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Juwen Gao

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  • Fremont, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    GRADIENT LINER IN METAL FILL
    • Publication number 20250022751
    • Publication date Jan 16, 2025
    • LAM RESEARCH CORPORATION
    • Sang-Hyeob LEE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTI-LAYER FEATURE FILL
    • Publication number 20240282580
    • Publication date Aug 22, 2024
    • LAM RESEARCH CORPORATION
    • Xiaolan BA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION ON 3D NAND STRUCTURES
    • Publication number 20240266177
    • Publication date Aug 8, 2024
    • LAM RESEARCH CORPORATION
    • Ruopeng Deng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LOW RESISTANCE PULSED CVD TUNGSTEN
    • Publication number 20240006180
    • Publication date Jan 4, 2024
    • LAM RESEARCH CORPORATION
    • Yu PAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOW RESISTANCE GATE OXIDE METALLIZATION LINER
    • Publication number 20230290639
    • Publication date Sep 14, 2023
    • LAM RESEARCH CORPORATION
    • Lawrence Schloss
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20230041794
    • Publication date Feb 9, 2023
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RAPID FLUSH PURGING DURING ATOMIC LAYER DEPOSITION
    • Publication number 20220186370
    • Publication date Jun 16, 2022
    • LAM RESEARCH CORPORATION
    • Pragna Nannapaneni
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20220102208
    • Publication date Mar 31, 2022
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION ON 3D NAND STRUCTURES
    • Publication number 20210335617
    • Publication date Oct 28, 2021
    • LAM RESEARCH CORPORATION
    • Ruopeng Deng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20210327754
    • Publication date Oct 21, 2021
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTI-LAYER FEATURE FILL
    • Publication number 20210313183
    • Publication date Oct 7, 2021
    • LAM RESEARCH CORPORATION
    • Xiaolan Ba
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METAL-CONTAINING PASSIVATION FOR HIGH ASPECT RATIO ETCH
    • Publication number 20210242032
    • Publication date Aug 5, 2021
    • LAM RESEARCH CORPORATION
    • Karthik S. COLINJIVADI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METAL FILL PROCESS FOR THREE-DIMENSIONAL VERTICAL NAND WORDLINE
    • Publication number 20200211853
    • Publication date Jul 2, 2020
    • LAM RESEARCH CORPORATION
    • Lawrence Schloss
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20200185273
    • Publication date Jun 11, 2020
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20190206731
    • Publication date Jul 4, 2019
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20190019725
    • Publication date Jan 17, 2019
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20180277431
    • Publication date Sep 27, 2018
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FOR WORDLINE APPLICATIONS
    • Publication number 20180219014
    • Publication date Aug 2, 2018
    • LAM RESEARCH CORPORATION
    • Michal Danek
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20170278749
    • Publication date Sep 28, 2017
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FOR WORDLINE APPLICATIONS
    • Publication number 20160233220
    • Publication date Aug 11, 2016
    • LAM RESEARCH CORPORATION
    • Michal Danek
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20160190008
    • Publication date Jun 30, 2016
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20160093528
    • Publication date Mar 31, 2016
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20160071764
    • Publication date Mar 10, 2016
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS OF PREPARING TUNGSTEN AND TUNGSTEN NITRIDE THIN FILMS USING...
    • Publication number 20150325475
    • Publication date Nov 12, 2015
    • LAM RESEARCH CORPORATION
    • Hanna Bamnolker
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20150056803
    • Publication date Feb 26, 2015
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS AND APPARATUSES FOR ATOMIC LAYER CLEANING OF CONTACTS AND VIAS
    • Publication number 20150037972
    • Publication date Feb 5, 2015
    • LAM RESEARCH CORPORATION
    • Michal Danek
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TERNARY TUNGSTEN BORIDE NITRIDE FILMS AND METHODS FOR FORMING SAME
    • Publication number 20140027664
    • Publication date Jan 30, 2014
    • Wei Lei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF IMPROVING TUNGSTEN CONTACT RESISTANCE IN SMALL CRITICAL...
    • Publication number 20140030889
    • Publication date Jan 30, 2014
    • Feng Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF FORMING TENSILE TUNGSTEN FILMS AND COMPRESSIVE TUNGSTEN...
    • Publication number 20140011358
    • Publication date Jan 9, 2014
    • Feng Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20130302980
    • Publication date Nov 14, 2013
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...