactive cleaning of substrate support

Inline microwave batch degas chamber

Substrate support with edge seal

Base plate for a processing chamber substrate support

Base plate for a processing chamber substrate support

Pre-clean chamber with integrated shutter garage

Process shield for a substrate processing chamber

Substrate position calibration for substrate supports in substrate...

Deposition ring for a substrate processing chamber

Two piece shutter disk assembly with self-centering feature

Physical vapor deposition (PVD) electrostatic chuck with improved t...

PVD buffer layers for LED fabrication

Method and apparatus for processing a substrate using non-contact t...

Lift pin assembly

Methods and apparatus for shutter disk assembly detection

High conductance process kit

Base plate for a processing chamber substrate support

Process shield for a substrate processing chamber

Apparatus to improve substrate temperature uniformity

Process kit design for in-chamber heater and wafer rotating mechanism

Deposition ring for physical vapor deposition chamber

Substrate support for plasma etch operations

Apparatus and method for reducing substrate sliding in process cham...

Substrate support with improved RF return

Patents Applicationslast 30 patents

Finger Electrostatic Chuck for High Resistance Substrate Chucking

Electrostatic Chuck

PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER

METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES

Process Chamber And Process Kits For Advanced Packaging

POCKET HEATER WITH PURGE TO IMPROVE GAP TOLERANCE

HIGH TEMPERATURE DETACHABLE VERY HIGH FREQUENCY (VHF) ELECTROSTATIC...

REACTIVE CLEANING OF SUBSTRATE SUPPORT

SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...

METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE USING NON-CONTACT T...

DETACHABLE BIASABLE ELECTROSTATIC CHUCK FOR HIGH TEMPERATURE APPLIC...

INLINE MICROWAVE BATCH DEGAS CHAMBER

Method and Apparatus for cleaning a substrate

PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER

PHYSICAL VAPOR DEPOSITION (PVD) ELECTROSTATIC CHUCK WITH IMPROVED...

PRE-CLEAN CHAMBER WITH INTEGRATED SHUTTER GARAGE

TWO PIECE SHUTTER DISK ASSEMBLY WITH SELF-CENTERING FEATURE

SUBSTRATE SUPPORT WITH EDGE SEAL

METHODS AND APPARATUS FOR SHUTTER DISK ASSEMBLY DETECTION

SUBSTRATE SUPPORT FOR REDUCED DAMAGE SUBSTRATE BACKSIDE

SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...

PROCESS KIT DESIGN FOR IN-CHAMBER HEATER AND WAFER ROTATING MECHANISM

HIGH CONDUCTANCE PROCESS KIT

APPARATUS AND METHOD FOR REDUCING SUBSTRATE SLIDING IN PROCESS CHAM...

Methods and Apparatus for Cleaning a Substrate

PVD BUFFER LAYERS FOR LED FABRICATION

APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY

SUBSTRATE SUPPORT WITH IMPROVED RF RETURN

HIGH CONDUCTANCE PROCESS KIT