Ilya Lavitsky

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Self-retained low friction pad
- Patent number D1037954
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Ilya Lavitsky
- D12 - Transportation
Information Patent Grant
Cleaning of SIN with CCP plasma or RPS clean
- Patent number 12,027,354
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator ring clamp and physical vapor deposition chamber incorpora...
- Patent number 11,670,493
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD target having self-retained low friction pads
- Patent number 11,618,943
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter target for a physical vapor deposition chamber
- Patent number D970566
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Martin Riker
- D15 - Machines not elsewhere specified
Information Patent Grant
Heated shield for physical vapor deposition chamber
- Patent number 11,339,466
- Issue date May 24, 2022
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D941372
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Ilya Lavitsky
- D15 - Machines not elsewhere specified
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D941371
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Ilya Lavitsky
- D15 - Machines not elsewhere specified
Information Patent Grant
Sputter target for a physical vapor deposition chamber
- Patent number D937329
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Martin Riker
- D15 - Machines not elsewhere specified
Information Patent Grant
Deposition ring for a substrate processing chamber
- Patent number D934315
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Ilya Lavitsky
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate processing chamber having improved process volume sealing
- Patent number 10,998,172
- Issue date May 4, 2021
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for PVD dielectric deposition
- Patent number 9,928,997
- Issue date Mar 27, 2018
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shutter blade and robot blade with CTE compensation
- Patent number 9,564,348
- Issue date Feb 7, 2017
- Applied Materials, Inc.
- Ilya Lavitsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring lip
- Patent number 8,865,602
- Issue date Oct 21, 2014
- Applied Materials, Inc.
- Joseph M. Ranish
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Support ring assembly
- Patent number 7,670,436
- Issue date Mar 2, 2010
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shields usable with an inductively coupled plasma reactor
- Patent number 7,569,125
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Motorized chamber lid
- Patent number 7,371,285
- Issue date May 13, 2008
- Applied Materials, Inc.
- Michael Rosenstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sidewall magnet improving uniformity of inductively coupled plasma...
- Patent number 7,041,201
- Issue date May 9, 2006
- Applied Materials, Inc.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Motorized chamber lid
- Patent number 6,776,848
- Issue date Aug 17, 2004
- Applied Materials, Inc.
- Michael Rosenstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Unitary removable shield assembly
- Patent number 6,730,174
- Issue date May 4, 2004
- Applied Materials, Inc.
- Alan B. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleanroom lift having an articulated arm
- Patent number 6,688,838
- Issue date Feb 10, 2004
- Applied Materials, Inc.
- Ilya Lavitsky
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415636
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415637
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR RING CLAMP AND PHYSICAL VAPOR DEPOSITION CHAMBER INCORPORA...
- Publication number 20220154329
- Publication date May 19, 2022
- Applied Materials, Inc.
- Ilya LAVITSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET HAVING SELF-RETAINED LOW FRICTION PADS
- Publication number 20220127714
- Publication date Apr 28, 2022
- Ilya LAVITSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20210292888
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT SYSTEM
- Publication number 20210043432
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- John MAZZOCCO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELD KIT FOR PROCESS CHAMBER
- Publication number 20200321202
- Publication date Oct 8, 2020
- Applied Materials, Inc.
- William R. JOHANSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT PEDESTAL
- Publication number 20200312683
- Publication date Oct 1, 2020
- Applied Materials, Inc.
- Ilya LAVITSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR LINEAR SCAN PHYSICAL VAPOR DEPOSITION WIT...
- Publication number 20200013592
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- John Joseph Mazzocco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING IMPROVED PROCESS VOLUME SEALING
- Publication number 20190096638
- Publication date Mar 28, 2019
- Applied Materials, Inc.
- ILYA LAVITSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PVD DIELECTRIC DEPOSITION
- Publication number 20160172168
- Publication date Jun 16, 2016
- Applied Materials, Inc.
- Keith A. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUTTER BLADE AND ROBOT BLADE WITH CTE COMPENSATION
- Publication number 20140271081
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Ilya LAVITSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION CHAMBER HAVING AN ADJUSTABLE TARGET
- Publication number 20080116067
- Publication date May 22, 2008
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Flexible magnetron including partial rolling support and centering...
- Publication number 20070151841
- Publication date Jul 5, 2007
- Applied Materials, Inc.
- Makoto Inagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Physical vapor deposition chamber having an adjustable target
- Publication number 20060096851
- Publication date May 11, 2006
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Physical vapor deposition chamber having a rotatable substrate pede...
- Publication number 20060096857
- Publication date May 11, 2006
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Support ring assembly
- Publication number 20060090706
- Publication date May 4, 2006
- APPLIED MATERIALS, INC.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shields usable with an inductively coupled plasma reactor
- Publication number 20050199491
- Publication date Sep 15, 2005
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Motorized chamber lid
- Publication number 20040173162
- Publication date Sep 9, 2004
- APPLIED MATERIALS, INC.
- Michael Rosenstein
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Application
Sidewall magnet improving uniformity of inductively coupled plasma...
- Publication number 20040055880
- Publication date Mar 25, 2004
- APPLIED MATERIALS, INC.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Unitary removable shield assembly
- Publication number 20030168168
- Publication date Sep 11, 2003
- APPLIED MATERIALS, INC.
- Alan B. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleanroom lift having an articulated arm
- Publication number 20030165378
- Publication date Sep 4, 2003
- APPLIED MATERIALS, INC.
- Ilya Lavitsky
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Motorized chamber lid
- Publication number 20030131794
- Publication date Jul 17, 2003
- APPLIED MATERIALS, INC.
- Michael Rosenstein
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES

