Katrina Mikhaylichenko

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-stage substrate cleaning method and apparatus
- Patent number 8,757,177
- Issue date Jun 24, 2014
- Lam Research Corporation
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Grant
Material for cleaning a substrate
- Patent number 8,716,210
- Issue date May 6, 2014
- Lam Research Corporation
- Erik M. Freer
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for surface treatment of semiconductor substra...
- Patent number 8,652,266
- Issue date Feb 18, 2014
- Lam Research Corporation
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing pattern collapse in high aspect ratio nanostruct...
- Patent number 8,617,993
- Issue date Dec 31, 2013
- Lam Research Corporation
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing contamination from a substrate and for making a...
- Patent number 8,608,859
- Issue date Dec 17, 2013
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for cleaning contaminants from substrate
- Patent number 8,590,550
- Issue date Nov 26, 2013
- Lam Research Corporation
- Mikhail Korolik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for cleaning a semiconductor substrate
- Patent number 8,591,662
- Issue date Nov 26, 2013
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for removing contamination from substrate
- Patent number 8,555,903
- Issue date Oct 15, 2013
- Lam Research Corporation
- Erik M. Freer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning a semiconductor substrate
- Patent number 8,522,801
- Issue date Sep 3, 2013
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and system for cleaning a substrate
- Patent number 8,522,799
- Issue date Sep 3, 2013
- Lam Research Corporation
- Erik M. Freer
- B08 - CLEANING
Information Patent Grant
Method and apparatus for particle removal
- Patent number 8,480,810
- Issue date Jul 9, 2013
- Lam Research Corporation
- Erik M. Freer
- B08 - CLEANING
Information Patent Grant
Substrate preparation using stabilized fluid solutions and methods...
- Patent number 8,475,599
- Issue date Jul 2, 2013
- Lam Research Corporation
- Erik M. Freer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for pattern collapse free wet processing of se...
- Patent number 8,440,573
- Issue date May 14, 2013
- Lam Research Corporation
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Damage free, high-efficiency, particle removal cleaner comprising p...
- Patent number 8,367,594
- Issue date Feb 5, 2013
- Lam Research Corporation
- Katrina Mikhaylichenko
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for silicon oxide residue removal
- Patent number 8,324,114
- Issue date Dec 4, 2012
- Lam Research Corporation
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-stage substrate cleaning method and apparatus
- Patent number 8,317,934
- Issue date Nov 27, 2012
- Lam Research Corporation
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning a semiconductor substrate
- Patent number 8,316,866
- Issue date Nov 27, 2012
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two-phase substrate cleaning material
- Patent number 8,242,067
- Issue date Aug 14, 2012
- Lam Research Corporation
- Mikhail Korolik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning compound and method and system for using the cleaning comp...
- Patent number 8,137,474
- Issue date Mar 20, 2012
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Proximity head heating method and apparatus
- Patent number 8,102,014
- Issue date Jan 24, 2012
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Proximity head heating method and apparatus
- Patent number 8,062,471
- Issue date Nov 22, 2011
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Substrate proximity drying using in-situ local heating of substrate
- Patent number 8,011,116
- Issue date Sep 6, 2011
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Methods for contained chemical surface treatment
- Patent number 7,897,213
- Issue date Mar 1, 2011
- Lam Research Corporation
- Katrina Mikhaylichenko
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and material for cleaning a substrate
- Patent number 7,862,662
- Issue date Jan 4, 2011
- Lam Research Corporation
- Erik M. Freer
- B08 - CLEANING
Information Patent Grant
Substrate proximity drying using in-situ local heating of substrate...
- Patent number 7,806,126
- Issue date Oct 5, 2010
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Method and system for using a two-phases substrate cleaning compound
- Patent number 7,799,141
- Issue date Sep 21, 2010
- Lam Research Corporation
- Mikhail Korolik
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
System and method for a combined contact and non-contact wafer clea...
- Patent number 7,743,449
- Issue date Jun 29, 2010
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Method for removing contamination from a substrate and for making a...
- Patent number 7,737,097
- Issue date Jun 15, 2010
- Lam Research Corporation
- Erik M. Freer
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Cleaning compound and method and system for using the cleaning comp...
- Patent number 7,696,141
- Issue date Apr 13, 2010
- Lam Research Corporation
- Erik M. Freer
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for removing contamination from substrate
- Patent number 7,648,584
- Issue date Jan 19, 2010
- Lam Research Corporation
- Erik M. Freer
