Keith Comendant

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chucks with coolant gas zones and corresponding groov...
- Patent number 11,942,351
- Issue date Mar 26, 2024
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucks with coolant gas zones and corresponding groov...
- Patent number 11,664,262
- Issue date May 30, 2023
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 11,302,556
- Issue date Apr 12, 2022
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly incorporation a gasket for distributin...
- Patent number 10,804,129
- Issue date Oct 13, 2020
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,770,363
- Issue date Sep 8, 2020
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with thermal zones for semiconductor processing
- Patent number 10,720,346
- Issue date Jul 21, 2020
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 10,636,689
- Issue date Apr 28, 2020
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supports with multi-layer structure including independent...
- Patent number 10,236,193
- Issue date Mar 19, 2019
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjusting substrate temperature to improve CD uniformity
- Patent number 10,056,225
- Issue date Aug 21, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,049,948
- Issue date Aug 14, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ESC assembly including an electrically conductive gasket for unifor...
- Patent number 10,002,782
- Issue date Jun 19, 2018
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating plate with heating zones for substrate processing and metho...
- Patent number 9,646,861
- Issue date May 9, 2017
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lightup prevention using multi-layer ceramic fabrication techniques
- Patent number 9,608,550
- Issue date Mar 28, 2017
- Lam Research Corporation
- Keith Laurence Comendant
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Heating plate with planar heater zones for semiconductor processing
- Patent number 9,392,643
- Issue date Jul 12, 2016
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode for use in measuring dielectric properties of parts
- Patent number 9,322,795
- Issue date Apr 26, 2016
- Lam Research Corporation
- Jaehyun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Plasma chamber top piece assembly
- Patent number 9,318,349
- Issue date Apr 19, 2016
- Lam Research Corporation
- Leonard J. Sharpless
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 9,093,483
- Issue date Jul 28, 2015
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating plate with planar heater zones for semiconductor processing
- Patent number 8,884,194
- Issue date Nov 11, 2014
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 8,821,639
- Issue date Sep 2, 2014
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for spatial and temporal control of temperature on a substrate
- Patent number 8,735,298
- Issue date May 27, 2014
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 8,709,202
- Issue date Apr 29, 2014
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 8,702,866
- Issue date Apr 22, 2014
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjusting substrate temperature to improve CD uniformity
- Patent number 8,642,480
- Issue date Feb 4, 2014
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating plate with planar heating zones for semiconductor processing
- Patent number 8,637,794
- Issue date Jan 28, 2014
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating plate with diode planar heater zones for semiconductor proc...
- Patent number 8,624,168
- Issue date Jan 7, 2014
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal plate with planar thermal zones for semiconductor processing
- Patent number 8,587,113
- Issue date Nov 19, 2013
- Lam Research Corporation
- Keith William Gaff
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma chamber top piece assembly
- Patent number 8,540,843
- Issue date Sep 24, 2013
- Lam Research Corporation
- Leonard J. Sharpless
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Electrode for use in measuring dielectric properties of parts
- Patent number 8,519,724
- Issue date Aug 27, 2013
- Lam Research Corporation
- Jaehyun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Plasma arrestor insert
- Patent number 8,503,151
- Issue date Aug 6, 2013
- Lam Research Corporation
- Keith Comendant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal plate with planar thermal zones for semiconductor processing
- Patent number 8,461,674
- Issue date Jun 11, 2013
- Lam Research Corporation
- Keith William Gaff
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...
- Publication number 20240347366
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...
- Publication number 20230260816
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE
- Publication number 20230253193
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
- Publication number 20230075462
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...
- Publication number 20220223387
- Publication date Jul 14, 2022
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...
- Publication number 20210005494
- Publication date Jan 7, 2021
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20200251370
- Publication date Aug 6, 2020
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
- Publication number 20180374763
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH FLEXIBLE WAFER TEMPERATURE CONTROL
- Publication number 20180286642
- Publication date Oct 4, 2018
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY INCORPORATING A GASKET FOR DISTRIBUTIN...
- Publication number 20180277412
- Publication date Sep 27, 2018
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS WITH MULTI-LAYER STRUCTURE INCLUDING INDEPENDENT...
- Publication number 20170229327
- Publication date Aug 10, 2017
- LAM RESEARCH CORPORATION
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIGHTUP PREVENTION USING MULTI-LAYER CERAMIC FABRICATION TECHNIQUES
- Publication number 20160352260
- Publication date Dec 1, 2016
- LAM RESEARCH CORPORATION
- Keith Laurence COMENDANT
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE SUPPORT WITH THERMAL ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20160300741
- Publication date Oct 13, 2016
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ESC ASSEMBLY INCLUDING AN ELECTRICALLY CONDUCTIVE GASKET FOR UNIFOR...
- Publication number 20160111314
- Publication date Apr 21, 2016
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20140332161
- Publication date Nov 13, 2014
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...
- Publication number 20140187049
- Publication date Jul 3, 2014
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
- Publication number 20140154819
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTING SUBSTRATE TEMPERATURE TO IMPROVE CD UNIFORMITY
- Publication number 20140110060
- Publication date Apr 24, 2014
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PLATE WITH PLANAR HEATER ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20140096909
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING PLATE WITH PLANAR HEATER ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20140047705
- Publication date Feb 20, 2014
- LAM RESEARCH CORPORATION
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING PLATE WITH PLANAR HEATER ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20140045337
- Publication date Feb 13, 2014
- LAM RESEARCH CORPORATION
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CHAMBER TOP PIECE ASSEMBLY
- Publication number 20130306239
- Publication date Nov 21, 2013
- LAM RESEARCH CORPORATION
- Leonard J. Sharpless
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20130269368
- Publication date Oct 17, 2013
- Keith William GAFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode for Use in Measuring Dielectric Properties of Parts
- Publication number 20130241581
- Publication date Sep 19, 2013
- LAM RESEARCH CORPORATION
- Jaehyun Kim
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20130072024
- Publication date Mar 21, 2013
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20130072035
- Publication date Mar 21, 2013
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PLATE WITH DIODE PLANAR HEATER ZONES FOR SEMICONDUCTOR PROC...
- Publication number 20130068750
- Publication date Mar 21, 2013
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CHAMBER TOP PIECE ASSEMBLY
- Publication number 20120043022
- Publication date Feb 23, 2012
- Leonard J. Sharpless
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20120018411
- Publication date Jan 26, 2012
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ADJUSTING SUBSTRATE TEMPERATURE TO IMPROVE CD UNIFORMITY
- Publication number 20110143462
- Publication date Jun 16, 2011
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS

Keith Comendant

Person

Patents Grantslast 30 patents

Electrostatic chucks with coolant gas zones and corresponding groov...

Electrostatic chucks with coolant gas zones and corresponding groov...

Apparatus for spatial and temporal control of temperature on a subs...

Electrostatic chuck assembly incorporation a gasket for distributin...

Power switching system for ESC with array of thermal control elements

Substrate support with thermal zones for semiconductor processing

Apparatus for spatial and temporal control of temperature on a subs...

Substrate supports with multi-layer structure including independent...

Adjusting substrate temperature to improve CD uniformity

Power switching system for ESC with array of thermal control elements

ESC assembly including an electrically conductive gasket for unifor...

Heating plate with heating zones for substrate processing and metho...

Lightup prevention using multi-layer ceramic fabrication techniques

Heating plate with planar heater zones for semiconductor processing

Electrode for use in measuring dielectric properties of parts

Plasma chamber top piece assembly

Showerhead electrode assembly with gas flow modification for extend...

Heating plate with planar heater zones for semiconductor processing

Apparatus for spatial and temporal control of temperature on a subs...

Method for spatial and temporal control of temperature on a substrate

Upper electrode backing member with particle reducing features

Showerhead electrode assembly with gas flow modification for extend...

Adjusting substrate temperature to improve CD uniformity

Heating plate with planar heating zones for semiconductor processing

Heating plate with diode planar heater zones for semiconductor proc...

Thermal plate with planar thermal zones for semiconductor processing

Plasma chamber top piece assembly

Electrode for use in measuring dielectric properties of parts

Plasma arrestor insert

Thermal plate with planar thermal zones for semiconductor processing

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...

ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...

SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE

ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING

HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...

ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

ELECTROSTATIC CHUCK WITH FLEXIBLE WAFER TEMPERATURE CONTROL

ELECTROSTATIC CHUCK ASSEMBLY INCORPORATING A GASKET FOR DISTRIBUTIN...

SUBSTRATE SUPPORTS WITH MULTI-LAYER STRUCTURE INCLUDING INDEPENDENT...

LIGHTUP PREVENTION USING MULTI-LAYER CERAMIC FABRICATION TECHNIQUES

SUBSTRATE SUPPORT WITH THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

ESC ASSEMBLY INCLUDING AN ELECTRICALLY CONDUCTIVE GASKET FOR UNIFOR...

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...

POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

ADJUSTING SUBSTRATE TEMPERATURE TO IMPROVE CD UNIFORMITY

HEATING PLATE WITH PLANAR HEATER ZONES FOR SEMICONDUCTOR PROCESSING

HEATING PLATE WITH PLANAR HEATER ZONES FOR SEMICONDUCTOR PROCESSING

HEATING PLATE WITH PLANAR HEATER ZONES FOR SEMICONDUCTOR PROCESSING

PLASMA CHAMBER TOP PIECE ASSEMBLY

THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

Electrode for Use in Measuring Dielectric Properties of Parts

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

HEATING PLATE WITH DIODE PLANAR HEATER ZONES FOR SEMICONDUCTOR PROC...

PLASMA CHAMBER TOP PIECE ASSEMBLY

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

ADJUSTING SUBSTRATE TEMPERATURE TO IMPROVE CD UNIFORMITY