Ilya Lavitsky

Person

Patents Grantslast 30 patents

Self-retained low friction pad

Cleaning of SIN with CCP plasma or RPS clean

Cleaning of sin with CCP plasma or RPS clean

Isolator ring clamp and physical vapor deposition chamber incorpora...

PVD target having self-retained low friction pads

Sputter target for a physical vapor deposition chamber

Heated shield for physical vapor deposition chamber

Process shield for a substrate processing chamber

Process shield for a substrate processing chamber

Sputter target for a physical vapor deposition chamber

Deposition ring for a substrate processing chamber

Substrate processing chamber having improved process volume sealing

Apparatus for PVD dielectric deposition

Shutter blade and robot blade with CTE compensation

Edge ring lip

Support ring assembly

Shields usable with an inductively coupled plasma reactor

Motorized chamber lid

Sidewall magnet improving uniformity of inductively coupled plasma...

Motorized chamber lid

Unitary removable shield assembly

Cleanroom lift having an articulated arm

Patents Applicationslast 30 patents

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

ISOLATOR RING CLAMP AND PHYSICAL VAPOR DEPOSITION CHAMBER INCORPORA...

PVD TARGET HAVING SELF-RETAINED LOW FRICTION PADS

HEATED SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER

SUBSTRATE SUPPORT SYSTEM

SHIELD KIT FOR PROCESS CHAMBER

SUBSTRATE SUPPORT PEDESTAL

METHODS AND APPARATUS FOR LINEAR SCAN PHYSICAL VAPOR DEPOSITION WIT...

SUBSTRATE PROCESSING CHAMBER HAVING IMPROVED PROCESS VOLUME SEALING

APPARATUS FOR PVD DIELECTRIC DEPOSITION

SHUTTER BLADE AND ROBOT BLADE WITH CTE COMPENSATION

PHYSICAL VAPOR DEPOSITION CHAMBER HAVING AN ADJUSTABLE TARGET

Flexible magnetron including partial rolling support and centering...

Physical vapor deposition chamber having an adjustable target

Physical vapor deposition chamber having a rotatable substrate pede...

Support ring assembly

Shields usable with an inductively coupled plasma reactor

Motorized chamber lid

Sidewall magnet improving uniformity of inductively coupled plasma...

Unitary removable shield assembly

Cleanroom lift having an articulated arm

Motorized chamber lid