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Passivation against vapor deposition
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Patent number 11,739,422
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Issue date Aug 29, 2023
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ASM IP Holding B.V.
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Varun Sharma
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Selective PEALD of oxide on dielectric
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Patent number 11,728,164
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Issue date Aug 15, 2023
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ASM IP Holding B.V.
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Eva Tois
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Deposition of organic films
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Patent number 11,728,175
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Issue date Aug 15, 2023
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ASM IP Holding B.V.
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Eva E. Tois
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Process for passivating dielectric films
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Patent number 11,549,177
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Issue date Jan 10, 2023
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ASM INTERNATIONAL, N.V.
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Tom E. Blomberg
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dual selective deposition
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Patent number 11,525,184
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Issue date Dec 13, 2022
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ASM IP Holding B.V.
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Suvi P. Haukka
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Deposition of oxide thin films
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Patent number 11,430,656
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Issue date Aug 30, 2022
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ASM IP Holding B.V.
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Suvi P. Haukka
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatuses for thin film deposition
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Patent number 11,421,321
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Issue date Aug 23, 2022
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ASM IP Holding B.V.
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Jun Kawahara
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Passivation against vapor deposition
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Patent number 11,396,701
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Issue date Jul 26, 2022
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ASM IP Holding B.V.
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Varun Sharma
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Deposition of organic films
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Patent number 11,387,107
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Issue date Jul 12, 2022
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ASM IP Holding B.V.
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Eva E. Tois
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Selective PEALD of oxide on dielectric
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Patent number 11,170,993
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Issue date Nov 9, 2021
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ASM IP Holding B.V.
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Eva Tois
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dual selective deposition
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Patent number 11,047,040
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Issue date Jun 29, 2021
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ASM IP Holding B.V.
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Suvi P. Haukka
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Enhanced thin film deposition
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Patent number 10,964,534
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Issue date Mar 30, 2021
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ASM International
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Antti Rahtu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Deposition of organic films
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Patent number 10,923,361
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Issue date Feb 16, 2021
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ASM IP Holding B.V.
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Eva E. Tois
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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