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
Method and Systems for Cleaning A Substrate
- Publication number 20150040947
- Publication date Feb 12, 2015
- LAM RESEARCH CORPORATION
- Erik M. Freer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Cleaning A Semiconductor Substrate
- Publication number 20150040941
- Publication date Feb 12, 2015
- LAM RESEARCH CORPORATION
- Erik M. Freer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems for Surface Treatment of Semiconductor Substrates using Seq...
- Publication number 20140116476
- Publication date May 1, 2014
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Cleaning a Semiconductor Substrate
- Publication number 20140059789
- Publication date Mar 6, 2014
- LAM RESEARCH CORPORATION
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Cleaning System Using Stabilized Fluid Solutions
- Publication number 20130284217
- Publication date Oct 31, 2013
- Erik M. Freer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MULTI-STAGE SUBSTRATE CLEANING METHOD AND APPARATUS
- Publication number 20130068261
- Publication date Mar 21, 2013
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Application
Apparatus for Cleaning a Semiconductor Substrate
- Publication number 20130048021
- Publication date Feb 28, 2013
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method for Reducing Substrate Pattern Collapse During...
- Publication number 20120260517
- Publication date Oct 18, 2012
- LAM RESEARCH CORPORATION
- Eric Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SILICON OXIDE RESIDUE REMOVAL
- Publication number 20110294299
- Publication date Dec 1, 2011
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REDUCING PATTERN COLLAPSE IN HIGH ASPECT RATIO NANOSTRUC...
- Publication number 20110189858
- Publication date Aug 4, 2011
- LAM RESEARCH CORPORATION
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SE...
- Publication number 20110183522
- Publication date Jul 28, 2011
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF PREVENTING PATTERN COLLAPSE USING LOW SURFACE...
- Publication number 20110139183
- Publication date Jun 16, 2011
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL FOR CLEANING A SUBSTRATE
- Publication number 20110065621
- Publication date Mar 17, 2011
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
Apparatus for Contained Chemical Surface Treatment
- Publication number 20110061687
- Publication date Mar 17, 2011
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Proximity Head Heating Method and Apparatus
- Publication number 20110008916
- Publication date Jan 13, 2011
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Application
Damage-Free High Efficiency Particle Removal Clean
- Publication number 20100331226
- Publication date Dec 30, 2010
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Two-Phase Substrate Cleaning Material
- Publication number 20100317556
- Publication date Dec 16, 2010
- LAM RESEARCH CORPORATION
- Mikhail Korolik
- B08 - CLEANING
Information Patent Application
Apparatus for Cleaning Contaminants from Substrate
- Publication number 20100313918
- Publication date Dec 16, 2010
- LAM RESEARCH CORPORATION
- Mikhail Korolik
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROXIMITY DRYING USING IN-SITU LOCAL HEATING OF SUBSTRATE
- Publication number 20100313443
- Publication date Dec 16, 2010
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Application
Multi-Stage Substrate Cleaning Method and Apparatus
- Publication number 20100288311
- Publication date Nov 18, 2010
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Application
Method for Removing Contamination from a Substrate and for Making a...
- Publication number 20100206340
- Publication date Aug 19, 2010
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
Cleaning Compound and Method and System for Using the Cleaning Comp...
- Publication number 20100139694
- Publication date Jun 10, 2010
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
Method and Apparatus for Removing Contamination from Substrate
- Publication number 20100059088
- Publication date Mar 11, 2010
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR SURFACE TREATMENT OF SEMICONDUCTOR SUBSTRA...
- Publication number 20100018553
- Publication date Jan 28, 2010
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND MATERIAL FOR CLEANING A SUBSTRATE
- Publication number 20090308410
- Publication date Dec 17, 2009
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
APPARATUS AND SYSTEM FOR CLEANING A SUBSTRATE
- Publication number 20090308413
- Publication date Dec 17, 2009
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
System and method for contained chemical surface treatment
- Publication number 20090114249
- Publication date May 7, 2009
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Chemical resistant semiconductor processing chamber bodies
- Publication number 20080038448
- Publication date Feb 14, 2008
- Lam Research Corp.
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for particle removal
- Publication number 20070151583
- Publication date Jul 5, 2007
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
Substrate preparation using stabilized fluid solutions and methods...
- Publication number 20070155640
- Publication date Jul 5, 2007
- LAM RESEARCH CORPORATION
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Katrina Mikhaylichenko

