Frank Greer

Person

Pasadena, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Composite substrate for fabricating III-V photodetector arrays
- Patent number 12,119,367
- Issue date Oct 15, 2024
- University of Southern California
- Rehan Rashid Kapadia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomically precise surface engineering for producing imagers
- Patent number 10,541,266
- Issue date Jan 21, 2020
- California Institute of Technology
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro-emitters for electrospray systems
- Patent number 10,384,810
- Issue date Aug 20, 2019
- California Institute of Technology
- Cecile Jung-Kubiak
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Grant
Low temperature deposition of low loss dielectric layers in superco...
- Patent number 9,455,393
- Issue date Sep 27, 2016
- Intermolecular, Inc.
- Ashish Bodke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma cleaning of superconducting layers
- Patent number 9,425,376
- Issue date Aug 23, 2016
- Intermolecular, Inc.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for stripping photoresist and/or cleaning metal regions
- Patent number 9,373,497
- Issue date Jun 21, 2016
- Novellus Systems, Inc.
- David Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Superconducting junctions
- Patent number 9,324,767
- Issue date Apr 26, 2016
- Intermolecular, Inc.
- Andrew Steinbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of native oxides by annealing in reducing gas or plasma
- Patent number 9,312,137
- Issue date Apr 12, 2016
- Intermolecular, Inc.
- Frank Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of metal-oxide tunnel barriers using optimi...
- Patent number 9,281,463
- Issue date Mar 8, 2016
- Intermolecular, Inc.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming high-k dielectrics containing hafnium and zirco...
- Patent number 9,245,743
- Issue date Jan 26, 2016
- Intermolecular, Inc.
- Khaled Ahmed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment of low-K surface to improve barrier deposition
- Patent number 9,245,793
- Issue date Jan 26, 2016
- Intermolecular, Inc.
- Ratsamee Limdulpaiboon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma densification of dielectrics for improved dielectric loss ta...
- Patent number 9,224,783
- Issue date Dec 29, 2015
- Intermolecular, Inc.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface preparation with remote plasma
- Patent number 9,224,594
- Issue date Dec 29, 2015
- Intermolecular, Inc.
- Kevin Kashefi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomically precise surface engineering for producing imagers
- Patent number 9,165,971
- Issue date Oct 20, 2015
- California Institute of Technology
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition of high performance anti reflection coating...
- Patent number 9,123,622
- Issue date Sep 1, 2015
- California Institute of Technology
- Michael E. Hoenk
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Multipurpose combinatorial vapor phase deposition chamber
- Patent number 9,087,864
- Issue date Jul 21, 2015
- Intermolecular, Inc.
- Chen-An Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Catalytic growth of Josephson junction tunnel barrier
- Patent number 9,082,927
- Issue date Jul 14, 2015
- Intermolecular, Inc.
- Dipankar Pramanik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gate stacks and ohmic contacts for SiC devices
- Patent number 9,076,651
- Issue date Jul 7, 2015
- Intermolecular, Inc.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate stacks including TaXSiYO for MOSFETS
- Patent number 8,975,706
- Issue date Mar 10, 2015
- Intermolecular, Inc.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combinatorially variable etching of stacks including two dissimilar...
- Patent number 8,906,709
- Issue date Dec 9, 2014
- Intermolecular, Inc.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving film non-uniformity and throughput
- Patent number 8,906,791
- Issue date Dec 9, 2014
- Novellus Systems, Inc.
- Kie-Jin Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nucleation interface for high-k layer on germanium
- Patent number 8,901,677
- Issue date Dec 2, 2014
- Intermolecular, Inc.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Delta-doping at wafer level for high throughput, high yield fabrica...
- Patent number 8,828,852
- Issue date Sep 9, 2014
- California Institute of Technology
- Michael E. Hoenk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to fabricate and improve stand-alone and integrated filters
- Patent number 8,697,474
- Issue date Apr 15, 2014
- California Institute of Technology
- Frank Greer
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Atomic layer deposition of chemical passivation layers and high per...
- Patent number 8,680,637
- Issue date Mar 25, 2014
- California Institute of Technology
- Michael E. Hoenk
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Methods for stripping photoresist and/or cleaning metal regions
- Patent number 8,435,895
- Issue date May 7, 2013
- Novellus Systems, Inc.
- David Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing plasma stabilization time in a cyclic deposition...
- Patent number 8,053,372
- Issue date Nov 8, 2011
- Novellus Systems, Inc.
- Frank Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of increasing the reactivity of a precursor in a cyclic depo...
- Patent number 7,871,678
- Issue date Jan 18, 2011
- Novellus Systems, Inc.
- Frank Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for engineering an interface between a diffus...
- Patent number 7,855,147
- Issue date Dec 21, 2010
- Novellus Systems, Inc.
- Alexander Dulkin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITE SUBSTRATE FOR FABRICATING III-V PHOTODETECTOR ARRAYS
- Publication number 20220028907
- Publication date Jan 27, 2022
- University of Southern California