Person

Patents Grantslast 30 patents

Multi-stage substrate cleaning method and apparatus

Material for cleaning a substrate

Method and apparatus for surface treatment of semiconductor substra...

Method of reducing pattern collapse in high aspect ratio nanostruct...

Method for removing contamination from a substrate and for making a...

Apparatus for cleaning contaminants from substrate

Methods for cleaning a semiconductor substrate

Method and apparatus for removing contamination from substrate

Method and apparatus for cleaning a semiconductor substrate

Apparatus and system for cleaning a substrate

Method and apparatus for particle removal

Substrate preparation using stabilized fluid solutions and methods...

Method and apparatus for pattern collapse free wet processing of se...

Damage free, high-efficiency, particle removal cleaner comprising p...

Method and apparatus for silicon oxide residue removal

Multi-stage substrate cleaning method and apparatus

Method and apparatus for cleaning a semiconductor substrate

Two-phase substrate cleaning material

Cleaning compound and method and system for using the cleaning comp...

Proximity head heating method and apparatus

Proximity head heating method and apparatus

Substrate proximity drying using in-situ local heating of substrate

Methods for contained chemical surface treatment

Method and material for cleaning a substrate

Substrate proximity drying using in-situ local heating of substrate...

Method and system for using a two-phases substrate cleaning compound

System and method for a combined contact and non-contact wafer clea...

Method for removing contamination from a substrate and for making a...

Cleaning compound and method and system for using the cleaning comp...

Method and apparatus for removing contamination from substrate

Patents Applicationslast 30 patents

Method and Systems for Cleaning A Substrate

Method and Apparatus for Cleaning A Semiconductor Substrate

Systems for Surface Treatment of Semiconductor Substrates using Seq...

Apparatus for Cleaning a Semiconductor Substrate

Substrate Cleaning System Using Stabilized Fluid Solutions

MULTI-STAGE SUBSTRATE CLEANING METHOD AND APPARATUS

Apparatus for Cleaning a Semiconductor Substrate

Apparatus and Method for Reducing Substrate Pattern Collapse During...

METHOD AND APPARATUS FOR SILICON OXIDE RESIDUE REMOVAL

METHOD FOR REDUCING PATTERN COLLAPSE IN HIGH ASPECT RATIO NANOSTRUC...

METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SE...

SYSTEM AND METHOD OF PREVENTING PATTERN COLLAPSE USING LOW SURFACE...

MATERIAL FOR CLEANING A SUBSTRATE

Apparatus for Contained Chemical Surface Treatment

Proximity Head Heating Method and Apparatus

Damage-Free High Efficiency Particle Removal Clean

Two-Phase Substrate Cleaning Material

Apparatus for Cleaning Contaminants from Substrate

SUBSTRATE PROXIMITY DRYING USING IN-SITU LOCAL HEATING OF SUBSTRATE

Multi-Stage Substrate Cleaning Method and Apparatus

Method for Removing Contamination from a Substrate and for Making a...

Cleaning Compound and Method and System for Using the Cleaning Comp...

Method and Apparatus for Removing Contamination from Substrate

METHOD AND APPARATUS FOR SURFACE TREATMENT OF SEMICONDUCTOR SUBSTRA...

METHOD AND MATERIAL FOR CLEANING A SUBSTRATE

APPARATUS AND SYSTEM FOR CLEANING A SUBSTRATE

System and method for contained chemical surface treatment

Chemical resistant semiconductor processing chamber bodies

Method and apparatus for particle removal

Substrate preparation using stabilized fluid solutions and methods...