- Rehan Rashid KAPADIA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO-EMITTERS FOR ELECTROSPRAY SYSTEMS
- Publication number 20180201395
- Publication date Jul 19, 2018
- California Institute of Technology
- Cecile Jung-Kubiak
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Application
Low Temperature Deposition of Silicon Containing Layers in Supercon...
- Publication number 20170186935
- Publication date Jun 29, 2017
- Intermolecular, Inc.
- Joseph Anthony Bonetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluorine Containing Low Loss Dielectric Layers for Superconducting...
- Publication number 20160133819
- Publication date May 12, 2016
- Intermolecular, Inc.
- Frank Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Reducing Interface Contact Resistivity
- Publication number 20160093772
- Publication date Mar 31, 2016
- Intermolecular, Inc.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMICALLY PRECISE SURFACE ENGINEERING FOR PRODUCING IMAGERS
- Publication number 20160005786
- Publication date Jan 7, 2016
- California Institute of Technology
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Annealed dielectrics and heat-tolerant conductors for superconduct...
- Publication number 20150179914
- Publication date Jun 25, 2015
- INTERMOLECULAR INC.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluorine Passivation During Deposition of Dielectrics for Supercond...
- Publication number 20150179915
- Publication date Jun 25, 2015
- Intermolecular, Inc.
- Frank Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GATE STACKS AND OHMIC CONTACTS FOR SIC DEVICES
- Publication number 20150179438
- Publication date Jun 25, 2015
- Intermolecular, Inc.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma cleaning of superconducting layers
- Publication number 20150179918
- Publication date Jun 25, 2015
- INTERMOLECULAR INC.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Rapid Generation of ALD Saturation Curves Using Segment...
- Publication number 20150176124
- Publication date Jun 25, 2015
- Intermolecular, Inc.
- Frank Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Catalytic Growth of Josephson Junction Tunnel Barrier
- Publication number 20150179916
- Publication date Jun 25, 2015
- Intermolecular, Inc.
- Dipankar Pramanik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition of metal-oxide tunnel barriers using optim...
- Publication number 20150179917
- Publication date Jun 25, 2015
- INTERMOLECULAR INC.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multipurpose Combinatorial Vapor Phase Deposition Chamber
- Publication number 20150179487
- Publication date Jun 25, 2015
- Intermolecular, Inc.
- Chen-An Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Treatment of Low-K Surface to Improve Barrier Deposition
- Publication number 20150179509
- Publication date Jun 25, 2015
- Intermolecular, Inc.
- Ratsamee Limdulpaiboon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma densification of dielectrics for improved dielectric loss t...
- Publication number 20150179436
- Publication date Jun 25, 2015
- INTERMOLECULAR INC.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tantalum-Based Copper Barriers and Methods for Forming the Same
- Publication number 20150179508
- Publication date Jun 25, 2015
- INTERMOLECULAR INC.
- Edwin Adhiprakasha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
al2o3 surface nucleation preparation with remote oxygen plasma
- Publication number 20150140834
- Publication date May 21, 2015
- INTERMOLECULAR INC.
- Kevin Kashefi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Forming Reliable Gate Stack on Semiconductors
- Publication number 20150132938
- Publication date May 14, 2015
- Intermolecular, Inc.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduction of native oxides by annealing in reducing gas or plasma
- Publication number 20150118828
- Publication date Apr 30, 2015
- INTERMOLECULAR INC.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV treatment for ALD film densification
- Publication number 20150064361
- Publication date Mar 5, 2015
- INTERMOLECULAR INC.
- Frank Greer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Gate Stacks Including TaXSiYO for MOSFETS
- Publication number 20150041912
- Publication date Feb 12, 2015
- Intermolecular, Inc.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doped High-k Dielectrics and Methods for Forming the Same
- Publication number 20150035085
- Publication date Feb 5, 2015
- INTERMOLECULAR INC.
- Khaled Ahmed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nucleation Interface for High-K Layer on Germanium
- Publication number 20140252565
- Publication date Sep 11, 2014
- Intermolecular, Inc.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF HIGH PERFORMANCE ANTI REFLECTION COATING...
- Publication number 20140167198
- Publication date Jun 19, 2014
- Michael E. Hoenk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR STRIPPING PHOTORESIST AND/OR CLEANING METAL REGIONS
- Publication number 20130157465
- Publication date Jun 20, 2013
- David Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMICALLY PRECISE SURFACE ENGINEERING FOR PRODUCING IMAGERS
- Publication number 20120168891
- Publication date Jul 5, 2012
- California Institute of Technology
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF CHEMICAL PASSIVATION LAYERS AND HIGH PER...
- Publication number 20110316110
- Publication date Dec 29, 2011
- California Institute of Technology
- Michael E. Hoenk
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF IMPROVING FILM NON-UNIFORMITY AND THROUGHPUT
- Publication number 20110300716
- Publication date Dec 8, 2011
- Kie-Jin PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REAL TIME MONITORING OF INDIUM BUMP REFLOW AND OXIDE REMOVAL ENABLI...
- Publication number 20110169160
- Publication date Jul 14, 2011
- California Institute of Technology
- Frank Greer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Frank Greer

Person

Patents Grantslast 30 patents

Composite substrate for fabricating III-V photodetector arrays

Atomically precise surface engineering for producing imagers

Micro-emitters for electrospray systems

Low temperature deposition of low loss dielectric layers in superco...

Plasma cleaning of superconducting layers

Methods for stripping photoresist and/or cleaning metal regions

Superconducting junctions

Reduction of native oxides by annealing in reducing gas or plasma

Atomic layer deposition of metal-oxide tunnel barriers using optimi...

Methods for forming high-k dielectrics containing hafnium and zirco...

Plasma treatment of low-K surface to improve barrier deposition

Plasma densification of dielectrics for improved dielectric loss ta...

Surface preparation with remote plasma

Atomically precise surface engineering for producing imagers

Atomic layer deposition of high performance anti reflection coating...

Multipurpose combinatorial vapor phase deposition chamber

Catalytic growth of Josephson junction tunnel barrier

Gate stacks and ohmic contacts for SiC devices

Gate stacks including TaXSiYO for MOSFETS

Combinatorially variable etching of stacks including two dissimilar...

Method of improving film non-uniformity and throughput

Nucleation interface for high-k layer on germanium

Delta-doping at wafer level for high throughput, high yield fabrica...

Methods to fabricate and improve stand-alone and integrated filters

Atomic layer deposition of chemical passivation layers and high per...

Methods for stripping photoresist and/or cleaning metal regions

Method of reducing plasma stabilization time in a cyclic deposition...

Method of increasing the reactivity of a precursor in a cyclic depo...

Methods and apparatus for engineering an interface between a diffus...

Patents Applicationslast 30 patents

COMPOSITE SUBSTRATE FOR FABRICATING III-V PHOTODETECTOR ARRAYS

MICRO-EMITTERS FOR ELECTROSPRAY SYSTEMS

Low Temperature Deposition of Silicon Containing Layers in Supercon...

Fluorine Containing Low Loss Dielectric Layers for Superconducting...

Methods for Reducing Interface Contact Resistivity

ATOMICALLY PRECISE SURFACE ENGINEERING FOR PRODUCING IMAGERS

Annealed dielectrics and heat-tolerant conductors for superconduct...

Fluorine Passivation During Deposition of Dielectrics for Supercond...

GATE STACKS AND OHMIC CONTACTS FOR SIC DEVICES

Plasma cleaning of superconducting layers

Methods for Rapid Generation of ALD Saturation Curves Using Segment...

Catalytic Growth of Josephson Junction Tunnel Barrier

Atomic layer deposition of metal-oxide tunnel barriers using optim...

Multipurpose Combinatorial Vapor Phase Deposition Chamber

Plasma Treatment of Low-K Surface to Improve Barrier Deposition

Plasma densification of dielectrics for improved dielectric loss t...

Tantalum-Based Copper Barriers and Methods for Forming the Same

al2o3 surface nucleation preparation with remote oxygen plasma

Methods and Systems for Forming Reliable Gate Stack on Semiconductors

Reduction of native oxides by annealing in reducing gas or plasma

UV treatment for ALD film densification

Gate Stacks Including TaXSiYO for MOSFETS

Doped High-k Dielectrics and Methods for Forming the Same

Nucleation Interface for High-K Layer on Germanium

ATOMIC LAYER DEPOSITION OF HIGH PERFORMANCE ANTI REFLECTION COATING...

METHODS FOR STRIPPING PHOTORESIST AND/OR CLEANING METAL REGIONS

ATOMICALLY PRECISE SURFACE ENGINEERING FOR PRODUCING IMAGERS

ATOMIC LAYER DEPOSITION OF CHEMICAL PASSIVATION LAYERS AND HIGH PER...

METHOD OF IMPROVING FILM NON-UNIFORMITY AND THROUGHPUT

REAL TIME MONITORING OF INDIUM BUMP REFLOW AND OXIDE REMOVAL ENABLI...